JP4576381B2 - 応力が加わる系のための基板アセンブリ - Google Patents
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
- H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
- H01L21/86—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body the insulating body being sapphire, e.g. silicon on sapphire structure, i.e. SOS
Description
第2基板の組み合わせ面および/または組み合わせ面とは反対側の第2基板の面から、第2基板にモチーフが形成、作製または蝕刻されている構造を提供する。
第1材料によって構成された第1基板と、第2材料によって構成された第2基板とを、先に述べたように、共に組み合わせる工程と、
基板の一方の一部を分離または分割して、他方の基板上に膜を残す工程と、を含む方法を提供する。
この図は、例えば石英基板(膨張係数5×10−7K−1)または砒化ガリウム(膨張係数6×10−6K−1)、およびシリコン基板(膨張係数2.5×10−6K−1)といった、異なる熱膨張係数c0およびc2を有する、2つの基板40,42を共に組み合わせることに関係している。
Claims (15)
- 第1熱膨張係数および前記第1熱膨張係数とは異なる第2熱膨張係数をそれぞれ有し、且つ第1および第2組み合わせ面(81,83)をそれぞれ有する、膜と基板(85,82)とが組み合わされてなり、
前記第2組み合わせ面(83)が平坦であり、
前記基板(82)には、前記第2組み合わせ面(83)とは反対側の面からモチーフが形成され、
前記モチーフは、前記反対側の面に蝕刻された周期的かつ幾何学的なモチーフであって、組み合わせ界面において発生した熱弾性応力を吸収する機械的な系を形成するように、前記第1および第2組み合わせ面と平行な平面において、弾力性または柔軟性があり、
前記膜が、以下の材料:砒化ガリウム、サファイア、ゲルマニウム、窒化ガリウム、シリコン、シリコン−ゲルマニウム(SiGe)、燐化インジウム、窒化アルミニウムおよび炭化ケイ素の1つによって構成されており、
前記基板が、以下の材料:シリコン、石英、サファイア、炭化ケイ素およびガラスの1つによって構成されている、構造。 - 第1熱膨張係数および前記第1熱膨張係数とは異なる第2熱膨張係数をそれぞれ有し、且つ第1および第2組み合わせ面(81,83)をそれぞれ有する、膜と基板(85,82)とが組み合わされてなり、
前記第2組み合わせ面(83)が平坦であり、
前記基板(82)には、前記第2組み合わせ面(83)とは反対側の面からモチーフが形成され、
前記モチーフは、鋲、トレンチまたは鋸の切り口の形状であって、組み合わせ界面において発生した熱弾性応力を吸収する機械的な系を形成するように、前記第1および第2組み合わせ面と平行な平面において、弾力性または柔軟性があり、
前記膜が、以下の材料:砒化ガリウム、サファイア、ゲルマニウム、窒化ガリウム、シリコン、シリコン−ゲルマニウム(SiGe)、燐化インジウム、窒化アルミニウムおよび炭化ケイ素の1つによって構成されており、
前記基板が、以下の材料:シリコン、石英、サファイア、炭化ケイ素およびガラスの1つによって構成されている、構造。 - 前記膜および前記基板が、雰囲気温度において少なくとも10%異なる熱膨張係数を有する、請求項1または請求項2に記載の構造。
- 前記膜が、薄層(85)の形状である、請求項1ないし請求項3のいずれか1項に記載の構造。
- 前記薄層の厚さが、0.1μm〜2μmの範囲にある、請求項4に記載の構造。
- ヘテロエピタキシーによって材料を堆積させるためのデバイスであって、請求項1ないし請求項5のいずれか1項に記載の構造を含む、デバイス。
- 第1材料から形成された膜を第2材料から形成された基板上に製造するための方法であって、
それぞれ第1熱膨張係数および前記第1熱膨張係数とは異なる第2熱膨張係数を有し、且つそれぞれ第1および第2組み合わせ面(81,83)を有する、第1および第2基板(80,82)を共に組み合わせる工程と、
前記基板の一方の一部を分離し、または前記基板の一方を減厚して、他方の基板上に膜(85)を残す工程と、を含み、
前記第2組み合わせ面(83)が平坦であり、
前記第2基板(82)には、前記第2組み合わせ面(83)とは反対側の面からモチーフが形成されており、前記モチーフは、前記反対側の面に蝕刻された周期的かつ幾何学的なモチーフであって、組み合わせ界面において発生した熱弾性応力を吸収する機械的な系を形成するように、前記第1および第2組み合わせ面と平行な平面において、弾力性または柔軟性があり、
前記第1基板が、以下の材料:砒化ガリウム、サファイア、ゲルマニウム、窒化ガリウム、シリコン、シリコン−ゲルマニウム(SiGe)、燐化インジウム、窒化アルミニウムおよび炭化ケイ素の1つによって構成されており、
前記第2基板が、以下の材料:シリコン、石英、サファイア、炭化ケイ素およびガラスの1つによって構成されている、方法。 - 第1材料から形成された膜を第2材料から形成された基板上に製造するための方法であって、
それぞれ第1熱膨張係数および前記第1熱膨張係数とは異なる第2熱膨張係数を有し、且つそれぞれ第1および第2組み合わせ面(81,83)を有する、第1および第2基板(80,82)を共に組み合わせる工程と、
前記基板の一方の一部を分離し、または前記基板の一方を減厚して、他方の基板上に膜(85)を残す工程と、を含み、
前記第2組み合わせ面(83)が平坦であり、
前記第2基板(82)には、前記第2組み合わせ面(83)とは反対側の面からモチーフが形成されており、前記モチーフは、鋲、トレンチまたは鋸の切り口の形状であって、組み合わせ界面において発生した熱弾性応力を吸収する機械的な系を形成するように、前記第1および第2組み合わせ面と平行な平面において、弾力性または柔軟性があり、
前記第1基板が、以下の材料:砒化ガリウム、サファイア、ゲルマニウム、窒化ガリウム、シリコン、シリコン−ゲルマニウム(SiGe)、燐化インジウム、窒化アルミニウムおよび炭化ケイ素の1つによって構成されており、
前記第2基板が、以下の材料:シリコン、石英、サファイア、炭化ケイ素およびガラスの1つによって構成されている、方法。 - 前記2つの共に組み合わされた基板の組が、当該方法の期間内に温度上昇の段階を経る、請求項7または請求項8に記載の方法。
- 前記2つの基板が、ウェーハ結合(wafer bonding)、分子接触(molecular contact)または接着性結合(adhesive bonding)によって、共に組み合わされている、請求項7ないし請求項9のいずれか1項に記載の方法。
- 前記第1基板(80)が、脆弱領域(87)を含む、請求項7ないし請求項9のいずれか1項に記載の方法。
- 前記第2基板(80)が、脆弱領域(87)を含む、請求項7ないし請求項9のいずれか1項に記載の方法。
- 前記脆弱領域が、多孔質層の形成によって作製されている、請求項11または請求項12に記載の方法。
- 前記脆弱領域が、イオン注入を行うことによって作製されている、請求項11または請求項12に記載の方法。
