JP4601331B2 - Imaging device and imaging module - Google Patents

Imaging device and imaging module Download PDF

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JP4601331B2
JP4601331B2 JP2004158451A JP2004158451A JP4601331B2 JP 4601331 B2 JP4601331 B2 JP 4601331B2 JP 2004158451 A JP2004158451 A JP 2004158451A JP 2004158451 A JP2004158451 A JP 2004158451A JP 4601331 B2 JP4601331 B2 JP 4601331B2
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hole
insulating substrate
recess
substrate
lens
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JP2005340539A (en
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定 加治佐
執蔵 中島
恭二 植村
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Kyocera Corp
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Description

本発明は、CCD型,CMOS型等の撮像素子を用いた、光学センサ等に適用される撮像装置および撮像モジュールに関する。   The present invention relates to an imaging apparatus and an imaging module that are applied to an optical sensor or the like using an imaging element such as a CCD type or a CMOS type.

従来、CCD型,CMOS型等の撮像素子を収納するための撮像装置としては、セラミック製のものが知られている。近年の携帯性を重視した電子機器では、その市場において小型化や薄型化が要求されることから、これらの要求に充分に応えるべく、例えば図6に示すような断面形状を有し、配線板12、撮像素子13およびシール材14によって主に構成された撮像装置11が提案されている。   2. Description of the Related Art Conventionally, ceramic devices are known as image pickup devices for housing CCD or CMOS image pickup devices. In recent years, electronic devices with an emphasis on portability are required to be reduced in size and thickness in the market. For this reason, in order to fully meet these requirements, for example, a cross-sectional shape as shown in FIG. 12, an imaging device 11 mainly composed of an imaging element 13 and a sealing material 14 has been proposed.

配線板12はセラミックスや樹脂などから成り、薄い平板として成形され、その下面に配線エリア15が形成されている。配線板12には、光を通過させる開口12aが形成されるとともに、配線板12の下面に枠状の基台18が設けられている。基台18は配線板12の下面に対してほぼ直交する向きで接合されており、基台18の下端部には外部接続用の端子19が形成されている。そして、この基台18によって配線板12が外部回路基板上に支持固定される。   The wiring board 12 is made of ceramics or resin, and is formed as a thin flat plate, and a wiring area 15 is formed on the lower surface thereof. The wiring board 12 has an opening 12 a through which light passes, and a frame-like base 18 is provided on the lower surface of the wiring board 12. The base 18 is joined in a direction substantially orthogonal to the lower surface of the wiring board 12, and a terminal 19 for external connection is formed at the lower end of the base 18. The wiring board 12 is supported and fixed on the external circuit board by the base 18.

また、配線板12の下面に、開口12aに受光部13aが対向するように撮像素子13が配置される。なお、撮像素子13はシリコンの基板の上面の中央部にCCD型,CMOS型の受光部13aが形成されたチップであり、撮像素子13の上面の外周部には電極パッドが形成されている。   In addition, the imaging element 13 is disposed on the lower surface of the wiring board 12 so that the light receiving portion 13a faces the opening 12a. The image pickup device 13 is a chip in which a CCD type and CMOS type light receiving portion 13a is formed at the center of the upper surface of a silicon substrate, and an electrode pad is formed on the outer peripheral portion of the upper surface of the image pickup device 13.

また、電極パッド上には金等から成る突起電極(導体バンプ)17が形成されている。その突起電極17は、配線エリア15にフリップチップ接合され、この接合部の周囲には、接合を補強するとともに封止を行なう樹脂からなる封止樹脂層であるダム17aが塗布形成されている。また、突起電極17は配線エリア15に接続されて配線板12および基台18の内部に形成された配線導体(図示せず)を介して端子19に導出されている。   A protruding electrode (conductor bump) 17 made of gold or the like is formed on the electrode pad. The protruding electrode 17 is flip-chip bonded to the wiring area 15, and a dam 17 a that is a sealing resin layer made of a resin that reinforces the bonding and seals is applied and formed around the bonding portion. The protruding electrode 17 is connected to the wiring area 15 and led out to the terminal 19 through a wiring conductor (not shown) formed inside the wiring board 12 and the base 18.

また、配線板12上面には、開口12aを塞ぐようにガラス等から成る透明なシール材14が樹脂接着剤等によって接着されている(例えば、下記の特許文献1参照)。   Further, a transparent sealing material 14 made of glass or the like is adhered to the upper surface of the wiring board 12 with a resin adhesive or the like so as to close the opening 12a (see, for example, Patent Document 1 below).

このようなセラミックス製の撮像装置11において、配線板12および基台18は、セラミックグリーンシート(以下、グリーンシートともいう)積層法により製作される。具体的には、セラミックスから成る配線板12用のグリーンシートと、セラミックスから成る基台18用のグリーンシートとを準備し、これらのグリーンシートに配線板12の配線エリア15から端子19に配線導体を導出させるための貫通孔や光を通過させる開口12aをグリーンシートの上下面に垂直に打ち抜く。   In such a ceramic imaging device 11, the wiring board 12 and the base 18 are manufactured by a ceramic green sheet (hereinafter also referred to as a green sheet) lamination method. Specifically, a green sheet for the wiring board 12 made of ceramics and a green sheet for the base 18 made of ceramics are prepared, and wiring conductors from the wiring area 15 of the wiring board 12 to the terminals 19 are provided on these green sheets. A through hole for deriving light and an opening 12a through which light passes are vertically punched on the upper and lower surfaces of the green sheet.

次に、配線板12の配線エリア15、基台18の端子19、および配線板12や基台18の内部に形成されて端子19に導出される配線導体用として、タングステン(W)やモリブデン(Mo)などの高融点金属粉末から成る金属ペーストを従来周知のスクリーン印刷法等により塗布する。そして、配線板12用のグリーンシートと基台18用のグリーンシートとを上下に重ねて接合し、これらを高温で焼成して焼結体と成す。   Next, tungsten (W) or molybdenum (for wiring conductors 15 formed on the wiring area 15 of the wiring board 12, the terminals 19 of the base 18, and the wiring conductors formed inside the wiring board 12 and the base 18 and led out to the terminals 19 are used. A metal paste made of a refractory metal powder such as Mo) is applied by a conventionally known screen printing method or the like. And the green sheet for wiring boards 12 and the green sheet for base 18 are piled up and down and joined, and these are baked at high temperature to form a sintered body.

