JP2005278093A - Imaging apparatus - Google Patents

Imaging apparatus Download PDF

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JP2005278093A
JP2005278093A JP2004092237A JP2004092237A JP2005278093A JP 2005278093 A JP2005278093 A JP 2005278093A JP 2004092237 A JP2004092237 A JP 2004092237A JP 2004092237 A JP2004092237 A JP 2004092237A JP 2005278093 A JP2005278093 A JP 2005278093A
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light
hole
insulating substrate
opening
imaging device
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Yosuke Moriyama
陽介 森山
Toshiyuki Chitose
敏幸 千歳
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Kyocera Corp
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Kyocera Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an imaging apparatus capable of preventing intrusion of noise to an extracted image converted from light into an electric signal by an imaging element by making the light passing through a lens incident onto a light receiving face of the imaging element with high accuracy in the case of photographing an object. <P>SOLUTION: The imaging apparatus is provided with: an insulation board 2 in the middle of which a through-hole 2a is formed; wire conductors 5 formed to a lower side of the insulation board 2; the imaging element 3 that is fitted to around the through-hole 2a at the lower side of the insulation board 2 by opposing its light receiving section 3a to the through-hole 2a and electrodes 7 of which are electrically connected to the wire conductors 5; and a window member 4 fitted to around the opening of the through-hole 2a at the upper side of the insulation board 2 in a way of covering the opening, and a light shield layer 8 is formed to the upper side of the insulation board 2 and includes a shield non-forming part or a groove 8a over the entire circumference of the opening of the through-hole 2a. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、CCD型,CMOS型等の撮像素子を用いた、光学センサ等に適用される撮像装置に関する。   The present invention relates to an imaging apparatus applied to an optical sensor or the like using an imaging element such as a CCD type or a CMOS type.

従来、CCD型,CMOS型等の撮像素子を収納するための撮像装置としては、セラミックス製のものが知られている。近年の携帯性を重視した電子機器では、その市場において小型化や薄型化が要求されることから、これらの要求に充分に応えるべく、例えば図4に示すような断面形状を有し、配線板12、撮像素子13およびシール材14によって主に構成された撮像装置11が提案されている。   2. Description of the Related Art Conventionally, ceramics are known as an image pickup apparatus for housing an image pickup device such as a CCD type or a CMOS type. In recent years, electronic devices with an emphasis on portability are required to be reduced in size and thickness in the market. Therefore, in order to sufficiently meet these demands, for example, a cross-sectional shape as shown in FIG. 12, an imaging device 11 mainly composed of an imaging element 13 and a sealing material 14 has been proposed.

配線板12はセラミックスや樹脂などから成り、薄い平板として成形され、その下面に配線エリア15が形成されている。配線板12には、光を通過させる開口12aが形成されるとともに、配線板12の下面に枠状の基台18が設けられている。基台18は配線板12の下面に対してほぼ直交する向きで接合されており、基台18の下端部には外部接続用の端子19が形成されている。そして、この基台18によって配線板12が外部回路基板上に支持固定される。   The wiring board 12 is made of ceramics or resin, and is formed as a thin flat plate, and a wiring area 15 is formed on the lower surface thereof. The wiring board 12 has an opening 12 a through which light passes, and a frame-like base 18 is provided on the lower surface of the wiring board 12. The base 18 is joined in a direction substantially orthogonal to the lower surface of the wiring board 12, and a terminal 19 for external connection is formed at the lower end of the base 18. The wiring board 12 is supported and fixed on the external circuit board by the base 18.

また、配線板12の下面に、開口12aに受光部13aが対向するように撮像素子13が配置される。なお、撮像素子13はシリコンの基板の上面の中央部にCCD型,CMOS型の受光部13aが形成されたチップであり、撮像素子13の上面の外周部には電極パッドが形成されている。   In addition, the imaging element 13 is disposed on the lower surface of the wiring board 12 so that the light receiving portion 13a faces the opening 12a. The image pickup device 13 is a chip in which a CCD type and CMOS type light receiving portion 13a is formed at the center of the upper surface of a silicon substrate, and an electrode pad is formed on the outer peripheral portion of the upper surface of the image pickup device 13.

また、電極パッド上には金等から成る突起電極(導体バンプ)17が形成されている。その突起電極17は、配線エリア15にフリップチップ接合され、この接合部の周囲には、接合を補強するとともに封止を行なう樹脂からなる封止樹脂層であるダム17aが塗布形成されている。また、突起電極17は配線エリア15に接続されて配線板12および基台18の内部に形成された配線導体(図示せず)を介して端子19に導出されている。   A protruding electrode (conductor bump) 17 made of gold or the like is formed on the electrode pad. The protruding electrode 17 is flip-chip bonded to the wiring area 15, and a dam 17 a that is a sealing resin layer made of a resin that reinforces the bonding and seals is applied and formed around the bonding portion. The protruding electrode 17 is connected to the wiring area 15 and led out to the terminal 19 through a wiring conductor (not shown) formed inside the wiring board 12 and the base 18.

また、配線板12上面には、開口12aを塞ぐようにガラス等から成る透明なシール材14が樹脂接着剤等によって接着されている(例えば、下記の特許文献1参照)。   Further, a transparent sealing material 14 made of glass or the like is adhered to the upper surface of the wiring board 12 with a resin adhesive or the like so as to close the opening 12a (see, for example, Patent Document 1 below).

このようなセラミック製の撮像装置11において、配線板12および基台18は、セラミックグリーンシート(以下、グリーンシートともいう)積層法により製作される。具体的には、セラミックスから成る配線板12用のグリーンシートと、セラミックスから成る基台18用のグリーンシートとを準備し、これらのグリーンシートに配線板12の配線エリア15から端子19に配線導体を導出させるための貫通孔や光を通過させる開口12aをグリーンシートの上下面に垂直に打ち抜く。   In such a ceramic imaging device 11, the wiring board 12 and the base 18 are manufactured by a ceramic green sheet (hereinafter also referred to as “green sheet”) lamination method. Specifically, a green sheet for the wiring board 12 made of ceramics and a green sheet for the base 18 made of ceramics are prepared, and wiring conductors from the wiring area 15 of the wiring board 12 to the terminals 19 are provided on these green sheets. A through hole for deriving light and an opening 12a through which light passes are vertically punched on the upper and lower surfaces of the green sheet.

