JPH08149863A - Ultrasonic oscillator - Google Patents

Abstract

PURPOSE: To provide an efficient ultrasonic oscillator which can shift a mover at a high speed, getting large amplitude. CONSTITUTION: An ultrasonic oscillator is equipped with a base 4 consisting of a bar-shaped elastic member, a beam 5 consisting of an elastic member having resonance frequency roughly in accord with that of the base 4 being made, projecting in roughly vertical direction from the roughly center of this base 4, first and second vibrators 6a and 6b being buried in the recesses 4a and 4b provided on both sides of the beam standing on the topside of the base 4 and consisting of the stack type piezoelectric element for generating flexural oscillation in the base 4, and a mover 3 being a driven member welded to the end face of the beam 5. Flexural oscillation is generated in the base 4 and the beam 5 by applying AC voltage having a phase difference of approximately 90 deg. to each of the first and second vibrators 6a and 6b from high frequency power sources 7a and 7b.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic vibrator, and more particularly to an ultrasonic vibrator using an electro-mechanical energy conversion element.

[0002]

2. Description of the Related Art Various ultrasonic vibrators using an electro-mechanical energy conversion element such as a piezoelectric element or an electrostrictive element have been conventionally proposed.

[0003] For example, the applicant of the present invention has an ultra-structure including a base, an elastic body having a beam extending vertically from the center of the base, and first and second piezoelectric elements embedded in the base of the elastic body. In the acoustic wave vibrator, a high-frequency electric signal having a constant phase difference is applied to these first and second piezoelectric elements to generate bending vibration in the horizontal portion composed of the base and the first and second piezoelectric elements. Therefore, a technical means for causing the tip of the beam to generate a vibration that draws a substantially elliptical orbit and moving the moving body pressed against the tip of the beam is proposed.

Further, Japanese Patent Laid-Open No. 63-39473 discloses an elastic body composed of a base body which is a horizontal portion and a beam which is formed so as to vertically project from the central portion of the base body, and each of the base body and the beam is bent. A first and a second piezoelectric element for generating vibration are applied, and an electric signal in an ultrasonic region is applied to the piezoelectric element to generate composite resonance in the elastic body, and a moving body is pressed against the tip of the beam. There is disclosed a technical means for moving by moving.

Further, in Japanese Patent Application Laid-Open No. 2-87981, the first and second piezoelectric elements fixed to the connecting body in the horizontal direction and the first and second piezoelectric elements are arranged at right angles to each other. A third piezoelectric element fixed to the connecting body, and applying an electric signal to the first, second, and third piezoelectric elements,
A technical means is disclosed in which an end portion of the third piezoelectric element is drawn with a trajectory such as an oblique line, an ellipse, or a circle, and a movable body is pressed against the end portion to move.

[0006]

However, in the above-mentioned technical means proposed by the applicant of the present invention, when the horizontal portion is flexurally vibrated, the beam protruding vertically moves only in accordance with the flexural vibration of the horizontal portion. However, since it cannot be said that this beam is performing an effective operation, the moving speed of the moving body is also relatively slow, and the efficiency of the vibrator cannot be said to be sufficiently good.

Further, in the technical means disclosed in the above-mentioned Japanese Patent Laid-Open No. 63-39473, a dedicated piezoelectric element for vibrating the base body and the beam is provided to each of the base body which is the horizontal portion and the beam which is the vertical portion. Therefore, there is a problem that the cost is increased and the power consumption is increased.

Further, in the technical means disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 2-87981, the displacement required for driving is obtained only by the displacement of the piezoelectric element. Therefore, sufficient displacement cannot be obtained. The driving speed becomes slow and the efficiency becomes poor. Further, since the driving force is directly transmitted to the piezoelectric element, there is a drawback that the piezoelectric element is easily broken when a large force is applied.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide an ultrasonic transducer which can obtain a large amplitude and has high efficiency.

[0010]

In order to achieve the above-mentioned object, an ultrasonic transducer according to claim 1 of the present invention comprises a base portion made of a rod-shaped or plate-shaped elastic body and a base portion of this base portion. A beam portion made of an elastic body integrally formed with the base portion so as to project in a substantially vertical direction from substantially the center, and bending vibrations are provided on both sides of the base portion sandwiching the beam portion. And at least two electro-mechanical energy conversion elements for generating
An ultrasonic transducer for applying bending voltage to each of the mechanical energy conversion elements to generate alternating bending voltage on both sides of the beam portion in the base portion by applying an alternating voltage having a predetermined phase difference, The resonance frequencies of the beam portion are substantially the same.

