JP4591749B2 - Ｍｏターゲット材の製造方法 - Google Patents

Ｍｏターゲット材の製造方法 Download PDF

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Publication number
JP4591749B2
JP4591749B2 JP2004121954A JP2004121954A JP4591749B2 JP 4591749 B2 JP4591749 B2 JP 4591749B2 JP 2004121954 A JP2004121954 A JP 2004121954A JP 2004121954 A JP2004121954 A JP 2004121954A JP 4591749 B2 JP4591749 B2 JP 4591749B2
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Prior art keywords
target material
powder
sintered
relative density
raw material
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JP2004121954A
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Japanese (ja)
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JP2005307225A5 (enExample
JP2005307225A (ja
Inventor
克典 岩崎
惠介 井上
和也 斉藤
典夫 植村
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Proterial Ltd
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Hitachi Metals Ltd
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Priority to JP2004121954A priority Critical patent/JP4591749B2/ja
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JP2004121954A 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法 Expired - Lifetime JP4591749B2 (ja)

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JP2004121954A JP4591749B2 (ja) 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法

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JP2004121954A JP4591749B2 (ja) 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法

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JP2005307225A JP2005307225A (ja) 2005-11-04
JP2005307225A5 JP2005307225A5 (enExample) 2007-04-26
JP4591749B2 true JP4591749B2 (ja) 2010-12-01

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JP2004121954A Expired - Lifetime JP4591749B2 (ja) 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5550328B2 (ja) * 2009-12-22 2014-07-16 株式会社東芝 Ｍｏスパッタリングターゲットおよびその製造方法
WO2013038668A1 (ja) * 2011-09-13 2013-03-21 株式会社アルバック Ｍｏ－Ｗターゲット及びその製造方法
US9334565B2 (en) * 2012-05-09 2016-05-10 H.C. Starck Inc. Multi-block sputtering target with interface portions and associated methods and articles
US20210008625A1 (en) * 2018-03-29 2021-01-14 A.L.M.T. Corp. Molybdenum material and method for manufacturing the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61141674A (ja) * 1984-12-13 1986-06-28 東京タングステン株式会社 タングステンシリサイド合金焼結体及びその製造方法
JP3244167B2 (ja) * 1998-01-19 2002-01-07 日立金属株式会社 タングステンまたはモリブデンターゲット
JP3748221B2 (ja) * 2001-10-23 2006-02-22 日立金属株式会社 Ｍｏ系スパッタリング用ターゲットおよびその製造方法

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