DE602004006592D1 - Mikroaktuator mit einer dielektrischen Mikroemulsion - Google Patents

Mikroaktuator mit einer dielektrischen Mikroemulsion

Info

Publication number
DE602004006592D1
DE602004006592D1 DE602004006592T DE602004006592T DE602004006592D1 DE 602004006592 D1 DE602004006592 D1 DE 602004006592D1 DE 602004006592 T DE602004006592 T DE 602004006592T DE 602004006592 T DE602004006592 T DE 602004006592T DE 602004006592 D1 DE602004006592 D1 DE 602004006592D1
Authority
DE
Germany
Prior art keywords
microactuator
microemulsion
dielectric
dielectric microemulsion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004006592T
Other languages
English (en)
Other versions
DE602004006592T2 (de
Inventor
Paul F Reboa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiwan Semiconductor Manufacturing Co TSMC Ltd
Original Assignee
Hewlett Packard Development Co LP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co LP filed Critical Hewlett Packard Development Co LP
Publication of DE602004006592D1 publication Critical patent/DE602004006592D1/de
Application granted granted Critical
Publication of DE602004006592T2 publication Critical patent/DE602004006592T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
DE602004006592T 2003-12-23 2004-12-13 Mikroaktuator mit einer dielektrischen Mikroemulsion Active DE602004006592T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US744832 2003-12-23
US10/744,832 US7023603B2 (en) 2002-04-30 2003-12-23 Micro-mirror device including dielectrophoretic microemulsion

Publications (2)

Publication Number Publication Date
DE602004006592D1 true DE602004006592D1 (de) 2007-07-05
DE602004006592T2 DE602004006592T2 (de) 2008-01-31

Family

ID=34552857

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004006592T Active DE602004006592T2 (de) 2003-12-23 2004-12-13 Mikroaktuator mit einer dielektrischen Mikroemulsion

Country Status (7)

Country Link
US (1) US7023603B2 (de)
EP (1) EP1548487B1 (de)
JP (1) JP3993197B2 (de)
KR (1) KR101064007B1 (de)
CN (1) CN100399103C (de)
DE (1) DE602004006592T2 (de)
TW (1) TWI254026B (de)

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US7095545B2 (en) * 2004-04-02 2006-08-22 Hewlett-Packard Development Company, L.P. Microelectromechanical device with reset electrode
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US7528933B2 (en) * 2006-04-06 2009-05-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement
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US8052289B2 (en) * 2006-06-07 2011-11-08 Asml Netherlands B.V. Mirror array for lithography
US7911672B2 (en) * 2006-12-26 2011-03-22 Zhou Tiansheng Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore
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DE102007051521A1 (de) * 2007-10-19 2009-04-23 Seereal Technologies S.A. Dynamische Wellenformereinheit
US8270056B2 (en) * 2009-03-23 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with openings between sub-pixels and method of making same
US9010936B2 (en) * 2010-04-28 2015-04-21 Lemoptix Sa Optical MEMS scanning micro-mirror with anti-speckle cover
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US9715107B2 (en) 2012-03-22 2017-07-25 Apple Inc. Coupling schemes for gimbaled scanning mirror arrays
US9784838B1 (en) 2014-11-26 2017-10-10 Apple Inc. Compact scanner with gimbaled optics
US9835853B1 (en) 2014-11-26 2017-12-05 Apple Inc. MEMS scanner with mirrors of different sizes
CN105807385A (zh) * 2015-01-19 2016-07-27 扬明光学股份有限公司 成像位移模块
US9798135B2 (en) 2015-02-16 2017-10-24 Apple Inc. Hybrid MEMS scanning module
US10281715B2 (en) 2015-06-16 2019-05-07 Young Optics Inc. Imaging displacement module
JP6682774B2 (ja) * 2015-07-03 2020-04-15 株式会社リコー 光偏向器、光走査装置、画像形成装置、画像投影装置、ヘッドアップディスプレイ装置、およびレーダ装置
US9897801B2 (en) 2015-09-30 2018-02-20 Apple Inc. Multi-hinge mirror assembly
US9703096B2 (en) * 2015-09-30 2017-07-11 Apple Inc. Asymmetric MEMS mirror assembly
US10488652B2 (en) 2016-09-21 2019-11-26 Apple Inc. Prism-based scanner
DE102017000406A1 (de) * 2017-01-18 2018-07-19 Stephanie Faustig Elektrisch steuerbares optisches Element, insbesondere Dünnschichtzelle und Verfahren zu dessen Herstellung
US11962214B2 (en) * 2019-05-28 2024-04-16 B&R Industrial Automation GmbH Transport device
CN114208006A (zh) 2019-08-18 2022-03-18 苹果公司 具有电磁致动的力平衡微镜
CA3177708A1 (en) * 2020-05-04 2021-11-11 Ryan Phillip MARCHEWKA Microspheres for electrophoretic displays and methods of manufacture thereof

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US4418346A (en) * 1981-05-20 1983-11-29 Batchelder J Samuel Method and apparatus for providing a dielectrophoretic display of visual information
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US6954297B2 (en) 2002-04-30 2005-10-11 Hewlett-Packard Development Company, L.P. Micro-mirror device including dielectrophoretic liquid
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US6844953B2 (en) * 2003-03-12 2005-01-18 Hewlett-Packard Development Company, L.P. Micro-mirror device including dielectrophoretic liquid

Also Published As

Publication number Publication date
DE602004006592T2 (de) 2008-01-31
KR20050065268A (ko) 2005-06-29
EP1548487B1 (de) 2007-05-23
KR101064007B1 (ko) 2011-09-08
CN1641398A (zh) 2005-07-20
JP3993197B2 (ja) 2007-10-17
JP2005182037A (ja) 2005-07-07
US20050152017A1 (en) 2005-07-14
EP1548487A1 (de) 2005-06-29
US7023603B2 (en) 2006-04-04
CN100399103C (zh) 2008-07-02
TW200521073A (en) 2005-07-01
TWI254026B (en) 2006-05-01

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Legal Events

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8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., , TW