その後、配線エリア15および配線導体が導出される端子19の露出表面に、ニッケル(Ni)や金(Au)等の金属から成るめっき金属層を無電解めっき法や電解めっき法により被着させている。   Thereafter, a plated metal layer made of a metal such as nickel (Ni) or gold (Au) is deposited on the exposed surfaces of the wiring area 15 and the terminal 19 from which the wiring conductor is led out by an electroless plating method or an electrolytic plating method. Yes.

図7は、図6の撮像装置11をモジュール化してなる光学センサ装置の断面図である。撮像装置11においては、配線板12の下面に枠状の基台18が設けられ、基台18の下端部に外部接続用の端子19が設けられており、端子19を外部回路基板16の配線導体等に接続し、半田によりその接続がなされるとともに補強される。また、撮像装置11における配線板12の上面でシール材14よりも外周側の外周部に、レンズ鏡筒20が接着固定されている。   FIG. 7 is a cross-sectional view of an optical sensor device obtained by modularizing the imaging device 11 of FIG. In the imaging device 11, a frame-shaped base 18 is provided on the lower surface of the wiring board 12, and a terminal 19 for external connection is provided at the lower end of the base 18, and the terminal 19 is wired to the external circuit board 16. It is connected to a conductor or the like, and is connected and reinforced with solder. In addition, the lens barrel 20 is bonded and fixed to an outer peripheral portion of the upper surface of the wiring board 12 in the imaging device 11 on the outer peripheral side of the sealing material 14.

そして、外部よりモジュールに入射する光は、レンズ鏡筒20の窓21からレンズ22を通って、透明なシール材14を通過する。シール材14を通過した光は、配線板12に形成された開口12aを通り、撮像素子13の受光部13aに入射する。撮像素子13の受光部13aで受光された光は電気信号に変換され、突起電極17を介して配線板12へ伝送される。配線板12へ伝送された電気信号は、配線板12および基台18の内部の配線導体を通り、基台18の端子19を介して撮像装置11の外部へ出力される。(例えば、下記の特許文献1参照)。なお、撮像素子13が平面視で四角形の場合、その2辺のみに沿って基台18が設けられている場合もある。
特開2002−299592号公報
Light entering the module from the outside passes through the lens 22 from the window 21 of the lens barrel 20 and passes through the transparent sealing material 14. The light that has passed through the sealing material 14 passes through the opening 12 a formed in the wiring board 12 and enters the light receiving portion 13 a of the image sensor 13. The light received by the light receiving portion 13 a of the image sensor 13 is converted into an electric signal and transmitted to the wiring board 12 through the protruding electrode 17. The electrical signal transmitted to the wiring board 12 passes through the wiring conductors inside the wiring board 12 and the base 18 and is output to the outside of the imaging device 11 via the terminal 19 of the base 18. (For example, refer to Patent Document 1 below). In addition, when the image pick-up element 13 is a rectangle by planar view, the base 18 may be provided along only the two sides.
JP 2002-299592 A

しかしながら、上記特許文献1の撮像装置11は、配線板12の厚みが撮像装置11毎にばらつきやすく、そのような厚みばらつきの大きな配線板12の下面に撮像素子13が配置され、配線板12の上面の外周部にレンズ22が取着されたレンズ鏡筒20が接着固定されるため、配線板12の厚みばらつきが原因となってレンズ22と撮像素子13の受光部13aとの距離を一定にすることが非常に困難となり、合焦性能が低下してレンズ22を透過した光を受光部13aに精度よく入射させることができないという問題点があった。   However, in the imaging device 11 of Patent Document 1, the thickness of the wiring board 12 is likely to vary for each imaging device 11, and the imaging element 13 is disposed on the lower surface of the wiring board 12 having such a large thickness variation. Since the lens barrel 20 with the lens 22 attached is bonded and fixed to the outer peripheral portion of the upper surface, the distance between the lens 22 and the light receiving portion 13a of the image sensor 13 is made constant due to the thickness variation of the wiring board 12. It is very difficult to do so, and there is a problem that the focusing performance is deteriorated and the light transmitted through the lens 22 cannot be accurately incident on the light receiving unit 13a.

また、配線板12の厚みのばらつきを小さくするため、配線板12の厚みを小さくすると、配線板12の機械的強度が弱くなり、撮像素子13の搭載や搬送などの工程において配線基板12に割れや欠けが発生してしまうという問題点を有していた。   Further, if the thickness of the wiring board 12 is reduced in order to reduce the variation in the thickness of the wiring board 12, the mechanical strength of the wiring board 12 is weakened, and the wiring board 12 is cracked in the process of mounting or transporting the image pickup device 13. There was a problem that chipping occurred.

従って、本発明は上記従来の問題点に鑑み完成されたものであり、その目的は、被写体を撮影する際に、レンズと撮像素子の受光部との間の合焦性能を高くすることでレンズを透過した光が撮像素子で正確に電気信号に変換され、鮮明な画像として取り出せる撮像装置および撮像モジュールを提供することにある。   Therefore, the present invention has been completed in view of the above-described conventional problems, and the object of the present invention is to increase the focusing performance between the lens and the light receiving portion of the image sensor when photographing a subject. It is an object of the present invention to provide an imaging device and an imaging module in which light transmitted through the light source is accurately converted into an electrical signal by an imaging device and can be extracted as a clear image.