次に、配線板12の配線エリア15、基台18の端子19、および配線板12や基台18の内部に形成されて端子19に導出される配線導体用として、タングステン(W)やモリブデン(Mo)などの高融点金属粉末から成る金属ペーストを従来周知のスクリーン印刷法等により塗布する。そして、配線板12用のグリーンシートと基台18用のグリーンシートとを上下に重ねて接合し、これらを高温で焼成して焼結体と成す。   Next, tungsten (W) or molybdenum (for wiring conductors 15 formed on the wiring area 15 of the wiring board 12, the terminals 19 of the base 18, and the wiring conductors formed inside the wiring board 12 and the base 18 and led out to the terminals 19 are used. A metal paste made of a refractory metal powder such as Mo) is applied by a conventionally known screen printing method or the like. And the green sheet for wiring boards 12 and the green sheet for base 18 are piled up and down and joined, and these are baked at high temperature to form a sintered body.

その後、配線エリア15および配線導体が導出される端子19の露出表面に、ニッケル(Ni)や金(Au)等の金属から成るめっき金属層を無電解めっき法や電解めっき法により被着させている。   Thereafter, a plated metal layer made of a metal such as nickel (Ni) or gold (Au) is deposited on the exposed surfaces of the wiring area 15 and the terminal 19 from which the wiring conductor is led out by an electroless plating method or an electrolytic plating method. Yes.

図5は、図4の撮像装置11をモジュール化してなる光学センサ装置の断面図である。撮像装置11においては、配線板12の下面に枠状の基台18が設けられ、基台18の下端部に外部接続用の端子19が設けられており、端子19を外部回路基板26の配線導体等に接続し、半田20によりその接続がなされるとともに補強される。また、撮像装置11における配線板12の上面でシール材14よりも外周側の外周部に、レンズ鏡筒21が接着固定されている。   FIG. 5 is a cross-sectional view of an optical sensor device formed by modularizing the imaging device 11 of FIG. In the imaging device 11, a frame-like base 18 is provided on the lower surface of the wiring board 12, and a terminal 19 for external connection is provided at the lower end of the base 18. The terminal 19 is connected to the wiring of the external circuit board 26. It is connected to a conductor or the like, and is connected and reinforced by the solder 20. In addition, a lens barrel 21 is bonded and fixed to the outer peripheral portion of the upper surface of the wiring board 12 in the imaging device 11 on the outer peripheral side of the sealing material 14.

上記の構成において、撮像装置11は、外部回路基板26に実装されることから、撮像装置11と外部回路基板26との間に実装スペース22が形成される。実装スペース22に面する外部回路基板26の上面には、IC,LSI等の半導体素子やコネクタなどの電子部品23が取付けられる。   In the above configuration, since the imaging device 11 is mounted on the external circuit board 26, a mounting space 22 is formed between the imaging device 11 and the external circuit board 26. An electronic component 23 such as a semiconductor element such as an IC or LSI or a connector is attached to the upper surface of the external circuit board 26 facing the mounting space 22.

そして、外部よりモジュールに入射する光は、レンズ鏡筒21の窓24からレンズ25を通って、透明なシール材14を通過する。シール材14を通過した光は、配線板12に形成された開口12aを通り、撮像素子13の受光部13aに入射する。撮像素子13の受光部13aで受光された光は電気信号に変換され、突起電極17を介して配線板12へ伝送される。配線板12へ伝送された電気信号は、配線板12および基台18の内部の配線導体を通り、基台18の端子19を介して撮像装置11の外部へ出力される。   Light entering the module from the outside passes through the lens 25 through the lens 25 from the window 24 of the lens barrel 21 and passes through the transparent sealing material 14. The light that has passed through the sealing material 14 passes through the opening 12 a formed in the wiring board 12 and enters the light receiving portion 13 a of the image sensor 13. The light received by the light receiving portion 13 a of the image sensor 13 is converted into an electric signal and transmitted to the wiring board 12 through the protruding electrode 17. The electrical signal transmitted to the wiring board 12 passes through the wiring conductors in the wiring board 12 and the base 18 and is output to the outside of the imaging device 11 through the terminal 19 of the base 18.

上記のように、撮像素子13の周囲に端子19が形成された基台18が設けられることにより、モジュールの外部回路基板26に撮像装置11を実装すると、撮像装置11と外部回路基板26との間に実装スペース22を確保することができ、実装スペース22を活用してそこに電子部品23を実装することができる。したがって、撮像装置11を有するモジュールの小型化を達成することができる(例えば、下記の特許文献1参照)。なお、撮像素子13が平面視で四角形の場合、その2辺のみに沿って基台18が設けられている場合もある。
特開2002−299592号公報
As described above, when the imaging device 11 is mounted on the external circuit board 26 of the module by providing the base 18 having the terminals 19 formed around the imaging device 13, the imaging device 11 and the external circuit board 26 are connected to each other. A mounting space 22 can be secured in between, and the electronic component 23 can be mounted there by utilizing the mounting space 22. Therefore, it is possible to reduce the size of the module having the imaging device 11 (see, for example, Patent Document 1 below). In addition, when the image pick-up element 13 is a square by planar view, the base 18 may be provided along only the two sides.
JP 2002-299592 A

しかしながら、上記特許文献1の撮像装置11によると、配線板12はセラミックスや樹脂等から成り、薄い平板として成形されていることから、配線板12を光が透過しやすく、配線板12の上面から光が入射し、内部で屈折した後に開口12aの内壁面から出射して開口12a内に侵入したり、配線板12を透過して下面から出射した後に撮像素子13の接合部の周囲に形成されたダム17aを透過して開口12a内に浸入したりすることにより、不要な光が受光部13aへ入射して精度よく受光できなくなり、電気信号へ変換されて取り出された画像にフレアやゴーストなどのノイズが発生するという問題点を有していた。   However, according to the imaging device 11 of Patent Document 1, since the wiring board 12 is made of ceramics, resin, or the like and is formed as a thin flat plate, light is easily transmitted through the wiring board 12, and from the upper surface of the wiring board 12. After light is incident and refracted inside, the light is emitted from the inner wall surface of the opening 12a and enters the opening 12a. The light is transmitted through the wiring board 12 and emitted from the lower surface, and is formed around the joint portion of the imaging element 13. By passing through the dam 17a and entering the opening 12a, unnecessary light enters the light receiving portion 13a and cannot be received with high precision, and flare, ghost, etc. are converted into an electric signal and taken out. There was a problem that noise was generated.

