JP2005307225A5 - - Google Patents

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Publication number
JP2005307225A5
JP2005307225A5 JP2004121954A JP2004121954A JP2005307225A5 JP 2005307225 A5 JP2005307225 A5 JP 2005307225A5 JP 2004121954 A JP2004121954 A JP 2004121954A JP 2004121954 A JP2004121954 A JP 2004121954A JP 2005307225 A5 JP2005307225 A5 JP 2005307225A5
Authority
JP
Japan
Prior art keywords
raw material
material powder
powder
particle size
pressurized container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004121954A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005307225A (ja
JP4591749B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004121954A priority Critical patent/JP4591749B2/ja
Priority claimed from JP2004121954A external-priority patent/JP4591749B2/ja
Publication of JP2005307225A publication Critical patent/JP2005307225A/ja
Publication of JP2005307225A5 publication Critical patent/JP2005307225A5/ja
Application granted granted Critical
Publication of JP4591749B2 publication Critical patent/JP4591749B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2004121954A 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法 Expired - Lifetime JP4591749B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004121954A JP4591749B2 (ja) 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004121954A JP4591749B2 (ja) 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法

Publications (3)

Publication Number Publication Date
JP2005307225A JP2005307225A (ja) 2005-11-04
JP2005307225A5 true JP2005307225A5 (enExample) 2007-04-26
JP4591749B2 JP4591749B2 (ja) 2010-12-01

Family

ID=35436327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004121954A Expired - Lifetime JP4591749B2 (ja) 2004-04-16 2004-04-16 Ｍｏターゲット材の製造方法

Country Status (1)

Country Link
JP (1) JP4591749B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5550328B2 (ja) * 2009-12-22 2014-07-16 株式会社東芝 Ｍｏスパッタリングターゲットおよびその製造方法
WO2013038668A1 (ja) * 2011-09-13 2013-03-21 株式会社アルバック Ｍｏ－Ｗターゲット及びその製造方法
US9334565B2 (en) * 2012-05-09 2016-05-10 H.C. Starck Inc. Multi-block sputtering target with interface portions and associated methods and articles
US20210008625A1 (en) * 2018-03-29 2021-01-14 A.L.M.T. Corp. Molybdenum material and method for manufacturing the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61141674A (ja) * 1984-12-13 1986-06-28 東京タングステン株式会社 タングステンシリサイド合金焼結体及びその製造方法
JP3244167B2 (ja) * 1998-01-19 2002-01-07 日立金属株式会社 タングステンまたはモリブデンターゲット
JP3748221B2 (ja) * 2001-10-23 2006-02-22 日立金属株式会社 Ｍｏ系スパッタリング用ターゲットおよびその製造方法

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