JP4594034B2 - Vibration type driving device, its control device and its control method - Google Patents

Description

The present invention, the vibration type driving apparatus, a control how the controller and its, in particular, at least a portion forming an electrical vibrating body - applying an alternating voltage of a resonance frequency near the mechanical energy conversion means vibration member Then, the vibration body is excited in a predetermined vibration mode, and the moving body that contacts the vibration body is relatively moved, the vibration-type drive apparatus control device, and the control applied to the vibration-type drive apparatus about the mETHODS.

  In general, the vibration type driving device is configured to move the moving body by a force of vibration of about several microns excited on the elastic body. By selectively extracting the direction of the force acting on the contact portion between the elastic body and the moving body, the moving body can be moved efficiently.

  Several methods have been proposed for the vibration-type driving device, but it is roughly classified into a standing wave type and a traveling wave type depending on the form of vibration. The standing wave type has the advantage of a high degree of freedom in the shape of the vibration type driving device and is easy to downsize. The traveling wave type is always in contact with the elastic body and the moving body, so it is relatively easy to obtain high torque. There are advantages.

  In a traveling wave type vibration type driving device, an annular or disk type elastic body is generally used, and the mass point of the wave front of the vibration wave moves in an elliptical locus due to bending vibration that travels along the circumference. Is used to extract a part of the motion of the elliptical locus and drive the moving body. The driving force is characterized in that torque proportional to the friction coefficient of the contact portion and the applied pressure of the contact portion is obtained, and motor performance with low speed and high torque is obtained.

Conventionally, a vibration type driving device using progressive vibration waves in a plurality of vibration modes has been proposed (for example, see Patent Document 1). In such a vibration-type drive device, an annular elastic body has a progressive vibration wave caused by bending vibration in an out-of-plane direction (rotational axis direction of the elastic body) and an in-plane direction (rotation with the rotational axis of the elastic body as a normal line). A traveling vibration wave caused by bending vibration in the in-plane direction) is selectively formed, so that the moving body in contact with the elastic body can be driven stably over a wide speed range.
Japanese Patent Laid-Open No. 03-135382

  However, the conventional traveling wave type vibration type driving device can transmit only the force due to the motion above the elliptical locus of the mass point to the moving body when the vibration amplitude of the elastic body is large. If the vibration amplitude of the elastic body is reduced in order to drive the motor at a low speed, the elliptical locus becomes smaller and the moving body comes into contact with the lower side of the elliptical locus. Then, since the moving body comes into contact with the mass point motion in the direction opposite to the moving direction, there is a problem that the output torque in the low speed region becomes small.

  Further, in the vibration type driving device shown in Patent Document 1, when the vibration mode is switched and continuous control is performed in a wide speed range from low speed to high speed, the speed becomes unstable at the time of switching. There was a problem.

The present invention has been made in view of such problems, and it is possible to prevent a decrease in output torque in a low speed region and to perform a stable control in a wide speed region from a low speed to a high speed. , and to provide a control how the control device and its.

In order to achieve the above object, the vibration-type driving device of the present invention includes a first progressive vibration wave and a second progressive vibration wave having a vibration amplitude direction different from that of the first progressive vibration wave. , And a moving body that contacts the vibrating body, and the vibration wave obtained by combining the first progressive vibration wave and the second progressive vibration wave is the vibration body. The moving body is caused to move relative to the vibrating body by being generated .

In order to achieve the above object, a control device for a vibration-type drive device according to the present invention includes a vibrating body provided with a piezoelectric element, wherein a first progressive vibration wave and the first progressive vibration wave have vibration amplitudes. And a second traveling vibration wave having a different direction, whereby a moving body in contact with the vibrating body is moved relative to the vibrating body. It has a supply means for supplying the piezoelectric element with an AC voltage that generates a vibration wave in which the one traveling vibration wave and the second traveling vibration wave are combined in the vibration body .

In order to achieve the above object, according to the control method of the vibration type driving device of the present invention , the first traveling vibration wave and the first traveling vibration wave are vibration amplitudes on a vibrating body including a piezoelectric element. And a second traveling vibration wave having a different direction, whereby a moving body in contact with the vibrating body is moved relative to the vibrating body. A vibration wave in which one progressive vibration wave and the second progressive vibration wave are combined is generated in the vibrating body .

  ADVANTAGE OF THE INVENTION According to this invention, while stopping the output torque at the time of driving a moving body at low speed, it becomes possible to drive a moving body stably in the wide speed area | region from low speed to high speed.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

[First Embodiment]
FIG. 1 is a side sectional view showing a configuration of a vibration type driving apparatus according to a first embodiment of the present invention.

  In FIG. 1, 1 is an annular elastic body, 2 is a piezoelectric element that is bonded to the elastic body 1 and vibrates the elastic body 1 by applying an AC voltage, and 3 is an elastic body. Reference numeral 1 denotes a friction member that is in pressure contact, and reference numeral 4 denotes a rotor (moving body) to which the friction member 3 is bonded and for taking out rotational output to the outside.

  FIG. 2 is a plan view showing the electrodes formed on the piezoelectric element 2 and the polarity of polarization at the electrodes.

  In FIG. 2, the electrodes formed on the piezoelectric element 2 are divided into an inner peripheral side and an outer peripheral side, and four electrodes on the same circumference (the outer circumferences are 2-a, 2-b, 2-c, 2 -D, the inner circumference is 2-e, 2-f, 2-g, 2-h), which is an electrode for one wavelength of the vibration wave, and is composed of 20 electrodes for five wavelengths. In addition, each electrode is connected every other along the circumference on the same circumference, and two groups of AC drive voltages Va, Vb, Vc, Vd is applied respectively.

  Here, in the elastic body 1, the resonance frequency in the fifth-order vibration mode in the plane (the direction in the rotation plane with the rotation axis of the elastic body as the normal) and the fifth order in the out-of-plane (rotation axis direction of the elastic body). The resonance frequency in the vibration mode is set to substantially the same frequency when the rotor 4 is in pressure contact with the elastic body 1. When the voltage applied between the inner and outer electrodes of the piezoelectric element 2 is in phase, the elastic body 1 can generate out-of-plane bending vibration, and the voltage applied between the inner and outer electrodes of the piezoelectric element 2 is in reverse phase. Then, in-plane bending vibration can be generated in the elastic body 1. Further, when an alternating voltage having a phase shift of 90 ° is applied between the two-phase electrodes on the inner and outer circumferences, an in-plane or out-of-plane progressive vibration wave can be generated in the elastic body 1. In addition, when an AC voltage is applied only to the inner periphery or only to the outer periphery, in-plane vibration and out-of-plane vibration can be generated simultaneously.

  In the first embodiment, the drive voltage Va and the drive voltage Vc are in phase, the drive voltage Vb and the drive voltage Vd are in phase, and the phase difference between the drive voltage Va and the drive voltage Vb is 90 °. In addition, the phase difference between the driving voltage Vc and the driving voltage Vd is set to 90 ° to generate in-plane and out-of-plane progressive vibration waves.