また、配線板12の上面に、開口12aを塞ぐようにガラス等から成る透明なシール材14が樹脂接着剤等によって接着されており、この樹脂接着剤が配線板12に形成された開口12aの内壁面に流れ込むことによって、開口12aの内壁面に樹脂接着剤が突起状に被着しやすく、シール材14を通過して入射した光は、開口12aを通過する際に、開口12aの内壁面に被着した突起状の樹脂接着剤で乱反射し、その光の一部が受光部13aに入射することにより精度よく受光できなくなり画像にノイズが発生するという問題点があった。   Further, a transparent sealing material 14 made of glass or the like is adhered to the upper surface of the wiring board 12 by a resin adhesive or the like so as to close the opening 12a, and this resin adhesive is formed in the opening 12a formed in the wiring board 12. By flowing into the inner wall surface, the resin adhesive easily adheres to the inner wall surface of the opening 12a in a protruding manner, and light incident through the sealing material 14 passes through the opening 12a and passes through the inner wall surface of the opening 12a. There is a problem that irregular reflection is caused by the projection-like resin adhesive deposited on the lens, and a part of the light enters the light receiving portion 13a, so that the light cannot be received accurately and noise is generated in the image.

また、撮像装置11をレンズを備えたモジュールとした場合も同様に、配線板12を光が透過したり、配線板12の開口12aの内壁面に被着した突起状の樹脂接着剤で乱反射したりすることにより、不要な光が受光部13aへ入射して精度よく受光できなくなり画像にノイズが発生するという問題点を有していた。   Similarly, when the imaging device 11 is a module including a lens, light is transmitted through the wiring board 12 or is irregularly reflected by a protruding resin adhesive attached to the inner wall surface of the opening 12 a of the wiring board 12. As a result, unnecessary light is incident on the light receiving portion 13a and cannot be received accurately, and noise is generated in the image.

従って、本発明は上記従来の問題点に鑑み完成されたものであり、その目的は、被写体を撮影する際にレンズを通過した光を乱反射させることなく撮像素子の受光面へ精度よく入射させることにより、撮像素子で電気信号に変換して取り出された画像へのノイズを防止できる撮像装置を提供することにある。   Accordingly, the present invention has been completed in view of the above-described conventional problems, and its purpose is to allow light that has passed through the lens to be incident on the light receiving surface of the image sensor with high accuracy without irregular reflection. Accordingly, an object of the present invention is to provide an imaging apparatus capable of preventing noise in an image taken out by being converted into an electrical signal by an imaging element.

本発明の撮像装置は、中央部に貫通孔が形成された絶縁基板と、該絶縁基板の下面に形成された配線導体と、前記絶縁基板の下面の前記貫通孔の周囲に前記貫通孔に受光部を対向させて取着されるとともに電極が前記配線導体に電気的に接続された撮像素子と、前記絶縁基板の上面の前記貫通孔の開口の周囲に、該開口を覆って取着された窓部材とを具備しており、前記絶縁基板は上面に光遮断層が形成されており、該光遮断層は、前記貫通孔の前記開口の周囲に全周にわたって非形成部または溝が設けられていることを特徴とする。   The imaging device according to the present invention includes an insulating substrate having a through hole formed in a central portion thereof, a wiring conductor formed on a lower surface of the insulating substrate, and light reception by the through hole around the through hole on the lower surface of the insulating substrate. An image pickup device in which electrodes are attached to face each other and an electrode is electrically connected to the wiring conductor, and is attached around the opening of the through hole on the upper surface of the insulating substrate so as to cover the opening The insulating substrate has a light blocking layer formed on an upper surface thereof, and the light blocking layer is provided with a non-formed portion or a groove around the opening of the through-hole. It is characterized by.

本発明の撮像装置は、好ましくは、前記光遮断層は、前記非形成部または溝の外周側の縁に沿った部位が前記非形成部または溝の内周側の縁に沿った部位よりも厚いことを特徴とする。   In the imaging device according to the aspect of the invention, it is preferable that the light blocking layer has a portion along the outer peripheral side edge of the non-formed part or groove rather than a part along the inner peripheral side edge of the non-formed part or groove. It is characterized by being thick.

本発明の撮像装置は、絶縁基板は上面に光遮断層が形成されていることから、絶縁基板が薄く成形されたとしても光遮断層によって絶縁基板を光が透過するのを有効に防止することができるようになる。よって、絶縁基板の上面から光が入射し、内部で屈折した後に貫通孔の内壁面から出射して貫通孔内に侵入したり、絶縁基板を透過して下面から出射した後に撮像素子の接合部の周囲に形成されたダムを透過して貫通孔内に浸入したりすることを有効に防止することができ、光を精度よく受光部へ入射することができるようになって電気信号へ変換されて取り出された画像へのノイズ発生を有効に防止することができる。   In the imaging device of the present invention, since the light blocking layer is formed on the upper surface of the insulating substrate, the light blocking layer effectively prevents light from being transmitted through the insulating substrate even if the insulating substrate is thinly formed. Will be able to. Therefore, light is incident from the upper surface of the insulating substrate, refracted inside, and then exits from the inner wall surface of the through hole and enters the through hole, or passes through the insulating substrate and exits from the lower surface, and then joins the image sensor. It is possible to effectively prevent the light from entering the through hole through the dam formed around the dam, and the light can be accurately incident on the light receiving portion and converted into an electric signal. It is possible to effectively prevent noise from being generated in the extracted image.

また、光遮断層は、貫通孔の開口の周囲に全周にわたって非形成部または溝が設けられていることから、この非形成部または溝は、窓部材を接着するための樹脂接着剤の溜りを形成し、窓部材を絶縁基板に強固に接着することができるとともに、樹脂接着剤が開口の内側に流れ込むことにより貫通孔の内壁面に樹脂接着剤が突起状に被着するのを有効に防止することができ、窓部材を通過して貫通孔内に入射した光は、内壁面に被着した突起状の樹脂接着剤で乱反射し、その光の一部が受光部に入射することもなく精度よく受光部へ入射することができることから、電気信号へ変換されて取り出された画像へのノイズ発生を有効に防止することができる。   Further, since the light blocking layer is provided with a non-formed part or groove around the entire periphery of the opening of the through hole, the non-formed part or groove is a pool of resin adhesive for bonding the window member. The window member can be firmly bonded to the insulating substrate, and the resin adhesive can flow into the inside of the opening, thereby effectively attaching the resin adhesive to the inner wall surface of the through hole in a protruding manner. The light that has passed through the window member and entered the through-hole is irregularly reflected by the protruding resin adhesive attached to the inner wall surface, and part of the light may enter the light-receiving unit. Therefore, it is possible to effectively prevent noise from being generated in an image that has been converted into an electrical signal and taken out.

また、撮像装置をレンズを備えたモジュールとした場合でも、レンズを通過した光が乱反射されることなく良好に電気信号へ変換されるので、ノイズを効果的に防止することができる。   Further, even when the imaging device is a module including a lens, the light passing through the lens is favorably converted into an electric signal without being irregularly reflected, so that noise can be effectively prevented.

