JP4589725B2 - 反射防止特性を有する、機械的に耐久性のある単層コーティングの調製 - Google Patents
反射防止特性を有する、機械的に耐久性のある単層コーティングの調製 Download PDFInfo
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- JP4589725B2 JP4589725B2 JP2004549714A JP2004549714A JP4589725B2 JP 4589725 B2 JP4589725 B2 JP 4589725B2 JP 2004549714 A JP2004549714 A JP 2004549714A JP 2004549714 A JP2004549714 A JP 2004549714A JP 4589725 B2 JP4589725 B2 JP 4589725B2
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- oxide
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- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
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- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
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Description
a)i)ステップb)で選択した条件下で架橋しない少なくとも第1の材料と、
ii)ステップb)で選択した条件下で架橋する少なくとも第2の材料と、
iii)ナノ粒子と、
iv)任意選択的に少なくとも1種の溶媒と、を含む混合物を基材上に塗布するステップと、
b)基材上に塗布した混合物の架橋を誘起させるステップと、
c)続いて少なくとも第1の材料の一部を除去するステップと、を含む工程によって製造することができることが見出された。
CH2=C(R6)−COO(R7O)m−R8 (1)
などのビニル基を含むモノマーが含まれる。ここで、式中、R6は水素原子またはメチル基であり、R7は2〜8個、好ましくは2〜5個の炭素原子を含むアルキレン基であり、mは0〜12、好ましくは1〜8の整数であり、R8は水素原子または1〜12個、好ましくは1〜9個の炭素原子を含むアルキル基であり、または、R8は任意選択的に1〜2個の炭素原子を有するアルキル基で置換された、4〜20個の炭素原子を有するアルキル基を含むテトラヒドロフラン基であり、または、R8は任意選択的にメチル基で置換された4〜20個の炭素原子を有するアルキル基を含むジオキサン基であり、または、R8は任意選択的にC1〜C12のアルキル基、好ましくはC8〜C9のアルキル基で置換された芳香族基であり、および、エトキシル化イソデシル(メタ)アクリレート、エトキシル化ラウリル(メタ)アクリレートなどのアルコキシル化脂肪族単官能モノマーである。
<シリカナノ粒子のアクリル化および安定化>
酸化物粒子は、溶媒、例えばメチルエチルケトン中の酸化物粒子の懸濁物へ、アクリレート基の重合を抑制する化合物、例えば、p−メトキシフェノールと一緒に、アクリレート基を含むトリメトキシシラン化合物(例えば、式2による化合物)を加えることによって安定化することができる。攪拌の後、少量の水を混合物に加え、混合物を例えば80℃で3時間還流する。続いて脱水剤を加えて微量の水を除去し、得られる混合物を60℃で1時間攪拌する。適切な脱水剤は例えばオルトギ酸トリメチルである。他の安定化粒子(表1参照)の調製方法は、例えばメタノール中の酸化物粒子の懸濁物へ、アクリレート基の重合を抑制する化合物、例えば、ヒドロキノンモノメチルエーテルと一緒に、アクリレート基を含むメトキシシラン化合物(例えば、式2による)を加えることである。攪拌の後、混合物を例えば60℃で3時間還流した後、続いてアルコキシシラン化合物、例えばメチルトリメトキシシランを加える。60℃でさらに1時間還流し、脱水剤(例えばオルトギ酸トリメチル)を加え、得られる混合物を60℃で1時間攪拌する。
<基材上のフィルムの調製>
様々な混合物のフィルムを顕微鏡スライドガラス(透明性測定用)および/またはシリコンウェーハ(機械的特性の測定および厚さの測定用)の両方の上に次の手順で調製した。
<第1の材料および第2の材料の選択>
5種類の混合物を比較例として作り、実施例配合1の配合物と比較した。配合を表2に示す。混合物1および比較実験配合BおよびEの薄膜を顕微鏡スライドガラス上にスピンコートした。また、実施例配合1、比較実施例A、C、Dのフィルムをガラスプレート上に200μmのコーティング棒で調製し、厚さ数十ミクロンのフィルムを得た。架橋フィルムを適切な溶媒(例えばメタノール)で洗って非架橋成分を除去した。水溶性の非架橋成分(1、B、およびD)についてはこの洗浄を水で行った。比較実験配合Cの架橋フィルムを真空乾燥炉中で120℃で1時間加熱し、非架橋物質(水)を除去した。サンプルを裸眼および(偏光)顕微鏡を用いて評価した。