本発明の撮像装置は、上面と下面とに開口する第一の貫通孔を有する下部基板、および上面と下面とに開口する第二の貫通孔を有するとともに前記下部基板の上面に配設された上部基板を備え、前記第一の貫通孔の内側面および前記上部基板の下面によって撮像素子を収容するための凹部が形成されているとともに、前記第二の貫通孔が前記凹部の底面に開口する絶縁基板と、前記凹部の底面の前記第二の貫通孔の開口の周囲から前記絶縁基板
の下面に導出された配線導体と、前記第二の貫通孔に受光部が対向する状態で、前記凹部の底面の前記第二の貫通孔の周囲において電極が前記配線導体に電気的に接続された撮像素子と、前記絶縁基板の上面に前記第二の貫通孔の開口を覆って取着された窓部材とを具備しており、前記絶縁基板の側面において、前記下部基板が前記上部基板よりも側方に突出している、レンズ固定部材を固定するための鍔部が形成されていることを特徴とする。
An image pickup apparatus according to the present invention has a lower substrate having a first through hole that opens to an upper surface and a lower surface, and a second through hole that opens to an upper surface and a lower surface, and is disposed on the upper surface of the lower substrate. An upper substrate is provided, and a recess for accommodating the image sensor is formed by an inner surface of the first through hole and a lower surface of the upper substrate, and the second through hole opens at the bottom of the recess. In the state where the insulating substrate, the wiring conductor led out from the periphery of the opening of the second through hole on the bottom surface of the concave portion to the lower surface of the insulating substrate, and the light receiving portion face the second through hole, the concave portion An image pickup device in which an electrode is electrically connected to the wiring conductor around the second through hole on the bottom surface of the base plate, and a window attached to the top surface of the insulating substrate so as to cover the opening of the second through hole and comprising a member, the side of the insulating substrate In, wherein the lower substrate protrudes more laterally than the upper substrate, the flange portion for fixing the lens fixing member is formed.

本発明の撮像装置は、好ましくは、前記鍔部の上面と前記凹部の底面とが同一平面上にあることを特徴とする。   In the imaging apparatus of the present invention, it is preferable that the upper surface of the flange portion and the bottom surface of the concave portion are on the same plane.

本発明の撮像装置は、好ましくは、前記絶縁基板は、その上面と側面との間の角部が面取りされていることを特徴とする。   In the image pickup apparatus of the present invention, it is preferable that the insulating substrate is chamfered at a corner between its upper surface and side surfaces.

本発明の撮像モジュールは、本発明の撮像装置と、前記鍔部の上面に下端が接合され、上端面の中央部に貫通穴が形成されているとともに下端が開かれた筒状とされているレンズ固定部材と、該レンズ固定部材に前記貫通穴の開口を塞ぐように取着されたレンズとを具備していることを特徴とする。   The imaging module of the present invention has a cylindrical shape in which the lower end is joined to the upper surface of the collar portion, the through hole is formed in the center portion of the upper end surface, and the lower end is opened. A lens fixing member and a lens attached to the lens fixing member so as to close the opening of the through hole are provided.

本発明の撮像装置によれば、上面と下面とに開口する第一の貫通孔を有する下部基板、および上面と下面とに開口する第二の貫通孔を有するとともに下部基板の上面に配設された上部基板を備え、第一の貫通孔の内側面および上部基板の下面によって撮像素子を収容するための凹部が形成されているとともに、第二の貫通孔が凹部の底面に開口する絶縁基板と、凹部の底面の第二の貫通孔の開口の周囲から絶縁基板の下面に導出された配線導体と、第二の貫通孔に受光部が対向する状態で、凹部の底面の第二の貫通孔の周囲において電極が配線導体に電気的に接続された撮像素子と、絶縁基板の上面に第二の貫通孔の開口を覆って取着された窓部材とを具備しており、絶縁基板の側面において、下部基板が上部基板よりも側方に突出している、レンズ固定部材を固定するための鍔部が形成されていることから、撮像装置にレンズを備えたレンズ固定部材を接着固定して撮像モジュールとした際に、レンズ固定部材を鍔部の上面に接着固定させることで、絶縁基板の厚みを小さくすることなくレンズ固定部材に固定されたレンズと撮像素子との高さ方向の位置精度をきわめて高くすることができる。
According to the imaging apparatus of the present invention, the lower substrate having the first through-hole opening on the upper surface and the lower surface, and the second through-hole opening on the upper surface and the lower surface, and disposed on the upper surface of the lower substrate. A recess for accommodating the image pickup element is formed by the inner side surface of the first through-hole and the lower surface of the upper substrate, and the second through-hole opens to the bottom surface of the recess ; a wiring conductor which is led to the lower surface of the insulating substrate from the periphery of the opening of the second through hole of the bottom surface of the recess, in a state where the light receiving portion to the second through-holes are opposed, the second through hole of the bottom surface of the recess an imaging element electrode is electrically connected to the wiring conductor around the, and comprises a secured to a window member covering the opening of the second through-hole in the upper surface of the insulating substrate, the side surface of the insulating substrate In, the lower substrate protrudes to the side than the upper substrate Adhesive since the flange portion for fixing the lens fixing member is formed, when the imaging module lens fixing member having a lens in the imaging device bonded to the lens fixing member to the upper surface of the flange portion By fixing, the positional accuracy in the height direction between the lens fixed to the lens fixing member and the imaging element can be extremely increased without reducing the thickness of the insulating substrate.

すなわち、レンズ固定部材と撮像素子との位置精度は、レンズ固定部材が接着固定される鍔部の上面が位置する平面と、撮像素子が取着される凹部の底面が位置する平面との間の厚みばらつきだけに依存することとなり、絶縁基板の全体の厚みばらつきが生じたとしても、本発明の構成では、上記鍔部の上面が位置する平面と凹部の底面が位置する平面との間の厚みを無くすか、または非常に薄くしてばらつきを非常に小さくすることができ、鍔部の上面と凹部の底面との高さ方向の位置精度を非常に向上させることができる。その結果、レンズ固定部材に取着されたレンズと撮像素子の受光部との間の焦点距離のばらつきが小さくなり、レンズを透過した光を受光部に精度よく入射させることができるとともに、絶縁基板の機械的強度を維持することができる。   That is, the positional accuracy between the lens fixing member and the image sensor is between the plane on which the upper surface of the collar portion to which the lens fixing member is bonded and fixed is located and the plane on which the bottom surface of the recess to which the image sensor is attached is located. Even if the entire thickness of the insulating substrate varies depending on the thickness variation, in the configuration of the present invention, the thickness between the plane on which the upper surface of the flange is located and the plane on which the bottom surface of the recess is located. Or the thickness can be made very thin to make the variation very small, and the positional accuracy in the height direction between the top surface of the flange and the bottom surface of the recess can be greatly improved. As a result, the variation in the focal length between the lens attached to the lens fixing member and the light receiving portion of the image sensor is reduced, and the light transmitted through the lens can be accurately incident on the light receiving portion, and the insulating substrate The mechanical strength of can be maintained.