本発明の撮像装置は、好ましくは、光遮断層は、非形成部または溝の外周側の縁に沿った部位が非形成部または溝の内周側の縁に沿った部位よりも厚いことから、窓部材を光遮断層の非形成部または溝の外周側の縁によって窓部材の側面を覆うことができ、窓部材の側面から侵入する光を効果的に防いで不要な光が受光部に入射するのをさらに有効に防止できる。   In the imaging device of the present invention, preferably, the light blocking layer has a thicker portion along the outer peripheral edge of the non-formed portion or groove than a portion along the inner peripheral edge of the non-formed portion or groove. The window member can be covered with the non-light-blocking portion of the window member or the edge of the groove on the outer peripheral side, and the light entering from the side surface of the window member can be effectively prevented to prevent unnecessary light from entering the light receiving portion. Incidence can be more effectively prevented.

また、より厚い光遮断層によって絶縁基板を光が透過するのをさらに有効に防止することができるようになり、画像へのノイズ発生を有効に防止することができる。さらに、絶縁基板に窓部材を接着する際の樹脂接着剤の溜りの量を大きくとることが可能となり、窓部材をさらに強固に接着させることができる。   In addition, it is possible to more effectively prevent light from being transmitted through the insulating substrate by the thicker light blocking layer, and it is possible to effectively prevent noise from being generated in the image. Furthermore, it becomes possible to increase the amount of the resin adhesive pool when the window member is bonded to the insulating substrate, and the window member can be bonded more firmly.

本発明の撮像装置を以下に詳細に説明する。図1は本発明の撮像装置について実施の形態の一例を示す断面図であり、同図において、2は絶縁基板、2aは貫通孔、3は撮像素子、4は窓部材、5は配線導体であり、これらで撮像装置1が主に構成されている。   The imaging apparatus of the present invention will be described in detail below. FIG. 1 is a cross-sectional view showing an example of an embodiment of an imaging apparatus according to the present invention. In FIG. 1, 2 is an insulating substrate, 2a is a through hole, 3 is an image sensor, 4 is a window member, and 5 is a wiring conductor. There are these, and the imaging apparatus 1 is mainly configured.

本発明の絶縁基板2は、酸化アルミニウム質焼結体(アルミナセラミックス),窒化アルミニウム質焼結体等のセラミックスから成り、薄い平板として成型され、その表面および内部に、WやMo等の金属粉末メタライズから成り、撮像素子3の電気信号を伝送する機能を有する配線導体5が形成されており、中央部には光を通過させる貫通孔2aが形成され、貫通孔2aの下側には、受光部3aを貫通孔2aに対向させるとともに電極7(例えば、導体バンプ等の突起電極から成る)が配線導体5に電気的に接続された撮像素子3が取着されている。また、絶縁基板2の上側には撮像素子3の受光部3aを保護するための窓部材4が樹脂接着剤4a等で取着されている。   The insulating substrate 2 of the present invention is made of a ceramic such as an aluminum oxide sintered body (alumina ceramics) or an aluminum nitride sintered body, and is molded as a thin flat plate, and a metal powder such as W or Mo is formed on the surface and inside thereof. A wiring conductor 5 made of metallization and having a function of transmitting an electrical signal of the image sensor 3 is formed. A through hole 2a that allows light to pass through is formed at the center, and a light receiving light is formed below the through hole 2a. An image pickup device 3 is attached in which the portion 3a is opposed to the through hole 2a and an electrode 7 (for example, formed of a protruding electrode such as a conductor bump) is electrically connected to the wiring conductor 5. A window member 4 for protecting the light receiving portion 3a of the image sensor 3 is attached to the upper side of the insulating substrate 2 with a resin adhesive 4a or the like.

絶縁基板2は、例えば酸化アルミニウム質焼結体から成る場合、酸化アルミニウム,酸化珪素,酸化マグネシウム,酸化カルシウム等の原料粉末に適当な有機バインダー,溶剤等を添加混合して泥漿状となし、これを従来周知のドクターブレード法やカレンダーロール法等によりシート状に成形してグリーンシート(セラミック生シート)を得る。次に、グリーンシートに配線導体5形成用の貫通孔や光を通過させるための貫通孔2aを打ち抜き加工で形成するとともに、配線導体5となる金属ペーストを所定パターンに印刷塗布する。しかる後、これらのグリーンシートを積層し切断して絶縁基板2用のグリーンシートの成形体を得、最後にこの成形体を高温(約1600℃)で焼結させることによって製作される。   When the insulating substrate 2 is made of, for example, an aluminum oxide sintered body, a suitable organic binder, a solvent, etc. are added to and mixed with raw material powders such as aluminum oxide, silicon oxide, magnesium oxide, calcium oxide, etc. to form a slurry. Is formed into a sheet by a conventionally known doctor blade method, calendar roll method, or the like to obtain a green sheet (ceramic raw sheet). Next, a through hole for forming the wiring conductor 5 and a through hole 2a for allowing light to pass through are formed in the green sheet by punching, and a metal paste to be the wiring conductor 5 is printed and applied in a predetermined pattern. Thereafter, these green sheets are laminated and cut to obtain a green sheet molded body for the insulating substrate 2, and finally the molded body is sintered at a high temperature (about 1600 ° C.).

絶縁基板2に被着形成されている配線導体5は、撮像素子3の電気信号を外部接続用の端子6に伝送させる導電路として機能し、例えばWやMo等の高融点金属粉末に適当な有機溶剤,溶媒を添加混合して得た金属ペーストを、絶縁基板2となるグリーンシートに予めスクリーン印刷法により所定パターンに印刷塗布しておくことによって、絶縁基板2の所定位置に被着形成される。   The wiring conductor 5 deposited on the insulating substrate 2 functions as a conductive path for transmitting the electric signal of the image sensor 3 to the terminal 6 for external connection, and is suitable for refractory metal powder such as W or Mo. A metal paste obtained by adding and mixing an organic solvent and a solvent is preliminarily printed and applied in a predetermined pattern on a green sheet to be the insulating substrate 2 by a screen printing method. The

なお、配線導体5の露出する表面にニッケルや金等の耐蝕性に優れる金属を1〜20μm程度の厚みに被着させておくと、配線導体5が酸化腐蝕するのを有効に防止できるとともに、配線導体5と撮像素子3の電極7との接合を強固なものとすることができる。したがって、配線導体5の露出表面には、厚み1〜10μm程度のニッケルめっき層と厚み0.1〜3μm程度の金メッキ層とが電解めっき法や無電解めっき法により順次被着されているのが好ましい。   In addition, when a metal having excellent corrosion resistance such as nickel or gold is deposited on the exposed surface of the wiring conductor 5 to a thickness of about 1 to 20 μm, the wiring conductor 5 can be effectively prevented from being oxidized and corroded, The connection between the wiring conductor 5 and the electrode 7 of the imaging device 3 can be made strong. Therefore, a nickel plating layer having a thickness of about 1 to 10 μm and a gold plating layer having a thickness of about 0.1 to 3 μm are sequentially deposited on the exposed surface of the wiring conductor 5 by an electrolytic plating method or an electroless plating method. preferable.