  FIG. 3 is a plan view of the elastic body 1 as seen from above.

  The elastic body 1 is provided with a slit structure 1-a on the outer periphery, and the slit structure 1-a has an elastic body out of the amplitude in the elliptical vibration formed when in-plane bending vibration occurs. There is an effect of expanding the amplitude of the circumferential component of 1. The rotor 4 is configured to be in contact with the slit structure portion 1-a through the friction member 3.

  In the first embodiment, the rotational direction of the rotor 4 is controlled by changing the phase of the progressive vibration wave caused by the in-plane bending vibration and the progressive vibration wave caused by the out-of-plane bending vibration in the configuration as described above. I have to. This will be described below.

  4 and 5 are diagrams illustrating the relationship between the phase relationship between the in-plane and out-of-plane progressive vibration waves generated in the first embodiment and the rotation direction of the rotor 4.

  4 and 5, the outer graph shows the waveform of the in-plane fifth-order progressive vibration wave, and the amplitude of the outer portion of the elastic body 1 on the outer side (outer side) with respect to the neutral line indicated by the dotted line. The inside portion of the neutral line represents the amplitude of the inner side (inner peripheral side) of the elastic body 1. On the other hand, the inner peripheral side graph shows the waveform of the out-of-plane fifth-order progressive vibration wave, and the outer portion represents the amplitude of the elastic body 1 on the upper side (the rotor 4 side) with respect to the neutral line indicated by the dotted line. The inner part of the neutral line represents the amplitude of the lower side of the elastic body 1 (the piezoelectric element 2 side). In addition, the in-plane and out-of-plane traveling vibration waves move along the circumference of the elastic body 1 in the counterclockwise direction. Here, the rotation direction of the rotor 4 is reversed between FIG. 4 and FIG. This can be generated by making the phase of the in-plane progressive vibration wave different from the phase of the out-of-plane progressive vibration wave, which will be described below with reference to FIGS. Detailed description.

  The rotational direction of the rotor 4 is determined by the direction of vibration obtained by combining the circumferential components of the in-plane and out-of-plane elliptical vibrations at the position where the out-of-plane vibration is in contact with the rotor 4 via the friction member 3. It is. 4 and 5, it can be seen that the circumferential component of the out-of-plane elliptical vibration is small. This is because the out-of-plane elliptical vibration occurs at the neutral plane of the out-of-plane bending vibration. Because it is close.

  Thus, since the circumferential component of the out-of-plane elliptical vibration is small, the circumferential component of the in-plane elliptical vibration at the position where the out-of-plane bending vibration is in contact with the rotor 4 via the friction member 3 is the rotor 4. The direction of rotation is almost determined. Therefore, in FIG. 4, when the out-of-plane bending vibration is generated on the upper side of the elastic body 1 in contact with the rotor 4 via the friction member 3, the in-plane bending vibration is generated on the outer side of the elastic body 1. Then, the rotor 4 rotates in the direction opposite to the traveling direction of the progressive vibration wave. On the other hand, in FIG. 5, when the out-of-plane bending vibration is generated on the upper side of the elastic body 1 in contact with the rotor 4 via the friction member 3, the in-plane bending vibration is generated on the inner side of the elastic body 1. The rotor 4 rotates in the same direction as the traveling direction of the progressive vibration wave.

  In the first embodiment, the rotational direction of the rotor 4 is switched by changing the phase of the in-plane progressive vibration wave while generating the out-of-plane progressive vibration wave. Accordingly, the rotation direction of the rotor 4 can be switched by changing the phase between the respective progressive vibration waves without switching the rotation direction of each of the progressive vibration waves. Further, the rotation direction of the rotor 4 can be switched at high speed without almost disturbing the waveform of the progressive vibration wave.

  In the first embodiment, out-of-plane bending vibration having a predetermined amplitude or more is always generated. As a result, a dead zone in a region where the amplitude of vibration is small (a region where a phenomenon in which the rotor 4 does not rotate unless the amplitude is greater than a predetermined amplitude) is reduced. Therefore, by changing the amplitude of the in-plane bending vibration, the rotational speed of the rotor 4 can be controlled stably, and in particular, it can be driven stably from a very low speed with a high torque.

[Second Embodiment]
Next, a second embodiment of the present invention will be described.

  FIG. 6 is a side sectional view showing the configuration of the vibration type driving apparatus according to the second embodiment.

  In FIG. 6, reference numeral 5 denotes a piezoelectric element, and reference numeral 6 denotes an elastic body. The elastic body 6 includes an elastic body 6-a and an elastic body 6-b, and the piezoelectric element 5 includes the elastic body 6-a and the elastic body 6. -B is sandwiched from above and below. Reference numeral 7 denotes a rotor, which is composed of a rotor 7-a and a rotor 7-b. The rotor 7-a and the rotor 7-b are pressurized so as to sandwich the elastic body 6 by a pressing means (not shown), Thereby, the rotor 7 rotates according to the vibration excited by the elastic body 6. Reference numeral 8 denotes a fixing member, which includes a fixing member 8-a and a fixing member 8-b. The elastic body 6-a and the elastic body 6-b are sandwiched from above and below at the rotation center of the elastic body 6. Reference numeral 9 denotes a rotation shaft fixed to the rotation center of the rotor 7.

  The vibration body comprising the piezoelectric element 5, the elastic body 6, and the fixing member 8 in the vibration type driving device shown in FIG. 6 will be described in detail with reference to FIGS. 9 and 10. The inner secondary bending vibration is generated at the same time, whereby the rotation direction and the rotation speed of the rotor 7 are controlled. First, the out-of-plane falling vibration and the in-plane secondary bending vibration will be described.

  7 and 8 are diagrams showing the out-of-plane torsional vibration and the in-plane secondary bending vibration that are excited by the vibrating body including the piezoelectric element 5, the elastic body 6, and the fixing member 8, and FIGS. Then, the rotational direction of the rotor 7 is reversed due to the phase difference of the in-plane secondary bending vibration. 7 and 8, (A) shows the out-of-plane falling vibration, (B) shows the in-plane secondary bending vibration, and the state in which the vibration changes with time according to the arrow from top to bottom. .

  First, with reference to FIG. 7, a description will be given of a change in vibration of a vibrating body including the piezoelectric element 5, the elastic body 6, and the fixing member 8.

  The out-of-plane falling vibration is a vibration in which the vibrating body originally located on the same plane is inclined with respect to a plane whose normal is the central axis of the rotation shaft 9. FIG. 7A is a view of the vibrating body viewed from a direction perpendicular to the central axis of the rotating shaft 9, and the hatching shown in FIG. 7A shows the back surface of the vibrating body, and the vibrating body collapses. The direction (inclination direction) shows a state of rotating around the rotation center axis.