本発明の撮像装置は、好ましくは、鍔部の上面と凹部の底面とが同一平面上にあることから、撮像装置をレンズを備えた撮像モジュールとした際に、鍔部の上面と凹部の底面との間の厚みのばらつきがなくなることから、レンズと撮像素子の受光部との間の合焦性能を高いものとすることができる。   In the imaging device of the present invention, preferably, the upper surface of the collar and the bottom surface of the recess are on the same plane. Therefore, when the imaging device is an imaging module having a lens, the upper surface of the collar and the bottom of the recess. Therefore, the focusing performance between the lens and the light receiving portion of the image sensor can be improved.

本発明の撮像装置は、好ましくは、絶縁基板は、その上面と側面との間の角部が面取りされていることから、レンズ固定部材の接着固定、撮像素子の搭載、および搬送などにおける外部からの外力によって、絶縁基板の上面と側面との間の角部に割れや欠けが発生するのを有効に防止できるため、この割れや欠けによる破片によりレンズを透過する光が遮ぎられるのを防ぐことができる。   In the image pickup apparatus of the present invention, preferably, since the corner between the upper surface and the side surface of the insulating substrate is chamfered, the lens fixing member is bonded and fixed, the image pickup device is mounted, and conveyed from the outside. Because it can effectively prevent the corners between the top and side surfaces of the insulating substrate from being cracked or chipped by the external force, the light transmitted through the lens is prevented from being blocked by the broken or chipped pieces. be able to.

本発明の撮像モジュールは、本発明の撮像装置と、前記鍔部の上面に下端が接合され、上端面の中央部に貫通穴が形成されているとともに下端が開かれた筒状とされているレンズ固定部材と、該レンズ固定部材に前記貫通穴の開口を塞ぐように取着されたレンズとを具備していることから、機械的強度を大きくして、撮像素子の受光部に光を精度よく入射させて結像させ、撮像素子で正確に電気信号に変換して鮮明な画像を取り出すことができる。   The imaging module of the present invention has a cylindrical shape in which the lower end is joined to the upper surface of the collar portion, the through hole is formed in the center of the upper end surface, and the lower end is opened, with the imaging device of the present invention. Since the lens fixing member and the lens attached to the lens fixing member so as to close the opening of the through hole are provided, the mechanical strength is increased and the light is accurately transmitted to the light receiving portion of the image sensor. A well-incident image is formed, and an image signal is accurately converted into an electric signal, so that a clear image can be taken out.

本発明の撮像装置を以下に詳細に説明する。図1は本発明の撮像装置について実施の形態の一例を示す断面図であり、同図において、2は絶縁基板、2aは貫通孔、3は撮像素子、4は窓部材、5は配線導体であり、これらで撮像装置1が主に構成されている。
This onset Ming imaging apparatus will be described in detail below. Figure 1 is a cross-sectional view showing an example of an embodiment for the onset light of the imaging device, reference numeral 2 denotes an insulating substrate, 2a through hole, an imaging device 3, 4 is the window member, 5 a wiring conductor The imaging device 1 is mainly configured by these.

本発明の絶縁基板2は、酸化アルミニウム質焼結体(アルミナセラミックス),窒化アルミニウム質焼結体等のセラミックスから成り、薄い平板として成型され、その表面および内部に、WやMo等の金属粉末メタライズから成り、撮像素子3の電気信号を伝送する機能を有する配線導体5が形成されており、中央部には光を通過させる貫通孔2aが形成され、貫通孔2aの下側には、受光部3aを貫通孔2aに対向させるとともに電極が導体バンプ等の電気接続手段7を介して配線導体5に電気的に接続された撮像素子3が収容される凹部2bが形成されている。また、絶縁基板2の上側には撮像素子3の受光部3aを保護するための窓部材4が樹脂接着剤等で取着されている。   The insulating substrate 2 of the present invention is made of ceramics such as an aluminum oxide sintered body (alumina ceramics), an aluminum nitride sintered body, and is molded as a thin flat plate, and a metal powder such as W or Mo is formed on the surface and inside thereof. A wiring conductor 5 made of metallization and having a function of transmitting an electrical signal of the image sensor 3 is formed. A through hole 2a that allows light to pass through is formed at the center, and a light receiving light is formed below the through hole 2a. A concave portion 2b is formed in which the imaging element 3 is accommodated in which the portion 3a is opposed to the through hole 2a and the electrode is electrically connected to the wiring conductor 5 via the electrical connection means 7 such as a conductor bump. A window member 4 for protecting the light receiving portion 3a of the image sensor 3 is attached to the upper side of the insulating substrate 2 with a resin adhesive or the like.

絶縁基板2は、例えば酸化アルミニウム質焼結体から成る場合、酸化アルミニウム,酸化珪素,酸化マグネシウム,酸化カルシウム等の原料粉末に適当な有機バインダー,溶剤等を添加混合して泥漿状となし、これを従来周知のドクターブレード法やカレンダーロール法等によりシート状に成形してグリーンシート(セラミック生シート)を得る。次に、グリーンシートに配線導体5形成用の貫通孔や光を通過させるための貫通孔2a、撮像素子3を収容するための凹部2b、および鍔部2cの上方の絶縁基板2の外周側面となる部位を打ち抜き加工で形成するとともに、配線導体5となる金属ペーストを所定パターンに印刷塗布する。しかる後、これらのグリーンシートを積層し切断して絶縁基板2用のグリーンシートの成形体を得、最後にこの成形体を高温(約1600℃)で焼結させることによって製作される。   When the insulating substrate 2 is made of, for example, an aluminum oxide sintered body, a suitable organic binder, a solvent, etc. are added to and mixed with raw material powders such as aluminum oxide, silicon oxide, magnesium oxide, calcium oxide, etc. to form a slurry. Is formed into a sheet by a conventionally known doctor blade method, calendar roll method, or the like to obtain a green sheet (ceramic raw sheet). Next, a through hole for forming the wiring conductor 5 in the green sheet, a through hole 2a for allowing light to pass through, a recess 2b for accommodating the image pickup device 3, and an outer peripheral side surface of the insulating substrate 2 above the flange 2c, A part to be formed is formed by punching, and a metal paste to be the wiring conductor 5 is printed and applied in a predetermined pattern. Thereafter, these green sheets are laminated and cut to obtain a green sheet molded body for the insulating substrate 2, and finally the molded body is sintered at a high temperature (about 1600 ° C.).