- 前記基板の一方の分離または減厚が、研磨またはエッチングによって実施される、請求項7または請求項8に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0308447A FR2857502B1 (fr) | 2003-07-10 | 2003-07-10 | Substrats pour systemes contraints |
PCT/EP2004/007632 WO2005006419A2 (en) | 2003-07-10 | 2004-07-08 | Substrate assembly for stressed systems |
Publications (2)
Publication Number | Publication Date |
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JP2007527108A JP2007527108A (ja) | 2007-09-20 |
JP4576381B2 true JP4576381B2 (ja) | 2010-11-04 |
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Application Number | Title | Priority Date | Filing Date |
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JP2006518168A Active JP4576381B2 (ja) | 2003-07-10 | 2004-07-08 | 応力が加わる系のための基板アセンブリ |
Country Status (8)
Country | Link |
---|---|
US (2) | US7067393B2 (ja) |
EP (1) | EP1644967A2 (ja) |
JP (1) | JP4576381B2 (ja) |
KR (1) | KR100863081B1 (ja) |
CN (1) | CN1816897B (ja) |
FR (1) | FR2857502B1 (ja) |
TW (1) | TWI310212B (ja) |
WO (1) | WO2005006419A2 (ja) |
Families Citing this family (15)
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KR100652395B1 (ko) * | 2005-01-12 | 2006-12-01 | 삼성전자주식회사 | 다이-휨이 억제된 반도체 소자 및 그 제조방법 |
US7374957B2 (en) * | 2005-07-11 | 2008-05-20 | Asml Netherlands B.V. | Method of calibrating or qualifying a lithographic apparatus or part thereof, and device manufacturing method |
US20070090156A1 (en) * | 2005-10-25 | 2007-04-26 | Ramanathan Lakshmi N | Method for forming solder contacts on mounted substrates |
US7420202B2 (en) | 2005-11-08 | 2008-09-02 | Freescale Semiconductor, Inc. | Electronic device including a transistor structure having an active region adjacent to a stressor layer and a process for forming the electronic device |
US7723224B2 (en) * | 2006-06-14 | 2010-05-25 | Freescale Semiconductor, Inc. | Microelectronic assembly with back side metallization and method for forming the same |
US9019830B2 (en) | 2007-05-15 | 2015-04-28 | Imagine Communications Corp. | Content-based routing of information content |
JP5123573B2 (ja) * | 2007-06-13 | 2013-01-23 | ローム株式会社 | 半導体発光素子およびその製造方法 |
DE102007054856A1 (de) * | 2007-11-16 | 2009-05-20 | Osram Gesellschaft mit beschränkter Haftung | Beleuchtungsvorrichtung mit einer Substratplatte und einem Kühlkörper |
FR2942911B1 (fr) | 2009-03-09 | 2011-05-13 | Soitec Silicon On Insulator | Procede de realisation d'une heterostructure avec adaptation locale de coefficient de dilatation thermique |
FR2966285B1 (fr) * | 2010-10-14 | 2013-09-06 | St Microelectronics Crolles 2 | Procédé de formation de circuits intégrés sur substrat semi conducteur contraint |
FR2977069B1 (fr) | 2011-06-23 | 2014-02-07 | Soitec Silicon On Insulator | Procede de fabrication d'une structure semi-conductrice mettant en oeuvre un collage temporaire |
CN102420582A (zh) * | 2011-11-29 | 2012-04-18 | 浙江大学 | 基于柔性衬底的声表面波器件的结构及其制造方法 |
CN104409411B (zh) * | 2014-11-24 | 2017-12-08 | 上海华虹宏力半导体制造有限公司 | 半导体器件及其形成方法 |
FR3039003B1 (fr) * | 2015-07-17 | 2017-07-28 | Soitec Silicon On Insulator | Procede de fabrication d'un substrat |
KR102136197B1 (ko) | 2018-12-17 | 2020-07-22 | 주식회사 티씨케이 | 탄화탄탈 코팅 재료 |
