DE602004032075D1 - Isolierter Resonatorkreisel mit einer Antriebs- und Abgriffplatte - Google Patents

Isolierter Resonatorkreisel mit einer Antriebs- und Abgriffplatte

Info

Publication number
DE602004032075D1
DE602004032075D1 DE602004032075T DE602004032075T DE602004032075D1 DE 602004032075 D1 DE602004032075 D1 DE 602004032075D1 DE 602004032075 T DE602004032075 T DE 602004032075T DE 602004032075 T DE602004032075 T DE 602004032075T DE 602004032075 D1 DE602004032075 D1 DE 602004032075D1
Authority
DE
Germany
Prior art keywords
drive
tapping plate
resonator gyroscope
isolated resonator
isolated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004032075T
Other languages
German (de)
English (en)
Inventor
Dorian A Challoner
Kirill V Shcheglov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boeing Co
Original Assignee
Boeing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boeing Co filed Critical Boeing Co
Publication of DE602004032075D1 publication Critical patent/DE602004032075D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE602004032075T 2003-02-20 2004-02-20 Isolierter Resonatorkreisel mit einer Antriebs- und Abgriffplatte Expired - Lifetime DE602004032075D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/370,953 US7017410B2 (en) 2001-08-10 2003-02-20 Isolated resonator gyroscope with a drive and sense plate

Publications (1)

Publication Number Publication Date
DE602004032075D1 true DE602004032075D1 (de) 2011-05-19

Family

ID=32736451

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004032075T Expired - Lifetime DE602004032075D1 (de) 2003-02-20 2004-02-20 Isolierter Resonatorkreisel mit einer Antriebs- und Abgriffplatte

Country Status (4)

