JP2004251909A5 - - Google Patents
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- JP2004251909A5 JP2004251909A5 JP2004044947A JP2004044947A JP2004251909A5 JP 2004251909 A5 JP2004251909 A5 JP 2004251909A5 JP 2004044947 A JP2004044947 A JP 2004044947A JP 2004044947 A JP2004044947 A JP 2004044947A JP 2004251909 A5 JP2004251909 A5 JP 2004251909A5
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- JP
- Japan
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Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/370,953 US7017410B2 (en) | 2001-08-10 | 2003-02-20 | Isolated resonator gyroscope with a drive and sense plate |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004251909A JP2004251909A (ja) | 2004-09-09 |
| JP2004251909A5 true JP2004251909A5 (enExample) | 2005-09-29 |
| JP4620364B2 JP4620364B2 (ja) | 2011-01-26 |
Family
ID=32736451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004044947A Expired - Fee Related JP4620364B2 (ja) | 2003-02-20 | 2004-02-20 | 駆動および感知プレートを有する分離された共振子ジャイロスコープ |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US7017410B2 (enExample) |
| EP (1) | EP1450131B1 (enExample) |
| JP (1) | JP4620364B2 (enExample) |
| DE (1) | DE602004032075D1 (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6915215B2 (en) * | 2002-06-25 | 2005-07-05 | The Boeing Company | Integrated low power digital gyro control electronics |
| US7691723B2 (en) * | 2005-01-07 | 2010-04-06 | Honeywell International Inc. | Bonding system having stress control |
| US7818871B2 (en) | 2006-07-25 | 2010-10-26 | California Institute Of Technology | Disc resonator gyroscope fabrication process requiring no bonding alignment |
| JP4851555B2 (ja) * | 2008-05-13 | 2012-01-11 | 株式会社デンソー | 力学量センサおよびその製造方法 |
| US8039912B2 (en) * | 2008-06-25 | 2011-10-18 | Honeywell International Inc. | Systems and methods for reduced stress anchors |
| US8450913B1 (en) * | 2011-03-31 | 2013-05-28 | Georgia Tech Research Corporation | Tunable Piezoelectric MEMS Resonators suitable for real-time clock applications |
| US8960003B2 (en) * | 2011-09-16 | 2015-02-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Motion sensor device and methods for forming the same |
| EP2573516B1 (en) * | 2011-09-21 | 2013-11-20 | Tronics Microsystems S.A. | A micro-electromechanical gyro device |
| US8650955B2 (en) * | 2012-01-18 | 2014-02-18 | The United States Of America As Represented By The Secretary Of The Navy | Time domain switched gyroscope |
| CN102661744B (zh) * | 2012-05-31 | 2014-12-17 | 东南大学 | 硅基双平衡环动调陀螺转子体结构与加工方法 |
| KR101388814B1 (ko) * | 2012-09-11 | 2014-04-23 | 삼성전기주식회사 | 각속도 센서 |
| WO2015042700A1 (en) | 2013-09-24 | 2015-04-02 | Motion Engine Inc. | Mems components and method of wafer-level manufacturing thereof |
| EP3019442A4 (en) | 2013-07-08 | 2017-01-25 | Motion Engine Inc. | Mems device and method of manufacturing |
| KR101531093B1 (ko) * | 2013-07-31 | 2015-06-23 | 삼성전기주식회사 | 가속도 센서 및 각속도 센서 |
| EP3028007A4 (en) | 2013-08-02 | 2017-07-12 | Motion Engine Inc. | Mems motion sensor and method of manufacturing |
| US20150168146A1 (en) * | 2013-12-13 | 2015-06-18 | Sensors In Motion | Planar accelerometer with internal radial sensing and actuation |
| US10317211B2 (en) * | 2013-12-30 | 2019-06-11 | Robert Bosch Gmbh | Robust inertial sensors |
| JP6590812B2 (ja) | 2014-01-09 | 2019-10-16 | モーション・エンジン・インコーポレーテッド | 集積ｍｅｍｓシステム |
| US20170030788A1 (en) | 2014-04-10 | 2017-02-02 | Motion Engine Inc. | Mems pressure sensor |
| WO2015184531A1 (en) | 2014-06-02 | 2015-12-10 | Motion Engine Inc. | Multi-mass mems motion sensor |
| CN104197919B (zh) * | 2014-08-08 | 2017-06-13 | 上海交通大学 | 上下贯通支撑的玻璃金属半球谐振微陀螺 |
| CA3004760A1 (en) | 2014-12-09 | 2016-06-16 | Motion Engine Inc. | 3d mems magnetometer and associated methods |
| CA3004763A1 (en) | 2015-01-15 | 2016-07-21 | Motion Engine Inc. | 3d mems device with hermetic cavity |
| US10794700B1 (en) | 2015-10-30 | 2020-10-06 | Garmin International, Inc. | Stress isolation of resonating gyroscopes |
| US10278281B1 (en) | 2015-10-30 | 2019-04-30 | Garmin International, Inc. | MEMS stress isolation and stabilization system |
