JP2005307225A5 - - Google Patents

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Publication number
JP2005307225A5
JP2005307225A5 JP2004121954A JP2004121954A JP2005307225A5 JP 2005307225 A5 JP2005307225 A5 JP 2005307225A5 JP 2004121954 A JP2004121954 A JP 2004121954A JP 2004121954 A JP2004121954 A JP 2004121954A JP 2005307225 A5 JP2005307225 A5 JP 2005307225A5
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JP
Japan
Prior art keywords
raw material
material powder
powder
particle size
pressurized container
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JP2004121954A
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Japanese (ja)
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JP4591749B2 (en
JP2005307225A (en
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Priority to JP2004121954A priority Critical patent/JP4591749B2/en
Priority claimed from JP2004121954A external-priority patent/JP4591749B2/en
Publication of JP2005307225A publication Critical patent/JP2005307225A/en
Publication of JP2005307225A5 publication Critical patent/JP2005307225A5/ja
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Publication of JP4591749B2 publication Critical patent/JP4591749B2/en
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すなわち、純度９９．９％以上のＭｏ原料粉末は、一般的に化学的な合成法により作製されるため粉末の粒度が細かく一定体積あたりの粉末比表面積が大きいため流動性に乏しいという特徴を有している。そのため、Ｍｏにおいては、焼結時の原料粉末の粒度に対する依存性が極めて高く、その粒度により特徴が異なる。微細なＭｏ原料粉末では加圧容器に充填した場合の一定体積あたりの粉末比表面積が大きくなるため、焼結性に優れ相対密度は高めることができるものの、加圧容器への相対的な充填密度が低下するという欠点がある。一方、粗大なＭｏ原料粉末を作製した場合では、加圧容器への相対的な充填密度は高くなるものの焼結性が劣り、最終的な焼結体の相対密度は低下する。 That is, the Mo raw material powder having a purity of 99.9% or more is generally produced by a chemical synthesis method, and thus has a feature that the powder has a small particle size and a large powder specific surface area per fixed volume, so that the fluidity is poor. doing. Therefore, in Mo, the dependence with respect to the particle size of the raw material powder at the time of sintering is very high, and the characteristics differ depending on the particle size. The fine Mo raw material powder has a large powder specific surface area per fixed volume when filled into a pressurized container, so it has excellent sinterability and can increase the relative density, but the relative filling density into the pressurized container Has the disadvantage of lowering. On the other hand, when a coarse Mo raw material powder is produced, the relative packing density in the pressurized container is increased, but the sinterability is inferior, and the relative density of the final sintered body is lowered.

JP2004121954A 2004-04-16 2004-04-16 Manufacturing method of Mo target material Expired - Lifetime JP4591749B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004121954A JP4591749B2 (en) 2004-04-16 2004-04-16 Manufacturing method of Mo target material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004121954A JP4591749B2 (en) 2004-04-16 2004-04-16 Manufacturing method of Mo target material

Publications (3)

Publication Number Publication Date
JP2005307225A JP2005307225A (en) 2005-11-04
JP2005307225A5 true JP2005307225A5 (en) 2007-04-26
JP4591749B2 JP4591749B2 (en) 2010-12-01

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ID=35436327

Family Applications (1)

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JP2004121954A Expired - Lifetime JP4591749B2 (en) 2004-04-16 2004-04-16 Manufacturing method of Mo target material

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JP (1) JP4591749B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5550328B2 (en) * 2009-12-22 2014-07-16 株式会社東芝 Mo sputtering target and manufacturing method thereof
CN103797153B (en) * 2011-09-13 2016-11-23 株式会社爱发科 Mo-W target and manufacture method thereof
US9334565B2 (en) * 2012-05-09 2016-05-10 H.C. Starck Inc. Multi-block sputtering target with interface portions and associated methods and articles
WO2019188713A1 (en) * 2018-03-29 2019-10-03 株式会社アライドマテリアル Molybdenum material and method for producing same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61141674A (en) * 1984-12-13 1986-06-28 東京タングステン株式会社 Tungsten silicide alloy sintered body and manufacture
JP3244167B2 (en) * 1998-01-19 2002-01-07 日立金属株式会社 Tungsten or molybdenum target
JP3748221B2 (en) * 2001-10-23 2006-02-22 日立金属株式会社 Mo-based sputtering target and method for producing the same

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