An ultrasonic transducer according to a second aspect of the present invention is further pressure-contacted to an end face of the beam portion which is formed perpendicular to the amplitude direction of the bending vibration, and is relative to the ultrasonic transducer. 2. A mobile body configured to be movable to
As described in.

Further, the ultrasonic vibrator according to claim 3 of the present invention is the ultrasonic vibrator according to claim 1, wherein the electro-mechanical energy conversion element is a laminated piezoelectric element.

[0013]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 5 show a first embodiment of the present invention. FIG. 1 is a side view (A) showing an ultrasonic transducer,
(B) It is a front view.

The ultrasonic transducer 1 of the first embodiment comprises a driving body 2 and a moving body 3 which is driven by being pressed against the driving body 2.
And is configured.

As shown in the figure, the drive body 2 is formed integrally with the base 4 made of a rod-shaped elastic body forming a horizontal portion, and extends at a right angle from the center of the base 4. Beam 5 made of an elastic body and recesses 4a and 4b formed on both sides of the beam 5 of the base 4 sandwiching the beam 5 and forming a horizontal portion together with the base 4 and bending and vibrating. It has a vibrating body 6a, 6b.

The base 4 and the beam 5 constitute an elastic body having a T-shape as a whole, and are made of a metal having a relatively small vibration damping rate. This T-shaped elastic body is supported by an immovable member (not shown) in a state in which the flexural vibrations generated do not propagate. The moving body 3 is adapted to come into pressure contact with the upper end of the beam 5 made of such an elastic body.

The first and second vibrating bodies 6a and 6b are laminated piezoelectric elements which are electric-mechanical energy conversion elements fixed by an adhesive material such as epoxy resin, and the laminating direction of the base 4 extends. The recess 4 is formed so as to substantially match the direction.
By embedding it in a and 4b, the driving force for generating bending vibration is strengthened.

The first and second vibrating bodies 6a and 6b include
High frequency power supplies 7a and 7b for high frequency driving are electrically connected to each other.

The bending resonance frequency of the horizontal portion composed of the base 4 and the first and second vibrating bodies 6a, 6b and the bending resonance frequency of the beam 5 extending vertically from the base 4 are the same. And the resonance frequency from the high frequency power supplies 7a and 7b to the first and second vibrating bodies 6a,
By applying the voltage to 6b, the beam 5 is also flexibly vibrated in synchronization with the flexural vibration of the horizontal portion.

In this first embodiment, the moving body 3
Is moved to the left as shown by arrow A in FIG.
This will be described with reference to FIGS.

In the first vibrating body 6a, the base 4 and the first and second vibrating bodies 6a, 6a having an amplitude V0 as shown in FIG.
AC voltage V0sinω having a sine waveform g1 of an angular frequency ω that substantially matches the bending resonance frequency of the horizontal portion 6b and the beam 5.
When t is applied from the high frequency power supply 7a, the first vibrating body 6a vibrates for one cycle through the states of straight line → extension → straight line → contraction → straight line.

When an AC voltage -V0cosωt having a sine waveform g2, which is 90 ° out of phase with the sine waveform g1 as shown in FIG. 2B, is applied to the second vibrating body 6b from the high frequency power source 7b, The vibrating body 6b vibrates for one cycle through the states of contraction → straight line → extension → straight line → contraction.

Therefore, when the sinusoidal waves shown in FIGS. 2A and 2B are simultaneously applied to the first and second vibrating bodies 6a and 6b, the driving body 2 becomes as shown in FIGS. Vibrate as shown.

That is, in FIG. 3 (A), which substantially corresponds to the state of ωt = 0, the first vibrating body 6a is in a substantially linear state (since the base 4 etc. applies stress, it is not in a completely linear state). In addition, the second vibrating body 6b is in a contracted state, and the beam 5 is slightly bent to the right to be in a left convex state.

In FIG. 3B, the first and second vibrating bodies 6a,
6b is in a substantially intermediate state between FIG. 3 (A) and the next FIG. 3 (C), and the beam 5 is largely bent to the right to be in a left convex state.