<コーティングの硬度および換算弾性係数の測定>
スピンコートしたコーティングの硬度および換算弾性係数を測定するために、6個の平坦なサンプルを洗浄ステップなしで調製した。使用した配合を表3に示す。硬度測定は、較正されたBerkovichダイアモンドチップを圧痕器として用い、Hysitron TriboScopeで行った。チップを既知の負荷でコーティングの中に挿入し、コーティング中への侵入深さを記録した。使用した典型的な負荷関数を図1に示し、得られた力−変位曲線を図2に示す。硬度は、H(GPaで)=Fmax/24.5d2の関係(式中Fmaxは加えた最大負荷であり、dは侵入深さである。)によって計算した。換算弾性係数はEr=0.5(π/24.5d2)1/2(δF/δd)を用いて、力−変位曲線から計算した。ナノ圧痕法実験に関するさらなる詳細はF.J.Balta Calleja & S.Fakirov、Microhardness of Polymer、Cambridge Un.Press、2000に見出すことができる。
<コーティングの耐引掻性の測定>
耐引掻性を測定するために、5個の平坦なサンプルを、「基材上のコーティングの調製」に記載したように洗浄ステップなしに調製した。使用した配合を表3に示す。測定は、較正されたBerkovichダイアモンドチップを圧痕器として用い、Hysitron Triboscopeで行った。測定の前に、AFMモードでHysitron Triboscopeを用いてコーティング表面を走査した。次いである負荷でチップをコーティング中に挿入し、20μms−1の速度でコーティングの上を引っ張った。この間に、横方向の引掻の動きのために消失したエネルギーUscratchを記録した。引掻の後、コーティングをAFMモードでHysitron Triboscopeを用いて再び試験した。引掻負荷の間に除去された容積ΔVを計算した。次いで耐引掻性はSr=ΔV/Uscratchで定義される。
<ナノ構造化フィルムまたはコーティングの耐引掻性>
「基材上のコーティングの調製」に記載したようにして、実施例配合2および3(表3)で3種類のナノ構造化コーティングを調製した。洗浄ステップの後、選択したサンプルに追加の熱処理を100℃で30分間行った。得られた実施例Iの(ナノ)表面構造AFM結像を図3に示す。ナノ引掻試験はそれらのナノ構造化コーティングについて前の実施例に記載したようにして行った。引掻後のナノ構造化コーティングのAFM結像を図4に示す。
<ナノ表面構造化コーティングの光学特性>
顕微鏡スライドガラスの一面に、「基材上のコーティングの調製」に記載したようにして、実施例配合1からナノ構造化フィルムを調製した。Perkin−Elmer Lambda−20 UV−Vis分光計でスペクトルの可視領域のスペクトル透明性を測定した。コーティングしないスライドガラスの透明性と共に、透明性を図5に示す。単一ナノ構造化コーティングの塗布によって透明性は明らかに増加する。
<他のナノ表面構造化コーティングの光学特性>
シリコンウェーハおよび顕微鏡スライドガラスの両方の面に、「基材上のコーティングの調製」に記載したようにして、実施例配合4からナノ構造化フィルムを調製した(表7を参照されたい)。得られた表面構造のAFM結像を図7に示す。Perkin−Elmer Lambda−20 UV−Vis分光計でスペクトルの可視領域のスペクトル透明性を測定した。コーティングしないスライドガラスの透明性と共に、透明性を図8に示す。単一ナノ構造化コーティングの塗布によって透明性は増加する。
Claims (10)
- a)i.ステップb)で選択した条件下で架橋しない少なくとも第1の材料と、
ii.ステップb)で選択した条件下で実際に架橋する少なくとも第2の材料と、
iii.400nm未満の直径を有するナノ粒子と、
iv.任意選択的に少なくとも1種の溶媒と、
を含む混合物を基材上に塗布するステップと、
b)基材上に塗布した混合物の架橋を起こし、続いて第1の材料の少なくとも一部を除去するステップと、
を含み、
前記第1の材料がヒドロキシプロピルセルロースである、単層硬質コートを調製する方法。 - 混合物が架橋の前に層分離を起こしていない、請求項1に記載の方法。
- ナノ粒子の少なくとも一部がその表面に有機基を有する請求項1または2に記載の方法。
- 前記ナノ粒子の少なくとも一部がその表面に架橋基を有する請求項1〜3のいずれか一項に記載の方法。
- ナノ粒子が無機ナノ粒子である請求項1〜4のいずれか一項に記載の方法。
- 前記ナノ粒子が酸化物粒子であり、当該酸化物粒子は酸化アルミニウム、酸化ケイ素、酸化ジルコニウム、酸化チタン、酸化アンチモン、酸化亜鉛、酸化スズ、酸化インジウム、および酸化セリウムの群から選択される酸化物の粒子である請求項5に記載の方法。
- 第2の材料に存在するモノマーまたはオリゴマーが、モノマーまたはオリゴマー1分子当たり、少なくとも2個の反応性/重合性または架橋性の基を有する、請求項1〜6のいずれか一項に記載の方法。
- ナノ粒子が50nm未満の直径を有する請求項1〜7のいずれか一項に記載の方法。