  In-plane secondary bending vibration is vibration in which the outer annular portion of the vibrating body vibrates in the in-plane secondary bending mode. FIG. 7B is a view of the vibration waveform of the vibrating body from the direction of the central axis of the rotation shaft 9, and the vibration waveform rotates around the rotation central axis in the same direction as the out-of-plane falling vibration. Yes. As will be described later, since the frequency of the in-plane secondary bending vibration is set to twice the frequency of the out-of-plane falling vibration, the vibration waveform of the in-plane secondary bending vibration is the rotation axis of the out-of-plane falling vibration. The vibration waveform is the same every time halfway around the center.

  The out-of-plane falling vibration and the in-plane secondary bending vibration are simultaneously excited by the vibrating body. At that time, in the contact portion between the elastic body 6 and the rotor 7, the component caused by the out-of-plane falling vibration is mostly a component pushed up and down, so the rotor 7 hardly rotates, but the component caused by the in-plane secondary bending vibration. 7B is an elliptical vibration that rotates in the direction opposite to the traveling direction of the in-plane secondary bending vibration, as shown in FIG. 7B, and the vibration of the elliptical vibration that comes into contact at the timing when the out-of-plane falling vibration pushes up the rotor 7. The rotor 7 rotates in the direction. Therefore, the rotor 7 rotates in the direction opposite to the rotation direction of the in-plane secondary bending vibration.

  Further, as shown in the configuration diagram of FIG. 6, the rotor 7 is configured to be sandwiched from above and below the vibrating body including the piezoelectric element 5, the elastic body 6, and the fixing member 8. However, the rotor 7 does not rotate unless it contacts the elliptical vibration in the same direction of the vibrating body, but in the case of in-plane secondary bending vibration, the elliptical vibrations on both sides across the rotation center axis of the vibrating body to be pushed up are As described above, the rotation direction is the same for setting the frequency twice, and these elliptical vibrations contact the rotor 7-a and the rotor 7-b at the same timing, so the rotor 7 rotates.

  FIG. 8 shows vibration when the rotor 7 rotates in the direction opposite to that in FIG. FIG. 8 is the same as the display form of FIG. 7, but the phase of the in-plane secondary bending vibration with respect to the out-of-plane falling vibration is different from that of FIG. However, the rotation direction of the out-of-plane falling vibration and the rotation direction of the in-plane secondary bending vibration are the same as those in FIG.

  In FIG. 7, the longitudinal vibration of the in-plane secondary bending vibration is generated at the contact portion between the elastic body 6 and the rotor 7 when the elastic body 6 contacts the rotor 7, that is, when the out-of-plane falling vibration pushes up the rotor 7. The elastic body 6 and the rotor 7 are in contact with each other at the timing when the contact portion between the elastic body 6 and the rotor 7 moves in the direction opposite to the traveling direction of the in-plane secondary bending vibration, and the rotor 7 is in-plane 2 It rotates in the direction opposite to the traveling direction of the next bending vibration. On the other hand, in FIG. 8, at the timing when the elastic body 6 comes into contact with the rotor 7, vibration in the minor axis direction of the in-plane secondary bending vibration is generated at the contact portion between the elastic body 6 and the rotor 7. The elastic body 6 and the rotor 7 are in contact with each other at the timing when the contact portion of the rotor 7 moves in the traveling direction of the in-plane secondary bending vibration, and the rotor 7 rotates in the traveling direction of the in-plane secondary bending vibration. .

  Next, how the out-of-plane falling vibration and the in-plane secondary bending vibration are excited in the vibrating body will be described with reference to FIGS. 9 and 10.

  FIG. 9 is a side sectional view showing a vibrating body including the piezoelectric element 5, the elastic body 6, and the fixing member 8 excluding the rotor 7 and the rotating shaft 9 shown in FIG. 6, and shows the internal configuration of the piezoelectric element 5. FIG.

  The piezoelectric element 5 includes piezoelectric elements 5-a, 5-b, 5-c, and 5-d divided into four sections. As will be described later with reference to FIG. 10, the piezoelectric element 5 is also divided in the rotation direction. Each of the piezoelectric elements 5-a, 5-b, 5-c, and 5-d is configured to expand and contract independently, and is polarized in the vertical direction (rotational axis direction).

  Here, an in-phase AC voltage is applied to the piezoelectric elements 5-a and 5-d, and an in-phase AC voltage is also applied to the piezoelectric elements 5-b and 5-c. A negative phase AC voltage is applied between -a and the piezoelectric element 5-b, and a negative phase AC voltage is also applied between the piezoelectric element 5-c and the piezoelectric element 5-d. As a result, an out-of-plane falling vibration is generated in which the vibrating body swings clockwise or counterclockwise on the paper surface of FIG.

  A similar piezoelectric element section is also provided in a direction rotated 90 ° with respect to the rotation center axis, that is, in a direction orthogonal to the paper surface of FIG. 9, and an AC voltage 90 ° out of phase with the AC voltage is applied. To. Accordingly, as shown in FIGS. 7A and 8A, the out-of-plane falling vibration rotates around the rotation axis.

  FIG. 10 is a plan view of the piezoelectric element 5 as viewed from the rotation axis direction.

  Eight electrode sections 5-e to 5-l are provided on the circumference of the piezoelectric element 5. A voltage that simultaneously excites both the in-plane secondary bending vibration and the out-of-plane falling vibration is applied to the electrode sections 5-e to 5-l of the piezoelectric element 5, but first, the in-plane secondary bending vibration is applied. A voltage for excitation will be described.

  The natural frequency of the in-plane secondary bending vibration mode is set to twice the natural frequency of the out-of-plane falling vibration. In the in-plane secondary bending vibration mode, since two in-plane bending vibrations are formed on the circumference of the elastic body 6, one wavelength of the in-plane bending vibration occupies four electrode sections. That is, each of the electrode sections 5-e to 5-l occupies a quarter wavelength. Therefore, if an alternating voltage whose phase is shifted by 90 ° is applied to each of the electrode sections 5-e to 5-l, in-plane secondary bending vibrations are out of plane about the rotation center axis of FIG. It rotates in the same direction as the falling vibration.

  Here, in order to excite the out-of-plane torsional vibration and the in-plane secondary bending vibration at the same time, the AC voltage having the frequency of the out-of-plane falling vibration and the frequency of the in-plane secondary bending vibration that is twice the frequency are set. It is necessary to apply an AC voltage obtained by synthesizing the AC voltage to the electrode sections 5-e to 5-l in FIG. Further, in order to determine the rotation direction of the rotor 7, it is necessary to set the phase difference between the out-of-plane falling vibration and the in-plane secondary bending vibration to a predetermined phase. Further, it is necessary to apply an AC voltage whose phase is shifted by a predetermined amount to each of the electrode sections 5-e to 5-l.

  In the above description with reference to FIG. 9, it is assumed that an AC voltage having a phase difference of 90 ° is applied, and this is sufficient to rotate the out-of-plane tilting vibration. Since eight sections are provided along the circumference, an alternating voltage whose phase is shifted by 45 ° is applied in order to rotate the out-of-plane falling vibration.

