JP4662700B2 - 薄膜トランジスタアレイ基板及びその製造方法 - Google Patents
薄膜トランジスタアレイ基板及びその製造方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 79
- 239000010409 thin film Substances 0.000 title claims description 78
- 238000004519 manufacturing process Methods 0.000 title claims description 39
- 239000004065 semiconductor Substances 0.000 claims abstract description 48
- 239000010408 film Substances 0.000 claims description 176
- 230000005611 electricity Effects 0.000 claims description 36
- 230000003068 static effect Effects 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 35
- 230000008569 process Effects 0.000 claims description 27
- 230000001681 protective effect Effects 0.000 claims description 24
- 238000005530 etching Methods 0.000 claims description 23
- 229910052782 aluminium Inorganic materials 0.000 claims description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 15
- 229910000838 Al alloy Inorganic materials 0.000 claims description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 6
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 239000011651 chromium Substances 0.000 claims description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims description 6
- 239000011733 molybdenum Substances 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims 1
- 238000002161 passivation Methods 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 88
- 238000003860 storage Methods 0.000 description 32
- 239000003990 capacitor Substances 0.000 description 27
- 239000004020 conductor Substances 0.000 description 27
- 239000004973 liquid crystal related substance Substances 0.000 description 27
- 229910021417 amorphous silicon Inorganic materials 0.000 description 15
- 238000001312 dry etching Methods 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 7
- 238000001259 photo etching Methods 0.000 description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 7
- 239000007789 gas Substances 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 210000002858 crystal cell Anatomy 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- -1 or the like Chemical compound 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136204—Arrangements to prevent high voltage or static electricity failures
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/456—Ohmic electrodes on silicon
- H01L29/458—Ohmic electrodes on silicon for thin film silicon, e.g. source or drain electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4908—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
- G02F1/13629—Multilayer wirings
Description
94、96、124、174 抵抗段差用連結線
97 補助データパッド
100 薄膜トランジスタアレイ基板
110 絶縁基板
121 ゲート線
123 ゲート電極
125 ゲートパッド
128 ゲート短絡線
131 維持電極線
133 維持電極
140 ゲート絶縁膜
150 半導体層
152 半導体パターン
160 非晶質シリコン層
168 中間層パターン
170 導電体層
171 データ線
173 ソース電極
175 ドレーン電極
177 維持蓄電器用導電体パターン
178 データ短絡線
179 データパッド
180 保護膜
182、184、185、186、187、189 接触孔
190 画素電極
200 ゲート配線
201、701 下部膜
202、702 上部膜
212、214 感光膜
700 データ配線
Claims (13)
- 絶縁基板と、
前記絶縁基板の上に形成されている、ゲート線及び前記ゲート線に連結されているゲート電極を含むゲート配線、前記ゲート線と連結される第1抵抗段差用連結線及びゲート短絡線を含む第1静電気保護用配線と、
前記ゲート配線を覆うゲート絶縁膜と、
前記ゲート絶縁膜の上部に形成されている半導体層と、
