JP2006129553A5 - - Google Patents

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JP2006129553A5
JP2006129553A5 JP2004311078A JP2004311078A JP2006129553A5 JP 2006129553 A5 JP2006129553 A5 JP 2006129553A5 JP 2004311078 A JP2004311078 A JP 2004311078A JP 2004311078 A JP2004311078 A JP 2004311078A JP 2006129553 A5 JP2006129553 A5 JP 2006129553A5
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圧電素子を備えた振動体と該振動体に接触する移動体とを有し、該圧電素子交流電圧を供給することで該振動体発生する振動により該移動体を駆動する振動型駆動装置において、
前記振動体は交流電圧が供給されることによって、該振動体異なる複数の振動からなる第1の楕円振動と、異なる複数の振動からなり該第1の楕円振動とは異なる第2の楕円振動の、合成からなる振動が形成されることを特徴とする振動型駆動装置。
And a moving body in contact with the vibrator and the vibrator having a piezoelectric element, the vibration type driving apparatus for driving a moving body by vibration generated in the vibrating body by supplying an AC voltage to said piezoelectric element In
By the vibrator that AC voltage is supplied, the vibration member, the first and elliptical vibration composed of a plurality of different vibration, different different second ellipse to the elliptical vibration of the first made from the vibration vibration type driving apparatus characterized by a vibration, the vibration of a synthetic are formed.
前記第1の楕円振動と前記第2の楕円振動の合成により、前記振動体に楕円振動が形成されることを特徴とする請求項1記載の振動型駆動装置。 2. The vibration type driving device according to claim 1, wherein an elliptical vibration is formed in the vibrating body by combining the first elliptical vibration and the second elliptical vibration . 前記第1の楕円振動と前記第2の楕円振動の合成により、前記振動体進行性振動波が形成されることを特徴とする請求項1または請求項2記載の振動型駆動装置。 Wherein the first synthesis of elliptical vibration and the second elliptical vibration, the vibration type driving apparatus according to claim 1 or claim 2, wherein the traveling vibration wave is formed on the vibrator. 前記第1の楕円振動と前記第2の楕円振動の少なくとも一方は、前記移動体へ加圧する方向に振幅することを特徴とする請求項1乃至請求項3のいずれかに記載の振動型駆動装置。 Wherein the first at least one of the elliptical vibration and the second elliptical vibration, the vibration type driving according to any one of claims 1 to 3, characterized in that the amplitude in the direction of pressure to the movable body apparatus. 前記第1の楕円振動と前記第2の楕円振動位相を変化させることにより、前記移動体の速度を変化させることを特徴とする請求項1乃至請求項4のいずれかに記載の振動型駆動装置。 5. The vibration type drive according to claim 1, wherein a speed of the moving body is changed by changing a phase of the first elliptical vibration and the second elliptical vibration. 6. apparatus. 前記第1の楕円振動と前記第2の楕円振動位相を変化させることにより、前記移動体の駆動方向を変化させることを特徴とする請求項1乃至請求項5のいずれかに記載の振動型駆動装置。 The vibration according to any one of claims 1 to 5, wherein a direction of driving of the moving body is changed by changing a phase of the first elliptical vibration and the second elliptical vibration. Mold drive. 前記第1の楕円振動は前記振動体と前記移動体の加圧方向の振幅を含み、前記第2の楕円振動は前記移動体の駆動方向の振幅を含み、前記第2の楕円振動振幅の量を変化させることにより、前記移動体の速度を変化させることを特徴とする請求項1乃至請求項6のいずれかに記載の振動型駆動装置。 Wherein the first elliptical vibration comprises an amplitude of the pressure direction of the moving body and the vibrating body, said second elliptical vibration comprises an amplitude in the direction of driving of the movable body, the second amplitude of the elliptic vibration The vibration type driving apparatus according to claim 1, wherein the speed of the moving body is changed by changing the amount of the moving body. 前記第1の楕円振動と前記第2の楕円振動の一方が前記振動体おける面内振動であり、もう一方が面外振動であることを特徴とする請求項1乃至請求項7のいずれかに記載の振動型駆動装置。 Wherein a first elliptical vibration and the second one-plane vibration definitive to the vibration of the elliptical vibration, either one of claims 1 to 7, characterized in that the other is a plane vibration The vibration type driving device described in 1. 