また、絶縁基板2の上面には、ガラスやサファイア等から成る透明な窓部材4がエポキシ樹脂等の樹脂接着剤4aによって配置接合され撮像素子3のCCD型,CMOS型などの受光部3aを保護している。   A transparent window member 4 made of glass, sapphire, or the like is disposed and bonded on the upper surface of the insulating substrate 2 by a resin adhesive 4a such as an epoxy resin to protect the light receiving portion 3a of the image sensor 3 such as a CCD type or a CMOS type. doing.

また、本発明において、絶縁基板2は上面に光遮断層8が形成されており、光遮断層8は、貫通孔2aの開口の周囲に全周にわたって非形成部または溝8aが設けられている。そして、そのことが重要である。これにより、絶縁基板2が薄く成形されたとしても光遮断層8によって絶縁基板2を光が透過するのを有効に防止することができるようになる。よって、絶縁基板2の上面から光が入射し、内部で屈折した後に貫通孔2aの内壁面から出射して貫通孔2a内に侵入したり、絶縁基板2を透過して下面から出射した後に撮像素子3の接合部の周囲に形成されたダム7aを透過して貫通孔2a内に浸入したりすることを有効に防止することができ、光を精度よく受光部3aへ入射することができるようになって電気信号へ変換されて取り出された画像へのノイズ発生を有効に防止することができる。   In the present invention, the insulating substrate 2 has the light blocking layer 8 formed on the upper surface, and the light blocking layer 8 has a non-formed portion or groove 8a around the entire periphery of the opening of the through hole 2a. . And that is important. Thereby, even if the insulating substrate 2 is thinly formed, the light blocking layer 8 can effectively prevent light from being transmitted through the insulating substrate 2. Therefore, light enters from the upper surface of the insulating substrate 2 and is refracted inside and then exits from the inner wall surface of the through hole 2a and enters the through hole 2a, or passes through the insulating substrate 2 and exits from the lower surface. It is possible to effectively prevent the dam 7a formed around the joint portion of the element 3 from passing through and entering the through hole 2a, so that light can be incident on the light receiving portion 3a with high accuracy. Thus, it is possible to effectively prevent noise from being generated in an image that has been converted into an electrical signal and taken out.

また、光遮断層8は、貫通孔2aの開口の周囲に全周にわたって非形成部または溝8aが設けられていることから、この非形成部または溝8aは、窓部材4を接着するための樹脂接着剤4aの溜りを形成し、窓部材4を絶縁基板2に強固に接着することができるとともに、樹脂接着剤4aが開口の内側に流れ込むことにより貫通孔2aの内壁面に樹脂接着剤4aが突起状に被着するのを有効に防止することができ、窓部材4を通過して貫通孔2a内に入射した光は、内壁面に被着した突起状の樹脂接着剤4aで乱反射し、その光の一部が受光部3aに入射することもなく精度よく受光部3aへ入射することができることから、電気信号へ変換されて取り出された画像へのノイズ発生を有効に防止することができる。   Further, since the light blocking layer 8 is provided with non-formed portions or grooves 8a around the entire periphery of the opening of the through hole 2a, the non-formed portions or grooves 8a are used for bonding the window member 4 to each other. A pool of the resin adhesive 4a can be formed, and the window member 4 can be firmly bonded to the insulating substrate 2, and the resin adhesive 4a flows into the inside of the opening so that the resin adhesive 4a is applied to the inner wall surface of the through hole 2a. Can be effectively prevented from adhering to the projection, and the light that has passed through the window member 4 and entered the through-hole 2a is diffusely reflected by the projection-like resin adhesive 4a that adheres to the inner wall surface. Since a part of the light can be accurately incident on the light receiving unit 3a without entering the light receiving unit 3a, it is possible to effectively prevent the generation of noise in the image that is converted into an electric signal and taken out. it can.

なお、光遮断層8は、可視光領域の光に対する光透過率が10%以下のものである。そのような材料としては、酸化アルミニウム質焼結体,窒化アルミニウム質焼結体,ムライト質焼結体,ガラスセラミックス質焼結体等のセラミックス、エポキシ樹脂,アクリル樹脂,ポリカーボネート,フェノール樹脂,シリコーン樹脂等の樹脂、Al,Cu,Ni,Ag,ステンレススチール,真鍮(Cu―Zu合金),Fe―Ni―Co合金,Cu―W合金等の金属などが用いられ、所望の光透過率とするために、それらの材料に色素や顔料、有機フィラー、無機フィラー、金属フィラーを含有させたり、表面に金属層を形成したりしてもよい。   The light blocking layer 8 has a light transmittance of 10% or less for light in the visible light region. Such materials include ceramics such as aluminum oxide sintered bodies, aluminum nitride sintered bodies, mullite sintered bodies, glass ceramic sintered bodies, epoxy resins, acrylic resins, polycarbonates, phenol resins, silicone resins. In order to obtain a desired light transmittance, such as resin such as Al, Cu, Ni, Ag, stainless steel, brass (Cu-Zu alloy), Fe-Ni-Co alloy, Cu-W alloy, etc. are used. In addition, these materials may contain pigments, pigments, organic fillers, inorganic fillers, metal fillers, or a metal layer may be formed on the surface.

また、絶縁基板2との接合を行なうための接着剤層を設けてもよく、接着剤層も含めた状態での可視光領域の光に対する光透過率が10%以下となれば光遮断層8として機能する。このような接着剤層としては、エポキシ等の樹脂接着剤、Agロウ,Pb−Sn系はんだ,Pbフリーはんだ等のロウ材等からなる接合材が挙げられる。   Further, an adhesive layer for bonding to the insulating substrate 2 may be provided. If the light transmittance with respect to light in the visible light region including the adhesive layer is 10% or less, the light blocking layer 8 is provided. Function as. Examples of such an adhesive layer include a bonding material made of a resin adhesive such as epoxy, a brazing material such as Ag brazing, Pb—Sn solder, and Pb free solder.

また、光遮断層8に設けられている非形成部(光遮断層8の一部に上下面を貫通するように枠状の穴を形成して絶縁基板2を露出させたもの)または溝(光遮断層8の表面に枠状の凹部を形成したもの)8aは、セラミックスであれば、セラミック生シートへの金型による打ち抜き加工により形成され、樹脂および金属であれば、打ち抜き金型や成形金型により形成される。   Further, a non-formation part (a part in which the insulating substrate 2 is exposed by forming a frame-like hole so as to penetrate the upper and lower surfaces in a part of the light blocking layer 8) provided in the light blocking layer 8 or a groove ( If the surface of the light blocking layer 8 is formed with a frame-like recess) 8a is a ceramic, it is formed by punching a ceramic raw sheet with a die, and if it is a resin or metal, it is a punching die or molding. It is formed by a mold.

