JP4994850B2 - Vibration type actuator drive control device and vibration type actuator drive control method - Google Patents

Description

The present invention, the vibration type actuator related to the driving control device and the vibration type actuator driving control how, in particular, the elastic body and a plurality of vibrating means for vibrating the elastic body phase of different AC voltage is applied, respectively For driving a vibration type actuator comprising: a contact member that is in pressure contact with the elastic body and moves relative to the elastic body by a frictional force generated by vibration excited by the elastic body about the type actuator drive control device and the vibration type actuator driving control how applied to the vibration type actuator drive controller.

  In general, the vibration type actuator is composed of at least a vibrating body made of a piezoelectric body and a moving body pressed against the piezoelectric body, and by a frictional force generated between the moving body by vibration excited by the vibrating body, The vibrating body and the moving body are configured to move relative to each other. Usually, in order to control the position change due to the relative movement, a sensor for position detection such as an optical sensor is separately provided. Then, the position detected by the position detection sensor is compared with the target position, and on / off of vibration excited by the vibrating body is controlled based on the comparison result, thereby performing position control.

Conventionally, a moving body is provided with a magnetic pattern, the rotational position of the moving body is detected using the magnetic pattern, and the moving body is rotated to a target position based on the detected rotational position. There is a control circuit that controls a voltage to be applied (see, for example, Patent Document 1).
JP-A-63-140677

  However, the conventional control circuit described above requires a magnetic sensor for detecting the rotational position of the moving body, and the configuration of the control circuit for performing feedback control so that the position of the moving body reaches the target position is complicated. There was a problem of becoming.

  Also, in this control circuit, each circuit for performing position detection, control calculation, drive frequency and drive voltage control, etc. is connected in sequence, and the processing time in each circuit is accumulated, so that the control response time is long. There was a problem that the control response was slow.

The present invention was made in view of such a problem, a position as unnecessary detection sensor and feedback control circuit, the vibration-type actuator drive control device and the vibration type actuator driving control how tried to simplify the structure The purpose is to provide.

In order to achieve the above object, according to the first aspect of the present invention, an elastic body, a plurality of vibration means for vibrating the elastic body by applying a plurality of alternating voltages having different phases, and the elastic body A vibration type actuator drive control for driving a vibration type actuator having a contact member that is pressed against the elastic body and moves relative to the elastic body by a frictional force generated by vibration excited by the elastic body In the apparatus, a first voltage generating unit that generates a first applied AC voltage having a first phase and applies the first applied AC voltage to the first vibrating unit among the plurality of vibrating units; Second and third applied AC voltages that have a second phase different from the phase and whose amplitude increase / decrease directions change in opposite directions according to a change in the relative positional relationship between the contact member and the elastic body. Generating the plurality of shaking hands Is applied to the second vibration means of, have a second voltage generating means for vibrating the elastic body, the second voltage generating means receives the first and second alternating voltage The amplitudes change in accordance with the amplitudes of the first and second AC voltages, and the increasing / decreasing directions of the amplitudes are opposite to each other in accordance with the change in the relative positional relationship between the contact member and the elastic body. A vibration type actuator drive control device is provided that generates the second and third applied AC voltages that change in direction .
According to the invention of claim 7, the elastic body, a plurality of vibration means that vibrate the elastic body by applying a plurality of alternating voltages having different phases, respectively, and press-contacting the elastic body, In a vibration type actuator drive control device for driving a vibration type actuator having a contact member that moves relative to the elastic body by a frictional force generated by vibration excited by the elastic body, A first voltage generating means for generating a first applied AC voltage having a phase and applying the first applied AC voltage to the first vibrating means among the plurality of vibrating means; and a second voltage different from the first phase. Generating a second and third applied AC voltage in which the amplitude increasing / decreasing direction changes opposite to each other in accordance with a change in the relative positional relationship between the contact member and the elastic body, Second vibration of the plurality of vibration means And a second voltage generating means for applying vibration to the elastic body, and the second voltage generating means includes an AC voltage generating means for generating an AC voltage having a predetermined frequency, and a first voltage generating means. And the third and fourth DC voltages in response to the second input DC voltage or the first and second input AC voltages, respectively, and the third and fourth DC voltages are output from the contact member and the second DC voltage, respectively. DC voltage output means for increasing or decreasing in opposite directions according to a change in relative positional relationship with the elastic body, and an amplitude value of the AC voltage output from the AC voltage generation means is output from the DC voltage output means. And a multiplication means for multiplying each value of the third and fourth DC voltages to generate the second and third applied AC voltages, respectively. Is done.

According to the invention of claim 8 , the elastic body, a plurality of vibration means that vibrate the elastic body by applying a plurality of alternating voltages with different phases, and press contact with the elastic body, In a vibration type actuator drive control device for driving a vibration type actuator having a contact member that moves relative to the elastic body by a frictional force generated by vibration excited by the elastic body, A first voltage generating means for generating a first applied AC voltage having a phase and applying the first applied AC voltage to the first vibrating means among the plurality of vibrating means; and a second voltage different from the first phase. A second applied voltage and a third applied AC voltage in which the amplitude increase / decrease direction changes in reverse with each other in accordance with a change in the relative positional relationship between the contact member and the elastic body, A second of the excitation means of Each applied to 3 of vibrating means, have a second voltage generating means for vibrating the elastic body in opposite phase, the second voltage generating means receives the first and second alternating voltage The amplitudes change in accordance with the amplitudes of the first and second AC voltages, and the increasing / decreasing directions of the amplitudes are opposite to each other in accordance with the change in the relative positional relationship between the contact member and the elastic body. A vibration type actuator drive control device is provided that generates the second and third applied AC voltages that change in direction .

According to the invention of claim 10 , the elastic body, a plurality of vibration means that vibrate the elastic body by applying a plurality of alternating voltages having different phases, and press-contacting the elastic body, In a vibration type actuator drive control device for driving a vibration type actuator having a contact member that moves relative to the elastic body by a frictional force generated by vibration excited by the elastic body, A first voltage generating means for generating a first applied AC voltage having a phase and applying the first applied AC voltage to the first vibrating means among the plurality of vibrating means; and a second voltage different from the first phase. A position-physical quantity conversion means for generating two physical quantities having a phase of ## EQU2 ## and changing the relative positional relationship between the contact member and the elastic body, the magnitude increasing / decreasing directions being opposite to each other; Position-physical quantity conversion means Therefore, a second applied AC voltage having an amplitude corresponding to the difference or sum of the two physical quantities generated is generated, and the second voltage is applied to the second vibrating means among the plurality of vibrating means. And a vibration type actuator drive control device.

According to the invention of claim 13 , the elastic body, a plurality of excitation voltages that respectively apply a plurality of alternating voltages having different phases to vibrate the elastic body, and press contact with the elastic body, In a vibration type actuator drive control method for driving a vibration type actuator having a contact member that moves relative to the elastic body by a frictional force generated by vibration excited by the elastic body, A first voltage generation step of generating a first applied AC voltage having a phase and applying the first applied AC voltage to the first vibration means among the plurality of vibration means, and a second different from the first phase A second applied voltage and a third applied AC voltage, the amplitudes of which increase and decrease in opposite directions according to a change in the relative positional relationship between the contact member and the elastic body, The second of the excitation means Is applied to the actuating mechanism, have a second voltage generating step of vibrating the elastic body, wherein the second voltage generating step, receives the first and second alternating voltage, the first and second Each amplitude changes in accordance with the amplitude of the alternating voltage of the second, and the increase / decrease direction of each amplitude changes in the opposite direction according to the change in the relative positional relationship between the contact member and the elastic body. And a vibration type actuator drive control method characterized by generating a third applied AC voltage .

According to the invention of claim 15 , the elastic body, a plurality of vibration means that vibrate the elastic body by applying a plurality of alternating voltages having different phases, and press-contacting the elastic body, In a vibration type actuator drive control method for driving a vibration type actuator having a contact member that moves relative to the elastic body by a frictional force generated by vibration excited by the elastic body, A first voltage generation step of generating a first applied AC voltage having a phase and applying the first applied AC voltage to the first vibration means among the plurality of vibration means, and a second different from the first phase A second applied voltage and a third applied AC voltage in which the amplitude increase / decrease direction changes in reverse with each other in accordance with a change in the relative positional relationship between the contact member and the elastic body, The second of the excitation means Each applied to the preliminary third vibrator, it has a second voltage generating step of vibrating the elastic body in opposite phases, and in the second voltage generating step, first and second alternating voltage Each amplitude changes according to the amplitude of the first and second AC voltages, and the direction of increase / decrease of each amplitude varies according to the change in the relative positional relationship between the contact member and the elastic body. A vibration type actuator drive control method is provided that generates the second and third applied AC voltages that change in opposite directions .

According to the invention of claim 16 , the elastic body, a plurality of vibration means for vibrating the elastic body by applying a plurality of alternating voltages having different phases, respectively, and press-contacting the elastic body, In a vibration type actuator drive control method for driving a vibration type actuator having a contact member that moves relative to the elastic body by a frictional force generated by vibration excited by the elastic body, A first voltage generation step of generating a first applied AC voltage having a phase and applying the first applied AC voltage to the first vibration means among the plurality of vibration means, and a second different from the first phase A position-physical quantity conversion step that generates two physical quantities having a phase of ## EQU2 ## and in accordance with a change in the relative positional relationship between the contact member and the elastic body, the magnitude increasing / decreasing directions being opposite to each other; Position-physical quantity A second applied AC voltage having an amplitude corresponding to the difference or sum of the two physical quantities generated in the conversion step is generated and applied to the second vibration means among the plurality of vibration means. There is provided a vibration type actuator drive control method characterized by comprising a voltage generation step.

  Furthermore, a program for causing a computer to execute the vibration actuator drive control method is provided.

  According to the present invention, the position deviation can be calculated on the vibrating body of the vibration type actuator, and the position of the contact member can be controlled without a circuit for calculating the position deviation. Therefore, the configuration of the vibration type actuator drive control device can be simplified.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

[First Embodiment]
FIG. 1 is a diagram showing a configuration of a vibration type actuator that is driven and controlled by the vibration type actuator drive control device according to the first embodiment of the present invention. This vibration type actuator is a linear actuator whose movement direction is linear.

  In FIG. 1, 1 is an elastic body, 2, 3, 4 are piezoelectric bodies for exciting vibrations in the elastic body 1, and 5, 6, 7, and 8 are magnetic coils. The magnetic coils 7 and 8 are configured to be movable integrally with a vibrating body including the elastic body 1 and the piezoelectric bodies 2, 3, and 4, and these move relative to the magnetic coils 5 and 6. It is possible.