| US10551190B1 (en) | 2015-10-30 | 2020-02-04 | Garmin International, Inc. | Multi Coriolis structured gyroscope |
| US10352960B1 (en) | 2015-10-30 | 2019-07-16 | Garmin International, Inc. | Free mass MEMS accelerometer |
| US10126128B2 (en) | 2016-05-26 | 2018-11-13 | Nxp Usa, Inc. | Angular rate sensor |
| JP2020030067A (ja) * | 2018-08-21 | 2020-02-27 | セイコーエプソン株式会社 | 物理量センサー、センサーデバイス、電子機器、および移動体 |
| CN109813853A (zh) * | 2019-03-16 | 2019-05-28 | 中国民用航空飞行学院 | 一种便携式泡沫灭火剂稳定性能检测仪 |
| CN113794459B (zh) * | 2021-09-18 | 2025-04-01 | 清华大学 | Mems谐振器锚点阻尼的数值表征、抑制的结构及方法 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US392650A (en) | 1888-11-13 | watrous | ||
| DE69102590T2 (de) | 1990-05-18 | 1994-10-06 | British Aerospace | Trägheitssensoren. |
| US5203208A (en) * | 1991-04-29 | 1993-04-20 | The Charles Stark Draper Laboratory | Symmetrical micromechanical gyroscope |
| US5665915A (en) | 1992-03-25 | 1997-09-09 | Fuji Electric Co., Ltd. | Semiconductor capacitive acceleration sensor |
| US5646346A (en) | 1994-11-10 | 1997-07-08 | Okada; Kazuhiro | Multi-axial angular velocity sensor |
| US5488862A (en) * | 1993-10-18 | 1996-02-06 | Armand P. Neukermans | Monolithic silicon rate-gyro with integrated sensors |
| US6044705A (en) | 1993-10-18 | 2000-04-04 | Xros, Inc. | Micromachined members coupled for relative rotation by torsion bars |
| DE4442033C2 (de) | 1994-11-25 | 1997-12-18 | Bosch Gmbh Robert | Drehratensensor |
| JP3585980B2 (ja) * | 1995-02-21 | 2004-11-10 | 株式会社ワコー | 角速度センサ |
| JPH08285608A (ja) * | 1995-04-14 | 1996-11-01 | Miyota Kk | 角速度センサ |
| DE59607420D1 (de) | 1995-05-31 | 2001-09-06 | Litef Gmbh | Mikromechanischer drehratensensor |
| DE19530007C2 (de) | 1995-08-16 | 1998-11-26 | Bosch Gmbh Robert | Drehratensensor |
| US5756895A (en) | 1995-09-01 | 1998-05-26 | Hughes Aircraft Company | Tunneling-based rate gyros with simple drive and sense axis coupling |
| KR0171009B1 (ko) | 1995-12-07 | 1999-05-01 | 양승택 | 원판 진동형 마이크로 자이로스코프 및 그의 제조방법 |
| US5894090A (en) | 1996-05-31 | 1999-04-13 | California Institute Of Technology | Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same |
| DE19641284C1 (de) | 1996-10-07 | 1998-05-20 | Inst Mikro Und Informationstec | Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen |
| JP3865854B2 (ja) * | 1997-02-12 | 2007-01-10 | 株式会社ワコー | 振動子を用いた角速度センサ |
| US6151964A (en) | 1998-05-25 | 2000-11-28 | Citizen Watch Co., Ltd. | Angular velocity sensing device |
| US5920012A (en) | 1998-06-16 | 1999-07-06 | Boeing North American | Micromechanical inertial sensor |
| JP3106395B2 (ja) | 1998-07-10 | 2000-11-06 | 株式会社村田製作所 | 角速度センサ |
| GB9817347D0 (en) * | 1998-08-11 | 1998-10-07 | British Aerospace | An angular rate sensor |
| US6009751A (en) | 1998-10-27 | 2000-01-04 | Ljung; Bo Hans Gunnar | Coriolis gyro sensor |
| US6164134A (en) | 1999-01-29 | 2000-12-26 | Hughes Electronics Corporation | Balanced vibratory gyroscope and amplitude control for same |
| AU7049000A (en) | 1999-04-21 | 2000-11-21 | Regents Of The University Of California, The | Micro-machined angle-measuring gyroscope |
| US6289733B1 (en) | 1999-05-12 | 2001-09-18 | Hughes Electronics Corporation | Planar vibratory gyroscopes |
| US6367786B1 (en) | 1999-06-07 | 2002-04-09 | California Institute Of Technology | Micromachined double resonator |
| US6245590B1 (en) * | 1999-08-05 | 2001-06-12 | Microvision Inc. | Frequency tunable resonant scanner and method of making |
| JP2002350138A (ja) * | 2001-05-28 | 2002-12-04 | Wacoh Corp | 加速度と角速度との双方を検出する装置 |
| US6629460B2 (en) * | 2001-08-10 | 2003-10-07 | The Boeing Company | Isolated resonator gyroscope |
-
2003
- 2003-02-20 US US10/370,953 patent/US7017410B2/en not_active Expired - Lifetime
-
2004
- 2004-02-20 EP EP04003915A patent/EP1450131B1/en not_active Expired - Lifetime
- 2004-02-20 JP JP2004044947A patent/JP4620364B2/ja not_active Expired - Fee Related
- 2004-02-20 DE DE602004032075T patent/DE602004032075D1/de not_active Expired - Lifetime
-
2005
- 2005-02-04 US US11/051,884 patent/US7093486B2/en not_active Expired - Lifetime