前記半導体層の上部に形成されている、前記ゲート線と交差するデータ線、前記データ線に連結されるソース電極を含むデータ配線、ドレーン電極、前記データ線と連結される第2抵抗段差用連結線及びデータ短絡線を含む第2静電気保護用配線と、
前記ドレーン電極に連結されている画素電極とを含み、
前記第1及び第2抵抗段差用連結線の上部膜の一部が除去されている
薄膜トランジスタアレイ基板。 - 前記第1及び第2抵抗段差用連結線は、下部膜及び前記下部膜より低い比抵抗を有する上部膜を含む、請求項1に記載の薄膜トランジスタアレイ基板。
- 前記データ配線と前記画素電極との間に形成されている保護膜をさらに含む、請求項2に記載の薄膜トランジスタアレイ基板。
- 前記保護膜は、前記第1及び第2抵抗段差用連結線の一部を露出する第1及び第2接触孔を有し、前記第1及び第2接触口を介して露出された前記上部膜の一部が除去されている、請求項3に記載の薄膜トランジスタアレイ基板。
- 前記ゲート配線は、前記ゲート線の一端に連結されているゲートパッドを含み、前記データ配線は、前記データ線の一端に連結されているデータパッドを含み、
前記保護膜は、前記ゲートパッド及び前記データパッドを露出する第3及び第4接触孔を有し、
前記画素電極と同一層に形成されており、前記第3及び第4接触孔を介して前記ゲートパッド及び前記データパッドに連結されている補助ゲートパッド及び補助データパッドをさらに含む、請求項4に記載の薄膜トランジスタアレイ基板。 - 前記画素電極と同一層に形成されており、前記第1及び第2接触孔を介して前記下部膜に接している第1及び第2抵抗段差用導電膜をさらに含む、請求項4に記載の薄膜トランジスタアレイ基板。
- 前記半導体層と前記データ配線との間に形成されており、高濃度不純物がドーピングされている抵抗性接触層をさらに含む、請求項1に記載の薄膜トランジスタアレイ基板。
- 前記ソース電極と前記ドレーン電極との間のチャンネル部を除いた前記半導体層は、前記データ配線と同一なパターンを有する、請求項1に記載の薄膜トランジスタアレイ基板。
- 基板の上に第1下部膜及び前記第1下部膜より低い比抵抗を有する第1上部膜を積層してパターニングし、ゲート線及び前記ゲート線に連結されているゲート電極を含むゲート配線、前記ゲート配線に連結されている第1抵抗段差用連結線及びゲート短絡線を含む第1静電気保護用配線とを形成する段階と、
前記ゲート配線の上にゲート絶縁膜を積層する段階と、
前記ゲート絶縁膜の上部に半導体層を形成する段階と、
第2下部膜及び前記第2下部膜より低い比抵抗を有する第2上部膜を積層してパターニングし、データ線及び前記データ線に連結するソース電極を含むデータ配線、前記ドレーン電極、前記データ線に連結する第2抵抗段差用連結線及びデータ短絡線を含む第2静電気保護用配線とを形成する段階と、
前記第1及び第2抵抗段差用連結線の上部膜の一部を除去する段階と、
前記ドレーン電極に連結される画素電極を形成する段階と、
を含む薄膜トランジスタアレイ基板の製造方法。 - 前記下部膜はクロム、モリブデン又はモリブデン合金で形成し、前記上部膜はアルミニウム又はアルミニウム合金で形成する、請求項9に記載の薄膜トランジスタアレイ基板の製造方法。
- 前記データ配線と前記画素電極との間に保護膜を形成する段階をさらに含む、請求項10に記載の薄膜トランジスタアレイ基板の製造方法。
- 前記上部膜の一部を除去する段階は、
前記保護膜をパターニングして前記第1及び第2抵抗段差用連結線を露出する第1及び第2接触孔を形成する段階と、
前記第1及び第2接触孔を介して露出された前記上部膜をエッチングする段階と、
を含む、請求項11に記載の薄膜トランジスタアレイ基板の製造方法。 - 前記上部膜をエッチングする段階は、アルミニウムエッチング液を用いたアルミニウム全面エッチング工程で実施する、請求項12に記載の薄膜トランジスタアレイ基板の製造方法。
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Application Number | Priority Date | Filing Date | Title |
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KR1020020050778A KR100870013B1 (ko) | 2002-08-27 | 2002-08-27 | 박막 트랜지스터 어레이 기판 및 그 제조 방법 |
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JP2004088113A JP2004088113A (ja) | 2004-03-18 |
JP4662700B2 true JP4662700B2 (ja) | 2011-03-30 |
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JP2003302809A Expired - Fee Related JP4662700B2 (ja) | 2002-08-27 | 2003-08-27 | 薄膜トランジスタアレイ基板及びその製造方法 |
Country Status (5)
Country | Link |
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US (2) | US6927420B2 (ja) |
JP (1) | JP4662700B2 (ja) |
KR (1) | KR100870013B1 (ja) |
CN (1) | CN100346218C (ja) |
TW (1) | TWI289718B (ja) |
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CN103809318A (zh) * | 2014-02-14 | 2014-05-21 | 京东方科技集团股份有限公司 | 一种阵列基板制造方法、阵列基板及显示设备 |
CN104078469B (zh) * | 2014-06-17 | 2017-01-25 | 京东方科技集团股份有限公司 | 一种阵列基板及其制备方法,显示面板、显示装置 |
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TWI289718B (en) | 2007-11-11 |
CN1501153A (zh) | 2004-06-02 |
US6927420B2 (en) | 2005-08-09 |
TW200500763A (en) | 2005-01-01 |
US20060011920A1 (en) | 2006-01-19 |
JP2004088113A (ja) | 2004-03-18 |
US7355206B2 (en) | 2008-04-08 |
US20040113149A1 (en) | 2004-06-17 |
KR20040018784A (ko) | 2004-03-04 |
CN100346218C (zh) | 2007-10-31 |
KR100870013B1 (ko) | 2008-11-21 |
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