前記圧電素子には複数の電極が形成されており、前記複数の電極の少なくとも一部、前記第1の楕円振動を形成するための交流電圧および前記第2の楕円振動を形成するための交流電圧が供給される電極であることを特徴とする請求項1乃至請求項8のいずれかに記載の振動型駆動装置。 Wherein the piezoelectric element has a plurality of electrodes are formed, at least a portion of said plurality of electrodes, an AC to form an AC voltage and the second elliptical vibration for forming the first elliptical vibration 9. The vibration type driving apparatus according to claim 1, wherein the vibration type driving apparatus is an electrode to which a voltage is supplied. 圧電素子を備えた振動体と該振動体に接触する移動体とを有し、該圧電素子交流電圧を供給することで該振動体発生する振動により該移動体を駆動する振動型駆動装置において、前記振動体は交流電圧が供給されることによって、該振動体異なる複数の振動からなる第1の進行性振動波と、異なる複数の振動からなり該第1の進行性振動波とは異なる第2の進行性振動波の、合成からなる進行性振動波が形成されることを特徴とする振動型駆動装置。 And a moving body in contact with the vibrator and the vibrator having a piezoelectric element, the vibration type driving apparatus for driving a moving body by vibration generated in the vibrating body by supplying an AC voltage to said piezoelectric element in the vibrating body by the alternating voltage supplied to the vibrating body, a first traveling vibration wave comprising a plurality of different vibration, a plurality of different traveling vibration wave in said first consists vibration A vibration type driving device characterized in that a traveling vibration wave composed of a combination of different second traveling vibration waves is formed. 前記第1の進行性振動波と前記第2の進行性振動波の少なくとも一方は、前記移動体へ加圧する方向に振幅することを特徴とする請求項10記載の振動型駆動装置。 Wherein the first at least one and traveling vibration wave of said second traveling vibration wave of the vibration type driving apparatus according to claim 10, characterized in that the amplitude in the direction of pressure to the movable body. 前記第1の進行性振動波と前記第2の進行性振動波の位相を変化させることにより、前記移動体の速度を変化させることを特徴とする請求項10または請求項11記載の振動型駆動装置。 The vibration type drive according to claim 10 or 11, wherein a speed of the moving body is changed by changing a phase of the first progressive vibration wave and the second progressive vibration wave. apparatus. 前記第1の進行性振動波と前記第2の進行性振動波の位相を変化させることにより、前記移動体の駆動方向を変化させることを特徴とする請求項10乃至請求項12のいずれかに記載の振動型駆動装置。 By changing the first traveling vibration wave and the second traveling vibration wave in phase, any of claims 10 to 12, characterized in that changing the direction of the drive of the movable body The vibration type driving device described in 1. 前記第1の進行性振動波は前記振動体と前記移動体の加圧方向の振動を含み、前記第2の進行性振動波は前記移動体の駆動方向の振動を含み、前記第2の進行性振動波の振動振幅を変化させることにより、前記移動体の速度を変化させることを特徴とする請求項10乃至請求項13のいずれかに記載の振動型駆動装置。 Wherein the vibration of the pressing direction of the first traveling vibration wave is the vibrating body and the moving body, the second traveling vibration wave includes a vibration direction of the driving of the movable body, the second The vibration type driving device according to any one of claims 10 to 13, wherein a speed of the moving body is changed by changing a vibration amplitude of a progressive vibration wave. 前記第1の進行性振動波と前記第2の進行性振動波の一方が前記振動体おける面内振動であり、もう一方が面外振動であることを特徴とする請求項10乃至請求項14のいずれかに記載の振動型駆動装置。 Said one of said second traveling vibration wave and the first traveling vibration wave is the plane vibration definitive in the vibrator, claims 10 to, wherein the other is a plane vibration 14. The vibration type driving device according to any one of the above. 圧電素子を備えた振動体と該振動体に接触する移動体とを有し、該圧電素子交流電圧を供給することで該振動体発生する振動により該移動体を駆動する振動型駆動装置の制御装置において、前記振動体異なる複数の振動からなる第1の楕円振動と、異なる複数の振動からなり該第1の楕円振動とは異なる第2の楕円振動の、合成からなる振動を形成する交流電圧を、前記圧電素子に供給する供給手段を有することを特徴とする振動型駆動装置の制御装置。 