JP4680619B2 - プラズマ成膜装置 - Google Patents
プラズマ成膜装置 Download PDFInfo
- Publication number
- JP4680619B2 JP4680619B2 JP2005032596A JP2005032596A JP4680619B2 JP 4680619 B2 JP4680619 B2 JP 4680619B2 JP 2005032596 A JP2005032596 A JP 2005032596A JP 2005032596 A JP2005032596 A JP 2005032596A JP 4680619 B2 JP4680619 B2 JP 4680619B2
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- JP
- Japan
- Prior art keywords
- gas
- film
- electrode
- mixing box
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000008021 deposition Effects 0.000 title claims description 19
- 239000007789 gas Substances 0.000 claims description 147
- 230000015572 biosynthetic process Effects 0.000 claims description 20
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 18
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 14
- 239000012212 insulator Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 17
- 238000000151 deposition Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Description
Claims (6)
- 内部が真空排気される真空チャンバと、
前記真空チャンバ内に設置され、成膜対象物が支持される第1電極と、
複数種の成膜ガスを混合するガスミキシングボックスと、
前記真空チャンバの壁の一部を構成して前記第1電極に対向しており、前記ガスミキシングボックス内で混合された成膜ガスを前記真空チャンバ内に導入するためのガス導入口が形成された第2電極と、
前記第1及び第2電極間に高周波電界を生じさせて前記真空チャンバ内に前記成膜ガスのプラズマを生成させる高周波電源と、を備えたプラズマ成膜装置であって、
前記ガスミキシングボックスは、前記第2電極上に絶縁物を介して設置され、前記混合ガスのガス出口を前記第2電極の前記ガス導入口に直結させている
ことを特徴とするプラズマ成膜装置。 - 前記複数種の成膜ガスは、珪素含有ガスと窒素含有ガスを含み、前記成膜対象物に窒化珪素膜が成膜される請求項1に記載のプラズマ成膜装置。
- 前記複数種の成膜ガスは、珪素含有ガスと不活性ガスを含み、前記成膜対象物に多結晶もしくは非晶質の珪素膜が成膜される請求項1に記載のプラズマ成膜装置。
- 前記高周波電源の発振周波数は10〜100MHzであることを特徴とする請求項1乃至請求項3の何れかに記載のプラズマ成膜装置。
- 前記絶縁物は、アルミナまたはフッ素樹脂であることを特徴とする請求項1乃至請求項4の何れかに記載のプラズマ成膜装置。
- 前記ガスミキシングボックス内で混合された成膜ガスが前記第2電極の前記ガス導入口に至るまでのガス流路が300mm以下であることを特徴とする請求項1乃至請求項5の何れかに記載のプラズマ成膜装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005032596A JP4680619B2 (ja) | 2005-02-09 | 2005-02-09 | プラズマ成膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005032596A JP4680619B2 (ja) | 2005-02-09 | 2005-02-09 | プラズマ成膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006219702A JP2006219702A (ja) | 2006-08-24 |
JP4680619B2 true JP4680619B2 (ja) | 2011-05-11 |
Family
ID=36982215
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005032596A Active JP4680619B2 (ja) | 2005-02-09 | 2005-02-09 | プラズマ成膜装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4680619B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101250356B1 (ko) * | 2006-11-08 | 2013-04-05 | 주식회사 원익아이피에스 | 반도체 제조 장치 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000273638A (ja) * | 1999-03-24 | 2000-10-03 | Ebara Corp | 化学的気相成長装置 |
JP2001148378A (ja) * | 1999-11-22 | 2001-05-29 | Tokyo Electron Ltd | プラズマ処理装置、クラスターツールおよびプラズマ制御方法 |
JP2001335941A (ja) * | 2000-05-25 | 2001-12-07 | Ulvac Japan Ltd | ガス噴出装置及び真空処理装置 |
JP2003224000A (ja) * | 2002-01-30 | 2003-08-08 | Alps Electric Co Ltd | プラズマ処理装置 |
JP2005344169A (ja) * | 2004-06-03 | 2005-12-15 | Tokyo Electron Ltd | プラズマcvd装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59213439A (ja) * | 1983-05-18 | 1984-12-03 | Kyocera Corp | 容量結合型グロ−放電分解装置 |
JP3425009B2 (ja) * | 1995-05-30 | 2003-07-07 | アネルバ株式会社 | 表面処理装置 |
US5670218A (en) * | 1995-10-04 | 1997-09-23 | Hyundai Electronics Industries Co., Ltd. | Method for forming ferroelectric thin film and apparatus therefor |
US5648175A (en) * | 1996-02-14 | 1997-07-15 | Applied Materials, Inc. | Chemical vapor deposition reactor system and integrated circuit |
JPH09279350A (ja) * | 1996-04-11 | 1997-10-28 | Anelva Corp | 表面処理装置 |
US6068703A (en) * | 1997-07-11 | 2000-05-30 | Applied Materials, Inc. | Gas mixing apparatus and method |
-
2005
- 2005-02-09 JP JP2005032596A patent/JP4680619B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000273638A (ja) * | 1999-03-24 | 2000-10-03 | Ebara Corp | 化学的気相成長装置 |
JP2001148378A (ja) * | 1999-11-22 | 2001-05-29 | Tokyo Electron Ltd | プラズマ処理装置、クラスターツールおよびプラズマ制御方法 |
JP2001335941A (ja) * | 2000-05-25 | 2001-12-07 | Ulvac Japan Ltd | ガス噴出装置及び真空処理装置 |
JP2003224000A (ja) * | 2002-01-30 | 2003-08-08 | Alps Electric Co Ltd | プラズマ処理装置 |
JP2005344169A (ja) * | 2004-06-03 | 2005-12-15 | Tokyo Electron Ltd | プラズマcvd装置 |
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JP2006219702A (ja) | 2006-08-24 |
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