JP4588396B2 - テトラフルオロシランの製造方法 - Google Patents

テトラフルオロシランの製造方法 Download PDF

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Publication number
JP4588396B2
JP4588396B2 JP2004276569A JP2004276569A JP4588396B2 JP 4588396 B2 JP4588396 B2 JP 4588396B2 JP 2004276569 A JP2004276569 A JP 2004276569A JP 2004276569 A JP2004276569 A JP 2004276569A JP 4588396 B2 JP4588396 B2 JP 4588396B2
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Japan
Prior art keywords
tetrafluorosilane
reactor
sif
sulfuric acid
producing
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JP2004276569A
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Japanese (ja)
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JP2005119956A (ja
JP2005119956A5 (https=
Inventor
正和 岡
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Resonac Holdings Corp
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Showa Denko KK
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Priority to JP2004276569A priority Critical patent/JP4588396B2/ja
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Publication of JP2005119956A5 publication Critical patent/JP2005119956A5/ja
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JP2004276569A 2003-09-25 2004-09-24 テトラフルオロシランの製造方法 Expired - Fee Related JP4588396B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004276569A JP4588396B2 (ja) 2003-09-25 2004-09-24 テトラフルオロシランの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003333061 2003-09-25
JP2004276569A JP4588396B2 (ja) 2003-09-25 2004-09-24 テトラフルオロシランの製造方法

Publications (3)

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JP2005119956A JP2005119956A (ja) 2005-05-12
JP2005119956A5 JP2005119956A5 (https=) 2007-06-14
JP4588396B2 true JP4588396B2 (ja) 2010-12-01

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ID=34622000

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JP2004276569A Expired - Fee Related JP4588396B2 (ja) 2003-09-25 2004-09-24 テトラフルオロシランの製造方法

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JP (1) JP4588396B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4576312B2 (ja) 2005-10-03 2010-11-04 東北電力株式会社 四フッ化ケイ素の製造方法、及びそれに用いる製造装置
JP5291098B2 (ja) * 2007-08-23 2013-09-18 オブシェストボ、エス、オルガニチェンノイ、オトベトストベンノストユ、“ソーラー、エスアイ” フルオロケイ酸溶液からの多結晶シリコン製造の技術ならびにその製造のための設備
KR101215490B1 (ko) 2010-06-11 2012-12-26 주식회사 케이씨씨 다양한 플루오라이드 원료들과 비정질 실리카 및 황산을 이용한 사불화규소의 연속 제조방법
CN108455616A (zh) * 2017-12-20 2018-08-28 湖北瓮福蓝天化工有限公司 一种氟硅酸除氯方法及装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1196983B (it) * 1986-07-23 1988-11-25 Enichem Agricoltura Spa Procedimento per la produzione di tetrafluoruro di silicio
US5232602A (en) * 1992-07-01 1993-08-03 Hemlock Semiconductor Corporation Phosphorous removal from tetrachlorosilane
JP3734009B2 (ja) * 1999-06-17 2006-01-11 信越化学工業株式会社 クロロシラン類中のボロン化合物の分離方法及びクロロシラン類蒸発用組成物
JP3909385B2 (ja) * 2001-07-12 2007-04-25 昭和電工株式会社 テトラフルオロシランの製造方法およびその用途

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