And a moving body in contact with the vibrator and the vibrator having a piezoelectric element, the vibration type driving apparatus for driving a moving body by vibration generated in the vibrating body by supplying an AC voltage to said piezoelectric element in the control device, on the vibrator, different first and elliptical vibration composed of a plurality of vibration differs a plurality of vibration of different second elliptical vibration to the elliptical vibration of the first, the vibration of a synthetic A control device for a vibration type driving device, characterized by comprising supply means for supplying an alternating voltage to be formed to the piezoelectric element . 前記供給手段は、前記第1の楕円振動と前記第2の楕円振動の合成により、前記振動体に楕円振動を形成する交流電圧を、前記圧電素子に供給することを特徴とする請求項16記載の振動型駆動装置の制御装置。 The said supply means supplies the alternating voltage which forms an elliptical vibration in the said vibrating body to the said piezoelectric element by the synthesis | combination of the said 1st elliptical vibration and the said 2nd elliptical vibration. Control device for vibration type drive device. 前記供給手段は、前記第1の楕円振動と前記第2の楕円振動の合成により、前記振動体進行性振動波を形成する交流電圧を、前記圧電素子に供給することを特徴とする請求項17記載の振動型駆動装置の制御装置。 Claim wherein the supplying means, by the synthesis of the second elliptical vibration to the first elliptical vibration, an alternating voltage to form a traveling vibration wave in said vibration member, and supplying to the piezoelectric element 17. The control device for the vibration type driving device according to 17. 前記供給手段を制御して前記第1の楕円振動と前記第2の楕円振動の位相差を変化させることにより、前記移動体の速度および駆動方向の少なくとも一方を制御する駆動制御装置を有することを特徴とする請求項16乃至請求項18のいずれかに記載の振動型駆動装置の制御装置。 By changing the phase difference of the second elliptical vibration to the first elliptical vibration by controlling said supply means, to a drive control device for controlling at least one of speed and the driving direction of the movable body The control device of the vibration type driving device according to any one of claims 16 to 18. 前記第1の楕円振動は前記振動体と前記移動体の加圧方向の振動を含み、前記第2の楕円振動は前記移動体の駆動方向の振動を含み、前記供給手段を制御して前記第2の楕円振動振幅の量を変化させることにより、前記移動体の速度を制御する駆動制御装置を有することを特徴とする請求項16乃至請求項18のいずれかに記載の振動型駆動装置の制御装置。 Wherein the first elliptical vibration includes vibration of the pressure direction of the moving body and the vibrating body, said second elliptical vibration includes vibration direction of the driving of the movable body, wherein by controlling said supply means 19. The vibration type driving device according to claim 16, further comprising a drive control device that controls a speed of the moving body by changing an amount of amplitude of the second elliptical vibration. Control device. 前記第1の楕円振動は前記振動体と前記移動体の加圧方向の振動を含み、前記第2の楕円振動は前記移動体の駆動方向の振幅を含み、前記駆動制御装置は、前記供給手段に該第1の楕円振動を形成する交流電圧を供給させ、その後に該第1の楕円振動と該第2の楕円振動を形成する交流電圧を供給させることを特徴とする請求項19または請求項20に記載の振動型駆動装置の制御装置。 Wherein the first elliptical vibration includes vibration of the pressure direction of the moving body and the vibrating body, said second elliptical vibration comprises an amplitude in the direction of driving of the movable body, the drive control device, the supply to supply an alternating voltage to form an elliptical vibration of the first to the means, then, characterized in that to supply an alternating voltage to form an elliptical vibration of the first elliptical vibration and the second to claim 19, wherein Item 20. The control device for the vibration type driving device according to Item 20. 前記第1の楕円振動は前記振動体と前記移動体の加圧方向の振幅を含み、前記第2の楕円振動は前記移動体の駆動方向の振幅を含み、前記駆動制御装置は、前記供給手段に該第1の楕円振動と該第2の楕円振動を形成する交流電圧を供給させている状態から、該第2の楕円振動を形成する交流電圧の供給を停止させ、その後に該第1の楕円振動を形成する交流電圧の供給を停止させることを特徴とする請求項19または請求項20に記載の振動型駆動装置の制御装置。 