  Magnetic fluxes generated by applying an alternating voltage to the magnetic coils 5 and 6 and causing an alternating current to flow through the magnetic coils 5 and 6 are detected by the magnetic coils 7 and 8 according to the relative positional relationship between them. 8 generates an AC voltage according to the detected amount of magnetic flux. The AC voltage output from the magnetic coils 7 and 8 is applied to the piezoelectric bodies 1, 2, and 3 by circuits to be described later, thereby exciting the vibration body.

  Reference numeral 9 denotes a flat plate using a nonmagnetic material, and is configured integrally with the magnetic coils 5 and 6. Further, a protrusion extending downward from the elastic body 1 is in pressure contact with the flat plate 9 by a pressing means (not shown), and a frictional force is generated in the contact portion by vibration excited by the elastic body 1. However, the flat plate 9 is relatively moved in the left-right direction of the paper surface of FIG.

  FIG. 2 is a schematic diagram for explaining vibrations excited by the elastic body 1.

  The elastic body 1 is T-shaped, and a piezoelectric body 2 (FIG. 1) is bonded to the upper surface thereof. The piezoelectric body 2 is bent on the upper side of the T-shape in the vertical direction of the paper surface of FIG. It is configured to generate vibration. Further, the piezoelectric body 3 (FIG. 1) and the piezoelectric body 4 (FIG. 1) are bonded to the T-shaped lower protrusion so as to face each other, and the difference in force generated by the piezoelectric body 3 and the piezoelectric body 4 is different. However, the projection is configured to generate bending vibration. With this configuration, the elastic body 1 can form independent bending vibrations on the T-shaped upper side and the lower protrusion.

  2A to 2D show temporal changes in the shape of the elastic body 1 in this order. As shown in FIG. 2, by shifting the phase of the vibration of the upper side of the T-shaped (longitudinal vibration) and the vibration of the lower protrusion (lateral vibration), vibration that draws an elliptical locus at the tip of the lower protrusion is generated. .

  Here, the rigidity of the flat plate 9 is designed to be moderately hard so that the flat plate 9 (FIG. 1) and the elastic body 1 are in contact with each other in the vicinity of the lowest point of the elliptical locus. A relative movement in the left-right direction of the paper surface of FIG. Further, the speed of relative movement changes according to the vibration amplitude in the left-right direction, and the rotational direction of the elliptical locus can be reversed by shifting the phase relationship between the longitudinal vibration and the lateral vibration by 180 degrees. Therefore, the moving speed and the relative moving direction can be changed by changing the vibration amplitude in the left-right direction including the sign (vibration direction).

  FIG. 3 is a circuit diagram showing a configuration of a vibration type actuator drive control device for driving the vibration type actuator shown in FIG.

  AC voltages VAC 1 and VAC 2 are applied to the magnetic coils 5 and 6. The AC voltages VAC1 and VAC2 are in-phase or reverse-phase AC voltages, and the relative balance between the magnetic coils 5 and 6 and the magnetic coils 7 and 8 is changed by changing the balance of their amplitudes including the sign. Change the relative position.

  An AC voltage PA and an AC voltage PB that are output voltages of the magnetic coils 7 and 8 are applied to one terminal of each of the piezoelectric body 3 and the piezoelectric body 4. The other terminals of the piezoelectric body 3 and the piezoelectric body 4 are grounded. The AC voltage PA and the AC voltage PB are applied to one terminal of each of the inductance elements 10 and 11, and the other terminal of each of the inductance elements 10 and 11 is connected to one terminal of the piezoelectric body 2. The other terminal of 2 is grounded.

  FIG. 4 is a diagram showing the relationship between the amplitudes of the AC voltages VAC1 and VAC2 applied to the magnetic coils 5 and 6 and the relative positions of the magnetic coils 5 and 6 and the magnetic coils 7 and 8, respectively. 4 represents the amplitude of the AC voltage VAC1, the solid line represents the amplitude of the AC voltage VAC2, and the dashed line represents the average voltage of the AC voltages PA and PB. 4 represents the positions of the magnetic coil 7 and the magnetic coil 8 relative to the magnetic coil 5 and the magnetic coil 6. Hereinafter, each state of the vibration type actuator shown in FIGS. 4A to 4E will be described with reference to the circuit shown in FIG.

  First, in the state shown in FIG. 4C, the AC voltage VAC1 and the AC voltage VAC2 have the same amplitude. In this state and as shown in FIG. 3, when the magnetic coils 5 and 6 and the magnetic coils 7 and 8 are in positions facing each other, AC voltages PA and PB that are output voltages of the magnetic coils 7 and 8, respectively. The amplitudes of are also the same. Then, since the voltages applied to the piezoelectric body 3 and the piezoelectric body 4 are the same, the lower projections of the elastic body 1 have the same magnitude with different signs from the piezoelectric body 3 and the piezoelectric body 4 bonded to the opposing surface. That is, the bending excitation force is applied. Therefore, no bending vibration is excited in the lower protrusion of the elastic body 1.

  Next, excitation by the piezoelectric body 2 provided on the upper side portion of the elastic body 1 will be described.

  The inductance elements 10 and 11 in FIG. 3 generate an AC voltage PC having an amplitude corresponding to the average voltage of the AC voltage PA and the AC voltage PB and having a phase delay, and apply the AC voltage PC to the piezoelectric body 2. As shown in FIG. 4, since the amplitudes of the AC voltage VAC1 and the AC voltage VAC2 are each 1V, the amplitudes of the AC voltage PA and the AC voltage PB are each approximately 1V. Therefore, an alternating voltage PC having an amplitude of approximately 1 V is applied to the piezoelectric body 2, whereby longitudinal vibration is excited in the upper side portion of the elastic body 1. However, as described above, bending vibration (lateral vibration) is not excited in the lower protrusion of the elastic body 1, so that no relative movement occurs between the magnetic coils 5 and 6 and the magnetic coils 7 and 8.

  Here, it is assumed that the magnetic coils 7 and 8 have moved upwards on the paper surface of FIG. When the magnetic coil 7 moves upward, the area facing the magnetic coil 5 decreases, so the amplitude of the AC voltage PA decreases. On the other hand, even if the magnetic coil 8 moves upward, the facing area with the magnetic coil 5 is increased by the amount that the facing area with the magnetic coil 6 is reduced, so that the amplitude of the AC voltage PB hardly changes. Therefore, the amplitude of AC voltage PB becomes larger than the amplitude of AC voltage PA. Then, elliptical vibration is generated at the tip of the lower protrusion of the elastic body 1, and the magnetic coils 7 and 8 are moved downward in FIG. 3 where the amplitude of the AC voltage PA and the amplitude of the AC voltage PB are equal. Return to the state of (C).

  The same applies when the magnetic coils 7 and 8 are moved downward in the drawing of FIG. That is, when the magnetic coil 8 moves downward, the area facing the magnetic coil 6 decreases, so the amplitude of the AC voltage PB decreases. On the other hand, even if the magnetic coil 7 moves downward, the facing area with the magnetic coil 6 is increased by the amount by which the facing area with the magnetic coil 5 is reduced, so the amplitude of the AC voltage PA hardly changes. Therefore, the amplitude of AC voltage PA becomes larger than the amplitude of AC voltage PB. Then, elliptical vibration is generated at the tip of the lower protrusion of the elastic body 1, and the magnetic coils 7 and 8 are moved upward in FIG. 3 where the amplitude of the AC voltage PA and the amplitude of the AC voltage PB are equal to each other. Return to the state of C).

  Next, the state illustrated in FIG. 4B will be described.

  The AC voltage VAC1 and the AC voltage VAC2 are changed from the voltage state of FIG. 4C to the AC voltage VAC1 having an amplitude of 1V and gradually decreasing the amplitude of the AC voltage VAC2 to zero. When the amplitude of the AC voltage VAC2 is decreased, the amplitude of the AC voltage PB is decreased. As a result, the amplitude of the AC voltage PA becomes larger than the amplitude of the AC voltage PB, so that the magnetic coils 7 and 8 move upward in the drawing of FIG. When the amplitude of the AC voltage VAC2 finally becomes 0, the magnetic flux of the magnetic coil 6 disappears and only the magnetic flux of the magnetic coil 5 is generated. Therefore, the magnetic coil 7 and the magnetic coil 8 move at a position (P / 2) where the facing area with the magnetic coil 5 becomes equal, that is, a position (P / 2) half the size P in the vertical direction of FIG. The AC voltages PA and PB are equal in amplitude to each other. As shown above, the broken line of the alternate long and short dash line shown in FIG. 4 represents the average voltage of the AC voltages PA and PB. When the average voltage in the state of FIG. The average voltage in the state of B) is half V / 2.

  Next, the state shown in FIG.

  When the phase of the AC voltage VAC2 is reversed with respect to the phase of the AC voltage VAC1, this is expressed as a negative amplitude, and when the amplitude of the AC voltage VAC2 is gradually changed to −1V, the magnetic coils 7 and 8 are further changed to FIG. Can be moved upward on the drawing sheet. That is, when the amplitude of the AC voltage VAC2 is gradually approached to -1V while maintaining the amplitude of the AC voltage VAC1 at 1V from the state of FIG. 4B, the amplitude of the AC voltage PB further decreases, and the AC voltage The amplitude of the voltage PA is larger than the amplitude of the AC voltage PB. Then, the magnetic coil 7 and the magnetic coil 8 further move upward in the drawing of FIG. 4, and finally move to the position of 2P / 3. The amplitude of the average voltage of the AC voltages PA and PB is V / 3.

  The states shown in FIGS. 4D and 4E are the same as the states shown in FIGS. 4B and 4A, respectively, and a description thereof will be omitted.

  Thus, by setting the amplitude balance of the AC voltage VAC1 and the AC voltage VAC2 including the sign, the magnetic coils 7 and 8 that move together with the elastic body 1 move together with the flat plate 9. The relative position with respect to the magnetic coils 5 and 6 can be changed. Therefore, it is possible to realize a vibration type actuator capable of setting a linear relative positional relationship without special feedback control.

  In the setting example of the amplitudes of the AC voltage VAC1 and the AC voltage VAC2 shown in FIG. 4, the amplitude of the AC voltage PC that is the average value of the AC voltages PA and PB (the broken line of the dashed line in FIG. 4) fluctuates. For this reason, the driving force of the vibration type actuator varies. Therefore, the amplitudes of the AC voltage VAC1 and the AC voltage VAC2 are set so that the amplitude of the AC voltage PC does not change. This will be described with reference to FIG.