FIG. 3 almost corresponding to the state of ωt = π / 2
In (C), the first vibrating body 6a is in a stretched state, the second vibrating body 6b is in a substantially straight line state, and the beam 5 is slightly bent to the right and is in a left convex state.

In FIG. 3D, the first and second vibrating bodies 6a,
6b has a substantially intermediate state between FIG. 3 (C) and the next FIG. 3 (E), and the beam 5 is in a substantially linear state.

FIG. 3E, which almost corresponds to the state of ωt = π
Then, the first vibrating body 6a is in a substantially linear state, and the second vibrating body 6b is
Is in a stretched state, and the beam 5 is slightly bent to the left and is in a state of being convex to the right.

In FIG. 3F, the first and second vibrating bodies 6a,
6b is in a substantially intermediate state between FIG. 3 (E) and the next FIG. 3 (G), and the beam 5 is largely bent to the left to be in a right convex state.

FIG. 3 almost corresponding to the state of ωt = 3π / 2
In (G), the first vibrating body 6a is in a contracted state, the second vibrating body 6b is in a substantially straight state, and the beam 5 is slightly bent to the left and is in a right convex state.

In FIG. 3H, the first and second vibrating bodies 6a,
6b is in a substantially intermediate state between FIG. 3 (G) and FIG. 3 (A), and the beam 5 is in a substantially linear state.

As described above, the bending vibration is generated in the horizontal portion, and the beam 5 having the same resonance frequency as that of the horizontal portion is
Bending vibration of left convex → straight line → right convex → straight line → left convex is occurring at the same time.

Then, the upper end surface of the beam 5 moves from the right to the left while approaching the moving body 3 [FIG. 3 (B) → (F)], and moves from the left to the right moving away from the moving body 3 [FIG. Three
(F) → (B)], a substantially circular motion or a substantially elliptical motion is performed, and the amplitude of this motion is further increased by the bending vibration of the beam 5 itself.

As a result, the moving body 3 is acted by the upper end surface of the beam 5 to kick it up from the right to the left.
The moving body 3 moves to the left.

In this way, even when the bending vibration generated in the horizontal portion has a small amplitude, it is converted into a large circular motion or a substantially elliptical motion at the upper end surface of the beam 5,
Furthermore, since the beam 5 itself performs bending vibration in synchronization with the horizontal portion to increase the amplitude, the moving body 3 can be moved quickly.

As the above-described operation is continuously performed, the moving body 3 moves in the direction of arrow A along with the bending vibration of the horizontal portion.
It will move continuously in the direction of.

When moving the moving body 3 to the right, if the signal applied to the second vibrating body 6b is out of phase by 180 ° with respect to the above case, that is, the first vibrating body 6 is moved.
By advancing the phase of the voltage applied to the second vibrating body 6b by 90 ° with respect to the voltage applied to a, the moving body 3 in FIG. 1 can be moved in the direction opposite to the arrow A.

The moving speed of the moving body 3 in the first embodiment is related to the amplitude of the bending vibration of the horizontal portion and the beam 5, and when the moving body 3 is moved quickly, the amplitude of the bending vibration should be increased. If the voltage applied to the first and second vibrating bodies 6a and 6b is constant, the first and second vibrating body 6
The frequencies applied to a and 6b may be changed to approach the bending resonance frequency of the horizontal portion and the beam 5.

When the moving body 3 is moved slowly, the amplitude of the flexural vibration may be reduced, and if the voltage applied to the first and second vibrating bodies 6a and 6b is constant, the first and second vibrations may be generated. It suffices to change the frequency applied to the bodies 6a and 6b to move away from the bending resonance frequency of the horizontal portion.

When the frequency of the applied voltage approaches or goes away from the bending resonance frequency of the horizontal portion, the horizontal portion and the beam 5
The amplitude of the flexural vibration that occurs in the beam changes, that is, the size of the circular or elliptical orbit drawn by the upper end surface of the beam 5 changes (that is, the size of the circle or ellipse itself changes approximately). Along with this, the moving speed of the moving body 3 is changed.

At this time, the phase difference between the voltage applied to the first vibrating body 6a and the voltage applied to the second vibrating body 6b is preferably changed within the range of 60 ° to 120 °, for example. When driving in the reverse direction, the phase difference is, for example, −60.
It may be changed within the range of ° to −120 °.