絶縁基板2に被着形成されている配線導体5は、撮像素子3の電気信号を外部回路基板6の配線導体に伝送させる導電路として機能し、例えばWやMo等の高融点金属粉末に適当な有機溶剤,溶媒を添加混合して得た金属ペーストを、絶縁基板2となるグリーンシートに予めスクリーン印刷法により所定パターンに印刷塗布しておき、絶縁基板2となるグリーンシートと同時焼成することによって、絶縁基板2の所定位置に被着形成される。   The wiring conductor 5 deposited on the insulating substrate 2 functions as a conductive path for transmitting the electric signal of the image pickup device 3 to the wiring conductor of the external circuit board 6, and is suitable for refractory metal powders such as W and Mo. A metal paste obtained by adding and mixing an organic solvent and a solvent is preliminarily printed and applied in a predetermined pattern to the green sheet to be the insulating substrate 2 by a screen printing method, and is simultaneously fired with the green sheet to be the insulating substrate 2 As a result, the insulating substrate 2 is deposited on a predetermined position.

なお、配線導体5の露出する表面にニッケルや金等の耐蝕性に優れる金属を1〜20μm程度の厚みに被着させておくと、配線導体5が酸化腐蝕するのを有効に防止できるとともに、配線導体5と撮像素子3の電極7との接合および外部回路基板6の配線導体との接合を強固なものとすることができる。したがって、配線導体5の露出表面には、厚み1〜10μm程度のニッケルめっき層と厚み0.1〜3μm程度の金メッキ層とが電解めっき法や無電解めっき法により順次被着されているのが好ましい。   In addition, when a metal having excellent corrosion resistance such as nickel or gold is deposited on the exposed surface of the wiring conductor 5 to a thickness of about 1 to 20 μm, the wiring conductor 5 can be effectively prevented from being oxidized and corroded, The bonding between the wiring conductor 5 and the electrode 7 of the imaging device 3 and the bonding between the wiring conductor of the external circuit board 6 can be made strong. Therefore, a nickel plating layer having a thickness of about 1 to 10 μm and a gold plating layer having a thickness of about 0.1 to 3 μm are sequentially deposited on the exposed surface of the wiring conductor 5 by an electrolytic plating method or an electroless plating method. preferable.

絶縁基板2の下面には、撮像素子3を収容するための凹部2bが形成されているとともに、上面と凹部2bの底面との間に貫通孔2aが形成されており、この貫通孔2aに受光部3aが対向する状態で、凹部2bの底面の貫通孔2aの周囲の配線導体5に電極7が電気的に接続されるように撮像素子3が収容されている。   A recess 2b for accommodating the image pickup device 3 is formed on the lower surface of the insulating substrate 2, and a through hole 2a is formed between the upper surface and the bottom surface of the recess 2b. The through hole 2a receives light. The imaging element 3 is accommodated so that the electrode 7 is electrically connected to the wiring conductor 5 around the through hole 2a on the bottom surface of the recess 2b with the portion 3a facing each other.

なお、撮像素子3は、電極7が絶縁基板2のニッケルや金などでメッキ処理された配線導体5に、例えば超音波接合法によりフリップチップ接合される。超音波接合法によるフリップチップ接合は、室温で接合部を加圧しつつ0.5秒前後の超音波振動を接合部に加えることにより接合させる接合法である。撮像素子3の接合部の周囲には、接合を補強するとともに封止を行なう樹脂から成る封止樹脂層であるダム7aが塗布形成してある。このダム7aは、エポキシ系樹脂等の樹脂の粘度を大きくしたものであり、樹脂の形状維持の強さの指標であるチキソ比も1.7以上と大きいのがよい。   Note that the image pickup device 3 is flip-chip bonded to the wiring conductor 5 whose electrode 7 is plated with nickel, gold or the like of the insulating substrate 2 by, for example, an ultrasonic bonding method. The flip chip bonding by the ultrasonic bonding method is a bonding method in which bonding is performed by applying ultrasonic vibration of about 0.5 seconds to the bonding portion while pressurizing the bonding portion at room temperature. A dam 7a, which is a sealing resin layer made of a resin that reinforces and seals the joint, is applied and formed around the joint of the image sensor 3. The dam 7a is obtained by increasing the viscosity of a resin such as an epoxy resin, and the thixo ratio, which is an index of the strength of maintaining the shape of the resin, is preferably as large as 1.7 or more.

また、撮像素子3は、シリコンの基板上にCCD型,CMOS型の受光部3aが形成されており、撮像素子3の外周部には金などの電極が形成され、電極が導体バンプ等の電気接続手段7を介して配線導体5に接続されており、撮像素子3は、配線導体5を介して外部回路基板6の配線導体に電気的に接続されることとなる。   The image pickup device 3 has a CCD-type and CMOS-type light receiving portion 3a formed on a silicon substrate. An electrode such as gold is formed on the outer peripheral portion of the image pickup device 3, and the electrode is an electric such as a conductor bump. The image pickup device 3 is connected to the wiring conductor of the external circuit board 6 through the wiring conductor 5.

なお、撮像素子3は、凹部2bの底面にエポキシ樹脂系や半田等の接合部材にて接合され、撮像素子3の電極がボンディングワイヤなどを介して配線導体5に電気的に接続されていてもよい。   Note that the image pickup device 3 is bonded to the bottom surface of the recess 2b with a bonding member such as an epoxy resin or solder, and the electrode of the image pickup device 3 is electrically connected to the wiring conductor 5 via a bonding wire or the like. Good.

また、本発明において、絶縁基板2は、その側面の下端部に鍔部2cが形成されている。そして、そのことが重要である。このように、絶縁基板2は、その側面の下端部に鍔部2cが形成されていることから、図5の撮像装置1にレンズ9を備えた本発明の撮像モジュール10とした際に、レンズ固定部材8を鍔部2cの上面に接着固定させることで、絶縁基板2の厚みを小さくすることなく鍔部2cの上面と撮像素子3が取着される凹部2bの底面との間の厚みを小さくして、その厚みばらつきを小さくすることができるため、レンズ固定部材8に取着されたレンズ9と撮像素子3の受光部3aとの間の焦点距離のばらつきが小さくなり、レンズ9を透過した光を受光部3aに精度よく入射させることができるとともに、絶縁基板2の機械的強度を維持することができる。   In the present invention, the insulating substrate 2 has a flange portion 2c formed at the lower end portion of the side surface thereof. And that is important. As described above, since the insulating substrate 2 has the flange portion 2c formed at the lower end portion of the side surface thereof, when the imaging module 10 of the present invention having the lens 9 in the imaging device 1 of FIG. By fixing the fixing member 8 to the upper surface of the flange portion 2c, the thickness between the upper surface of the flange portion 2c and the bottom surface of the concave portion 2b to which the image sensor 3 is attached can be reduced without reducing the thickness of the insulating substrate 2. Since the thickness variation can be reduced by reducing the thickness, the variation in the focal length between the lens 9 attached to the lens fixing member 8 and the light receiving portion 3a of the image sensor 3 is reduced, and the lens 9 is transmitted. The incident light can be accurately incident on the light receiving portion 3a, and the mechanical strength of the insulating substrate 2 can be maintained.