  FIG. 5 is a diagram showing the relationship between the amplitudes of the AC voltages VAC1 and VAC2 set differently from the amplitudes shown in FIG. 4 and the relative positions of the magnetic coils 5 and 6 and the magnetic coils 7 and 8. is there.

  In order not to change the AC voltage PC that is the average value of the AC voltages PA and PB, the amplitude of the AC voltages VAC1 and VAC2 shown in FIG. 4 is reduced by the rate of decrease of the amplitude of the AC voltage PC shown in FIG. Is divided into the amplitudes of the AC voltages VAC1 and VAC2 shown in FIG. That is, the amplitude of the AC voltage PC in the state of FIG. 4B is V / 2 which is half of the amplitude 1V of the AC voltage PC in the state of FIG. Therefore, the amplitudes of the AC voltages VAC1 and VAC2 in the state of FIG. 5B may be set to 2V and 0 that are twice the AC voltages VAC1 and VAC2 in the state of FIG. Further, the amplitude of the AC voltage PC in the state of FIG. 4A is V / 3, which is half of the amplitude V of the AC voltage PC in the state of FIG. Therefore, the amplitudes of the AC voltages VAC1 and VAC2 in the state of FIG. 5A may be 3V and −3V, which is three times the AC voltages VAC1 and VAC2 in the state of FIG.

  By setting the amplitudes of the AC voltages VAC1 and VAC2 as described above, fluctuations in the amplitude of the AC voltage PC can be minimized, and the driving force of the vibration actuator can be stabilized.

  In the above-described embodiment, the piezoelectric bodies 3 and 4 are provided on both surfaces of the lower protrusion of the elastic body 1 to cancel the vibration force of both piezoelectric bodies, so that the bending vibration generated in the lower protrusion can be reduced. Although the amplitude is set to 0, this is inefficient. Therefore, a piezoelectric body may be provided only on one side of the lower protrusion. This will be described with reference to FIGS.

  FIG. 6 is a diagram showing a configuration of a vibration type actuator in which the piezoelectric body 3 is provided only on one surface of the lower protrusion of the elastic body 1. FIG. 7 is a circuit diagram showing a configuration of a vibration type actuator drive control device for driving the vibration type actuator shown in FIG.

  In the vibration type actuator drive control device shown in FIG. 3, the AC voltage PA is applied to one surface of the piezoelectric body 3, the other surface of the piezoelectric body 3 is connected to the ground potential, and the AC voltage PB is applied to the piezoelectric body 4. The other surface of the piezoelectric body 4 is connected to the ground potential. On the other hand, in the vibration type actuator drive control device shown in FIG. 7, the AC voltage PA and the AC voltage PB are applied to both surfaces of the piezoelectric body 3. When the AC voltages PA and PB are at the same potential, the piezoelectric body 3 is not distorted. Therefore, when the AC voltages PA and PB are at the same potential, bending vibration does not occur in the lower protrusion of the elastic body 1 and the efficiency is increased. Can be improved.

  In the vibration type actuator drive control device shown in FIG. 7, FIG. 8 shows a configuration example for simplifying the connection between the piezoelectric body 3, the magnetic coil 7, and the magnetic coil 8. FIG. 8 is a circuit diagram showing a configuration in which the connection between the piezoelectric body 3, the magnetic coil 7, and the magnetic coil 8 is simplified in the vibration type actuator drive control device shown in FIG.

  In the circuit shown in FIG. 8, the AC voltage PB, which is the output voltage of the magnetic coil 8, is short-circuited to the ground potential, the magnetic coil 7 and the magnetic coil 8 are connected in series, and the output voltages of both coils are added to generate an AC. A voltage PA is applied to the piezoelectric body 3.

  In this configuration, the AC voltage PC applied to the piezoelectric body 2 is only the same as the AC voltage PA delayed via the inductance element 10 as shown in FIG. Therefore, the AC voltage PC cannot be set to a constant value, and the driving force of the vibration type actuator varies. Further, even if the phase of the AC voltage PA is reversed, the mutual phase relationship between the AC voltage PA and the AC voltage PC does not change, and therefore the direction of relative movement between the magnetic coils 5 and 6 and the magnetic coils 7 and 8. Can not be reversed. Therefore, a dedicated AC voltage generator 12 for generating the AC voltage PC is used. Then, the relationship between the phase of the AC voltage PC output from the AC voltage generator 12 and the phase of the AC voltages VAC1 and VAC2 is set to the phase relationship described with reference to FIG. Thereby, the relative movement similar to the relative movement between the magnetic coils 5 and 6 and the magnetic coils 7 and 8 described with reference to FIG. 4 can be realized.

  In the above-described embodiment, the AC voltages VAC1 and VAC2 are input and the AC voltages PA and PB are output by the magnetic coupling between the magnetic coils 5 and 6 and the magnetic coils 7 and 8. Instead, the AC voltage may be transmitted by electrostatic coupling.

  FIG. 9 is a circuit diagram showing a configuration of a vibration type actuator drive control device applied to a vibration type actuator using electrostatic coupling.

  In FIG. 9, 24 is a dielectric, and 20, 21, 22, and 23 are electrodes of the same area provided on the dielectric 24, respectively. The electrodes 20 and 21 are bonded to the dielectric 24, and the electrodes 22 and 23 are configured to be movable in the vertical direction on the paper surface of FIG. Capacitance is generated between the electrodes facing each other, but when the electrodes 22 and 23 move, the respective facing areas with the electrodes 20 and 21 change, so the balance of both capacitances between the electrodes changes. Therefore, the ratios of the AC voltages PA and PB to the electrostatic capacity of the piezoelectric bodies 3 and 4 to which the AC voltages PA and PB are supplied respectively change, and thereby the amplitudes of the AC voltages PA and PB change.

[Second Embodiment]
Next, a second embodiment of the present invention will be described.

  Since the configuration of the second embodiment is basically the same as the configuration of the first embodiment, in the description of the second embodiment, the same parts as the configuration of the first embodiment are used. Are denoted by the same reference numerals, and the description of the first embodiment is used, and only different portions will be described.

  FIG. 10 is a circuit diagram showing the configuration of the vibration type actuator drive control device in the second embodiment. This configuration is similar to the configuration of the vibration type actuator drive control device in the first embodiment shown in FIG.

  In the vibration type actuator drive control device in the first embodiment shown in FIG. 8, the magnetic coils 7 and 8 are used to detect the magnetic fluxes output from the magnetic coils 5 and 6, respectively, and the detected voltages are added. And output as AC voltage PA. On the other hand, in the vibration type actuator drive control device in the second embodiment shown in FIG. 10, the magnetic coil 13 is used to add and detect the magnetic flux output from the magnetic coils 5 and 6 in the state of magnetic flux, The detected voltage is output as an AC voltage PA. As a result, an AC voltage PA having an amplitude corresponding to the amplitude of the AC voltages VAC1 and VAC2 is output.

  FIG. 11 is a diagram illustrating the relationship between the amplitudes of the AC voltages VAC1 and VAC2 applied to the magnetic coils 5 and 6 and the relative positions of the magnetic coils 5 and 6 and the magnetic coil 13 in the second embodiment. is there.

  The broken line in FIG. 11 indicates the amplitude of the AC voltage VAC1, and the AC voltage VAC1 is always set to a positive amplitude value. The solid line indicates the amplitude of the AC voltage VAC2, and the AC voltage VAC2 is always set to a negative amplitude value. That is, the phases of the AC voltage VAC1 and the AC voltage VAC2 are inverted.

  Also in this embodiment, AC voltage generator 12 performs the same operation as AC voltage generator 12 in the first embodiment shown in FIG.

[Third Embodiment]
Next, a third embodiment of the present invention will be described.

  Since the configuration of the third embodiment is basically the same as the configuration of the first embodiment, in the description of the third embodiment, the same parts as the configuration of the first embodiment are used. Are denoted by the same reference numerals, and the description of the first embodiment is used, and only different portions will be described.

  FIG. 12 is a circuit diagram showing a configuration of a vibration type actuator drive control device according to the third embodiment. This configuration is similar to the configuration of the vibration type actuator drive control device in the first embodiment shown in FIG.

  In the vibration type actuator drive control device in the first embodiment, the frequencies of the AC voltages VAC1 and VAC2 are the excitation frequencies of the piezoelectric bodies 2, 3 and 4. On the other hand, in the vibration type actuator drive control device in the third embodiment shown in FIG. 12, an AC voltage generator 15 described later is provided, and the frequency of the AC voltage applied to the piezoelectric bodies 2 and 3 is AC. It is determined by the voltage generator 15.

  Reference numeral 15 denotes a two-phase AC voltage generator that generates an AC voltage P0 that is the source of the AC voltages PA and PB and an AC voltage PC that is 90 degrees out of phase with the AC voltage P0. Reference numeral 14 denotes a power supply voltage generator, which inputs an AC voltage output from the magnetic coils 7 and 8 and whose amplitude balance changes, generates a predetermined DC voltage, and supplies it to the AC voltage generator 15 as a power supply voltage. ing. Reference numerals 16 and 17 denote AC-DC converters which convert the AC voltage output from the magnetic coils 7 and 8 into a DC voltage, respectively. Reference numerals 18 and 19 denote multipliers, which are obtained by multiplying the amplitude value of the AC voltage P0 output from the AC voltage generator 15 by the amplitude value of each DC voltage output from the AC-DC converters 16 and 17, respectively. The AC voltages PA and PB having the respective amplitude values are output to the piezoelectric body 3.

  With this configuration, the amplitudes of the AC voltages PA and PB correspond to the amplitudes of the AC voltages output from the magnetic coils 7 and 8. Therefore, bending vibration is generated in the T-shaped lower protrusion of the elastic body 1 in accordance with the change in the amplitude balance of each AC voltage output from the magnetic coils 7, 8, and the magnetic coils 5, 6 and the magnetic coil 7, The relative positional relationship with 8 changes.

  FIG. 13 shows the relationship between the amplitudes of the AC voltages VAC1 and VAC2 applied to the magnetic coils 5 and 6 in the third embodiment and the relative positions of the magnetic coils 5 and 6 and the magnetic coils 7 and 8, respectively. FIG.

  In the third embodiment, the relative positional relationship of 2P / 3 does not exist like the relative position in the second embodiment shown in FIG. This is because the AC-DC converters 16 and 17 shown in FIG. 12 cannot detect the negative amplitude, so that the AC voltage PA and the AC voltage PB cannot be reversed in phase.