Wherein the first elliptical vibration comprises an amplitude of the pressure direction of the moving body and the vibrating body, said second elliptical vibration comprises an amplitude in the direction of driving of the movable body, the drive control device, the supply an AC voltage of forming an elliptical vibration of the first elliptical vibration and the second from a state in which is supplied to the means to stop the supply of the AC voltage which forms the elliptical vibration of the second, first thereafter 21. The control device for the vibration type driving device according to claim 19 or 20, wherein the supply of the alternating voltage that forms the elliptical vibration of the motor is stopped. 圧電素子を備えた振動体と該振動体に接触する移動体とを有し、該圧電素子交流電圧を供給することで該振動体発生する振動により該移動体を駆動する振動型駆動装置の制御装置において、前記振動体異なる複数の振動からなる第1の進行性振動波と、異なる複数の振動からなり該第1の進行性振動波とは異なる第2の進行性振動波の、合成からなる振動を形成する交流電圧を、前記圧電素子に供給する供給手段を有することを特徴とする振動型駆動装置の制御装置。 And a moving body in contact with the vibrator and the vibrator having a piezoelectric element, the vibration type driving apparatus for driving a moving body by vibration generated in the vibrating body by supplying an AC voltage to said piezoelectric element of the control device, on the vibrator, different to the first traveling vibration wave consisting of vibration, different a plurality of vibration of the second traveling vibration wave is different from the traveling vibration wave in said first A control device for a vibration-type drive device, comprising: a supply means for supplying an alternating voltage that forms a vibration composed of a composition to the piezoelectric element . 圧電素子を備えた振動体と該振動体に接触する移動体とを有し、該圧電素子交流電圧を供給することで該振動体発生する振動により該移動体を駆動する振動型駆動装置の制御方法において、前記振動体に交流電圧を供給し、該振動体異なる複数の振動からなる第1の楕円振動を発生させ、前記振動体に交流電圧を供給し、該振動体異なる複数の振動からなり該第1の楕円振動とは異なる第2の楕円振動を発生させ、前記第1の楕円振動と前記第2の楕円振動の合成からなる振動を形成することを特徴とする振動型駆動装置の制御方法。 And a moving body in contact with the vibrator and the vibrator having a piezoelectric element, the vibration type driving apparatus for driving a moving body by vibration generated in the vibrating body by supplying an AC voltage to said piezoelectric element the control method of, supplying an AC voltage to the vibrating body, the vibrating body to generate a first elliptical vibration composed of a plurality of different vibration and supplies an AC voltage to the vibrating body, the vibrating body, different to generate a different second elliptical vibration to the plurality of elliptical vibration of the first consists vibration, and forming a vibration of a synthetic of the second elliptical vibration to the first elliptical vibration Control method of vibration type driving device. 前記第1の楕円振動と前記第2の楕円振動の位相差を変化させることにより、前記移動体の速度および駆動方向の少なくとも一方を制御することを特徴とする請求項24記載の振動型駆動装置の制御方法。 25. The vibration type drive according to claim 24, wherein at least one of a speed and a driving direction of the movable body is controlled by changing a phase difference between the first elliptical vibration and the second elliptical vibration. Control method of the device. 前記第1の楕円振動は前記振動体と前記移動体の加圧方向の振幅を含み、前記第2の楕円振動は前記移動体の駆動方向の振幅を含み、前記第2の楕円振動振幅の量を変化させることにより、前記移動体の速度を制御することを特徴とする請求項24記載の振動型駆動装置の制御方法。 Wherein the first elliptical vibration comprises an amplitude of the pressure direction of the moving body and the vibrating body, said second elliptical vibration comprises an amplitude in the direction of driving of the movable body, the second amplitude of the elliptic vibration The method of controlling a vibration type driving device according to claim 24, wherein the speed of the moving body is controlled by changing the amount of the moving body. 圧電素子を備えた振動体と該振動体に接触する移動体とを有し、該圧電素子交流電圧を供給することで該振動体発生する振動により該移動体を駆動する振動型駆動装置の制御方法において、
