JP4683059B2 - 樹脂封止型半導体装置の設置方法 - Google Patents
樹脂封止型半導体装置の設置方法 Download PDFInfo
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- JP4683059B2 JP4683059B2 JP2008040244A JP2008040244A JP4683059B2 JP 4683059 B2 JP4683059 B2 JP 4683059B2 JP 2008040244 A JP2008040244 A JP 2008040244A JP 2008040244 A JP2008040244 A JP 2008040244A JP 4683059 B2 JP4683059 B2 JP 4683059B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
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- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
<参考例>
図1および図2は本発明の参考例を示すものである。
各図において、1は半導体装置の回路組立体で、リードフレーム(Cu)1aに半導体チップ1bをマウントした上でその相互間をボンディングワイヤ(Al)1cで配線して組み立てる。2は前記の回路組立体1の周域を樹脂封止したモールド樹脂(樹脂パッケージ)で、その上面側の表面には左右に並んで平行に延在する多数状のリブ状突起3aと該突起3aの間の溝部3bからなる放熱用の凹凸部3が形成されている。また、4は上型4aと下型4bを組み合わせたトランスファー成形金型であり、そのキャビティ4cには前記凹凸部3の形状に対応する凹凸面4dが形成されており、このキャビティ4cに向けて上型4aと下型4bとの重なり面にゲート4eが開口している。ここで、前記ゲート4eは図1(a) で表すように複数箇所(金型の左右2箇所,もしくは左右と中央の3箇所)に分散配置した上で、図1(c) で示すようにキャビティ4cの内面に形成した凹凸面4dの延在方向(長手方向)に向けて開口している。また、前記の凹凸面4dは図示のように金型4にインサートした回路組立体1(図1(c) 参照)に配線したボンディングワイヤ1cのループと平行な向きに形成しておくものとする。
り、ワイヤ1cに樹脂から横向きの不要な力を受けることがなく、ボンディング点の剥がれ,ネック切れなどのトラブルの生じるおそれはない。
そして、金型内で注型樹脂を硬化させた後に金型4から取り出すと、図2(a),(b) で示すように回路組立体1の周域がモールド樹脂2で封止され、かつモールド樹脂2の表面には凹凸部3が形成される。また、モールド成形した製品についてその成形状態を検査したところでは、モールド樹脂2にはボイド,充填不良などの欠陥も見られないことが確認されている。
図3は半導体パワーモジュールの底面側にヒートシンクとして金属製の放熱フィン6を取り付けた上で、この半導体パワーモジュールをプリント基板5に実装して自然冷却を行うようにした使用状態を表しており、図示のようにモールド樹脂(樹脂パッケージ)2の表面に形成した凹凸部3が上下方向に向くように縦向き姿勢に設置している。
この設置により、半導体チップの通電動作に伴って発生した熱の一部はモールド樹脂2を伝熱して凹凸部3の表面から放熱し、この部分接する周囲空気を熱する。これにより、パッケージ側からの受熱で昇温した空気には凹凸部3による煙突効果が作用し、図示矢印のように上昇気流が生じて周囲に熱放散する。なお、図3の配置による放熱性の効果を検証するために、半導体パワーモジュールを垂直姿勢と水平姿勢にしてプリント基板5に実装したものを供試試料として、通電動作(100%負荷)による樹脂パッケージの表面温度を調べたところ、図3のように垂直姿勢の配置とすることで水平姿勢の配置と比べて放熱性が約10%向上することが確認されている。
1a リードフレーム
1b 半導体チップ
1c ボンディングワイヤ
2 モールド樹脂(樹脂パッケージ)
3 凹凸部
4 トランスファー成形金型
4c キャビティ
4d キャビティに形成した凹凸面
4e ゲート
5 プリント基板
6 金属製放熱フィン
Claims (2)
- リードフレームに半導体チップをマウントしてワイヤ配線した回路組立体の周域をモールド樹脂で封止し、かつそのモールド樹脂の表面に並列して並ぶ複数条の放熱用凹凸部を成形した樹脂封止型半導体装置をプリント基板に実装して使用する際に、
前記放熱用凹凸部が前記プリント基板に対向するように、かつ、前記プリント基板と前記放熱用凹凸部との間に流れる冷却空気流に対し、前記放熱用凹凸部が平行になる姿勢に定めて配置することを特徴とする樹脂封止型半導体装置の設置方法。 - 前記樹脂封止型半導体装置の、前記放熱用凹凸部が形成された面とは反対側の面に放熱フィンをさらに備えることを特徴とする請求項1に記載の樹脂封止型半導体装置の設置方法。
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JP2003344773A Division JP2005116556A (ja) | 2003-10-02 | 2003-10-02 | 樹脂封止型半導体装置の製造方法および設置方法 |
