JP4594034B2 - 振動型駆動装置、その制御装置及びその制御方法 - Google Patents
振動型駆動装置、その制御装置及びその制御方法 Download PDFInfo
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- JP4594034B2 JP4594034B2 JP2004311078A JP2004311078A JP4594034B2 JP 4594034 B2 JP4594034 B2 JP 4594034B2 JP 2004311078 A JP2004311078 A JP 2004311078A JP 2004311078 A JP2004311078 A JP 2004311078A JP 4594034 B2 JP4594034 B2 JP 4594034B2
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JP2004311078A JP4594034B2 (ja) | 2004-10-26 | 2004-10-26 | 振動型駆動装置、その制御装置及びその制御方法 |
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JP2004311078A JP4594034B2 (ja) | 2004-10-26 | 2004-10-26 | 振動型駆動装置、その制御装置及びその制御方法 |
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JP2006129553A JP2006129553A (ja) | 2006-05-18 |
JP2006129553A5 JP2006129553A5 (enrdf_load_stackoverflow) | 2007-12-06 |
JP4594034B2 true JP4594034B2 (ja) | 2010-12-08 |
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JP2004311078A Expired - Fee Related JP4594034B2 (ja) | 2004-10-26 | 2004-10-26 | 振動型駆動装置、その制御装置及びその制御方法 |
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JP (1) | JP4594034B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5343322B2 (ja) * | 2007-03-30 | 2013-11-13 | 株式会社ニコン | 振動アクチュエータの駆動装置、レンズ鏡筒及びカメラ |
KR100954529B1 (ko) * | 2007-11-27 | 2010-04-23 | 한국과학기술연구원 | 원환형 압전 초음파 공진기 및 그를 이용한 압전 초음파회전모터 |
CN104467519A (zh) * | 2014-12-09 | 2015-03-25 | 苏州科技学院 | 一种单电信号激励超声椭圆振动多振子双向物料输送装置 |
JP6819010B2 (ja) * | 2019-03-27 | 2021-01-27 | シンフォニアテクノロジー株式会社 | ワーク搬送装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4672828B2 (ja) * | 2000-03-31 | 2011-04-20 | セイコーインスツル株式会社 | 超音波モータ、及び超音波モータ付電子機器 |
JP4731737B2 (ja) * | 2001-06-12 | 2011-07-27 | キヤノン株式会社 | 振動波モータ |
JP4046966B2 (ja) * | 2001-10-09 | 2008-02-13 | キヤノン株式会社 | 振動波駆動装置 |
JP2003134856A (ja) * | 2001-10-29 | 2003-05-09 | Canon Inc | 振動波アクチュエータ駆動制御装置 |
JP2004088815A (ja) * | 2002-08-22 | 2004-03-18 | Taiheiyo Cement Corp | 超音波モータの駆動方法および超音波モータ装置 |
JP2004222453A (ja) * | 2003-01-16 | 2004-08-05 | Minolta Co Ltd | アクチュエータ |
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JP2006129553A (ja) | 2006-05-18 |
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