  Further, the frequency and phase relationship of the AC voltages PA, PB and PC can be set in the AC voltage generator 15 independently of the AC voltages VAC1 and VAC2, so that the vibration state of the elastic body 1 is detected. The drive frequency can be set according to the vibration state. Further, since the phase difference between the AC voltages PA, PB and the AC voltage PC can be set without depending on the driving frequency, the driving force between the elastic body 1 and the flat plate 9 can be stably generated. it can.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described.

  Since the configuration of the fourth embodiment is basically the same as the configuration of the first embodiment, in the description of the fourth embodiment, the same parts as the configuration of the first embodiment are used. Are denoted by the same reference numerals, and the description of the first embodiment is used, and only different portions will be described.

  FIG. 14 is a circuit diagram showing a configuration of a vibration type actuator drive control device according to the fourth embodiment. This configuration is similar to the configuration of the vibration type actuator drive control device in the third embodiment shown in FIG.

  In the vibration type actuator drive control device according to the third embodiment shown in FIG. 12, the amplitudes of the AC voltages PA and PB are changed in accordance with the amplitudes of the AC voltages VAC1 and VAC2. However, in this vibration type actuator drive control device, the AC-DC converters 16 and 17 are provided to convert the AC voltage into the DC voltage, and the circuit is complicated. In order to improve such a point, the vibration type actuator drive control device in the fourth embodiment uses the DC voltages VDC1 and VDC2 instead of the AC voltages VAC1 and VAC2.

  In FIG. 14, reference numerals 25 and 26 denote variable resistors. DC voltages VDC1 and VDC2 are respectively applied to one terminals of the variable resistors 25 and 26, and the other terminals are grounded. The sliding contacts of the variable resistors 25 and 26 are integrated with the elastic body 1 so as to move in the vertical direction on the paper surface of FIG. The DC voltages detected at the sliding contacts of the variable resistors 25 and 26 are sent to the multipliers 18 and 19, respectively. Multipliers 18 and 19 were obtained by multiplying the amplitude value of AC voltage P0 output from AC voltage generator 15 by the amplitude value of each DC voltage output from variable resistors 25 and 26, respectively. AC voltages PA and PB having respective values as amplitudes are output to the piezoelectric body 3. This eliminates the need for the AC-DC converters 16 and 17 that are required in the vibration type actuator drive control device according to the third embodiment shown in FIG. 12, and simplifies the circuit configuration.

  FIG. 15 is a diagram showing the relationship between the amplitudes of the DC voltages VDC1 and VDC2 applied to the variable resistors 25 and 26 in the fourth embodiment and the positions of the sliding contacts of the variable resistors 25 and 26, respectively. It is.

  When the DC voltage VDC2 is V and the DC voltage VDC1 is 0, only the AC voltage PB is generated. Therefore, as shown in FIG. It moves upward and finally moves until the detected voltage of each sliding contact becomes almost zero.

  When the DC voltages VDC1 and VDC2 are set to the same voltage value, the state shown in FIG. In this state, the output voltages of the variable resistors 25 and 26 are respectively half the DC voltages VDC1 and VDC2, and the AC voltages PA and PB have the same amplitude as each other. do not do.

  When the position of each sliding contact of the variable resistors 25 and 26 is deviated from the position shown in FIG. 15B, the balance of the amplitude of the AC voltage PA and the AC voltage PB changes, and FIG. Operates to converge to the indicated state. Further, as the amplitudes of the output voltages PC and PO of the AC voltage generator 15 are increased, the convergence position can be brought closer to the ideal position. This is because even with a slight deviation, the driving force of the vibration actuator increases.

[Fifth Embodiment]
Next, a fifth embodiment of the present invention will be described.

  The first to fourth embodiments described above relate to uniaxial movement (generation of driving force in one direction), but the fifth embodiment has two or more movements (2 in the same plane). Driving force generation in the direction beyond).

  FIG. 16 is a diagram showing a part of a magnetic coil constituting the vibration type actuator in the fifth embodiment. FIG. 16 shows the arrangement of the magnetic coils on a moving XY plane having two or more axes (driving force generating XY plane in two or more directions).

  Reference numerals 27, 28, 29, and 30 indicated by solid lines are magnetic coils on the AC voltage input side (hereinafter referred to as “input side magnetic coils”), and 31, 32, 33, and 34 indicated by broken lines are AC voltage outputs. Side magnetic coil (hereinafter referred to as "output side magnetic coil"). Each of the magnetic coils 27 to 34 has a 90-degree fan shape obtained by dividing a circle into four. The input side magnetic coils 27, 28, 29, 30 and the output side magnetic coils 31, 32, 33, 34 overlap in the Z direction and are displaced with an angle difference of 45 degrees in the XY plane. The input side magnetic coils 27, 28, 29, and 30 and the output side magnetic coils 31, 32, 33, and 34 are separated by a nonmagnetic flat plate (57 in FIG. 17).

  The input side magnetic coils 27, 28, 29, and 30 move together with the non-magnetic flat plate, and the output side magnetic coils 31, 32, 33, and 34 are elastic bodies (55 in FIG. 17) described later. , 56) and the piezoelectric body (35, 36, 37 in FIG. 17) move together. These movements are relatively performed in the XY plane.

  FIG. 17 is a diagram illustrating the vibrating body and a nonmagnetic flat plate that contacts the vibrating body.

  55 and 56 are T-shaped elastic bodies, and 35a, 35b, 36 and 37 are piezoelectric bodies. The piezoelectric bodies 35a and 35b are provided on the upper sides of the T-shaped elastic bodies 55 and 56, respectively, and the piezoelectric bodies 36 and 37 are provided on the lower protrusions of the T-shaped elastic bodies 55 and 56, respectively. The piezoelectric body 36 is provided on one side of the lower protrusion of the elastic body 55 in the X-axis direction, and the piezoelectric body 37 is provided on one side of the lower protrusion of the elastic body 56 in the Y-axis direction.

  In the fifth embodiment, like the elastic bodies 55 and 56, two T-shaped elastic bodies are used as drive sources for the X-axis direction and the Y-axis direction. As described above, the elastic bodies 55 and 56 are configured to move integrally with the output-side magnetic coils 31, 32, 33 and 34 (not shown). Reference numeral 57 denotes a non-magnetic flat plate which is configured to move together with unillustrated input side magnetic coils 27, 28, 29 and 30.

  FIG. 18 is a diagram illustrating AC voltages input to the input side magnetic coils 27, 28, 29, and 30.

  In the first to fourth embodiments, since the uniaxial driving is performed, the input AC voltage is two. However, in the present embodiment, the biaxial driving is performed, so the input AC voltage is input. There are four. That is, AC voltages VAC1, VAC2, VAC3, and VAC4 are input to the input side magnetic coils 27, 28, 29, and 30, respectively.

  FIG. 19 is a circuit diagram illustrating a drive circuit that drives the piezoelectric bodies 35 (35a, 35b), 36, and 37 based on the AC voltage output from the output-side magnetic coils 31, 32, 33, and 34.

  The AC voltage PB output from the magnetic coil 32 and the AC voltage PD output from the opposing magnetic coil 34 are applied to both electrodes of the piezoelectric body 36, and according to the amplitude balance between the AC voltage PB and the AC voltage PD, It is comprised so that the relative position of the X-axis direction of FIG. 17 may change. Further, the AC voltage PA output from the magnetic coil 31 and the AC voltage PC output from the opposing magnetic coil 33 are applied to both electrodes of the piezoelectric body 37 and correspond to the amplitude balance between the AC voltage PA and the AC voltage PC. Thus, the relative position in the Y-axis direction of FIG. 17 is configured to change.

  The AC voltages PA, PB, PD, and PC are applied to one ends of the inductance elements 39, 40, 41, and 42, respectively, and the other ends of the inductance elements 39, 40, 41, and 42 are connected to the piezoelectric body 35. Connected to one electrode. The other electrode of the piezoelectric body 35 is grounded. The inductance elements 39, 40, 41, 42 generate an AC voltage PE obtained by delaying the average voltage of the AC voltages PA, PB, PC, PD and apply it to the piezoelectric body 35.

  The operation of the drive circuit shown in FIG. 19 will be described below.

  The basic principle of driving of this drive circuit is the same as the driving principle of the vibration type actuator drive control device in the first embodiment. That is, the AC voltage output from two magnetic coils arranged diagonally among the output side magnetic coils 31, 32, 33, and 34 shown in FIG. 19 is the two AC voltages PA in the first embodiment. , PB.

  By changing the amplitude balance between the AC voltages VAC1 and VAC2 and the AC voltages VAC3 and VAC4 in FIG. 18, the input side magnetic coils 27, 28, 29, and 30 and the output side magnetic coils 31, 32, 33, and 34 in FIG. Move relative to each other in the X-axis direction (FIG. 17). Further, by changing the amplitude balance between the AC voltages VAC1, VAC4 and the AC voltages VAC2, VAC3, the input side magnetic coils 27, 28, 29, 30 and the output side magnetic coils 31, 32, 33, 34 are moved in the Y-axis direction ( 17).

  FIG. 20 shows the amplitudes of the input AC voltages VAC1, VAC2, VAC3, VAC4 and the relative positions of the input side magnetic coils 27, 28, 29, 30 and the output side magnetic coils 31, 32, 33, 34. It is a figure which shows the relationship. 20 represents the position of the output side magnetic coils 31, 32, 33, 34 in the X-axis direction, and the curve PO represents the Y-axis direction of the output side magnetic coils 31, 32, 33, 34. Represents the position. 20 shows the relative positions of the output-side magnetic coils 31, 32, 33, and 34 (broken lines) with respect to the input-side magnetic coils 27, 28, 29, and 30 (solid lines). Black circles indicate the centers of the output side magnetic coils 31, 32, 33, and 34.

  In the state of FIG. 20A, the amplitudes of the AC voltages VAC3 and VAC4 are 2V, and the amplitudes of the AC voltages VAC1 and VAC2 are 0. Therefore, the X-axis of the input side magnetic coils 27, 28, 29, and 30 The balance of magnetic flux in the direction changes. Then, among the output side magnetic coils 31, 32, 33, and 34, the balance of the magnetic flux projected on the magnetic coil 32 and the magnetic coil 34 provided to face each other in the X-axis direction changes. As a result, the balance of amplitude between the AC voltage PB and the AC voltage PD changes, an excitation force is generated in the piezoelectric body 36, and the output side magnetic coils 31, 32, 33, and 34 are connected to the input side magnetic coil 27, It moves relative to the 28, 29, 30 in the X-axis direction. Then, relative movement is made in the X-axis direction to a point P where the amplitude of the AC voltage PB and the amplitude of the AC voltage PD substantially coincide.