  11 and 12 are diagrams showing AC voltage waveforms V1 to V8 to be applied to the electrode sections 5-e to 5-l of the piezoelectric element 5, respectively. 11 and 12 show a case where the rotation direction of the rotor 7 is opposite.

  11 and 12, each waveform is an AC waveform having a frequency for generating an out-of-plane falling vibration, which is a fundamental wave, and an in-plane secondary bending vibration having a frequency twice that of the fundamental wave. This is a composite of an AC waveform having a frequency for the purpose.

  In the description of the out-of-plane falling vibration with reference to FIG. 9, the piezoelectric element 5 is divided into two sections, ie, the piezoelectric element 5-a, 5-b, 5-c, and 5-d. In other words, an in-phase AC voltage is applied to the piezoelectric elements 5-a and 5-d, and an in-phase AC voltage is applied to the piezoelectric elements 5-b and 5-c, while the piezoelectric elements 5-a and 5 are applied. It has been described that a negative phase AC voltage is applied to -b and a negative phase AC voltage is applied to the piezoelectric elements 5-c and 5-d. However, in reality, each of the piezoelectric element 5 divided into two in the thickness direction is divided into eight electrode sections in the circumferential direction as shown in FIG. 10, so that the piezoelectric element 5 is divided into 16 regions. The Then, the AC voltage applied to each of the upper and lower regions divided into two in the thickness direction of the piezoelectric element 5 is symmetric with respect to the rotation axis by 180 ° so that the wiring in the piezoelectric element 5 is Made.

  FIG. 11 shows an example of an applied voltage waveform for generating the vibration state shown in FIG. 7. A broken line superimposed on the AC voltage waveform V1 (solid line) represents an out-of-plane falling vibration, and an alternate long and short dash line is In-plane secondary bending vibration having a frequency twice that of out-of-plane falling vibration is shown.

  As shown in FIG. 7, the phase of the out-of-plane falling vibration that pushes up the rotor 7 (the peak of the out-of-plane falling vibration) and the phase of the long diameter portion of the in-plane secondary bending vibration (the peak of the in-plane secondary bending vibration) coincide Therefore, it is necessary to set the phase of the second harmonic component of the AC voltages V1 to V8. Therefore, assuming that the out-of-plane torsional vibration and the in-plane secondary bending vibration are oscillating at the respective resonance frequencies, the phase lag of the vibration with respect to the applied voltage is 90 °. Therefore, in the AC voltage waveforms V1 to V8, The phase difference between the wave component and the out-of-plane falling vibration is set to 90 °, and the phase difference between the second harmonic component of the fundamental wave and the in-plane secondary bending vibration is set to 90 °. As can be seen from the figure, the frequency of the torsional vibration and the in-plane secondary bending vibration are different, so even if the phase difference is the same as 90 °, the time delay is different, so the waveform of the applied voltage is simply a synthesized vibration waveform. Have different waveforms.

  FIG. 12 shows an example of an applied voltage waveform for generating the vibration state shown in FIG. 8, and the display form is the same as FIG. The difference from FIG. 11 is that the second harmonic in FIG. 12 is in opposite phase to the second harmonic in FIG. That is, as shown in FIG. 8, the phase of the out-of-plane falling vibration pushes up the rotor 7 (the peak of the out-of-plane falling vibration) and the phase of the short-diameter portion of the in-plane secondary bending vibration (the valley of the in-plane secondary bending vibration). Are matched, the phase of the second harmonic component is set in the AC voltage waveforms V1 to V8 shown in FIG.

  Here, the in-plane secondary bending mode is used as the vibration in the in-plane direction. However, as long as it is an even-order bending mode, the present embodiment can be applied to in-plane bending modes of other orders. In the configuration in which the elastic body 6 is sandwiched by the rotor 7 from above and below, it is possible to apply a driving force from the elastic body 6 to the upper and lower rotors 7. However, in that case, it is necessary to superimpose a harmonic component having a frequency that is a multiple according to the order (four times the frequency if the fourth order) on the applied voltage. When the in-plane bending mode is an odd-order bending mode of the third or higher order, one of the upper and lower rotors 7-a and 7-b of the rotor 7 is deleted, and the elastic body 6 starts from one surface. It is necessary to have a configuration that only obtains driving force. In this case as well, it is necessary to apply a harmonic component having a frequency that is a multiple according to the order (a frequency that is three times higher if the third order), as in the even order.

  Further, a vibration mode that swings in the plane may be used as the lowest order of the in-plane vibration. In that case, since it has the same frequency as the out-of-plane falling vibration, it cannot be driven by superimposing a drive signal on the same piezoelectric element. Therefore, it is necessary to drive with a dedicated piezoelectric element for generating in-plane vibration (for example, a piezoelectric element polarized in the in-plane direction or a piezoelectric element that undergoes shear deformation).

[Third Embodiment]
Next, a third embodiment of the present invention will be described.

  The third embodiment relates to a drive control apparatus for driving a vibration type drive apparatus having the same configuration as the vibration type drive apparatus according to the first embodiment shown in FIG.

  FIG. 13 is a block diagram illustrating the configuration of the drive control device of the vibration type drive device according to the third embodiment.

  In FIG. 13, reference numeral 10 denotes a vibration type driving apparatus having the same configuration as that of the vibration type driving apparatus according to the first embodiment shown in FIG. 1, and driving voltages Va, Vb, Vc, Vd as shown in FIG. Is applied. In the following description, the configuration of the vibration type driving device according to the first embodiment will be used.

  Reference numeral 11 denotes a CPU which controls the speed of the vibration type driving device 10 in accordance with a speed command from a command means (not shown). A drive voltage generation unit 12 outputs a four-phase AC voltage signal for driving the vibration type drive device 10 in accordance with the frequency command, the amplitude command 1 and the amplitude command 2 from the CPU 11. Reference numeral 13 denotes an inductor circuit, which is used for matching with the braking capacity of the piezoelectric element of the vibration-type driving device 10. The four-phase AC voltage signal from the driving voltage generation unit 12 is passed through an inductor corresponding to each phase. And output as drive voltages Va, Vb, Vc, Vd. Reference numeral 14 denotes a rotary encoder for detecting the rotation of the rotor 4 of the vibration type driving device 10, and reference numeral 15 denotes a counter for detecting the rotation angle by counting the two-phase output signals PA and PB of the rotary encoder 14. It is.

  FIG. 14 is a timing chart showing drive voltages Va, Vb, Vc, Vd at the time of startup acceleration of the vibration type drive device 10, output signals PA, PB of the rotary encoder 14, and output signals of the counter 15. FIG. 15 is a flowchart showing a procedure of start acceleration control performed by the CPU 11 on the vibration type drive device 10 during start-up acceleration of the vibration type drive device 10.

  Hereinafter, the operation of the drive control apparatus of the vibration type drive apparatus shown in FIG. 13 will be described with reference to FIGS.