- 架橋の間または後に基材上に塗布した混合物を加熱する請求項1〜8のいずれか一項に記載の方法。
- 前記混合物が、1,4−ジオキサン、アセトン、アセトニトリル、クロロホルム、クロロフェノール、シクロヘキサン、シクロヘキサノン、シクロペンタノン、ジクロロメタン、酢酸ジエチル、ジエチルケトン、ジメチルカルボネート、ジメチルホルムアミド、ジメチルスルホキシド、エタノール、酢酸エチル、m−クレゾール、モノ−およびジ−アルキル置換グリコール、N,N−ジメチルアセトアミド、p−クロロフェノール、1,2−プロパンジオール、1−ペンタノール、1−プロパノール、2−ヘキサノン、2−メトキシエタノール、2−メチル−2−プロパノール、2−オクタノン、2−プロパノール、3−ペンタノン、4−メチル−2−ペンタノン、ヘキサフルオロイソプロパノール、メタノール、酢酸メチル、アセト酢酸メチル、メチルエチルケトン、メチルプロピルケトン、n−メチルピロリドン−2、酢酸n−ペンチル、フェノール、テトラフルオロ−n−プロパノール、テトラフルオロイソプロパノール、テトラヒドロフラン、トルエン、キシレン、および水からなる群より選択される少なくとも1種の溶媒を含む請求項1〜9のいずれか一項に記載の方法。
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EP20020079649 EP1418448A1 (en) | 2002-11-06 | 2002-11-06 | Preparation of a mechanically durable single layer coating with anti-reflective properties |
PCT/NL2003/000770 WO2004042434A1 (en) | 2002-11-06 | 2003-11-04 | Preparation of a mechanically durable single layer coating with anti-reflective properties |
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JP (1) | JP4589725B2 (ja) |
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2002
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- 2003-11-04 JP JP2004549714A patent/JP4589725B2/ja not_active Expired - Fee Related
- 2003-11-04 US US10/533,094 patent/US7655298B2/en not_active Expired - Fee Related
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- 2003-11-04 CN CNB2003801028502A patent/CN100432706C/zh not_active Expired - Fee Related
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- 2003-11-04 DE DE60328703T patent/DE60328703D1/de not_active Expired - Lifetime
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WO2004042434A1 (en) | 2004-05-21 |
EP2081057A2 (en) | 2009-07-22 |
TWI314589B (en) | 2009-09-11 |
CN1711486A (zh) | 2005-12-21 |
KR100771739B1 (ko) | 2007-10-30 |
EP1418448A1 (en) | 2004-05-12 |
EP1558949B1 (en) | 2009-08-05 |
US20090191346A1 (en) | 2009-07-30 |
JP2006505395A (ja) | 2006-02-16 |
EP2081057A3 (en) | 2012-07-04 |
AU2003279613A1 (en) | 2004-06-07 |
US20060014012A1 (en) | 2006-01-19 |
ATE438871T1 (de) | 2009-08-15 |
EP1558949A1 (en) | 2005-08-03 |
TW200419007A (en) | 2004-10-01 |
KR20050074985A (ko) | 2005-07-19 |
DE60328703D1 (de) | 2009-09-17 |
CN100432706C (zh) | 2008-11-12 |
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