  An AC voltage PE having an amplitude proportional to the average amplitude 1V of the AC voltages VAC1, VAC2, VAC3, and VAC4 and having a phase shifted from the AC voltages PA, PB, PC, and PD is applied to the piezoelectric body 35. Note that, by setting the average amplitude of the AC voltages VAC1, VAC2, VAC3, and VAC4 to be always 1V, the amplitude of the AC voltage PE can be constantly stabilized, and the driving force of the vibration actuator is relatively stabilized. be able to.

  Next, the state of FIG.

  In the state of FIG. 20B, since the amplitudes of the AC voltages VAC2 and VAC3 are 2V and the amplitudes of the AC voltages VAC1 and VAC4 are 0, the input side magnetic coils 27, 28, 29, and 30 are in the Y-axis direction. The balance of magnetic flux changes. Then, among the output side magnetic coils 31, 32, 33, and 34, the balance of the magnetic flux projected to the magnetic coil 31 and the magnetic coil 33 provided facing each other in the Y-axis direction changes. As a result, the amplitude balance between the AC voltage PA and the AC voltage PC changes, and an excitation force is generated in the piezoelectric body 37, so that the output side magnetic coils 31, 32, 33, 34 are connected to the input side magnetic coil 27, 28, 29, and 30 move relative to the Y-axis direction. Then, it moves in the Y-axis direction to a point -P where the amplitude of the AC voltage PA and the amplitude of the AC voltage PC substantially coincide.

  Next, the state of FIG.

  In the state of FIG. 20C, the AC voltage VAC2 has an amplitude of 4V, and the AC voltages VAC1, VAC3, and VAC4 have an amplitude of 0. Therefore, the input side magnetic coils 27, 28, 29, and 30 are in the X-axis direction. The balance of the magnetic flux in the direction inclined 45 degrees from is changed. Then, among the output side magnetic coils 31, 32, 33, 34, the magnetic coil 32 and the magnetic coil 34 provided to face each other in the X-axis direction and the magnetic coil 31 and the magnetic coil provided to face each other in the Y-axis direction. Both balances of the magnetic flux projected to 33 change. Thereby, the balance of the amplitude between the AC voltage PB and the AC voltage PD and the balance of the amplitude between the AC voltage PA and the AC voltage PC change. Therefore, an excitation force is generated in the piezoelectric body 36 and the piezoelectric body 37, and the output side magnetic coils 31, 32, 33, 34 are in the X axis direction and the Y axis direction with respect to the input side magnetic coils 27, 28, 29, 30. Move relative to. Then, the amplitude of the AC voltage PB and the amplitude of the AC voltage PD, and the amplitude of the AC voltage PA and the amplitude of the AC voltage PC are moved in the X-axis direction and the Y-axis direction to a point -P where the amplitudes substantially coincide with each other.

  The operation of the drive circuit in each state of FIGS. 20D to 20G is also the same as that of FIGS.

  In the present embodiment, the input side magnetic coils 27, 28, 29, and 30 and the output side magnetic coils 31, 32, 33, and 34 are arranged on the XY plane, respectively. Alternatively, these magnetic coils may be arranged on a cylindrical surface or a spherical surface. Accordingly, the vibration type actuator can be driven in the form of rotation and translation, two rotation axes, and the like.

[Sixth Embodiment]
Next, a sixth embodiment of the present invention will be described.

  Since the configuration of the sixth embodiment is similar to the configuration of the fifth embodiment, in the description of the sixth embodiment, the same reference is made to the same part as the configuration of the fifth embodiment. The description of the fifth embodiment is applied with reference numerals, and only different portions will be described.

  In the fifth embodiment, as shown in FIG. 17, the elastic bodies 55 and 56 that drive in the X-axis direction and the Y-axis direction, respectively, take individual forms. On the other hand, in the sixth embodiment, the two elastic bodies 55 and 56 are realized by one elastic body, and the vibrating body can generate a rotational motion. And in 6th Embodiment, as shown to FIG.20 (C) of 5th Embodiment, the output side magnetic coils 31, 32, 33, and 34 are the input side magnetic coils 27, 28, 29, and 30. FIG. Against relative movement in the X-axis direction and the Y-axis direction.

  FIG. 21 is a diagram showing an elastic body and a piezoelectric body constituting the vibration type actuator in the sixth embodiment. FIG. 21A is a perspective view showing the configuration of the elastic body and the piezoelectric body, and FIG. 21B is a view of the elastic body and the piezoelectric body shown in FIG. 21A from below (the lower protrusion side). It is a top view.

  58 is an elastic body, and 35, 36, 37, 38 (38a to 38d) are piezoelectric bodies. The elastic body 58 includes a cross-shaped upper structure portion (cross portion) and a lower protrusion extending downward from the center of the cross. That is, the two T-shaped elastic bodies 55 and 56 in the fifth embodiment shown in FIG. 17 share the lower protrusions, and the two upper sides of the T-shape are stacked so as to be orthogonal to each other. It has become. The piezoelectric body 35 is provided on the upper side of the cross portion of the elastic body 58, and the piezoelectric bodies 38 a to 38 d are provided on one side surface of each of the four arm portions in the cross portion of the elastic body 58. The piezoelectric bodies 36 and 37 are respectively provided on two adjacent side surfaces of the lower protrusion of the elastic body 58.

  Similar to the vibration of the T-shaped elastic bodies 55 and 56, the piezoelectric body 35 vibrates the cross section of the elastic body 58, so that the center of the cross section of the elastic body 58 is bent to each side of the cross section. Vibration occurs. Further, it vibrates so as to vertically hit a non-magnetic flat plate (not shown) with which the lower protrusion of the elastic body 58 comes into contact. Furthermore, when the piezoelectric bodies 36 and 37 vibrate the lower protrusions of the elastic body 58, the driving forces in the X-axis and Y-axis directions are generated between the lower protrusions and a non-magnetic flat plate (not shown). Are generated respectively.

  The piezoelectric bodies 38a to 38d bend the arms of the cross of the elastic body 58 in the same rotational direction on the XY plane so that the elastic body 58 rotates and oscillates around the center of the cross. It is composed. As the cross portion of the elastic body 58 rotates, the lower protrusion also rotates, so that it becomes possible to generate a driving force in the rotation direction between the elastic body 58 and a non-magnetic flat plate (not shown).

  Also in the vibration type actuator in the sixth embodiment, the input side magnetic coils 27, 28, 29, and 30 and the output side magnetic coils 31, 32, 33, and 34 are arranged in the same manner as the vibration type actuator in the fifth embodiment. Provide. The input side magnetic coils 27, 28, 29, and 30 move together with a nonmagnetic flat plate, and the output side magnetic coils 31, 32, 33, and 34 are elastic bodies 58 and piezoelectric bodies 35, 36, and 37, respectively. , 38 and move together.

  FIG. 22 is a diagram illustrating AC voltages input to the input side magnetic coils 27, 28, 29, and 30 in the sixth embodiment.

  As in the fifth embodiment, AC voltages VAC1, VAC2, VAC3, and VAC4 are input to the input side magnetic coils 27, 28, 29, and 30, respectively.

  FIG. 23 is a circuit diagram showing a drive circuit that drives the piezoelectric bodies 35, 36, 37, and 38 based on the AC voltage output from the output side magnetic coils 31, 32, 33, and 34 in the sixth embodiment. It is. Since this drive circuit is basically the same as the drive circuit in the fifth embodiment shown in FIG. 19, the same parts are denoted by the same reference numerals and the description thereof is omitted.

  In the sixth embodiment, the AC voltage PA is applied to one electrode of the piezoelectric body 38 via the inductance element 43, and the AC voltage PC is applied to the one electrode of the piezoelectric body 38 via the inductance element 44. Apply to. The AC voltage PD is applied to the other electrode of the piezoelectric body 38 via the inductance element 45, and the AC voltage PB is applied to the other electrode of the piezoelectric body 38 via the inductance element 46. The inductance elements 43 and 44 generate the average voltage PF of the AC voltages PA and PC, and the inductance elements 45 and 46 generate the average voltage PG of the AC voltages PD and PB.

  FIG. 24 shows the amplitudes of the input AC voltages VAC1, VAC2, VAC3, VAC4, the input side magnetic coils 27, 28, 29, 30 and the output side magnetic coils 31, 32, 33, in the sixth embodiment. It is a figure which shows the relationship with the relative position between 34. 24 represents the position of the output-side magnetic coils 31, 32, 33, and 34 in the X-axis direction, and the curve PO represents the Y-axis direction of the output-side magnetic coils 31, 32, 33, and 34. Represents the position. 24 shows the relative positions of the output-side magnetic coils 31, 32, 33, and 34 (broken lines) with respect to the input-side magnetic coils 27, 28, 29, and 30 (solid lines). Black circles indicate the centers of the output side magnetic coils 31, 32, 33, and 34.

  In the sixth embodiment, the input side magnetic coils 27, 28, 29, and 30 and the output side magnetic coils 31, 32, 33, and 34 are regulated so as not to rotate relatively. That is, as shown in FIG. 20C of the fifth embodiment, the input side magnetic coils 27, 28, 29, 30 are in the X-axis direction and Y direction with respect to the output side magnetic coils 31, 32, 33, 34. Prevents relative movement in the axial direction. This will be described below.

  First, an independent operation amount is required to restrict rotation independently of movement in the X-axis direction and the Y-axis direction. Therefore, in the present embodiment, the average voltage PF of the AC voltages PA and PC that do not affect the X-axis drive and the Y-axis drive and the average voltage PG of the AC voltages PB and PD are used. That is, the movement in the X-axis direction is possible by changing the balance between the amplitude of the AC voltage PB and the amplitude of the AC voltage PD, and therefore the offset value (average value) of the amplitudes of the AC voltages PB and PD is balanced. Take advantage of being able to change independently. Actually, the average amplitude of the AC voltages VAC1 and VAC3 is separated from the average amplitude of the AC voltages VAC2 and VAC4 by a predetermined amount. As a result, the average voltage PF of the amplitudes of the AC voltages PA and PC and the average voltage PG of the AC voltages PB and PD are converted into the input side magnetic coils 27, 28, 29, and 30 and the output side magnetic coils 31, 32, 33, and 34. To change with rotation.