  The drive voltages Va, Vb, Vc, and Vd are four-phase drive voltages applied to the vibration type drive device 10, and the output signals PA and PB change in frequency according to the rotational speed of the vibration type drive device 10. This is a pulse signal with a 90 ° phase shift, and the phase is inverted when the rotation direction is switched. The counter 15 counts this pulse signal and outputs a signal representing the rotational position of the vibration type driving device 10 to the CPU 11.

  As described in the first embodiment, the rotation type and the rotation speed of the vibration type driving device 10 are controlled by the amplitude of the in-plane bending vibration and the phase difference between the out-of-plane bending vibration and the in-plane bending vibration. It is comprised so that. When a rotation speed command is input to the CPU 11 from a command means (not shown) when the vibration type driving device 10 is stopped, the CPU 11 commands a frequency command signal for commanding a predetermined frequency F1 and an amplitude of 0 respectively. The amplitude command 1 signal and the amplitude command 2 signal are output to the drive voltage generator 12 (step S1 in FIG. 15). In response to this, the drive voltage generator 12 generates a two-phase AC voltage signal corresponding to the drive voltages Va and Vb having the frequency commanded by the frequency command signal and having the amplitude commanded by the amplitude command 1 signal. 13 and outputs to the inductor circuit 13 a two-phase AC voltage signal corresponding to the drive voltages Vc and Vd having the frequency commanded by the frequency command signal and having the amplitude commanded by the amplitude command 2 signal.

  Then, the CPU 11 gradually increases each amplitude commanded by the amplitude command 1 signal and the amplitude command 2 signal in the same manner (step S2), and each amplitude commanded by the amplitude command 1 signal and the amplitude command 2 signal is a predetermined amplitude. The voltage is increased until it reaches Vo (NO in step S3). When each amplitude reaches the predetermined amplitude Vo (YES in step S3), the process proceeds to step S4. In the process of increasing each amplitude to the predetermined amplitude Vo, as shown in FIG. 14, the amplitudes of the drive voltages Va, Vb, Vc, and Vd are increased to the predetermined amplitude Vo, and only the out-of-plane bending vibration is applied to the elastic body 1. appear. In elliptical vibration due to out-of-plane bending vibration, the rotor 4 hardly rotates because the vibration amplitude component in the rotation direction of the rotor 4 is smaller than the vibration amplitude component orthogonal to the rotation direction (for example, 1/10 or less).

  Next, in order to accelerate the rotation of the rotor 4 at the timing T1 (FIG. 14) at which each amplitude commanded by the amplitude command 1 signal and the amplitude command 2 signal becomes the predetermined amplitude Vo, the amplitude of the in-plane bending vibration Will gradually increase. In this method, the amplitudes of the drive voltages Va and Vb are increased by the amplitude command 1 signal, while the amplitudes of the drive voltages Vc and Vd are decreased by the amplitude command 2 signal (step S4, FIG. 14). Since the amplitude of the in-plane bending vibration is excited according to the difference between the drive voltages Va and Vb and the drive voltages Vc and Vd, the amplitude increases accordingly. Even when the rotation of the rotor 4 is being accelerated, the current speed calculated from the change in the rotational position information of the rotor 4 obtained from the output signal of the counter 15 is commanded by a rotational speed command from a command means (not shown). If this speed is exceeded (YES in step S5), the activation acceleration control is terminated.

  Then, when the amplitudes of the drive voltages Va and Vb commanded by the amplitude command 1 signal reach a predetermined maximum amplitude Vmax (YES in step S6, timing T2 in FIG. 14), the drive voltages Va and V The increase in the amplitude of Vb is stopped.

  Further, in order to continue the acceleration of the rotation of the rotor 4, each amplitude of the drive voltages Vc and Vd commanded by the amplitude command 2 signal is decreased (step S7, FIG. 14), and the amplitude commanded by the amplitude command 2 signal is 0. When the amplitudes of the drive voltages Vc and Vd become 0 (timing T3 in FIG. 14), in order to continue acceleration, the amplitude commanded by the amplitude command 2 signal is set to a negative value, whereby the drive voltages Vc and Vd And the amplitude of the drive voltages Vc and Vd commanded by the amplitude command 2 signal is decreased to a predetermined value Vmin (NO in step S9). If the current speed of the rotor 4 exceeds the speed commanded by the rotation speed command from the command means (not shown) during the rotation acceleration of the rotor 4 (YES in step S8), the start acceleration control is finished. To do. Further, as can be seen from FIG. 14, even when the phases of the drive voltages Vc and Vd are inverted in order to continue acceleration, the phase difference between the drive voltage Vc and the drive voltage Vd does not change.

  In this way, at the time of start-up acceleration, first, the amplitude of the out-of-plane bending vibration that is the vibration in the pressurizing direction to the elastic body 1 of the rotor 4 is set to a predetermined amplitude or more, and the rotor 4 is floated while being almost stopped with a high holding force. Thus, the dead zone is reduced, and the amplitude of the in-plane bending vibration is controlled including the sign, thereby realizing a speed control with a wide dynamic range with little change in torque performance from low speed to high speed.

  FIG. 16 is a timing chart showing drive voltages Va, Vb, Vc, Vd, output signals PA, PB of the rotary encoder 14 and output signals of the counter 15 when the vibration type drive device 10 is decelerated and stopped. FIG. 17 is a flowchart showing a procedure of deceleration stop control performed on the vibration type driving device 10 by the CPU 11 when the vibration type driving device 10 is decelerated and stopped.

  The timing chart shown in FIG. 16 shows exactly the opposite operation to the timing chart during startup acceleration shown in FIG. Here, first, the vibration type driving device 10 rotates at a high speed, the phase difference between the driving voltage Va and the driving voltage Vb and the phase difference between the driving voltage Vc and the driving voltage Vd are both 90 °, and the driving voltage Va It is assumed that the drive voltage Vc, the drive voltage Vb, and the drive voltage Vd are all in phase. However, before the timing T4, since the drive voltage Vc and the drive voltage Vd are both negative values, the drive voltage Va and the drive voltage Vc, and the drive voltage Vb and the drive voltage Vd are both in opposite phases. In this state, the CPU 11 outputs the predetermined frequency F1 as the frequency command signal to the drive voltage generation unit 12, the predetermined maximum amplitude Vmax as the amplitude command 1 signal, and the negative minimum amplitude Vmin as the amplitude command 2 signal. It outputs to the drive voltage generation part 12 (step S11 of FIG. 17).

  In this state, when a deceleration command is input to the CPU 11 from command means (not shown), the CPU 11 gradually increases until the amplitude commanded by the amplitude command 2 signal becomes a positive predetermined amplitude Vp (step S12). , NO in S13). When the amplitude commanded by the amplitude command 2 signal becomes 0 (timing T4 in FIG. 16) and further reaches a positive predetermined amplitude Vp (YES in step S13, timing T5 in FIG. 16), the amplitude commanded by the amplitude command 2 signal While continuing the increase, the amplitude commanded by the amplitude command 1 signal is decreased (step S14).