Country Link
US (2) US7017410B2 (enExample)
EP (1) EP1450131B1 (enExample)
JP (1) JP4620364B2 (enExample)
DE (1) DE602004032075D1 (enExample)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6915215B2 (en) * 2002-06-25 2005-07-05 The Boeing Company Integrated low power digital gyro control electronics
US7691723B2 (en) * 2005-01-07 2010-04-06 Honeywell International Inc. Bonding system having stress control
US7818871B2 (en) 2006-07-25 2010-10-26 California Institute Of Technology Disc resonator gyroscope fabrication process requiring no bonding alignment
JP4851555B2 (ja) * 2008-05-13 2012-01-11 株式会社デンソー 力学量センサおよびその製造方法
US8039912B2 (en) * 2008-06-25 2011-10-18 Honeywell International Inc. Systems and methods for reduced stress anchors
US8450913B1 (en) * 2011-03-31 2013-05-28 Georgia Tech Research Corporation Tunable Piezoelectric MEMS Resonators suitable for real-time clock applications
US8960003B2 (en) * 2011-09-16 2015-02-24 Taiwan Semiconductor Manufacturing Company, Ltd. Motion sensor device and methods for forming the same
EP2573516B1 (en) * 2011-09-21 2013-11-20 Tronics Microsystems S.A. A micro-electromechanical gyro device
US8650955B2 (en) * 2012-01-18 2014-02-18 The United States Of America As Represented By The Secretary Of The Navy Time domain switched gyroscope
CN102661744B (zh) * 2012-05-31 2014-12-17 东南大学 硅基双平衡环动调陀螺转子体结构与加工方法
KR101388814B1 (ko) * 2012-09-11 2014-04-23 삼성전기주식회사 각속도 센서
WO2015042700A1 (en) 2013-09-24 2015-04-02 Motion Engine Inc. Mems components and method of wafer-level manufacturing thereof
EP3019442A4 (en) 2013-07-08 2017-01-25 Motion Engine Inc. Mems device and method of manufacturing
KR101531093B1 (ko) * 2013-07-31 2015-06-23 삼성전기주식회사 가속도 센서 및 각속도 센서
EP3028007A4 (en) 2013-08-02 2017-07-12 Motion Engine Inc. Mems motion sensor and method of manufacturing
US20150168146A1 (en) * 2013-12-13 2015-06-18 Sensors In Motion Planar accelerometer with internal radial sensing and actuation
US10317211B2 (en) * 2013-12-30 2019-06-11 Robert Bosch Gmbh Robust inertial sensors
JP6590812B2 (ja) 2014-01-09 2019-10-16 モーション・エンジン・インコーポレーテッド 集積ｍｅｍｓシステム
US20170030788A1 (en) 2014-04-10 2017-02-02 Motion Engine Inc. Mems pressure sensor
WO2015184531A1 (en) 2014-06-02 2015-12-10 Motion Engine Inc. Multi-mass mems motion sensor
CN104197919B (zh) * 2014-08-08 2017-06-13 上海交通大学 上下贯通支撑的玻璃金属半球谐振微陀螺
CA3004760A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
CA3004763A1 (en) 2015-01-15 2016-07-21 Motion Engine Inc. 3d mems device with hermetic cavity
US10794700B1 (en) 2015-10-30 2020-10-06 Garmin International, Inc. Stress isolation of resonating gyroscopes
US10278281B1 (en) 2015-10-30 2019-04-30 Garmin International, Inc. MEMS stress isolation and stabilization system
US10551190B1 (en) 2015-10-30 2020-02-04 Garmin International, Inc. Multi Coriolis structured gyroscope
US10352960B1 (en) 2015-10-30 2019-07-16 Garmin International, Inc. Free mass MEMS accelerometer
US10126128B2 (en) 2016-05-26 2018-11-13 Nxp Usa, Inc. Angular rate sensor
JP2020030067A (ja) * 2018-08-21 2020-02-27 セイコーエプソン株式会社 物理量センサー、センサーデバイス、電子機器、および移動体
CN109813853A (zh) * 2019-03-16 2019-05-28 中国民用航空飞行学院 一种便携式泡沫灭火剂稳定性能检测仪
CN113794459B (zh) * 2021-09-18 2025-04-01 清华大学 Mems谐振器锚点阻尼的数值表征、抑制的结构及方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US392650A (en) 1888-11-13 watrous
DE69102590T2 (de) 1990-05-18 1994-10-06 British Aerospace Trägheitssensoren.
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5665915A (en) 1992-03-25 1997-09-09 Fuji Electric Co., Ltd. Semiconductor capacitive acceleration sensor
US5646346A (en) 1994-11-10 1997-07-08 Okada; Kazuhiro Multi-axial angular velocity sensor
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US6044705A (en) 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
DE4442033C2 (de) 1994-11-25 1997-12-18 Bosch Gmbh Robert Drehratensensor
JP3585980B2 (ja) * 1995-02-21 2004-11-10 株式会社ワコー 角速度センサ
JPH08285608A (ja) * 1995-04-14 1996-11-01 Miyota Kk 角速度センサ
DE59607420D1 (de) 1995-05-31 2001-09-06 Litef Gmbh Mikromechanischer drehratensensor
DE19530007C2 (de) 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
US5756895A (en) 1995-09-01 1998-05-26 Hughes Aircraft Company Tunneling-based rate gyros with simple drive and sense axis coupling
KR0171009B1 (ko) 1995-12-07 1999-05-01 양승택 원판 진동형 마이크로 자이로스코프 및 그의 제조방법
US5894090A (en) 1996-05-31 1999-04-13 California Institute Of Technology Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same
DE19641284C1 (de) 1996-10-07 1998-05-20 Inst Mikro Und Informationstec Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen
JP3865854B2 (ja) * 1997-02-12 2007-01-10 株式会社ワコー 振動子を用いた角速度センサ
US6151964A (en) 1998-05-25 2000-11-28 Citizen Watch Co., Ltd. Angular velocity sensing device
US5920012A (en) 1998-06-16 1999-07-06 Boeing North American Micromechanical inertial sensor
JP3106395B2 (ja) 1998-07-10 2000-11-06 株式会社村田製作所 角速度センサ
GB9817347D0 (en) * 1998-08-11 1998-10-07 British Aerospace An angular rate sensor
US6009751A (en) 1998-10-27 2000-01-04 Ljung; Bo Hans Gunnar Coriolis gyro sensor
US6164134A (en) 1999-01-29 2000-12-26 Hughes Electronics Corporation Balanced vibratory gyroscope and amplitude control for same
AU7049000A (en) 1999-04-21 2000-11-21 Regents Of The University Of California, The Micro-machined angle-measuring gyroscope
US6289733B1 (en) 1999-05-12 2001-09-18 Hughes Electronics Corporation Planar vibratory gyroscopes
US6367786B1 (en) 1999-06-07 2002-04-09 California Institute Of Technology Micromachined double resonator
US6245590B1 (en) * 1999-08-05 2001-06-12 Microvision Inc. Frequency tunable resonant scanner and method of making
JP2002350138A (ja) * 2001-05-28 2002-12-04 Wacoh Corp 加速度と角速度との双方を検出する装置
US6629460B2 (en) * 2001-08-10 2003-10-07 The Boeing Company Isolated resonator gyroscope