  In FIG. 24, the respective amplitudes of the alternating voltages VAC2 and VAC4 are set to be half of the respective amplitudes of the alternating voltages VAC1 and VAC3. AC voltages VAC2 and VAC4 having a small amplitude are input to the magnetic coils 28 and 30, respectively, and AC voltages VAC1 and VAC3 having a large amplitude are input to the magnetic coils 27 and 29, respectively.

  By the way, it is assumed that the input-side magnetic coils 27, 28, 29, and 30 and the output-side magnetic coils 31, 32, 33, and 34 are overlapped in the Z-axis direction with a 45 degree angle shift on the XY plane. . In this case, the output side magnetic coils 31, 32, 33, and 34 are opposed to the input side magnetic coil on the AC voltage side having a small amplitude and the input side magnetic coil on the large AC voltage side by half. Therefore, the average voltage PF of the AC voltages PA and PC and the average voltage PG of the AC voltages PB and PD have the same value, and the piezoelectric body 38 is not excited. However, when the overlap in the Z-axis direction deviates from 45 degrees on the XY plane, this balance changes and the piezoelectric body 38 vibrates the elastic body 58 in the rotational direction. As a result, the input side magnetic coils 27, 28, 29, and 30 and the output side magnetic coils 31, 32, 33, and 34 have a deviation angle of 45 so that the amplitude of the average voltage PF is equal to the amplitude of the average voltage PG. Rotate relatively on the XY plane until it reaches degrees.

  FIG. 25 is an XY plan view showing an input side magnetic coil in which the number of divisions of the input side magnetic coil is changed from 4 divisions to 8 divisions.

  The output side magnetic coils 31, 32, 33, and 34 are the same as the output side magnetic coils 31, 32, 33, and 34 shown in FIG. On the other hand, eight input side magnetic coils 47 to 54 are provided. That is, four input side magnetic coils 27, 28, 29, and 30 are divided into halves to form eight input side magnetic coils 47-54. The central angle of each sector shape of the input side magnetic coils 47 to 54 is 45 degrees.

  By comprising in this way, the relative rotational position between the input side magnetic coils 27, 28, 29, and 30 and the output side magnetic coils 31, 32, 33, and 34 can be changed.

  FIG. 26 is a diagram illustrating AC voltages input to the eight input side magnetic coils 47 to 54 illustrated in FIG. 25.

  AC voltages VAC1 to VAC8 are input to the input side magnetic coils 47 to 54, respectively. The AC voltages VAC1 to VAC8 are in phase and have different amplitudes.

  FIG. 27 shows the piezoelectric bodies 35, 36, 37, 38 based on the AC voltage output from the AC voltage output side magnetic coils 31, 32, 33, 34 by the input of the AC voltages VAC1-VAC8 as shown in FIG. It is a circuit diagram which shows the drive circuit which drives Since this drive circuit is basically the same as the drive circuit shown in FIG. 23, the same parts are denoted by the same reference numerals and the description thereof is omitted.

  The principle of relatively rotating the input side magnetic coils 47 to 54 and the output side magnetic coils 31, 32, 33, and 34 is the same as the principle of rotation described with reference to FIGS. However, in the vibration type actuators shown in FIGS. 21 to 24, it was not possible to change the rotational positions of two pairs of two opposing input side magnetic coils (27 and 29 or 28 and 30). . For this reason, the relative rotational positional relationship between the input-side magnetic coils 47 to 54 and the output-side magnetic coils 31, 32, 33, and 34 cannot be changed.

  On the other hand, in the vibration type actuator shown in FIGS. 25 to 27, the rotation position of the pair is rotated by 45 degrees by switching the amplitude value of the input AC voltage for each pair with the opposing input side magnetic coils as a pair. To do. Further, by sequentially switching the input AC voltage value for each pair, the rotational position can be continuously shifted.

  FIG. 28 shows the amplitudes of the input AC voltages VAC1 to VAC8 and the relationship between the input side magnetic coils 47 to 54 and the output side magnetic coils 31, 32, 33, 34 in the vibration type actuator shown in FIGS. It is a figure which shows the relationship with relative position. The curve PI in the lower part of FIG. 28 represents the position of the output side magnetic coils 31, 32, 33, 34 in the X axis direction, and the curve PO represents the Y axis direction of the output side magnetic coils 31, 32, 33, 34. Represents the position. 28 shows the relative positions of the output side magnetic coils 31, 32, 33, and 34 (broken line) with respect to the input side magnetic coils 47 to 54 (solid line). Black circles indicate the centers of the output side magnetic coils 31, 32, 33, and 34.

  28A to 28E, the AC voltage VAC1 and the AC voltage VAC2, the AC voltage VAC3 and the AC voltage VAC4, the AC voltage VAC5 and the AC voltage VAC6, the AC voltage VAC7 and the AC voltage VAC8 are the same. Amplitude. As a result, the input side magnetic coils 47 to 54 and the output side magnetic coils 31, 32, 33, and 34 are relatively moved in the same manner as described with reference to FIG. In each state shown in FIGS. 28A to 28E, the AC voltages VAC1, VAC2, VAC5, and VAC6 each have an amplitude of 2V, and a set having a larger amplitude is formed. On the other hand, each of the AC voltages VAC3, VAC4, VAC7, and VAC8 has an amplitude of 1V and constitutes a set having a smaller amplitude. Therefore, the output side magnetic coils 31, 32, 33, and 34 move to positions where they overlap each other by half in both the smaller group and the larger group, and the rotational position where the angle θ shown in FIG. 27 is 45 degrees. The relative movement in the X axis direction and the Y axis direction is maintained. The angle θ is an angle formed by the boundary between the output side magnetic coil 31 and the output side magnetic coil 34 with respect to the X axis.

  Next, each state in FIGS. 28E to 28F will be described.

  In each state of FIGS. 28 (E) to 28 (F), a change occurs between the group with the larger amplitude and the group with the smaller amplitude of the AC voltage. That is, the AC voltages VAC1 and VAC5 are moved from the group having the larger amplitude to the smaller group, and the AC voltages VAC3 and VAC7 are moved from the group having the smaller amplitude to the larger group. As a result, the boundary between the group with the larger amplitude and the group with the smaller amplitude is rotated by 45 degrees, and the output side magnetic coils 31, 32, 33, and 34 are in the rotational positions where the angle θ shown in FIG. 27 is 90 degrees. It is rotating.

[Seventh Embodiment]
In the vibration type actuators according to the first to sixth embodiments, a method is used in which elliptical vibration obtained by synthesizing vibrations in two orthogonal directions is generated in the lower protrusion of the T-shaped elastic body. On the other hand, in the vibration type actuator according to the seventh embodiment, the out-of-plane bending vibration shifted by 90 degrees is generated on the annular elastic body by shifting by 90 degrees in time, thereby A progressive vibration wave is formed on the elastic body.

  FIG. 29 is a perspective view showing the configuration of the vibration type actuator in the seventh embodiment using progressive vibration waves.

  Reference numeral 60 denotes a cylindrical elastic body. A plurality of protrusions are formed along the circumference at one end in the axial direction, and the other end has a flat plate shape to which an annular piezoelectric body 59 is bonded. Is done. Reference numeral 61 denotes a disk-shaped rotating body, which is pressed against and contacts a plurality of protrusions of the elastic body 60 by a pressing means (not shown). Reference numeral 62 denotes a rotation shaft provided at the rotation center of the rotating body 61.

  FIG. 30 is a diagram showing an electrode pattern provided on one plane of the annular piezoelectric body 59 in the seventh embodiment.

  An electrode pattern is provided on one plane of the piezoelectric body 59, and an elastic body 60 is bonded to the other plane of the piezoelectric body 59. The electrode pattern is composed of a plurality of electrodes 59a to 59c arranged along the circumference.

  When an AC voltage is applied to the plurality of electrodes 59a to 59c, two out-of-plane bending vibrations are generated on the ring of the piezoelectric body 59. The first out-of-plane bending vibration is generated by applying an AC voltage to the electrode 59a, and the second out-of-plane bending vibration is generated by applying an AC voltage to the electrode 59b and the electrode 59c. The electrode 59b and the electrode 59c are configured to cancel vibrations when the same voltage is applied.

  FIG. 31 is a diagram illustrating configurations of an input side magnetic coil and an output side magnetic coil according to the seventh embodiment.

  The input side magnetic coil is indicated by a solid line, and the input side magnetic coil is composed of four magnetic coils 63, 64, 65, 66 arranged along the circumference. The output side magnetic coil is indicated by a broken line, and the output side magnetic coil is composed of two magnetic coils 67 and 68.

  FIG. 32 is a diagram illustrating an AC voltage input to the input-side magnetic coils 63, 64, 65, and 66 according to the seventh embodiment.

  AC voltages VAC1 to VAC4 are input to the input side magnetic coils 63, 64, 65, and 66, respectively.

  FIG. 33 is a circuit diagram illustrating a drive circuit that drives the piezoelectric bodies 59a, 59b, and 59c based on the AC voltage output from the output-side magnetic coils 67 and 68 according to the seventh embodiment.

  The output side magnetic coils 67 and 68 output AC voltages PA and PB, respectively. The AC voltage PA is applied to the electrode 59b of the piezoelectric body 59, and the AC voltage PB is applied to the electrode 59c of the piezoelectric body 59. The AC voltages PA and PB are applied to the inductance elements 70 and 69, respectively, have an average amplitude of each amplitude of the AC voltages PA and PB, and a phase delayed from each phase of the AC voltages PA and PB. An alternating voltage PC is created. The AC voltage PC is applied to the electrode 59 a of the piezoelectric body 59.

  By applying the AC voltage PC to the electrode 59 a of the piezoelectric body 59, the first out-of-plane bending vibration described above is generated in the elastic body 60.

  The amplitude of the second out-of-plane bending vibration is 0 when the amplitude of the AC voltage PA and the amplitude of the AC voltage PB are substantially equal, and the input side magnetic coils 63, 64, 65, 66 and the output side The relative rotational movement between the magnetic coils 67 and 68 is configured to stop.

  The angle θ shown in FIG. 33 is an angle formed by the boundary between the output side magnetic coil 67 and the output side magnetic coil 68 with respect to the X-axis direction (left and right direction in FIG. 33).

  FIG. 34 is a diagram illustrating the relationship between the amplitudes of the AC voltages VAC1 to VAC4 input to the input side magnetic coils 63, 64, 65, and 66 in the seventh embodiment and the angle θ illustrated in FIG. . The angle θ is also a rotation angle of a relative rotation generated between the input side magnetic coils 63, 64, 65, 66 and the output side magnetic coils 67, 68.