  As a result, when the amplitude commanded by the amplitude command 1 signal becomes Vo (YES in step S15), the vibration type driving device 10 becomes only out-of-plane bending vibration and almost stops. Finally, the amplitudes commanded by the amplitude command 1 signal and the amplitude command 2 signal are set to the same value and simultaneously decreased (step S16), and this is continued until both commands become 0 (NO in step S17). Finally, the vibration of the elastic body 1 stops (YES in step S17).

  As described above, during start-up acceleration and deceleration stop, in-plane bending vibration control during acceleration / deceleration and out-of-plane bending vibration control during start-up and vibration stop after vibration stop are necessary. It is also possible to continuously control the position without stopping the vibration. For this purpose, it is necessary to perform amplitude control including the sign of the in-plane bending vibration while always generating out-of-plane bending vibration, and to perform speed control including rotation stop and reversing operation of the rotor 4.

  FIG. 18 shows timings indicating drive voltages Va, Vb, Vc, Vd, output signals PA, PB of the rotary encoder 14 and output signals of the counter 15 when the vibration type driving device 10 is continuously decelerated and inverted. It is a chart.

  At timing T7 in FIG. 18, the driving voltage Va and the driving voltage Vc, and the driving voltage Vb and the driving voltage Vd have the same amplitude and the same phase, and the amplitude of the in-plane bending vibration is 0. Therefore, the rotor 4 almost stops. The amplitude difference between the drive voltages Va and Vb and the drive voltages Vc and Vd increases from the timing T7 toward the left and right ends, the rotational speed of the rotor 4 increases, and the amplitude on the right and left sides increases. Since the signs of the differences are different, the rotation direction of the rotor 4 is reversed. The output signal of the counter 15 at timing T7 indicates the state of deceleration stop acceleration.

  In the third embodiment, the rotor 4 is configured to hardly rotate even when the amplitude of the progressive vibration wave caused by the out-of-plane bending vibration is increased. When rotating at a speed, the speed may be controlled around the predetermined speed by the amplitude of the in-plane bending vibration. Here, if it is possible to change the amplitude of the progressive vibration wave caused by the in-plane bending vibration at least within the range in which the rotor 4 is rotated forward and backward, in the case where the speed is always controlled by rotation in the same direction, the low speed is reduced. Control up to high speed. In this case, the rotation direction of the rotor 4 is switched by switching the rotation direction of the progressive vibration wave.

  Further, in the third embodiment, the rotor 4 is almost stopped by the progressive vibration wave caused by the out-of-plane bending vibration, but may actually rotate. In that case, the amplitude of the progressive vibration wave due to the in-plane bending vibration may be controlled so that the rotor 4 stops without setting the amplitude of the in-plane vibration to zero.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described.

  The fourth embodiment relates to a drive control apparatus for driving a vibration type driving apparatus having the same configuration as that of the vibration type driving apparatus according to the second embodiment shown in FIG.

  FIG. 19 is a block diagram illustrating a configuration of a drive control device of the vibration type drive device according to the fourth embodiment. Note that the configuration of the drive control device of the vibration type driving device in the fourth embodiment is basically the same as the configuration of the drive control device of the vibration type driving device in the third embodiment shown in FIG. In the description of the fourth embodiment, only the different parts will be described using the configuration of the third embodiment.

  In FIG. 19, reference numeral 17 denotes a vibration type driving apparatus having the same configuration as that of the vibration type driving apparatus according to the second embodiment shown in FIG. 6, and drive voltages V1 to V8 as shown in FIGS. Applied. In the following description, the configuration of the vibration type driving device according to the second embodiment is used.

  Reference numeral 18 denotes a drive voltage generation unit that outputs an eight-phase AC voltage signal in accordance with the frequency command signal, the amplitude command 1 signal, and the amplitude command 2 signal sent from the CPU 11, and includes a class D amplifier. In addition to setting the amplitude of the wave, the amplitude of the second harmonic having a predetermined phase relationship with the fundamental wave is set by the amplitude command 2 signal, and these are combined to form a PWM signal (pulse width modulation signal) of several hundred kHz An eight-phase AC voltage signal for driving the vibration type driving device 17 is output. Reference numeral 19 denotes an inductor circuit for matching with the braking capacity of the piezoelectric element of the vibration type driving device 17. The inductor circuit 19 receives an eight-phase AC signal sent from the driving voltage generator 18 and corresponds to each phase. The drive voltages V1 to V8 are output via.

  FIG. 20 is a timing chart showing drive voltage waveforms V1 to V8 at the time of starting acceleration of the vibration type drive device 17. FIG. 21 is a flowchart showing a procedure of startup acceleration control performed on the vibration type driving device 17 by the CPU 11 at the time of starting acceleration of the vibration type driving device 17.

  Hereinafter, the operation of the drive control device of the vibration type drive device shown in FIG. 19 will be described with reference to FIGS.

  When a rotational speed command is input to the CPU 11 from a command means (not shown) when the vibration type driving device 17 is stopped, the CPU 11 commands a frequency command signal for commanding a predetermined frequency F1 and an amplitude of 0 respectively. The amplitude command 1 signal and the amplitude command 2 signal are output to the drive voltage generator 18 (step S21 in FIG. 21).

  The CPU 11 gradually increases the amplitude commanded by the amplitude command 1 signal to the predetermined amplitude Vq while keeping the amplitude commanded by the amplitude command 2 signal at 0 (NO in steps S22 and S23). As a result, only out-of-plane falling vibration is generated in the elastic body 1, and the amplitude of the vibration increases. In the elliptical vibration due to the out-of-plane falling vibration, the rotor 7 hardly rotates because the vibration amplitude of the rotational direction component of the rotor 7 is small.

  Next, when the amplitude commanded by the amplitude command 1 signal reaches the predetermined amplitude Vq (YES in step S23, timing T8 in FIG. 20), a command is issued by the amplitude command 1 signal to accelerate the rotation of the rotor 7. The amplitude is fixed at a predetermined amplitude Vq, and the amplitude commanded by the amplitude command 2 signal is increased (step S24). Thereby, the amplitude of the progressive vibration wave due to the in-plane secondary bending vibration gradually increases. FIG. 20 shows how the harmonics increase at the timing T8. When the amplitude commanded by the amplitude command 2 signal reaches the maximum amplitude Vmax (YES in step S26), the increase in the amplitude commanded by the amplitude command 2 is stopped and the acceleration operation is terminated. Even during acceleration, the current speed of the rotor 7 calculated based on the change in the rotational position information of the rotor 7 obtained from the output signal of the counter 15 is commanded by a rotational speed command from a command means (not shown). If this speed is exceeded (YES in step S25), the activation acceleration control is terminated.

  FIG. 22 is a timing chart showing drive voltage waveforms V1 to V8 when the deceleration type inversion acceleration of the vibration type drive device 17 is continuously performed.