絶縁基板2をグリーンシート積層法で作製する場合、鍔部2cを有する絶縁基板2の下部と凹部2bの底面と成る絶縁基板2の上部とを、間にグリーンシートを挟んで積層することにより本発明の絶縁基板2を形成できる。そして、この絶縁基板2の上部と下部との間に挟まれるグリーンシートを薄くすることにより、この間に挟まれるグリーンシートの厚みばらつきが小さくなる。よって、絶縁基板2の下部に設けられた鍔部2cの上面の高さ位置、および絶縁基板2の上部の凹部2bの底面の高さ位置のばらつきが小さくなって、鍔部2cの上面と凹部2bの底面の高さ方向の位置精度がきわめて高くなる。   When the insulating substrate 2 is manufactured by the green sheet laminating method, the lower portion of the insulating substrate 2 having the flange portion 2c and the upper portion of the insulating substrate 2 serving as the bottom surface of the recess 2b are laminated with a green sheet interposed therebetween. The insulating substrate 2 of the invention can be formed. Then, by thinning the green sheet sandwiched between the upper part and the lower part of the insulating substrate 2, the thickness variation of the green sheet sandwiched therebetween is reduced. Therefore, variations in the height position of the upper surface of the flange portion 2c provided in the lower portion of the insulating substrate 2 and the height position of the bottom surface of the recess portion 2b in the upper portion of the insulating substrate 2 are reduced, and the upper surface and the recess portion of the flange portion 2c are reduced. The positional accuracy in the height direction of the bottom surface of 2b becomes extremely high.

好ましくは、鍔部2cを有する絶縁基板2の下部と凹部2bの底面と成る絶縁基板2の上部とを、間にグリーンシートを挟まずに直接積層するのがよい。これにより、鍔部2cの上面と凹部2bの底面とが同一平面上にあることとなり、鍔部2cの上面と凹部2bの底面との高さが同じになるので高さ方向の位置のばらつきがなくなり、鍔部2cの上面に接着固定されるレンズ固定部材8と凹部2bの底面に取着される撮像素子3との位置精度をきわめて良好にすることができる。   Preferably, the lower portion of the insulating substrate 2 having the flange portion 2c and the upper portion of the insulating substrate 2 serving as the bottom surface of the concave portion 2b are directly laminated without interposing a green sheet therebetween. As a result, the upper surface of the flange portion 2c and the bottom surface of the recess portion 2b are on the same plane, and the height of the upper surface of the flange portion 2c and the bottom surface of the recess portion 2b is the same. Accordingly, the positional accuracy of the lens fixing member 8 bonded and fixed to the upper surface of the flange portion 2c and the imaging element 3 attached to the bottom surface of the concave portion 2b can be made extremely good.

また、鍔部2cは、撮像素子3が平面視で四角形の場合、図2に絶縁基板2の平面図で示すように絶縁基板2の4辺の側面の下端部に全周にわたって設けられており、レンズ固定部材8の接着強度を大きくできるとともに、撮像モジュール10の外部からの浮遊物の侵入を阻止することができる。   In addition, when the image pickup element 3 is square in plan view, the flange 2c is provided over the entire periphery at the lower ends of the four side surfaces of the insulating substrate 2 as shown in the plan view of the insulating substrate 2 in FIG. In addition, the adhesive strength of the lens fixing member 8 can be increased, and intrusion of floating substances from the outside of the imaging module 10 can be prevented.

また、図3の絶縁基板2の平面図で示すように、鍔部2cは、絶縁基板2の2辺のみに沿って設けられていても良い。この場合、撮像モジュール10を小型化することが可能となる。   Further, as shown in the plan view of the insulating substrate 2 in FIG. 3, the flange portion 2 c may be provided along only two sides of the insulating substrate 2. In this case, the imaging module 10 can be reduced in size.

また、鍔部2cは、絶縁基板2の側面より突出する幅が0.5〜2.0mmであることが好ましい。0.5mm未満の場合、鍔部2cの上面にレンズ固定部材8を接着固定する範囲が狭くなり、接着強度が小さくなる。他方、2.0mmをえると撮像装置1が大型化しやすくなる。
Moreover, it is preferable that the width | variety which protrudes from the side surface of the insulated substrate 2 is 0.5-2.0 mm. In the case of less than 0.5 mm, the range in which the lens fixing member 8 is bonded and fixed to the upper surface of the flange portion 2c becomes narrow, and the adhesive strength decreases. On the other hand, it is exceeded and the imaging apparatus 1 is likely to increase the size of the 2.0 mm.

絶縁基板2の上面には、ガラスやサファイア等から成る透明な窓部材4がエポキシ樹脂等の樹脂接着剤によって配置接合され撮像素子3の受光部3aを保護している。   A transparent window member 4 made of glass, sapphire, or the like is disposed and bonded to the upper surface of the insulating substrate 2 with a resin adhesive such as an epoxy resin to protect the light receiving portion 3a of the image sensor 3.