  In FIG. 34, the amplitudes of the AC voltages VAC1 to VAC4 input to the input side magnetic coils 63, 64, 65, and 66 are the same as the pair of opposing magnetic coils of the input side magnetic coils 63, 64, 65, and 66. It changes so that the balance of AC voltage changes. And the pair of two alternating voltage switches so that it may rotate according to the relative rotation between an input side magnetic coil and an output side magnetic coil.

  In the state of FIG. 34A, only the AC voltage VAC3 has an amplitude of 2V, and all other AC voltages are 0. As a result, only the input side magnetic coil 65 generates a magnetic flux. Therefore, the input side magnetic coil and the output side magnetic coil are relatively positioned so that the projected area of the magnetic flux on the output side magnetic coils 67 and 68 is 50%. To a stable state (θ = −45 degrees).

  Next, when the voltage of the AC voltage VAC4 is increased while gradually decreasing the amplitude of the AC voltage VAC3, the output-side magnetic coil gradually rotates counterclockwise on the paper surface of FIG. When only the AC voltage VAC4 has an amplitude of 2V and all other AC voltages are 0, the angle θ is 45 degrees (state shown in FIG. 34B).

  34 (C) to 34 (H), only one amplitude of the AC voltages VAC1 to VAC4 input to the input side magnetic coils 63, 64, 65, and 66 is set to 2V, and the other is used. By setting it to 0, the relative rotation angle θ can be determined. In addition, the relative rotation angle θ can be continuously changed in the course of gradually changing the amplitudes of the AC voltages VAC1 to VAC4 to the above values.

  FIG. 35 is a diagram illustrating the relationship between the amplitudes of the AC voltages VAC1 to VAC4 and the relative rotation angle θ when the change in the angle θ illustrated in FIG. 34 is linear.

  Here, the relative rotation angle θ is linearly changed by changing the changes in the amplitudes of the AC voltages VAC1 to VAC4 along a predetermined curve. That is, the relationship between the change in the amplitude of each of the AC voltages VAC1 to VAC4 and the relative rotation angle θ is measured in advance, thereby determining the predetermined curve, and each of the AC voltages VAC1 to VAC4 based on the data of this curve. Change the amplitude.

  FIG. 36 is a diagram illustrating the relationship between the amplitude of the AC voltages VAC1 to VAC4 and the relative rotation angle θ when the relative rotation angle θ illustrated in FIG. 34 is changed stepwise as in a stepping motor.

  Changing the relative rotation angle θ stepwise can be realized simply by turning on / off the input AC voltages VAC1 to VAC4, and the drive circuit can be simplified.

  Note that the drive frequency of the vibration type actuator may be controlled according to the magnitude and phase of the input current to the input side magnetic coils 63, 64, 65, 66. Thereby, it is also possible to improve drive efficiency.

  In addition, as shown in FIG. 32, four input side magnetic coils 63, 64, 65, 66 are provided every 90 degrees along the circumference. Instead, more than four input side magnetic coils are provided. For example, the coil may be provided every 60 degrees or 45 degrees.

  Further, high-speed and high-precision rotation control may be performed by supplementing the rotational position detection accuracy using position detection means such as an optical encoder.

[Other Embodiments]
The vibration type actuator drive control device or drive circuit in each of the above embodiments may be configured by an information processing device including a CPU, RAM, ROM, input / output device and the like. In this case, the CPU executes the control program to realize various functions of the vibration type actuator drive control device or drive circuit.

  The object of the present invention is achieved by executing the following processing. That is, a storage medium recording software program codes for realizing the functions of the above-described embodiments is supplied to a system or apparatus, and a computer (or CPU, MPU, etc.) of the system or apparatus is stored in the storage medium. This is a process of reading the program code.

  In this case, the program code itself read from the storage medium realizes the functions of the above-described embodiments, and the program code and the storage medium storing the program code constitute the present invention. .

  Moreover, the following can be used as a storage medium for supplying the program code. For example, floppy (registered trademark) disk, hard disk, magneto-optical disk, CD-ROM, CD-R, CD-RW, DVD-ROM, DVD-RAM, DVD-RW, DVD + RW, magnetic tape, nonvolatile memory card, ROM or the like. Alternatively, the program code may be downloaded via a network.

  The present invention also includes the case where the functions of the above-described embodiments are realized by executing the program code read by the computer. In addition, the OS (operating system) running on the computer performs part or all of the actual processing based on the instructions of the program code, and the functions of the above-described embodiments are realized by the processing. This is also included.

  Furthermore, the present invention includes a case where the functions of the above-described embodiments are realized by the following processing. That is, the program code read from the storage medium is written in a memory provided in a function expansion board inserted into the computer or a function expansion unit connected to the computer. Thereafter, based on the instruction of the program code, the CPU or the like provided in the function expansion board or function expansion unit performs part or all of the actual processing.

It is a figure which shows the structure of the vibration type actuator drive-controlled by the vibration type actuator drive control apparatus which concerns on the 1st Embodiment of this invention. It is a schematic diagram for demonstrating the vibration excited by the elastic body in 1st Embodiment. It is a circuit diagram which shows the structure of the vibration type actuator drive control apparatus for driving the vibration type actuator shown in FIG. It is a figure which shows the relationship between the amplitude of AC voltage VAC1 and VAC2 each applied to an input side magnetic coil, and the relative position of an input side magnetic coil and an output side magnetic coil. FIG. 5 is a diagram showing the relationship between the amplitudes of the AC voltages VAC1 and VAC2 set differently from the amplitudes shown in FIG. 4 and the relative positions of the input side magnetic coil and the output side magnetic coil. It is a figure which shows the structure of the vibration type actuator which provided the piezoelectric material only in the single side | surface of the downward protrusion part of an elastic body. It is a circuit diagram which shows the structure of the vibration type actuator drive control apparatus for driving the vibration type actuator shown in FIG. FIG. 8 is a circuit diagram showing a configuration in which the connection between the piezoelectric body and the magnetic coil is simplified in the vibration type actuator drive control device shown in FIG. 7. It is a circuit diagram which shows the structure of the vibration type actuator drive control apparatus applied to the vibration type actuator using electrostatic coupling. It is a circuit diagram which shows the structure of the vibration type actuator drive control apparatus in 2nd Embodiment. It is a figure which shows the relationship between the amplitude of AC voltage VAC1 and VAC2 each applied to the input side magnetic coil in 2nd Embodiment, and the relative position between an input side magnetic coil and an output side magnetic coil. It is a circuit diagram which shows the structure of the vibration type actuator drive control apparatus in 3rd Embodiment. It is a figure which shows the relationship between the amplitude of AC voltage VAC1 and VAC2 each applied to the input side magnetic coil in 3rd Embodiment, and the relative position between an input side magnetic coil and an output side magnetic coil. It is a circuit diagram which shows the structure of the vibration type actuator drive control apparatus in 4th Embodiment. It is a figure which shows the relationship between the amplitude of DC voltage VDC1 and VDC2 each applied to the variable resistor in 4th Embodiment, and the position of each sliding contact of a variable resistor. It is a figure which shows a part of magnetic coil which comprises the vibration type actuator in 5th Embodiment. It is a figure which shows the flat plate of a nonmagnetic body which contacts a vibrating body and this vibrating body. It is a figure which shows the alternating voltage input into an input side magnetic coil, respectively. It is a circuit diagram which shows the drive circuit which drives a piezoelectric material based on the alternating voltage output from an output side magnetic coil. It is a figure which shows the relationship between each amplitude of AC voltage VAC1, VAC2, VAC3, VAC4 to input, and the relative position between an input side magnetic coil and an output side magnetic coil. It is a figure which shows the elastic body and piezoelectric material which comprise the vibration type actuator in 6th Embodiment. It is a figure which shows the alternating voltage input into the input side magnetic coil in 6th Embodiment. It is a circuit diagram which shows the drive circuit which drives a piezoelectric material based on the alternating voltage output from the output side magnetic coil in 6th Embodiment. In 6th Embodiment, it is a figure which shows the relationship between each amplitude of the alternating voltage VAC1, VAC2, VAC3, VAC4 to input, and the relative position between the input side magnetic coil and the output side magnetic coil. It is XY top view which shows the input side magnetic coil which changed the division | segmentation number of the input side magnetic coil from 4 divisions to 8 divisions. It is a figure which shows the alternating voltage input into eight input side magnetic coils shown in FIG. It is a circuit diagram which shows the drive circuit which drives a piezoelectric material based on the alternating voltage output from the alternating voltage output side magnetic coil by input of alternating voltage VAC1-VAC8 as shown in FIG. FIG. 28 is a diagram illustrating a relationship between amplitudes of input AC voltages VAC1 to VAC8 and relative positions between the input side magnetic coil and the output side magnetic coil in the vibration type actuator shown in FIGS. It is a perspective view which shows the structure of the vibration type actuator in 7th Embodiment using a progressive vibration wave. It is a figure which shows the electrode pattern provided in one plane of the annular | circular shaped piezoelectric material in 7th Embodiment. It is a figure which shows the structure of the input side magnetic coil and output side magnetic coil in 7th Embodiment. It is a figure which shows the alternating voltage input into the input side magnetic coil in 7th Embodiment, respectively. It is a circuit diagram which shows the drive circuit which drives a piezoelectric material based on the alternating voltage output from the output side magnetic coil in 7th Embodiment. It is a figure which shows the relationship between the amplitude of AC voltage VAC1-VAC4 each input into the input side magnetic coil in 7th Embodiment, and angle (theta) shown in FIG. It is a figure which shows the relationship between the amplitude of alternating voltage VAC1-VAC4 when relative change of angle (theta) shown in FIG. 34 is made linear, and relative rotation angle (theta). It is a figure which shows the relationship between the amplitude of alternating voltage VAC1-VAC4 when relative rotation angle (theta) shown in FIG. 34 is changed in steps like a stepping motor, and relative rotation angle (theta).