前記振動体に交流電圧を供給し、該振動体異なる複数の振動からなる第1の進行性振動波を発生させ、前記振動体に交流電圧を供給し、該振動体異なる複数の振動からなり該第1の進行性振動波とは異なる第2の進行性振動波を発生させ、前記第1の進行性振動波と前記第2の進行性振動波の合成からなる振動を形成することを特徴とする振動型駆動装置の制御方法。
And a moving body in contact with the vibrator and the vibrator having a piezoelectric element, the vibration type driving apparatus for driving a moving body by vibration generated in the vibrating body by supplying an AC voltage to said piezoelectric element In the control method of
It said supplying an AC voltage to the vibrating body, the vibrating body to generate a first traveling vibration wave comprising a plurality of different vibration and supplies an AC voltage to the vibrating body, the vibrating body, a plurality of different A second traveling vibration wave made of vibration and different from the first traveling vibration wave is generated to form a vibration composed of a combination of the first traveling vibration wave and the second traveling vibration wave. A control method for a vibration type driving apparatus.
圧電素子を備えた振動体と該振動体に接触する移動体とを有し、該圧電素子交流電圧を供給することで該振動体発生する振動により該移動体を駆動する振動型駆動装置に適用される駆動制御方法を、コンピュータに実行させるためのプログラムにおいて、前記振動体に交流電圧を供給し、該振動体異なる複数の振動からなる第1の楕円振動を発生させ、異なる複数の振動からなり該第1の楕円振動とは異なる第2の楕円振動を発生させ、前記第1の楕円振動と前記第2の楕円振動の合成からなる振動を形成するステップとを有することを特徴とするプログラム。 And a moving body in contact with the vibrator and the vibrator having a piezoelectric element, the vibration type driving apparatus for driving a moving body by vibration generated in the vibrating body by supplying an AC voltage to said piezoelectric element the drive control method applied to, in a program to be executed by a computer, to supply an AC voltage to the vibrating body, the vibrating body to generate a first elliptical vibration composed of a plurality of different vibration, different characterized by a step of forming a different second elliptical vibration to generate vibration of a synthetic of the second elliptical vibration to the first elliptical vibration from the elliptical vibration of the first made from the vibration Program. 圧電素子を備えた振動体と該振動体に接触する移動体とを有し、該圧電素子交流電圧を供給することで該振動体発生する振動により該移動体を駆動する振動型駆動装置の制御方法において、前記振動体に交流電圧を供給し、該振動体異なる複数の振動からなる第1の進行性振動波を発生させ、異なる複数の振動からなり該第1の楕円振動とは異なる第2の進行性振動波を発生させ、前記第1の進行性振動波と前記第2の進行性振動波の合成からなる振動を形成するステップとを有することを特徴とするプログラム。 And a moving body in contact with the vibrator and the vibrator having a piezoelectric element, the vibration type driving apparatus for driving a moving body by vibration generated in the vibrating body by supplying an AC voltage to said piezoelectric element the control method of the supplying AC voltage to the vibrating body, the vibrating body to generate a first traveling vibration wave comprising a plurality of different vibration, a plurality of different elliptical vibration of the first made from the vibration Generating a different second progressive vibration wave and forming a vibration composed of a combination of the first progressive vibration wave and the second progressive vibration wave.
JP2004311078A 2004-10-26 2004-10-26 Vibration type driving device, its control device and its control method Expired - Fee Related JP4594034B2 (en)

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JP5343322B2 (en) * 2007-03-30 2013-11-13 株式会社ニコン Drive device for vibration actuator, lens barrel and camera
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