  Here, the amplitude commanded by the amplitude command 2 signal is changed from −Vmax to Vmax while the amplitude commanded by the amplitude command 1 signal is kept at the predetermined amplitude Vq, and the sign of the second harmonic of the drive voltage is changed. Thus, the speed of the rotor 7 including the rotational direction is controlled.

[Fifth Embodiment]
Next, a fifth embodiment of the present invention will be described.

  In the first embodiment, the rotor 4 is brought into pressure contact with the elastic body 1 via the friction member 3 from the out-of-plane direction of the elastic body 1 and the rotational speed of the rotor 4 is changed by changing the amplitude of in-plane bending vibration. However, instead of this, the roles of in-plane bending vibration and out-of-plane bending vibration may be interchanged.

  FIG. 23 is a side sectional view showing the configuration of the vibration type driving device in the fifth embodiment, in which the roles in the in-plane bending vibration and the out-of-plane bending vibration in the first embodiment are interchanged.

  In the configuration shown in FIG. 23, the rotor 104 is in pressure contact with the elastic body 101 via the friction member 103 from the in-plane direction toward the center of the elastic body 101. In this case, the elastic body 101 is designed so that the rotor 104 hardly rotates unless an out-of-plane bending vibration is generated even if a progressive vibration wave due to in-plane bending vibration is always generated. Thus, while adjusting the applied voltage to the piezoelectric element 102 so that the traveling direction of the progressive vibration wave due to the in-plane bending vibration and the traveling direction of the progressive vibration wave due to the out-of-plane bending vibration are the same direction, By controlling the amplitude of the progressive vibration wave caused by the external bending vibration including the sign, the rotation speed including the rotation direction of the rotor 104 can be controlled.

  In the above-described vibration type driving device, the case where the phase relationship between the progressive vibration wave caused by the in-plane bending vibration and the progressive vibration wave caused by the out-of-plane bending vibration has been described as being in phase or opposite phase. The phase difference may be 90 °, and this case will be described below.

  FIG. 24 shows the vibration of the progressive vibration wave when the phase difference between the progressive vibration wave of the in-plane bending vibration and the progressive vibration wave of the out-of-plane bending vibration is 90 ° in the vibration type driving device shown in FIG. FIG.

  In the figure, reference numeral 16 denotes an annular elastic body, and the progressive vibration wave in the case where the phase difference is 90 ° proceeds on the circumference of the elastic body 16 so as to draw a spiral. The direction of rotation of the spiral is reversed depending on whether the phase difference is 90 ° or −90 °, and if the moving body is brought into pressure contact with the inner or outer periphery of the elastic body 16, it is orthogonal to the plane of the elastic body 16. Directional driving force can be obtained. That is, by controlling the amplitude and phase difference of the progressive vibration wave caused by the in-plane bending vibration and the out-of-plane bending vibration, it is possible to control the motion of two degrees of freedom, that is, the rotational motion and the linear motion.

[Other Embodiments]
The object of the present invention is to supply a storage medium storing software program codes for realizing the functions of the above-described embodiments to a system or apparatus, and a computer (or CPU, MPU, etc.) of the system or apparatus. Is also achieved by reading and executing the program code stored in the storage medium.

  In this case, the program code itself read from the storage medium realizes the novel function of the present invention, and the storage medium and program storing the program code constitute the present invention.

  The storage medium for supplying the program code is, for example, a flexible disk, hard disk, optical disk, magneto-optical disk, CD-ROM, CD-R, CD-RW, DVD-ROM, DVD-RAM, DVD-RW. DVD + RW, magnetic tape, nonvolatile memory card, ROM, etc. can be used. Alternatively, the program is supplied by downloading from another computer or database connected to the Internet, a commercial network, a local area network, or the like.

  Further, by executing the program code read by the computer, not only the functions of the above-described embodiments are realized, but also an OS (Operating System) running on the computer based on the instruction of the program code. Includes a case where the functions of the above-described embodiments are realized by performing part or all of the actual processing.

  Further, after the program code read from the storage medium is written in a memory provided in a function expansion board inserted into the computer or a function expansion unit connected to the computer, the function expansion is performed based on the instruction of the program code. This includes the case where the CPU or the like provided in the board or the function expansion unit performs part or all of the actual processing, and the functions of the above-described embodiments are realized by the processing.

It is a sectional side view which shows the structure of the vibration type drive device which concerns on the 1st Embodiment of this invention. It is a top view which shows the electrode formed in the piezoelectric element, and the polarity of the polarization in this electrode. It is the top view which looked at the elastic body from the upper surface. It is a figure which shows the relationship between the 1st phase relationship of each in-plane and out-of-plane progressive vibration wave which generate | occur | produces in 1st Embodiment, and the rotation direction of a rotor. It is a figure which shows the relationship between the 2nd phase relationship of each in-plane and out-of-plane progressive vibration wave which generate | occur | produces in 1st Embodiment, and the rotation direction of a rotor. It is a sectional side view which shows the structure of the vibration type drive device which concerns on 2nd Embodiment. It is a figure which shows the out-of-plane fall vibration excited by the vibration body which consists of a piezoelectric element, an elastic body, and a fixing member, and the in-plane secondary bending vibration which has a 1st phase. It is a figure which shows the out-of-plane fall vibration excited by the vibrating body which consists of a piezoelectric element, an elastic body, and a fixing member, and the in-plane secondary bending vibration which has a 2nd phase. FIG. 7 is a side cross-sectional view illustrating a vibrating body including a piezoelectric element, an elastic body, and a fixed member excluding a rotor and a rotating shaft illustrated in FIG. It is the top view which looked at the piezoelectric element from the rotating shaft direction. It is a figure which shows the waveform V1-V8 of the alternating voltage in a 1st phase relationship which should be applied to the electrode division of a piezoelectric element, respectively. It is a figure which shows the waveform V1-V8 of the alternating voltage in a 2nd phase relationship which should be applied to the electrode division of a piezoelectric element, respectively. It is a block diagram which shows the structure of the drive control apparatus of the vibration type drive device in 3rd Embodiment. It is a timing chart which shows drive voltage Va, Vb, Vc, Vd at the time of starting acceleration of a vibration type drive device, output signals PA and PB of a rotary encoder, and an output signal of a counter. It is a flowchart which shows the procedure of starting acceleration control performed with respect to a vibration type drive device by CPU at the time of start-up acceleration of a vibration type drive device. It is a timing chart which shows drive voltage Va, Vb, Vc, Vd at the time of deceleration stop of a vibration type drive device, output signals PA and PB of a rotary encoder, and an output signal of a counter. It is a flowchart which shows the procedure of the deceleration stop control performed with respect to a vibration type drive device by CPU at the time of the deceleration stop of a vibration type drive device. 6 is a timing chart showing drive voltages Va, Vb, Vc, Vd, rotary encoder output signals PA, PB, and a counter output signal when the vibration type drive device is continuously decelerated and inverted. It is a block diagram which shows the structure of the drive control apparatus of the vibration type drive device in 4th Embodiment. It is a timing chart which shows drive voltage waveform V1-V8 at the time of starting acceleration of a vibration type drive device. It is a flowchart which shows the procedure of starting acceleration control performed with respect to a vibration type drive device by CPU at the time of start-up acceleration of a vibration type drive device. It is a timing chart which shows drive voltage waveform V1-V8 at the time of carrying out the deceleration inversion acceleration of a vibration type drive device continuously. The sectional side view which shows the structure of the vibration type drive device in 5th Embodiment which replaced the role in the in-plane bending vibration in 1st Embodiment and an out-of-plane bending vibration is shown. In the vibration type driving device shown in FIG. 23, the state of the vibration of the progressive vibration wave when the phase difference between the progressive vibration wave of the in-plane bending vibration and the progressive vibration wave of the out-of-plane bending vibration is 90 ° is shown. FIG.