次に参考例の撮像装置について説明する。図4は参考例の撮像装置の断面図(図1と同部位については同符号とする)である。この撮像装置1’は、上面に撮像素子3を収容するための凹部2bが形成されている絶縁基板2と、凹部2bの底面から絶縁基板2の下面に導出された配線導体5と、凹部2bの底面に受光部3aを上側に向けて設置されるとともに電極が配線導体5に電気的に接続された撮像素子3と、絶縁基板2の上面に凹部2bを覆って取着された窓部材4とを具備しており、絶縁基板2は、その側面の下端部に鍔部2cが形成されている。このような場合でも、撮像装置1’をレンズ9を備えた撮像モジュール10とした際に、レンズ固定部材8を鍔部2cの上面に接着固定させることで、絶縁基板2の厚みを小さくすることなく鍔部2cの上面と撮像素子3が取着される凹部2bの底面との間の厚みを小さくして、その厚みばらつきを小さくすることができるため、レンズ固定部材8に取着されたレンズ9と撮像素子3の受光部3aとの間の焦点距離のばらつきが小さくなりレンズ9を透過した光を受光部3aに精度よく入射させることができるとともに、絶縁基板2の機械的強度を維持することができる。
Next, an imaging apparatus of a reference example will be described. FIG. 4 is a cross-sectional view of the imaging apparatus of the reference example (the same parts as those in FIG. 1 are denoted by the same reference numerals). The imaging device 1 ′ includes an insulating substrate 2 having a recess 2b for accommodating the image sensor 3 on the upper surface, a wiring conductor 5 led out from the bottom surface of the recess 2b to the lower surface of the insulating substrate 2, and a recess 2b. And the window member 4 attached to the upper surface of the insulating substrate 2 so as to cover the recess 2b. The insulating substrate 2 has a flange portion 2c formed at the lower end portion of the side surface thereof. Even in such a case, when the imaging device 1 ′ is an imaging module 10 including the lens 9, the thickness of the insulating substrate 2 can be reduced by bonding and fixing the lens fixing member 8 to the upper surface of the flange 2 c. Since the thickness variation between the upper surface of the flange 2c and the bottom surface of the recess 2b to which the image pickup device 3 is attached can be reduced to reduce the thickness variation, the lens attached to the lens fixing member 8 can be reduced. 9 and the light receiving portion 3a of the image pickup device 3 are reduced in variation in focal length so that the light transmitted through the lens 9 can be incident on the light receiving portion 3a with high accuracy and the mechanical strength of the insulating substrate 2 is maintained. be able to.

参考例の撮像装置1’も発明の撮像装置1と同様の材料、方法で作製することができるので詳細な説明は省略する。
Since the imaging device 1 ′ of the reference example can also be manufactured by the same material and method as the imaging device 1 of the present invention, detailed description thereof is omitted.

本発明および参考例において、撮像装置1,1’は、鍔部2cの上面と凹部2bの底面とが同一面上にあることが好ましい。これにより、撮像装置1,1’をレンズ9を備えた撮像モジュール10とした際に、鍔部2cの上面と凹部2bの底面との間の厚みのばらつ
きがなくなることから、レンズ9と撮像素子3の受光部3aとの間の合焦性能を高いものとすることができる。
In the onset bright Contact and Reference Example, the imaging device 1, 1 ', it is preferable that the bottom surface of the top surface and the recess 2b of the flange portion 2c are on the same plane. Accordingly, when the imaging device 1 or 1 ′ is an imaging module 10 including the lens 9, there is no variation in thickness between the upper surface of the flange 2c and the bottom surface of the recess 2b. The focusing performance with the three light receiving portions 3a can be made high.

なお、鍔部2cの上面および凹部2bの底面は、平坦度が5〜50μmであることが好ましい。5μm未満では、製造工程が煩雑となり製作が難しくなる。他方50μmを超えると、レンズ9と受光部3aとの間の合焦性能が低下しやすくなる。   In addition, it is preferable that the flatness of the upper surface of the collar part 2c and the bottom face of the recessed part 2b is 5-50 micrometers. If the thickness is less than 5 μm, the production process becomes complicated and the production becomes difficult. On the other hand, if it exceeds 50 μm, the focusing performance between the lens 9 and the light receiving portion 3a tends to be lowered.

また、本発明および参考例において、撮像装置1,1’は、絶縁基板2は、その上面と側面との間の角部が面取りされていることが好ましい。これにより、レンズ固定部材8の接着固定、撮像素子3の搭載、および搬送などにおける外部からの外力によって絶縁基板2の上面と側面との間の角部に割れや欠けが発生するのを有効に防止できるため、この割れや欠けによる破片によりレンズ9を透過する光が遮ぎられるのを防ぐことができる。なお、図1〜4において、この面取りされた部位を面取り部2dとして示している。
Further, in this onset bright Contact and Reference Example, the imaging apparatus 1 and 1 ', the insulating substrate 2, it is preferable that a corner portion between its upper surface and the side surface is chamfered. Thereby, it is effective that the corner portion between the upper surface and the side surface of the insulating substrate 2 is cracked or chipped due to external force from the outside in adhesion fixing of the lens fixing member 8, mounting of the image pickup device 3, and conveyance. Therefore, it is possible to prevent light transmitted through the lens 9 from being blocked by the fragments due to the cracks and chips. In addition, in FIGS. 1-4, this chamfered site | part is shown as the chamfering part 2d.

なお、絶縁基板2の上面と側面との間の角部の面取り部2dは、上述の絶縁基板2となるグリーンシートを積層して切断して成形体を得た後、角部を斜めに切断、角部を押し型で成形、または切断の際に面取り用の押し型が設けられた切断刃にて切断しながら角部を面取りする等の方法で形成されている。   The corner chamfered portion 2d between the upper surface and the side surface of the insulating substrate 2 is obtained by laminating and cutting the green sheet to be the insulating substrate 2 described above, and then cutting the corner diagonally. The corner portion is formed by a method such as forming the corner portion with a pressing die or chamfering the corner portion while cutting with a cutting blade provided with a pressing die for chamfering.

また、絶縁基板2の側面と面取り部2dの斜面との成す角度θは、15〜45度が好ましい。角度θが15度未満の場合、平面視で面取り部2dが小さくなるとともに、絶縁基板2側面側から外形寸法を小さくするような外力が加わり、絶縁基板2の外形寸法がばらつく。他方、45度を超えると、平面視で面取り部2dが大きくなり絶縁基板2を大型化しやすくなるとともに、絶縁基板2の上面側から外力が加わり、絶縁基板2に変形や反りが発生しやすくなる。   Further, the angle θ formed between the side surface of the insulating substrate 2 and the inclined surface of the chamfered portion 2d is preferably 15 to 45 degrees. When the angle θ is less than 15 degrees, the chamfered portion 2d is reduced in plan view, and an external force is applied to reduce the outer dimension from the side of the insulating substrate 2, and the outer dimension of the insulating substrate 2 varies. On the other hand, when the angle exceeds 45 degrees, the chamfered portion 2d becomes large in plan view, and the insulating substrate 2 is easily increased in size, and an external force is applied from the upper surface side of the insulating substrate 2, and the insulating substrate 2 is likely to be deformed or warped. .