Explanation of symbols

1, 55, 56, 58, 60 Elastic body 2, 3, 4, 35, 36, 37, 38, 59 Piezoelectric body (vibration means)
5, 6, 7, 8, 13, 27, 28, 29, 30, 31, 32, 33, 34, 47, 48, 49, 50, 51, 52, 53, 54, 63, 64, 65, 66, 67, 68 Magnetic coil (second voltage generating means)
9, 57 Flat plate (contact member)
10, 11, 39, 40, 41, 42, 43, 44, 45, 46, 69, 70 Inductance element (first voltage generating means)
12, 15 AC voltage generator 20, 21, 22, 23 Electrode 14 Power supply voltage generator 16, 17 AC-DC converter 18, 19 Multiplier 25, 26 Variable resistor 61 Rotating body

Claims (16)

An elastic body, a plurality of vibration means that vibrate the elastic body when a plurality of alternating voltages having different phases are applied thereto, and friction generated by vibration that is in pressure contact with the elastic body and is excited by the elastic body A vibration-type actuator drive control device for driving a vibration-type actuator having a contact member that moves relative to the elastic body by force;
A first voltage generating means for generating a first applied AC voltage having a first phase and applying the first applied AC voltage to the first vibrating means among the plurality of vibrating means;
The second and third phases have a second phase different from the first phase, and the amplitude increasing / decreasing directions change opposite to each other in accordance with a change in the relative positional relationship between the contact member and the elastic body . applying an AC voltage to generate a, is applied to the second vibration means of the plurality of vibrating means, we have a second voltage generating means for vibrating the elastic body,
The second voltage generating means receives the first and second AC voltages, and each amplitude varies according to the amplitude of the first and second AC voltages, and between the contact member and the elastic body. A vibration type actuator drive control device that generates the second and third applied AC voltages in which increasing and decreasing directions of amplitudes change in opposite directions according to a change in relative positional relationship between them. The plurality of vibration means are piezoelectric bodies and bonded to the elastic bodies,
The second and third applied AC voltages generated by the second voltage generating means are respectively fed to electrodes provided on both sides of the second exciting means made of a piezoelectric material. The vibration type actuator drive control device according to claim 1. The second voltage generating means includes
Receiving the first and second alternating voltage, and the first and second physical quantity generating means for generating a first and a second physical quantity corresponding to the amplitude of the first and second alternating voltage,
Third and fourth physical quantity detected and the second and respectively the relative position of the first and second physical quantity at a ratio corresponding to the relationship are respectively combined with the first and second physical quantity generating means vibration type actuator drive control device according to claim 1 or 2, characterized in that it comprises a first and second physical quantity detecting means for outputting a third the applied AC voltage, respectively. 4. The vibration type actuator drive control device according to claim 3, wherein the first to fourth physical quantities are magnetic flux or electric field. The first voltage generating means includes
A synthesizing unit that synthesizes an AC voltage having an amplitude corresponding to an average amplitude of the amplitudes of the second and third applied AC voltages generated by the second voltage generating unit;
Vibration type actuator drive controller according to any one of claims 1 to 4, characterized in that it comprises a phase shifting means for shifting the phase of the AC voltage that is synthesized by the synthesizing means. The first excitation means to which the first applied AC voltage is applied by the first voltage generation means generates vibration including a vibration component in a direction separating the contact member from the elastic body. The vibration type actuator drive control device according to any one of claims 1 to 5, wherein An elastic body, a plurality of vibration means that vibrate the elastic body when a plurality of alternating voltages having different phases are applied thereto, and friction generated by vibration that is in pressure contact with the elastic body and is excited by the elastic body A vibration-type actuator drive control device for driving a vibration-type actuator having a contact member that moves relative to the elastic body by force;
A first voltage generating means for generating a first applied AC voltage having a first phase and applying the first applied AC voltage to the first vibrating means among the plurality of vibrating means;
The second and third phases have a second phase different from the first phase, and the amplitude increasing / decreasing directions change opposite to each other in accordance with a change in the relative positional relationship between the contact member and the elastic body. A second voltage generating means for generating the applied AC voltage and applying it to the second vibrating means of the plurality of vibrating means to vibrate the elastic body;
Have
The second voltage generating means includes
AC voltage generating means for generating an AC voltage having a predetermined frequency;
Third and fourth DC voltage outputs respectively in response to first and second input DC voltage or the first and second input AC voltage, a third and a fourth direct voltage, the contact member DC voltage output means for increasing or decreasing in opposite directions according to a change in the relative positional relationship between the elastic body and the elastic body,
The DC voltage and the second and third applied alternating current by multiplying respectively the values of the third and fourth DC voltage outputted from the output means to the amplitude value of the output AC voltage from the AC voltage generation means dynamic actuator drive control unit vibration you; and a multiplying means for generating a voltage, respectively. An elastic body, a plurality of vibration means that vibrate the elastic body when a plurality of alternating voltages having different phases are applied thereto, and friction generated by vibration that is in pressure contact with the elastic body and is excited by the elastic body A vibration-type actuator drive control device for driving a vibration-type actuator having a contact member that moves relative to the elastic body by force;
A first voltage generating means for generating a first applied AC voltage having a first phase and applying the first applied AC voltage to the first vibrating means among the plurality of vibrating means;
Second and third, which have a second phase different from the first phase, and whose amplitude increasing / decreasing directions change opposite to each other in accordance with a change in the relative positional relationship between the contact member and the elastic body. A second voltage generating means for generating the applied AC voltage and applying the AC voltage to the second and third vibrating means of the plurality of vibrating means, respectively, to vibrate the elastic body in an opposite phase. And
The second voltage generating means receives the first and second AC voltages, and each amplitude varies according to the amplitude of the first and second AC voltages, and between the contact member and the elastic body. A vibration type actuator drive control device that generates the second and third applied AC voltages in which increasing and decreasing directions of amplitudes change in opposite directions according to a change in relative positional relationship between them. The plurality of vibration means are piezoelectric bodies and bonded to the elastic body, respectively, and the second and third vibration means are arranged along a relative movement direction of the contact member and the elastic body, 9. The vibration type actuator drive control device according to claim 8 , wherein the vibration type actuator drive control device is arranged so as to sandwich an elastic body. An elastic body, a plurality of vibration means that vibrate the elastic body when a plurality of alternating voltages having different phases are applied thereto, and friction generated by vibration that is in pressure contact with the elastic body and is excited by the elastic body A vibration-type actuator drive control device for driving a vibration-type actuator having a contact member that moves relative to the elastic body by force;
A first voltage generating means for generating a first applied AC voltage having a first phase and applying the first applied AC voltage to the first vibrating means among the plurality of vibrating means;
Two physical quantities having a second phase different from the first phase and whose magnitude increasing / decreasing directions change in opposite directions according to a change in a relative positional relationship between the contact member and the elastic body. The generated position-physical quantity conversion means;
A second applied AC voltage having an amplitude corresponding to the difference or sum of the two physical quantities generated by the position-physical quantity conversion means is generated and applied to the second excitation means among the plurality of excitation means. And a second voltage generating means. A vibration type actuator drive control device comprising: 11. The vibration type actuator drive control device according to claim 10, wherein the physical quantity generated by the position-physical quantity conversion means is one of magnetic flux, electric field, voltage, and current. 12. The vibration type actuator drive control device according to claim 10, wherein the second voltage generating means is composed of a passive element. An elastic body, a plurality of vibration means that vibrate the elastic body when a plurality of alternating voltages having different phases are applied thereto, and friction generated by vibration that is in pressure contact with the elastic body and is excited by the elastic body In a vibration actuator drive control method for driving a vibration actuator having a contact member that moves relative to the elastic body by force,
A first voltage generating step of generating a first applied AC voltage having a first phase and applying the first applied AC voltage to the first vibrating means of the plurality of vibrating means;
The second and third phases have a second phase different from the first phase, and the amplitude increasing / decreasing directions change opposite to each other in accordance with a change in the relative positional relationship between the contact member and the elastic body . generates the applied AC voltage, is applied to the second vibration means of the plurality of vibrating means, it has a second voltage generating step of vibrating the elastic body,
In the second voltage generation step, the first and second AC voltages are received, the amplitudes change according to the amplitudes of the first and second AC voltages, and the contact member and the elastic body A vibration type actuator drive control method characterized by generating the second and third applied AC voltages in which increasing and decreasing directions of each amplitude change in opposite directions according to a change in relative positional relationship between them. The vibration type actuator is
Receiving the first and second alternating voltage, and the first and second physical quantity generating means for generating a first and a second physical quantity corresponding to the amplitude of the first and second alternating voltage,
Third and fourth physical quantity detected and the second and respectively the relative position of the first and second physical quantity at a ratio corresponding to the relationship are respectively combined with the first and second physical quantity generating means First and second physical quantity detection means for outputting a third applied AC voltage,
The vibration according to claim 13 , further comprising a step of changing a relative positional relationship between the contact member and the elastic body by changing amplitudes of the first and second AC voltages. Type actuator drive control method. An elastic body, a plurality of vibration means that vibrate the elastic body when a plurality of alternating voltages having different phases are applied thereto, and friction generated by vibration that is in pressure contact with the elastic body and is excited by the elastic body In a vibration actuator drive control method for driving a vibration actuator having a contact member that moves relative to the elastic body by force,
A first voltage generating step of generating a first applied AC voltage having a first phase and applying the first applied AC voltage to the first vibrating means of the plurality of vibrating means;
Second and third, which have a second phase different from the first phase, and whose amplitude increasing / decreasing directions change opposite to each other in accordance with a change in the relative positional relationship between the contact member and the elastic body. A second voltage generating step of generating the applied AC voltage and applying the AC voltage to the second and third vibration means of the plurality of vibration means, respectively, to vibrate the elastic body in an opposite phase. And
In the second voltage generation step, the first and second AC voltages are received, the amplitudes change according to the amplitudes of the first and second AC voltages, and the contact member and the elastic body A vibration type actuator drive control method characterized by generating the second and third applied AC voltages in which increasing and decreasing directions of each amplitude change in opposite directions according to a change in relative positional relationship between them. An elastic body, a plurality of vibration means that vibrate the elastic body when a plurality of alternating voltages having different phases are applied thereto, and friction generated by vibration that is in pressure contact with the elastic body and is excited by the elastic body In a vibration actuator drive control method for driving a vibration actuator having a contact member that moves relative to the elastic body by force,
A first voltage generating step of generating a first applied AC voltage having a first phase and applying the first applied AC voltage to the first vibrating means of the plurality of vibrating means;
Two physical quantities having a second phase different from the first phase and whose magnitude increasing / decreasing directions change in opposite directions according to a change in a relative positional relationship between the contact member and the elastic body. The generated position-physical quantity conversion step;
A second applied AC voltage having an amplitude corresponding to the difference or sum of the two physical quantities generated in the position-physical quantity conversion step is generated and applied to the second vibrating means among the plurality of vibrating means. A vibration type actuator drive control method comprising: a second voltage generation step.

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