Explanation of symbols

1,6 Elastic body 2,5 Piezoelectric element 3 Friction member 4,7 Rotor (moving body)
8 Fixing member (vibrating body)
9 Rotating shaft 10, 17 Vibration type driving device 11 CPU
12, 18 Drive voltage generator 13, 19 Inductor circuit 14 Rotary encoder 15 Counter

Claims (18)

  A vibrator that generates a first progressive vibration wave and a second progressive vibration wave having a vibration amplitude direction different from that of the first progressive vibration wave;
  A moving body that contacts the vibrating body,
  Generating a vibration wave in which the first progressive vibration wave and the second progressive vibration wave are combined in the vibration body, thereby moving the movable body relative to the vibration body. A vibration type driving device. Said first traveling vibration wave and the second hand of the traveling vibration wave of the vibration type driving according to claim 1, characterized in that it comprises a vibration direction pressurizing the vibrating member to the movable body apparatus. By changing the first traveling vibration wave and the second traveling vibration wave in phase, vibratory driving of claim 1 or claim 2, wherein varying the speed of the moving body apparatus. By changing the first traveling vibration wave and the second traveling vibration wave in phase, any of claims 1 to 3, characterized in that changing the direction of relative movement of the moving body or the vibration type driving apparatus according to (1). It includes vibration direction of the first traveling vibration wave is to pressurize the vibrator to the moving body, the second traveling vibration wave includes a vibration direction of the relative movement of the movable body, the first by changing the vibration amplitude of the traveling vibration wave of 2, the vibration type driving apparatus according to any one of claims 1 to 4, characterized in that varying the speed of the moving body. The first in-plane bending vibration at the traveling vibration wave and the second progressive one said vibration member of the vibration wave, the other is characterized in that it is out-of-plane bending vibration claims 1 to vibratory driving device according to any one of claim 5.   The resonance frequency of the vibration mode for exciting the first progressive vibration wave and the resonance frequency of the vibration mode for exciting the second progressive vibration wave are substantially the same frequency. Or the vibration type drive device of 2.   One of the first progressive vibration wave and the second progressive vibration wave is an in-plane bending vibration in the vibrating body, and the other is an out-of-plane falling vibration. 6. The vibration type driving device according to any one of items 5. By generating a first traveling vibration wave and a second traveling vibration wave having a vibration amplitude direction different from that of the first traveling vibration wave in a vibrating body including a piezoelectric element, A control device for a vibration type driving device that moves a moving body that contacts the vibrating body relative to the vibrating body,
It has supply means for supplying the piezoelectric element with an AC voltage that causes the vibrating body to generate a vibration wave in which the first progressive vibration wave and the second progressive vibration wave are combined. Control device for vibration type drive device. Drive that changes at least one of the speed of the moving body and the direction of relative movement by changing the phase difference between the first traveling vibration wave and the second traveling vibration wave by controlling the supply means. The control device for the vibration type driving device according to claim 9 , further comprising a control device. Includes a vibration said first traveling vibration wave in the direction of pressure of the vibrator to the moving body, the second traveling vibration wave includes a vibration direction of the relative movement of the movable body, the supply by varying the amount of vibration amplitude of the second traveling vibration wave by controlling the means to claim 9 or claim 10, characterized in that a drive control device for varying the speed of the moving body The control device of the vibration type driving device described. It said first traveling vibration wave includes a vibration in a direction pressing the vibrating body to the mobile body, said second traveling vibration wave includes a vibration direction of the relative movement of the movable body, wherein the drive The control device causes the supply means to supply an AC voltage that forms the first traveling vibration wave, and then generates an AC voltage that forms the first traveling vibration wave and the second traveling vibration wave. The control device for a vibration type driving device according to claim 10 or 11 , wherein the control device is supplied. It said first traveling vibration wave includes a vibration in a direction pressing the vibrating body to the mobile body, said second traveling vibration wave includes a vibration direction of the relative movement of the movable body, wherein the drive The control device is configured to generate an alternating current that forms the second progressive vibration wave from a state in which the supply means supplies an alternating voltage that forms the first progressive vibration wave and the second progressive vibration wave . 12. The control device for a vibration type driving device according to claim 10 or 11 , wherein the supply of voltage is stopped, and then the supply of an alternating voltage that forms the first progressive vibration wave is stopped. By generating a first traveling vibration wave and a second traveling vibration wave having a vibration amplitude direction different from that of the first traveling vibration wave in a vibrating body including a piezoelectric element, A control method of a vibration type driving device for moving a moving body in contact with a vibrating body relative to the vibrating body,
A control method for a vibration type driving device, wherein a vibration wave in which the first progressive vibration wave and the second progressive vibration wave are combined is generated in the vibrating body . Claim 14, wherein the first varying the phase difference between the traveling vibration wave and the second traveling vibration wave, characterized by varying at least one of direction of the velocity and the relative movement of the movable body A control method of the vibration type driving device described. It includes vibration direction of the first traveling vibration wave is to pressurize the vibrator to the moving body, the second traveling vibration wave includes a vibration direction of the relative movement of the movable body, the first by varying the amount of vibration amplitude of the second traveling vibration wave, a control method of the vibration type driving apparatus according to claim 15, wherein varying the speed of the moving body.   The first progressive vibration wave includes vibration in a direction in which the vibrating body is pressurized to the moving body, and the second progressive vibration wave includes vibration in a relative movement direction of the moving body, and the first 16. An AC voltage for forming a progressive vibration wave is supplied, and thereafter an AC voltage for forming the first progressive vibration wave and the second progressive vibration wave is supplied. The method for controlling the vibration type driving device according to claim 16.   The first progressive vibration wave includes vibration in a direction in which the vibrating body is pressurized to the moving body, and the second progressive vibration wave includes vibration in a relative movement direction of the moving body, and the first From the state in which the AC voltage that forms the second progressive vibration wave and the AC voltage that forms the second progressive vibration wave are stopped, and then the supply of the AC voltage that forms the second progressive vibration wave is stopped. The control method of the vibration type driving device according to claim 15 or 16, wherein the supply of the alternating voltage that forms one progressive vibration wave is stopped.

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