Also Published As

Publication number Publication date
US7093486B2 (en) 2006-08-22
US20060070440A1 (en) 2006-04-06
EP1450131A3 (en) 2005-03-16
EP1450131B1 (en) 2011-04-06
EP1450131A2 (en) 2004-08-25
JP4620364B2 (ja) 2011-01-26
US20030150267A1 (en) 2003-08-14
US7017410B2 (en) 2006-03-28
JP2004251909A (ja) 2004-09-09

Similar Documents

Publication Publication Date Title
DE602004032075D1 (de) Isolierter Resonatorkreisel mit einer Antriebs- und Abgriffplatte
DE60217284D1 (de) Kühlschrank mit einer Tür in einer Tür
DE60327864D1 (de) Ballondissektor mit kanüle
DE60321995D1 (de) Mit PVDF coextrudierbare Zusammensetzung
DE60331611D1 (de) Antriebseinheit
DK1482799T3 (da) Herbicidkombinationer med specielle sulfonylurinstoffer
DE602004006592D1 (de) Mikroaktuator mit einer dielektrischen Mikroemulsion
DE50212679D1 (de) Elektromotorischer antrieb mit einer schnecke
DE60333912D1 (de) Verbundantriebswelle mit aufgenommenen endadaptern
DE602004013874D1 (de) Antrieb mit Verrieglungsmechanismus
DE50203390D1 (de) Mähdrescher mit von der Erntegutbergungsvorrichtung abhängiger Antriebsleistung
DE60204559D1 (de) Bohreinsatzgeometrie mit spanspaltender kerbe
DE60232472D1 (de) Kupplung mit Dichtungsschutzmittel
DE60213194D1 (de) Haltenadel mit flügel
DE50309175D1 (de) Anfahreinheit und getriebebaueinheit mit einer anfahreinheit
DE60334753D1 (de) Reibkupplungsscheibenbelag und mit einer solchen ausgerüsteter Kupplung
DE50308311D1 (de) Flurförderzeug mit einer seitlichen Batterieentnahmeöffnung
DE50213243D1 (de) Eitung mit einem vorgespannten anschlussst ck
DE10292220D2 (de) Grabgerät mit Saugeinrichtung
DE50311231D1 (de) Elektromagnetischer antrieb
FR2840848B1 (fr) Structure multicouche a permeabilite controlee
FR2826188B1 (fr) Materiaux multifonctions a effet thermooptiques controles
DE60319578D1 (de) Laufwerk
FR2836967B1 (fr) Accouplement a limitation de couple
DE60328662D1 (de) Plattenlaufwerk