非形成部または溝8aは、貫通孔2aの開口を取り囲むように形成されており、好ましくは、貫通孔2aの開口の周囲に全周にわたって形成されているのがよい。これにより、樹脂接着剤4aが開口の内側に流れ込むのをより有効に防止できる。   The non-formed part or the groove 8a is formed so as to surround the opening of the through hole 2a, and is preferably formed around the entire opening of the through hole 2a. Thereby, it can prevent more effectively that the resin adhesive 4a flows into the inside of opening.

また、非形成部または溝8aは、窓部材4と絶縁基板2との接合面の幅の0.3乃至0.8倍であるのがよい。これにより、樹脂接着剤4aが開口の内側に流れ込むのをより有効に防止できるとともに、樹脂接着剤4aの溜まりを大きくして窓部材4と絶縁基板2との接合強度をより高めることができる。   Further, the non-formed part or groove 8a is preferably 0.3 to 0.8 times the width of the joint surface between the window member 4 and the insulating substrate 2. Accordingly, it is possible to more effectively prevent the resin adhesive 4a from flowing into the inside of the opening, and it is possible to increase the pool of the resin adhesive 4a and further increase the bonding strength between the window member 4 and the insulating substrate 2.

また、撮像装置1をレンズを備えたモジュールとした場合でも、レンズを通過した光が乱反射されることなく良好に電気信号へ変換されるので、ノイズを効果的に防止することができる。   Further, even when the imaging device 1 is a module including a lens, the light that has passed through the lens is favorably converted into an electric signal without being irregularly reflected, so that noise can be effectively prevented.

また、絶縁基板2の中央部の貫通孔2aの下側には、シリコンの基板上にCCD型,CMOS型の受光部3aを形成した撮像素子3が配置される。撮像素子3の外周部には金などの電極7が形成され、電極7が配線導体5に接続されており、撮像素子3は、配線導体5を介して、外部電気回路に接続される端子6に電気的に接続されている。   Further, below the through hole 2a at the center of the insulating substrate 2, an image pickup device 3 in which a CCD type and CMOS type light receiving part 3a is formed on a silicon substrate is disposed. An electrode 7 such as gold is formed on the outer periphery of the image sensor 3, and the electrode 7 is connected to the wiring conductor 5. The image sensor 3 is connected to the external electric circuit via the wiring conductor 5. Is electrically connected.

図2は、絶縁基板2の下面の撮像素子3よりも外側に、枠状の側壁部9が設けられた本発明の実施の形態の他の例を示す断面図である。(図1と同部位については同符号とする)
側壁部9は、絶縁基板2と同材質の酸化アルミニウム質焼結体(アルミナセラミックス)、窒化アルミニウム質焼結体等のセラミックスから成り、撮像素子3の電気信号を配線導体5を介して外部へ取り出すためのものである。そのため、側壁部9の内部または表面には配線層(図示せず)が形成され、この配線層は、配線導体5と同材質である例えばW,Mo等の高融点金属粉末に適当な有機溶剤、溶媒を添加混合して得た金属ペーストを、側壁部9となるグリーンシートに予めスクリーン印刷法により所定パターンに印刷塗布しておくことによって、側壁部9の所定位置に被着形成される。そして、配線層の一端は配線導体5と電気的に接続されるように被着形成されており、他端は、側壁部9の下端に配線層と同材質で同様の方法で被着形成された端子10に接続するように導出されている。
FIG. 2 is a cross-sectional view showing another example of the embodiment of the present invention in which a frame-like side wall portion 9 is provided outside the imaging element 3 on the lower surface of the insulating substrate 2. (Same parts as in FIG.
The side wall portion 9 is made of ceramics such as an aluminum oxide sintered body (alumina ceramics), an aluminum nitride sintered body, and the like, which are the same material as the insulating substrate 2. It is for taking out. Therefore, a wiring layer (not shown) is formed inside or on the surface of the side wall 9, and this wiring layer is an organic solvent suitable for refractory metal powder such as W or Mo, which is the same material as the wiring conductor 5. The metal paste obtained by adding and mixing the solvent is preliminarily printed and applied in a predetermined pattern on the green sheet to be the side wall portion 9 by a screen printing method, so that the metal paste is deposited on the side wall portion 9 at a predetermined position. One end of the wiring layer is formed so as to be electrically connected to the wiring conductor 5, and the other end is formed on the lower end of the side wall portion 9 with the same material as the wiring layer in the same manner. It is derived so as to be connected to the terminal 10.

また、側壁部9は、絶縁基板2の支持体としても機能し、その下端の端子10が外部回路基板の配線導体等に接続されて撮像装置1が実装されると、撮像装置1と外部回路基板との間に実装スペースが形成され、実装スペースに対応する外部回路基板上や絶縁基板2の下面にIC,LSI,コネクタなどの電子部品を搭載することができる。そのため、撮像装置1を外部回路基板等に実装して成る光学センサ装置として使用する際に、光学センサ装置の小型化が達成される。   The side wall portion 9 also functions as a support for the insulating substrate 2. When the imaging device 1 is mounted with the terminal 10 at the lower end thereof connected to a wiring conductor or the like of the external circuit substrate, the imaging device 1 and the external circuit are mounted. A mounting space is formed between the substrate and an electronic component such as an IC, LSI, or connector on the external circuit board corresponding to the mounting space or the lower surface of the insulating substrate 2. Therefore, when the imaging device 1 is used as an optical sensor device that is mounted on an external circuit board or the like, the optical sensor device can be reduced in size.

また、側壁部9は、絶縁基板2と同様のグリーンシートに、端子10に接続される配線層を形成するための貫通孔を打ち抜き加工で形成するとともに、配線層および端子10となる金属ペーストを所定パターンに印刷塗布する。しかる後、これらのグリーンシートを絶縁基板2となるグリーンシートへ順次積層し切断することで絶縁基板2用のグリーンシートと一体化された成型体を得、最後に、この成形体を高温(約1600℃)で焼結させて製作される。   Further, the side wall 9 is formed by punching through holes for forming a wiring layer connected to the terminal 10 in the same green sheet as the insulating substrate 2, and a metal paste that becomes the wiring layer and the terminal 10 is formed. Printing is applied in a predetermined pattern. Thereafter, these green sheets are sequentially laminated on the green sheet to be the insulating substrate 2 and cut to obtain a molded body integrated with the green sheet for the insulating substrate 2. Finally, the molded body is heated to a high temperature (about 1600 ° C.).

