JP4620364B2 - 駆動および感知プレートを有する分離された共振子ジャイロスコープ - Google Patents

駆動および感知プレートを有する分離された共振子ジャイロスコープ Download PDF

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Publication number
JP4620364B2
JP4620364B2 JP2004044947A JP2004044947A JP4620364B2 JP 4620364 B2 JP4620364 B2 JP 4620364B2 JP 2004044947 A JP2004044947 A JP 2004044947A JP 2004044947 A JP2004044947 A JP 2004044947A JP 4620364 B2 JP4620364 B2 JP 4620364B2
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Japan
Prior art keywords
plate
resonator
proof mass
base plate
gyroscope
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Expired - Fee Related
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JP2004044947A
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Japanese (ja)
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JP2004251909A5 (enExample
JP2004251909A (ja
Inventor
エイ・ドリアン・チャロナー
キリル・ブイ・シュチェグロフ
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Boeing Co
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Boeing Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2004044947A 2003-02-20 2004-02-20 駆動および感知プレートを有する分離された共振子ジャイロスコープ Expired - Fee Related JP4620364B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/370,953 US7017410B2 (en) 2001-08-10 2003-02-20 Isolated resonator gyroscope with a drive and sense plate

Publications (3)

Publication Number Publication Date
JP2004251909A JP2004251909A (ja) 2004-09-09
JP2004251909A5 JP2004251909A5 (enExample) 2005-09-29
JP4620364B2 true JP4620364B2 (ja) 2011-01-26

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JP2004044947A Expired - Fee Related JP4620364B2 (ja) 2003-02-20 2004-02-20 駆動および感知プレートを有する分離された共振子ジャイロスコープ

Country Status (4)

Country Link
US (2) US7017410B2 (enExample)
EP (1) EP1450131B1 (enExample)
JP (1) JP4620364B2 (enExample)
DE (1) DE602004032075D1 (enExample)

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US8450913B1 (en) * 2011-03-31 2013-05-28 Georgia Tech Research Corporation Tunable Piezoelectric MEMS Resonators suitable for real-time clock applications
US8960003B2 (en) * 2011-09-16 2015-02-24 Taiwan Semiconductor Manufacturing Company, Ltd. Motion sensor device and methods for forming the same
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US8650955B2 (en) * 2012-01-18 2014-02-18 The United States Of America As Represented By The Secretary Of The Navy Time domain switched gyroscope
CN102661744B (zh) * 2012-05-31 2014-12-17 东南大学 硅基双平衡环动调陀螺转子体结构与加工方法
KR101388814B1 (ko) * 2012-09-11 2014-04-23 삼성전기주식회사 각속도 센서
WO2015042700A1 (en) 2013-09-24 2015-04-02 Motion Engine Inc. Mems components and method of wafer-level manufacturing thereof
EP3019442A4 (en) 2013-07-08 2017-01-25 Motion Engine Inc. Mems device and method of manufacturing
KR101531093B1 (ko) * 2013-07-31 2015-06-23 삼성전기주식회사 가속도 센서 및 각속도 센서
EP3028007A4 (en) 2013-08-02 2017-07-12 Motion Engine Inc. Mems motion sensor and method of manufacturing
US20150168146A1 (en) * 2013-12-13 2015-06-18 Sensors In Motion Planar accelerometer with internal radial sensing and actuation
US10317211B2 (en) * 2013-12-30 2019-06-11 Robert Bosch Gmbh Robust inertial sensors
JP6590812B2 (ja) 2014-01-09 2019-10-16 モーション・エンジン・インコーポレーテッド 集積ｍｅｍｓシステム
US20170030788A1 (en) 2014-04-10 2017-02-02 Motion Engine Inc. Mems pressure sensor
WO2015184531A1 (en) 2014-06-02 2015-12-10 Motion Engine Inc. Multi-mass mems motion sensor
CN104197919B (zh) * 2014-08-08 2017-06-13 上海交通大学 上下贯通支撑的玻璃金属半球谐振微陀螺
CA3004760A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
CA3004763A1 (en) 2015-01-15 2016-07-21 Motion Engine Inc. 3d mems device with hermetic cavity
US10794700B1 (en) 2015-10-30 2020-10-06 Garmin International, Inc. Stress isolation of resonating gyroscopes
US10278281B1 (en) 2015-10-30 2019-04-30 Garmin International, Inc. MEMS stress isolation and stabilization system
US10551190B1 (en) 2015-10-30 2020-02-04 Garmin International, Inc. Multi Coriolis structured gyroscope
US10352960B1 (en) 2015-10-30 2019-07-16 Garmin International, Inc. Free mass MEMS accelerometer
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JP2020030067A (ja) * 2018-08-21 2020-02-27 セイコーエプソン株式会社 物理量センサー、センサーデバイス、電子機器、および移動体
CN109813853A (zh) * 2019-03-16 2019-05-28 中国民用航空飞行学院 一种便携式泡沫灭火剂稳定性能检测仪
CN113794459B (zh) * 2021-09-18 2025-04-01 清华大学 Mems谐振器锚点阻尼的数值表征、抑制的结构及方法

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Also Published As

Publication number Publication date
US7093486B2 (en) 2006-08-22
US20060070440A1 (en) 2006-04-06
EP1450131A3 (en) 2005-03-16
DE602004032075D1 (de) 2011-05-19
EP1450131B1 (en) 2011-04-06
EP1450131A2 (en) 2004-08-25
US20030150267A1 (en) 2003-08-14
US7017410B2 (en) 2006-03-28
JP2004251909A (ja) 2004-09-09

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