Further, by changing the input voltage applied to the first and second vibrating bodies 6a and 6b, the moving body 3
You can control the moving speed of the. That is, by changing the applied voltage, the amplitude of the flexural vibration generated in the horizontal portion and the beam 5 changes, which changes the size of the circular trajectory drawn by the upper end surface of the beam 5 to change the speed of the moving body 3. Is changed.

In addition, by changing the phase difference between the voltages input to the first and second vibrating bodies 6a and 6b, the moving body 3
It is also possible to control the moving speed of the. When the phase difference of the input voltage is changed, the horizontal displacement changes in the circular or elliptical orbit drawn by the upper end surface of the beam 5, and the vertical displacement does not change. In other words, the trajectory drawn by the upper end surface of the beam 5 becomes vertically or horizontally long and draws various substantially elliptical orbits, but the vertical displacement at this time remains unchanged.
Only the lateral displacement will be changed. Along with this, the speed of the moving body 3 is changed.

Even if the applied voltage is changed to a pulse signal and the duty is changed by changing the pulse width, the speed of the moving body 3 can be changed.

Next, with reference to FIGS. 4 and 5, a designing method for matching the bending resonance frequencies of the beam 5 which is the horizontal portion and the vertical portion will be described.

First, FIG. 4 shows a T-shaped driving body 2 of this embodiment.
FIG. 3 is a perspective view showing the dimension and shape of FIG. 3, in which dimension symbols used in the formulas described later are described.

That is, the length of the horizontal portion is l2, the width of the horizontal portion is B, the thickness of the horizontal portion is h2, the length of the beam 5 is l1, the width of the beam 5 is B, and the thickness of the beam 5 is h1. .

Next, FIG. 5 shows a model of the T-shaped driving body 2 shown in FIG.
(B) It is a front view.

In this model, both ends C1 and C2 of the horizontal part are supported, and the beam 5 is replaced with a mass m located at the center of the horizontal part. Here, the mass of the horizontal portion is mb.

In the models shown in FIG. 4 and FIG. 5, the resonance frequencies of the beam 5 which is the horizontal portion and the vertical portion are matched.

First, referring to FIG. 4, the resonance frequency f1 of the beam 5, which is the vertical portion, is obtained.

Here, assuming that the length of the beam 5 is l1, the longitudinal elastic modulus of the beam 5 is E1, the density of the beam 5 is ρ1, the cross-sectional area of the beam 5 is A, and the moment of inertia of area of the beam 5 is I1. , The primary resonance frequency f1 of the beam 5 is

[Equation 1] Is represented.

In addition, the resonance frequency f2 of the horizontal portion is as shown in FIG. 5, where the length of the horizontal portion is l2, the mass of the horizontal portion is mb, the longitudinal elastic modulus of the horizontal portion is E2, and the second moment of area of the horizontal portion is I2,
If the mass of the beam 5 is m, the spring constant k of the horizontal part is

[Equation 2] When this spring constant k is used, the resonance frequency f2 of the horizontal part is

(Equation 3) Can be represented by

Matching the resonance frequencies of the beams 5, which are the horizontal portion and the vertical portion, means that f1 = f2 is satisfied, and the driver shown in FIG. It is only necessary to adjust the respective dimensions of No. 2, or the material.

In this embodiment, the rod 3 is used as the moving body 3 which is pressed against the upper end surface of the elastic beam 5, but the shape of the moving body 3 is not limited to this.
For example, instead of the rod-shaped one, a disc-shaped one is adopted,
The side surface portion or the flat surface portion of the disk-shaped moving body may be pressed against the driving body 2 and rotated.

As the material of the elastic body composed of the base 4 and the beam 5, a material having a high mechanical Qm is suitable,
For example, stainless steel, brass, phosphor bronze, aluminum, ceramics, glass, or a composite material thereof may be used.

Further, the frictional contact surface of the moving body 3 with the driving body 2 is made of a material having excellent wear resistance.

According to the first embodiment as described above, since the beam performs bending resonance vibration in synchronism with the horizontal portion, a large amplitude can be obtained at the tip of the beam that comes into contact with the moving body, and a low voltage can be obtained. But it is possible to move the moving body at a high speed,
It becomes an efficient ultrasonic transducer.