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DE3231062A1 (de) | 1982-08-20 | 1984-02-23 | Bayer Ag, 5090 Leverkusen | Verfahren zur herstellung von beschichtungsmassen, waessrige dispersionen von pu-reaktiv-systemen und ihre verwendung zur beschichtung |
US5126820A (en) * | 1985-02-01 | 1992-06-30 | Advanced Micro Devices, Inc. | Thermal expansion compensated metal lead frame for integrated circuit package |
GB2237929A (en) * | 1989-10-23 | 1991-05-15 | Philips Electronic Associated | A method of manufacturing a semiconductor device |
JP3300060B2 (ja) * | 1992-10-22 | 2002-07-08 | キヤノン株式会社 | 加速度センサー及びその製造方法 |
JP3410202B2 (ja) * | 1993-04-28 | 2003-05-26 | 日本テキサス・インスツルメンツ株式会社 | ウェハ貼着用粘着シートおよびこれを用いた半導体装置の製造方法 |
FR2715501B1 (fr) * | 1994-01-26 | 1996-04-05 | Commissariat Energie Atomique | Procédé de dépôt de lames semiconductrices sur un support. |
MY112145A (en) * | 1994-07-11 | 2001-04-30 | Ibm | Direct attachment of heat sink attached directly to flip chip using flexible epoxy |
US5506753A (en) * | 1994-09-26 | 1996-04-09 | International Business Machines Corporation | Method and apparatus for a stress relieved electronic module |
US5759753A (en) * | 1995-07-19 | 1998-06-02 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric device and method of manufacturing the same |
EP0996967B1 (de) * | 1997-06-30 | 2008-11-19 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren zur Herstellung von schichtartigen Gebilden auf einem Halbleitersubstrat, Halbleitersubstrat sowie mittels des Verfahrens hergestellte Halbleiterbauelemente |
JP3809733B2 (ja) * | 1998-02-25 | 2006-08-16 | セイコーエプソン株式会社 | 薄膜トランジスタの剥離方法 |
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US6455924B1 (en) * | 2001-03-22 | 2002-09-24 | International Business Machines Corporation | Stress-relieving heatsink structure and method of attachment to an electronic package |
US6503847B2 (en) * | 2001-04-26 | 2003-01-07 | Institute Of Microelectronics | Room temperature wafer-to-wafer bonding by polydimethylsiloxane |
FR2837981B1 (fr) * | 2002-03-28 | 2005-01-07 | Commissariat Energie Atomique | Procede de manipulation de couches semiconductrices pour leur amincissement |
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2003
- 2003-07-10 FR FR0308447A patent/FR2857502B1/fr not_active Expired - Lifetime
-
2004
- 2004-01-08 US US10/755,006 patent/US7067393B2/en active Active
- 2004-07-08 WO PCT/EP2004/007632 patent/WO2005006419A2/en active Application Filing
- 2004-07-08 JP JP2006518168A patent/JP4576381B2/ja active Active
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Publication number | Publication date |
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CN1816897A (zh) | 2006-08-09 |
FR2857502B1 (fr) | 2006-02-24 |
EP1644967A2 (en) | 2006-04-12 |
FR2857502A1 (fr) | 2005-01-14 |
US20060192269A1 (en) | 2006-08-31 |
TW200509217A (en) | 2005-03-01 |
WO2005006419A3 (en) | 2005-02-10 |
US7279779B2 (en) | 2007-10-09 |
KR100863081B1 (ko) | 2008-10-13 |
US7067393B2 (en) | 2006-06-27 |
TWI310212B (en) | 2009-05-21 |
KR20060034685A (ko) | 2006-04-24 |
WO2005006419A2 (en) | 2005-01-20 |
US20050006740A1 (en) | 2005-01-13 |
JP2007527108A (ja) | 2007-09-20 |
CN1816897B (zh) | 2010-06-23 |
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