なお、絶縁基板2の上面と側面との角部の面取り部2dは、凸側に弧形状と成っていても構わない。   The chamfered portion 2d at the corner between the upper surface and the side surface of the insulating substrate 2 may have an arc shape on the convex side.

かくして、本発明および参考例の撮像装置1,1’と、鍔部2cの上面に下端が接合され、上端面の中央部に貫通穴2aが形成されているとともに下端が開かれた筒状とされているレンズ固定部材8と、このレンズ固定部材8に貫通穴8aの開口を塞ぐように取着されたレンズ9とを具備することにより、図5の断面図に示すような本発明の撮像モジュール10となる。この構成により、機械的強度を大きくして、撮像素子3の受光部3aに光を精度よく入射させて結像させ、撮像素子3で正確に電気信号に変換して鮮明な画像を取り出すことができる。
Thus, the imaging apparatus 1, 1 'of the present onset bright Contact and Reference Example, the lower end is joined to an upper surface of the flange portion 2c, the lower end a through-hole 2a in the center portion of the upper surface is formed is opened cylinder The present invention as shown in the cross-sectional view of FIG. 5 is provided with a lens fixing member 8 having a shape and a lens 9 attached to the lens fixing member 8 so as to close the opening of the through hole 8a. Imaging module 10. With this configuration, the mechanical strength can be increased, light can be accurately incident on the light receiving portion 3a of the image sensor 3 to form an image, and the image sensor 3 can accurately convert it into an electrical signal to extract a clear image. it can.

なお、本発明は上述の実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内で種々の変更を施すことは何等差し支えない
It should be noted that the present invention is not limited to the above-described embodiment, and various modifications may be made without departing from the scope of the present invention .

本発明の撮像装置について実施の形態の一例を示す断面図である。The present onset light of the imaging device is a sectional view showing an example of an embodiment. 図1の撮像装置における絶縁基板の平面図である。FIG. 2 is a plan view of an insulating substrate in the imaging device of FIG. 1. 図1の撮像装置における絶縁基板の他の例を示す平面図である。It is a top view which shows the other example of the insulated substrate in the imaging device of FIG. 参考例の撮像装置について実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment about the imaging device of a reference example . 本発明の撮像モジュールについて実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment about the imaging module of this invention. 従来の撮像装置の断面図である。It is sectional drawing of the conventional imaging device. 従来の光学センサ装置の断面図である。It is sectional drawing of the conventional optical sensor apparatus.

符号の説明Explanation of symbols

1,1’:撮像装置
2:絶縁基板
2a:貫通孔
2b:凹部
2c:面取り部
3:撮像素子
3a:受光部
4:窓部材
5:配線導体
8:レンズ固定部材
9:レンズ
10:撮像モジュール
DESCRIPTION OF SYMBOLS 1,1 ': Imaging device 2: Insulating substrate 2a: Through-hole 2b: Concave part 2c: Chamfering part 3: Imaging element 3a: Light-receiving part 4: Window member 5: Wiring conductor 8: Lens fixing member 9: Lens 10: Imaging module

Claims (4)

上面と下面とに開口する第一の貫通孔を有する下部基板、および上面と下面とに開口する第二の貫通孔を有するとともに前記下部基板の上面に配設された上部基板を備え、前記第一の貫通孔の内側面および前記上部基板の下面によって撮像素子を収容するための凹部が形成されているとともに、前記第二の貫通孔が前記凹部の底面に開口する絶縁基板と、前記凹部の底面の前記第二の貫通孔の開口の周囲から前記絶縁基板の下面に導出された配線導体と、前記第二の貫通孔に受光部が対向する状態で、前記凹部の底面の前記第二の貫通孔の周囲において電極が前記配線導体に電気的に接続された撮像素子と、前記絶縁基板の上面に前記第二の貫通孔の開口を覆って取着された窓部材とを具備しており、前記絶縁基板の側面において、前記下部基板が前記上部基板よりも側方に突出している、レンズ固定部材を固定するための鍔部が形成されていることを特徴とする撮像装置。 A lower substrate having a first through-hole opening in the upper surface and the lower surface, and an upper substrate having a second through-hole opening in the upper surface and the lower surface and disposed on the upper surface of the lower substrate, A recess for accommodating the image sensor is formed by an inner surface of one through hole and a lower surface of the upper substrate, and an insulating substrate in which the second through hole opens at the bottom surface of the recess, said second wiring conductor derived on the lower surface of the insulating substrate from the periphery of the opening of the through hole of the bottom, in a state where the light receiving portion is opposed to the second through-hole, and the second bottom surface of the recess An image sensor in which an electrode is electrically connected to the wiring conductor around a through hole; and a window member attached to the upper surface of the insulating substrate so as to cover the opening of the second through hole. in a side of the insulating substrate, the lower Imaging apparatus characterized by plates projecting laterally than the upper substrate, the flange portion for fixing the lens fixing member is formed. 前記鍔部の上面と前記凹部の底面とが同一平面上にあることを特徴とする請求項1記載の撮像装置。 Claim 1 Symbol placement of the image pickup apparatus is characterized in that the upper surface of the flange portion and the bottom surface of the recess are coplanar. 前記絶縁基板は、その上面と側面との間の角部が面取りされていることを特徴とする請求項1または請求項記載の撮像装置。 The insulating substrate, the imaging apparatus according to claim 1 or claim 2, wherein corner portions, characterized in that it is chamfered between its top and sides. 請求項1乃至請求項のいずれかに記載の撮像装置と、前記鍔部の上面に下端が接合され、上端面の中央部に貫通穴が形成されているとともに下端が開かれた筒状とされているレンズ固定部材と、該レンズ固定部材に前記貫通穴の開口を塞ぐように取着されたレンズとを具備していることを特徴とする撮像モジュール。 The imaging device according to any one of claims 1 to 3 , and a cylindrical shape in which a lower end is joined to an upper surface of the flange portion, a through hole is formed in a central portion of the upper end surface, and a lower end is opened. An imaging module comprising: a lens fixing member that is attached; and a lens attached to the lens fixing member so as to close the opening of the through hole.
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