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JP4683059B2 true JP4683059B2 (ja) | 2011-05-11 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5676154B2 (ja) * | 2010-06-17 | 2015-02-25 | 株式会社デンソー | 電力変換装置 |
DE212021000238U1 (de) | 2020-10-14 | 2022-05-19 | Rohm Co., Ltd. | Halbleitermodul |
DE112021002452T5 (de) | 2020-10-14 | 2023-02-09 | Rohm Co., Ltd. | Halbleitermodul |
US20230245960A1 (en) | 2020-10-14 | 2023-08-03 | Rohm Co., Ltd. | Semiconductor module |
CN113921409A (zh) * | 2021-06-23 | 2022-01-11 | 杰华特微电子股份有限公司 | 封装模具、封装体及封装方法 |
DE102022103310B4 (de) * | 2022-02-11 | 2024-07-11 | Semikron Danfoss GmbH | Leistungsformmodul und Leistungsmodul-Baugruppe |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03222350A (ja) * | 1990-01-29 | 1991-10-01 | Hitachi Ltd | 樹脂封止形半導体装置及びその実装構造 |
JPH0555557U (ja) * | 1991-12-24 | 1993-07-23 | 沖電気工業株式会社 | ヒートシンク構造 |
JPH08153829A (ja) * | 1994-11-28 | 1996-06-11 | Matsushita Electric Works Ltd | 半導体装置 |
JPH08316388A (ja) * | 1995-05-24 | 1996-11-29 | Sumitomo Metal Ind Ltd | 熱放散特性に優れたヒートシンク |
JPH09153590A (ja) * | 1995-11-30 | 1997-06-10 | Mitsubishi Electric Corp | 半導体装置および半導体モジュール |
JPH10209351A (ja) * | 1997-01-21 | 1998-08-07 | Fujitsu Ltd | ヒートシンク |
JP2002118227A (ja) * | 2000-10-12 | 2002-04-19 | Fujitsu Denso Ltd | 電力半導体装置 |
JP2003168884A (ja) * | 2001-11-29 | 2003-06-13 | Nec Corp | 電子部品 |
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2008
- 2008-02-21 JP JP2008040244A patent/JP4683059B2/ja not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03222350A (ja) * | 1990-01-29 | 1991-10-01 | Hitachi Ltd | 樹脂封止形半導体装置及びその実装構造 |
JPH0555557U (ja) * | 1991-12-24 | 1993-07-23 | 沖電気工業株式会社 | ヒートシンク構造 |
JPH08153829A (ja) * | 1994-11-28 | 1996-06-11 | Matsushita Electric Works Ltd | 半導体装置 |
JPH08316388A (ja) * | 1995-05-24 | 1996-11-29 | Sumitomo Metal Ind Ltd | 熱放散特性に優れたヒートシンク |
JPH09153590A (ja) * | 1995-11-30 | 1997-06-10 | Mitsubishi Electric Corp | 半導体装置および半導体モジュール |
JPH10209351A (ja) * | 1997-01-21 | 1998-08-07 | Fujitsu Ltd | ヒートシンク |
JP2002118227A (ja) * | 2000-10-12 | 2002-04-19 | Fujitsu Denso Ltd | 電力半導体装置 |
JP2003168884A (ja) * | 2001-11-29 | 2003-06-13 | Nec Corp | 電子部品 |
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