Further, since the beam that directly drives the moving body is directly applied to the beam and is not directly applied to the vibrating body composed of the piezoelectric element, the vibrating body is not damaged and has sufficient strength. It is an ultrasonic transducer.

Further, since the moving body is moved at a high speed by skillfully forming the shape and size of the elastic body, there is no need to provide a beam-dedicated piezoelectric element, a power source or the like, and the cost is reduced. be able to.

FIG. 6 shows a second embodiment of the present invention and is a side view showing a driving body. In the second embodiment, description of the same parts as those of the first embodiment described above will be omitted, and mainly different points will be described.

The second embodiment is an example in which the first and second vibrating bodies 6a and 6b in the first embodiment are provided on the lower surface of the base 4.

That is, the concave portions 4c, 4 are formed on the lower surface of the base 4.
d is provided, and the first and second vibrating bodies 6a and 6b, which are laminated piezoelectric elements for bending and vibrating the base 4 in the recesses 4c and 4d, have a stacking direction substantially in the extending direction of the base 4. It is buried to match.

Then, the base 4 and the first and second vibrating bodies 6 are provided.
The bending resonance frequency of the horizontal portion formed by a and 6b and the bending resonance frequency of the beam 5 are substantially matched.

In the second embodiment as described above, similarly to the first embodiment, the first and second vibrating bodies 6a and 6b are
A high frequency voltage, which is a bending resonance frequency of the horizontal portion and the beam 5, is applied with a phase difference of approximately 90 ° to cause the horizontal portion and the beam 5 to resonate, and the movable body 3 (see FIG. 1) is pressure-welded to the end portion of the beam 5. The action of moving the same is the same.

According to the second embodiment, the same effect as that of the above-mentioned first embodiment is obtained.

FIG. 7 shows a third embodiment of the present invention and is a side view showing a driving body. In the third embodiment, description of the same parts as those of the first and second embodiments described above will be omitted, and only different points will be mainly described.

The elastic body of the third embodiment has a T-shape like the first embodiment, but the base 14 is not provided with a recess.

The first and second vibrating bodies 16a and 16b made of plate-shaped piezoelectric elements are fixed to the left and right sides of the beam 5 on the upper surface of the base 14 in the vibration direction of the bending vibration. 14 and the first and second vibrating bodies 16a, 1
A horizontal portion is formed by 6b. As in the above-described embodiments, the bending resonance frequencies of the horizontal portion and the beam 5 are the same.

When driving such an ultrasonic transducer, substantially the same as in the above-mentioned respective embodiments, the first and second
By applying a high frequency voltage, which is a bending resonance frequency of the horizontal portion and the beam 5, to the vibrating bodies 16a and 16b, resonance vibration is generated in the horizontal portion and the beam 5, and the moving body 3 (see FIG. 1) is pressed to move the moving body 3.

Although the first and second vibrating bodies 16a and 16b are fixed to the upper surface of the base 4 in the third embodiment, they are fixed to the lower surface of the base 4 as shown in FIG. I don't care.

According to the third embodiment, the same effects as those of the first and second embodiments can be obtained, and it becomes possible to use a plate-shaped piezoelectric element. Not having the advantage of making the base easier.

[Additional Notes] According to the above-described embodiment of the present invention as described in detail above, the following constitution can be obtained.

(1) A base portion formed of a rod-shaped or plate-shaped elastic body, and a beam portion formed of an elastic body integrally formed with the base portion so as to project in a substantially vertical direction from the substantial center of the base portion. And at least two electro-mechanical energy conversion elements which are provided on both sides of the base portion with the beam portion interposed therebetween and which generate bending vibration in the base portion,
Each of the electro-mechanical energy conversion element, an alternating voltage having a predetermined phase difference is applied to each of the electro-mechanical energy conversion elements, and ultrasonic vibrations that generate bending vibrations on both sides of the beam portion in the base portion. An ultrasonic transducer, which is a child, wherein the resonance frequencies of the base portion and the beam portion are substantially matched.

(2) An elastic body having a beam portion vertically projecting from substantially the center of a rod-shaped or plate-shaped base portion, and two electric-mechanical energy conversion elements provided on the base portion with the beam portion interposed therebetween. And an ultrasonic transducer that applies bending voltage to each of the two electro-mechanical energy conversion elements by applying an alternating voltage having a predetermined phase difference to the base portion. Then, an ultrasonic transducer characterized in that the resonance frequencies of the base portion and the beam portion are substantially matched.