なお、側壁部9の配線層および端子10の露出表面は、酸化腐食するのを有効に防止するとともに、絶縁基板2の配線導体5と側壁部9の配線層との接合状態を良好なものとするために、電解めっき法または無電解めっき法により、1〜20μm程度の厚みの銅めっき層,ニッケルめっき層,金めっき層が被着されているか、またはこれらのめっき層が順次被着されているのがよい。   Note that the wiring layer of the side wall 9 and the exposed surface of the terminal 10 effectively prevent oxidative corrosion, and the bonding state between the wiring conductor 5 of the insulating substrate 2 and the wiring layer of the side wall 9 is good. In order to do so, a copper plating layer, a nickel plating layer, and a gold plating layer having a thickness of about 1 to 20 μm are applied by electrolytic plating or electroless plating, or these plating layers are sequentially applied. It is good to be.

撮像素子3は、電極7が絶縁基板2のニッケルや金などでメッキ処理された配線導体5に、例えば超音波接合法によりフリップチップ接合される。超音波接合法によるフリップチップ接合は、室温で接合部を加圧しつつ0.5秒前後の超音波振動を接合部に加えることにより接合させる接合法である。撮像素子3の接合部の周囲には、接合を補強するとともに封止を行なう樹脂から成る封止樹脂層であるダム7aが塗布形成してある。このダム7aは、エポキシ系樹脂等の樹脂の粘度を大きくしたものであり、樹脂の形状維持の強さの指標であるチキソ比も1.7以上と大きいのがよい。   The imaging element 3 is flip-chip bonded to the wiring conductor 5 whose electrode 7 is plated with nickel, gold, or the like of the insulating substrate 2 by, for example, an ultrasonic bonding method. The flip chip bonding by the ultrasonic bonding method is a bonding method in which bonding is performed by applying ultrasonic vibration of about 0.5 seconds to the bonding portion while pressurizing the bonding portion at room temperature. A dam 7a, which is a sealing resin layer made of a resin that reinforces and seals the joint, is applied and formed around the joint of the image sensor 3. The dam 7a is obtained by increasing the viscosity of a resin such as an epoxy resin, and the thixo ratio, which is an index of the strength of maintaining the shape of the resin, is preferably as large as 1.7 or more.

このようにして、本発明の撮像装置1は、中央部に貫通孔2aが形成された絶縁基板2と、この絶縁基板2の下面に形成された配線導体5と、絶縁基板2の下面の貫通孔2aの周囲に貫通孔2aに受光部3aを対向させて取着されるとともに電極7が配線導体5に電気的に接続された撮像素子3と、絶縁基板2の上面の貫通孔2aの開口の周囲に、この開口を覆って取着された窓部材4とから成り、絶縁基板2は上面に光遮断層8が形成されていることから、絶縁基板2が薄く成形されたとしても光遮断層8によって絶縁基板2を光が透過するのを有効に防止することができるようになる。よって、窓部材4を通過して貫通孔2a内に入射した光は、絶縁基板2の上面から入射した光が内部で屈折して貫通孔2aの内壁面から出射して貫通孔2a内に入射した光や絶縁基板2を透過して下面から出射した光が撮像素子3の接合部の周囲に形成されたダム7aを透過して貫通孔2a内に入射した光などの不要な光が受光部3aへ入射することもなく精度よく受光部3aへ入射することができるようになり、電気信号へ変換されて取り出された画像へのノイズ発生を有効に防止することができる。   As described above, the imaging device 1 of the present invention includes the insulating substrate 2 in which the through hole 2a is formed in the central portion, the wiring conductor 5 formed on the lower surface of the insulating substrate 2, and the lower surface of the insulating substrate 2. The image sensor 3 in which the light receiving portion 3a is attached to the through hole 2a around the hole 2a and the electrode 7 is electrically connected to the wiring conductor 5, and the opening of the through hole 2a on the upper surface of the insulating substrate 2 Since the insulating substrate 2 has a light blocking layer 8 formed on the upper surface, the light blocking layer 8 is formed even if the insulating substrate 2 is thinly formed. The layer 8 can effectively prevent light from being transmitted through the insulating substrate 2. Therefore, the light that has passed through the window member 4 and entered the through hole 2a is refracted inside from the upper surface of the insulating substrate 2 and emitted from the inner wall surface of the through hole 2a to enter the through hole 2a. Undesired light such as light transmitted through the insulating substrate 2 and emitted from the lower surface through the dam 7a formed around the joint of the image sensor 3 and incident into the through hole 2a is received by the light receiving unit. The light can be incident on the light receiving unit 3a with high accuracy without being incident on the light 3a, and it is possible to effectively prevent the generation of noise in the image that is converted into an electric signal and taken out.

また、光遮断層8は、貫通孔2aの開口の周囲に全周にわたって非形成部または溝8aが設けられていることから、この非形成部または溝8aは、窓部材4を接着するための樹脂接着剤4aの溜りを形成し、窓部材4を絶縁基板2に強固に接着することができるとともに、樹脂接着剤4aが開口の内側に流れ込むことにより貫通孔2aの内壁面に樹脂接着剤4aが突起状に被着するのを有効に防止することができ、窓部材4を通過して貫通孔2a内に入射した光は、内壁面に被着した突起状の樹脂接着剤4aで乱反射し、その光の一部が受光部3aに入射することもなく精度よく受光部3aへ入射することができることから、電気信号へ変換されて取り出された画像へのノイズ発生を有効に防止することができる。   Further, since the light blocking layer 8 is provided with non-formed portions or grooves 8a around the entire periphery of the opening of the through hole 2a, the non-formed portions or grooves 8a are used for bonding the window member 4 to each other. A pool of the resin adhesive 4a can be formed, and the window member 4 can be firmly bonded to the insulating substrate 2, and the resin adhesive 4a flows into the inside of the opening so that the resin adhesive 4a is applied to the inner wall surface of the through hole 2a. Can be effectively prevented from adhering to the projection, and the light that has passed through the window member 4 and entered the through-hole 2a is diffusely reflected by the projection-like resin adhesive 4a that adheres to the inner wall surface. Since a part of the light can be accurately incident on the light receiving unit 3a without entering the light receiving unit 3a, it is possible to effectively prevent the generation of noise in the image that is converted into an electric signal and taken out. it can.

また、撮像装置1をレンズを備えたモジュールとした場合でも、レンズを通過した光が乱反射されることなく良好に電気信号へ変換されるので、ノイズを効果的に防止することができる。   Further, even when the imaging device 1 is a module including a lens, the light that has passed through the lens is favorably converted into an electric signal without being irregularly reflected, so that noise can be effectively prevented.

