JP4624905B2 - 三フッ化窒素の製造方法 - Google Patents

三フッ化窒素の製造方法 Download PDF

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Publication number
JP4624905B2
JP4624905B2 JP2005313361A JP2005313361A JP4624905B2 JP 4624905 B2 JP4624905 B2 JP 4624905B2 JP 2005313361 A JP2005313361 A JP 2005313361A JP 2005313361 A JP2005313361 A JP 2005313361A JP 4624905 B2 JP4624905 B2 JP 4624905B2
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Prior art keywords
gas
nitrogen trifluoride
reactor
producing nitrogen
reaction
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Japanese (ja)
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JP2007119294A (ja
JP2007119294A5 (enExample
Inventor
博基 大野
敏夫 大井
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Resonac Holdings Corp
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Showa Denko KK
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Priority to JP2005313361A priority Critical patent/JP4624905B2/ja
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Publication of JP2007119294A5 publication Critical patent/JP2007119294A5/ja
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  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP2005313361A 2005-10-27 2005-10-27 三フッ化窒素の製造方法 Expired - Fee Related JP4624905B2 (ja)

Priority Applications (1)

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JP2005313361A JP4624905B2 (ja) 2005-10-27 2005-10-27 三フッ化窒素の製造方法

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JP2005313361A JP4624905B2 (ja) 2005-10-27 2005-10-27 三フッ化窒素の製造方法

Publications (3)

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JP2007119294A JP2007119294A (ja) 2007-05-17
JP2007119294A5 JP2007119294A5 (enExample) 2008-12-04
JP4624905B2 true JP4624905B2 (ja) 2011-02-02

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JP2005313361A Expired - Fee Related JP4624905B2 (ja) 2005-10-27 2005-10-27 三フッ化窒素の製造方法

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014204785A1 (de) * 2014-03-14 2015-09-17 Evonik Degussa Gmbh Verfahren zur Herstellung von reinem Trisilylamin
CN113606820B (zh) * 2021-08-27 2022-09-23 中船(邯郸)派瑞特种气体股份有限公司 一种直接与间接制冷相结合的三氟化氮电解气超低温冷阱装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225511A (ja) * 1988-07-12 1990-01-29 Nippon Steel Corp 廃棄タイヤによる転炉発生ガス量増加方法
JPH0225512A (ja) * 1988-07-14 1990-01-29 Nkk Corp 電気炉の底吹き用羽口
JPH0225513A (ja) * 1988-07-14 1990-01-29 Nkk Corp 環流式真空脱ガス装置の下部構造
JPH05105411A (ja) * 1991-10-22 1993-04-27 Onoda Cement Co Ltd 三フツ化窒素の製造方法
JPH0986909A (ja) * 1995-09-28 1997-03-31 Mitsui Toatsu Chem Inc 高純度三フッ化窒素ガスの製造方法
JP3550074B2 (ja) * 2000-04-07 2004-08-04 東洋炭素株式会社 フッ素ガスまたは三フッ化窒素ガス発生用炭素電極及びそれを用いたフッ素ガスまたは三フッ化窒素ガス発生装置
JP4508356B2 (ja) * 2000-05-12 2010-07-21 昭和電工株式会社 三フッ化窒素の製造方法及びその用途
US6908601B2 (en) * 2002-02-08 2005-06-21 The Boc Group, Inc. Method for the production of nitrogen trifluoride
WO2007023968A1 (ja) * 2005-08-26 2007-03-01 Showa Denko K. K. 三フッ化窒素の製造方法および製造装置

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