(3) In Supplementary Note 1 or Supplementary Note 2, the beam portion is pressed against the end surface of the beam portion formed perpendicular to the amplitude direction of the bending vibration, and is movable relative to the ultrasonic transducer. Has a moving body.

(4) In Supplementary Note 1 or Supplementary Note 2, the electro-mechanical energy conversion element is a laminated piezoelectric element.

(5) In Appendix 4, the laminated piezoelectric element is formed by laminating it along the extending direction of the base portion.

(6) In Appendix 4, the laminated piezoelectric element causes bending vibration in the base portion by expanding and contracting along the extending direction of the base portion.

(7) In Supplementary Note 1 or Supplementary Note 2, the electromechanical energy conversion element is a plate-shaped piezoelectric element.

(8) In Supplementary Note 1 or Supplementary Note 2, the elastic body is made of a metal having a relatively small vibration damping rate.

(9) In Supplementary Note 1 or Supplementary Note 2, the elastic body is made of a material having a high mechanical Q.

(10) In Supplementary Note 1 or Supplementary Note 2,
The elastic body is made of any one of stainless steel, brass, phosphor bronze, aluminum, ceramics, and glass, or a composite material of these.

(11) In Supplementary Note 1 or Supplementary Note 2,
For each of the plurality of electro-mechanical energy conversion elements, 6
An alternating voltage having a phase difference of 0 ° to 120 ° or −60 ° to −120 ° is applied.

(12) In Supplementary Note 1 or Supplementary Note 2,
The frequency of the alternating voltage is substantially the same as the resonance frequency of the base portion and the beam portion of the elastic body.

(13) In Supplementary Note 1 or Supplementary Note 2,
The resonance frequency of the base portion and the beam portion is the resonance frequency of bending vibration in each portion.

[0087]

As described above, according to the present invention, it is possible to obtain an ultrasonic transducer having a large amplitude and high efficiency.

[Brief description of drawings]

FIG. 1A is a side view and FIG. 1B is a front view showing an ultrasonic transducer according to a first embodiment of the invention.

FIG. 2 is a diagram showing the first embodiment (A) first vibrating body,
(B) A diagram showing voltages applied to the second vibrating body.

FIG. 3 is a side view showing a vibration state of the ultrasonic transducer of the first embodiment.

FIG. 4 is a perspective view showing a dimensional shape of the driving body of the first embodiment.

FIG. 5A is a side view and FIG. 5B is a front view showing a model of the driving body of the first embodiment.

FIG. 6 is a side view showing a driving body according to a second embodiment of the present invention.

FIG. 7 is a side view showing a driving body according to a third embodiment of the present invention.

FIG. 8 is a side view showing another example of the driving body of the third embodiment.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Ultrasonic transducer 2 ... Driving body 3 ... Moving body 4,14 ... Base (base part) 5 ... Beam (beam part) 6a, 16a ... 1st vibrating body (electric-mechanical energy conversion element) 6b, 16b ... Second vibrating body (electrical-mechanical energy conversion element)

Claims (3)

[Claims] 1. A base portion made of a rod-shaped or plate-shaped elastic body, and a beam portion made of an elastic body integrally formed with the base portion so as to project in a substantially vertical direction from a substantially central portion of the base portion. And at least two electric-mechanical energy conversion elements that are provided on both sides of the base portion with the beam portion interposed therebetween and that generate bending vibration in the base portion. An ultrasonic transducer for applying a bending voltage to each of the conversion elements, the flexural vibrations being applied to both sides of the beam portion in the base portion by applying an alternating voltage having a predetermined phase difference between the base portion and the beam portion. An ultrasonic transducer characterized in that the resonance frequencies in are substantially the same. 2. A moving body, which is pressure-contacted to an end face of the beam portion formed perpendicular to the amplitude direction of the bending vibration and is configured to be movable relative to the ultrasonic transducer. The ultrasonic transducer according to claim 1, characterized in that 3. The electro-mechanical energy conversion element comprises:
The ultrasonic transducer according to claim 1, wherein the ultrasonic transducer is a laminated piezoelectric element.