また、本発明において、図3の断面図(図1と同部位については同符号とする)に示すように、光遮断層8は、非形成部または溝8aの外周側の縁に沿った部位が非形成部または溝8aの内周側の縁に沿った部位よりも厚いことが好ましい。すなわち、光遮断層8は、非形成部または溝8aの外周側の縁に沿った部位の厚さが非形成部または溝8aよりも内側に位置する部位の厚さよりも厚いことが好ましい。これにより、絶縁基板2を光が透過するのをさらに有効に防止することができるようになり、画像へのノイズ発生を有効に防止することができる。また、絶縁基板2に窓部材4を接着する際の樹脂接着剤4aの溜りの量を大きくとることが可能となり、窓部材4をさらに強固に接着させることができる。   Further, in the present invention, as shown in the cross-sectional view of FIG. 3 (the same parts as those in FIG. 1 are denoted by the same reference numerals), the light blocking layer 8 is a part along the outer peripheral edge of the non-formed part or the groove 8a. Is preferably thicker than the non-formed portion or the portion along the inner peripheral edge of the groove 8a. That is, in the light blocking layer 8, it is preferable that the thickness of the part along the outer peripheral side edge of the non-formed part or groove 8a is thicker than the thickness of the part located inside the non-formed part or groove 8a. As a result, it is possible to more effectively prevent light from being transmitted through the insulating substrate 2, and it is possible to effectively prevent noise from being generated in the image. Further, it is possible to increase the amount of the resin adhesive 4a accumulated when the window member 4 is bonded to the insulating substrate 2, and the window member 4 can be bonded more firmly.

かくして、本発明の撮像装置1は、側壁部9の下端にモジュールの外部回路基板を接続し、絶縁基板2の上面で窓部材4より外側の外周部にレンズ鏡筒が接着固定されて光学センサ装置となる。   Thus, in the imaging device 1 of the present invention, the external circuit board of the module is connected to the lower end of the side wall portion 9, and the lens barrel is bonded and fixed to the outer peripheral portion outside the window member 4 on the upper surface of the insulating substrate 2. It becomes a device.

なお、本発明は上述の実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内で種々の変更を施すことは何等差し支えない。例えば、撮像素子3が平面視で四角形の場合、その2辺のみに沿って側壁部9が設けられても構わない。   It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention. For example, when the image sensor 3 is a quadrangle in plan view, the side wall 9 may be provided along only two sides thereof.

本発明の撮像装置について実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment about the imaging device of this invention. 本発明の撮像装置について実施の形態の他の例を示す断面図である。It is sectional drawing which shows the other example of embodiment about the imaging device of this invention. 本発明の撮像装置について実施の形態の他の例を示す断面図である。It is sectional drawing which shows the other example of embodiment about the imaging device of this invention. 従来の撮像装置の断面図である。It is sectional drawing of the conventional imaging device. 図4の撮像装置を用いて構成した光学センサ装置の断面図である。It is sectional drawing of the optical sensor apparatus comprised using the imaging device of FIG.

符号の説明Explanation of symbols

1:撮像装置
2:絶縁基板
2a:貫通孔
3:撮像素子
3a:受光部
4:窓部材
4a:樹脂接着剤
5:配線導体
6:端子
7:電極
8:光遮断層
8a:非形成部または溝
1: Image pickup device 2: Insulating substrate 2a: Through hole 3: Image pickup element 3a: Light receiving portion 4: Window member 4a: Resin adhesive 5: Wiring conductor 6: Terminal 7: Electrode 8: Light blocking layer 8a: Non-formed portion or groove

Claims (2)

中央部に貫通孔が形成された絶縁基板と、該絶縁基板の下面に形成された配線導体と、前記絶縁基板の下面の前記貫通孔の周囲に前記貫通孔に受光部を対向させて取着されるとともに電極が前記配線導体に電気的に接続された撮像素子と、前記絶縁基板の上面の前記貫通孔の開口の周囲に、該開口を覆って取着された窓部材とを具備しており、前記絶縁基板は上面に光遮断層が形成されており、該光遮断層は、前記貫通孔の前記開口の周囲に全周にわたって非形成部または溝が設けられていることを特徴とする撮像装置。 An insulating substrate having a through-hole formed in the central portion, a wiring conductor formed on the lower surface of the insulating substrate, and a light-receiving portion disposed around the through-hole on the lower surface of the insulating substrate with the light receiving portion facing the through-hole And an imaging element having an electrode electrically connected to the wiring conductor, and a window member attached around the opening of the through hole on the upper surface of the insulating substrate and covering the opening. The insulating substrate has a light blocking layer formed on an upper surface thereof, and the light blocking layer is provided with a non-formed portion or a groove around the opening of the through hole over the entire circumference. Imaging device. 前記光遮断層は、前記非形成部または溝の外周側の縁に沿った部位が前記非形成部または溝の内周側の縁に沿った部位よりも厚いことを特徴とする請求項1記載の撮像装置。 2. The light blocking layer according to claim 1, wherein a portion along an outer peripheral side edge of the non-formed portion or groove is thicker than a portion along an inner peripheral edge of the non-formed portion or groove. Imaging device.
JP2004092237A 2004-03-26 2004-03-26 Imaging apparatus Pending JP2005278093A (en)

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WO2014175460A1 (en) * 2013-04-26 2014-10-30 京セラ株式会社 Substrate for mounting electronic element and electronic device
WO2015020076A1 (en) * 2013-08-09 2015-02-12 旭硝子株式会社 Optical member, method for producing same, and image-capturing device
JP2018196102A (en) * 2017-05-12 2018-12-06 海華科技股▲分▼有限公司 Portable electronic apparatus, image photographing module, and placing unit

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014175460A1 (en) * 2013-04-26 2014-10-30 京セラ株式会社 Substrate for mounting electronic element and electronic device
JPWO2014175460A1 (en) * 2013-04-26 2017-02-23 京セラ株式会社 Imaging device mounting substrate and imaging apparatus
US9872378B2 (en) 2013-04-26 2018-01-16 Kyocera Corporation Electronic element mounting board and electronic device
WO2015020076A1 (en) * 2013-08-09 2015-02-12 旭硝子株式会社 Optical member, method for producing same, and image-capturing device
JPWO2015020076A1 (en) * 2013-08-09 2017-03-02 旭硝子株式会社 Optical member, method for manufacturing the same, and imaging apparatus
JP2018196102A (en) * 2017-05-12 2018-12-06 海華科技股▲分▼有限公司 Portable electronic apparatus, image photographing module, and placing unit

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