JP4664463B2 - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP4664463B2
JP4664463B2 JP2000070852A JP2000070852A JP4664463B2 JP 4664463 B2 JP4664463 B2 JP 4664463B2 JP 2000070852 A JP2000070852 A JP 2000070852A JP 2000070852 A JP2000070852 A JP 2000070852A JP 4664463 B2 JP4664463 B2 JP 4664463B2
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Japan
Prior art keywords
optical path
path length
inspection
length switching
liquid crystal
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Expired - Fee Related
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JP2000070852A
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Japanese (ja)
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JP2001264266A (ja
JP2001264266A5 (enExample
Inventor
孝明 大西
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Olympus Corp
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Olympus Corp
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Priority to JP2000070852A priority Critical patent/JP4664463B2/ja
Publication of JP2001264266A publication Critical patent/JP2001264266A/ja
Publication of JP2001264266A5 publication Critical patent/JP2001264266A5/ja
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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
JP2000070852A 2000-03-14 2000-03-14 基板検査装置 Expired - Fee Related JP4664463B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000070852A JP4664463B2 (ja) 2000-03-14 2000-03-14 基板検査装置

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Application Number Priority Date Filing Date Title
JP2000070852A JP4664463B2 (ja) 2000-03-14 2000-03-14 基板検査装置

Publications (3)

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JP2001264266A JP2001264266A (ja) 2001-09-26
JP2001264266A5 JP2001264266A5 (enExample) 2007-05-10
JP4664463B2 true JP4664463B2 (ja) 2011-04-06

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JP2000070852A Expired - Fee Related JP4664463B2 (ja) 2000-03-14 2000-03-14 基板検査装置

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JP (1) JP4664463B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011150062A (ja) * 2010-01-20 2011-08-04 Hitachi High-Technologies Corp Ｆｐｄモジュール実装装置
JP5544894B2 (ja) * 2010-01-21 2014-07-09 カシオ計算機株式会社 ウエハ検査装置及びウエハ検査方法
JP5024842B1 (ja) * 2011-07-22 2012-09-12 レーザーテック株式会社 検査装置、及び検査方法
CN108897153B (zh) * 2018-08-10 2024-08-23 宁波舜宇仪器有限公司 液晶面板导电粒子自动视觉检测装置
JP7692878B2 (ja) * 2022-06-23 2025-06-16 クアーズテック合同会社 光透過性板状体の欠陥検査方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63134937A (ja) * 1986-11-27 1988-06-07 Canon Inc パタ−ン検査装置
JP2878763B2 (ja) * 1990-03-12 1999-04-05 富士通株式会社 外観検査装置
JP3074195B2 (ja) * 1991-04-16 2000-08-07 富士通株式会社 外観検査装置
JPH0784229A (ja) * 1993-09-14 1995-03-31 Advantest Corp 液晶パネル検査装置
JPH07318880A (ja) * 1994-05-24 1995-12-08 Nobuyoshi Kawai 液晶表示装置の検査装置
JP3380636B2 (ja) * 1994-12-07 2003-02-24 株式会社竹内製作所 プリント基板穴位置穴径検査機
JP3316837B2 (ja) * 1995-03-03 2002-08-19 株式会社高岳製作所 三次元撮像装置
JP2630302B2 (ja) * 1995-03-13 1997-07-16 株式会社ニコン 投影光学系における基板の位置決定方法及び投影露光方法
JPH095046A (ja) * 1995-06-21 1997-01-10 Takaoka Electric Mfg Co Ltd 立体形状測定装置
JPH09230250A (ja) * 1996-02-26 1997-09-05 Hitachi Denshi Ltd 光学顕微鏡自動合焦点装置
JP3606410B2 (ja) * 1996-07-08 2005-01-05 日立ハイテク電子エンジニアリング株式会社 落射照明光学系における垂直照明設定装置
JPH10282007A (ja) * 1997-04-04 1998-10-23 Hitachi Ltd 異物等の欠陥検査方法およびその装置
JPH10293834A (ja) * 1997-04-18 1998-11-04 Rohm Co Ltd 画像取得装置および合焦位置設定方法
JPH11132750A (ja) * 1997-10-30 1999-05-21 Matsushita Electric Ind Co Ltd 点欠陥検出装置及び方法

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JP2001264266A (ja) 2001-09-26

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