JP4563847B2 - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP4563847B2
JP4563847B2 JP2005076947A JP2005076947A JP4563847B2 JP 4563847 B2 JP4563847 B2 JP 4563847B2 JP 2005076947 A JP2005076947 A JP 2005076947A JP 2005076947 A JP2005076947 A JP 2005076947A JP 4563847 B2 JP4563847 B2 JP 4563847B2
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Japan
Prior art keywords
substrate
unit
glass substrate
stage
inspection apparatus
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Expired - Fee Related
Application number
JP2005076947A
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English (en)
Japanese (ja)
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JP2006258631A5 (enExample
JP2006258631A (ja
Inventor
達雄 市瀬
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Olympus Corp
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Olympus Corp
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Priority to JP2005076947A priority Critical patent/JP4563847B2/ja
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Publication of JP2006258631A5 publication Critical patent/JP2006258631A5/ja
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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2005076947A 2005-03-17 2005-03-17 基板検査装置 Expired - Fee Related JP4563847B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005076947A JP4563847B2 (ja) 2005-03-17 2005-03-17 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005076947A JP4563847B2 (ja) 2005-03-17 2005-03-17 基板検査装置

Publications (3)

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JP2006258631A JP2006258631A (ja) 2006-09-28
JP2006258631A5 JP2006258631A5 (enExample) 2008-04-24
JP4563847B2 true JP4563847B2 (ja) 2010-10-13

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Family Applications (1)

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JP2005076947A Expired - Fee Related JP4563847B2 (ja) 2005-03-17 2005-03-17 基板検査装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200010762A (ko) * 2018-07-23 2020-01-31 주식회사 신코 이미지센서를 구비한 광학필름 검사장치

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100944425B1 (ko) 2008-04-29 2010-02-25 주식회사 포스코 강판 표면의 결함마크 검출 장치
JP5553532B2 (ja) * 2009-06-04 2014-07-16 パナソニック株式会社 光学検査装置
US8502967B2 (en) * 2011-02-01 2013-08-06 Cooper S. K. Kuo Apparatus for optical inspection
US9699447B2 (en) * 2012-11-26 2017-07-04 Frito-Lay North America, Inc. Calibration of a dynamic digital imaging system for detecting defects in production stream
JP7512733B2 (ja) * 2020-07-21 2024-07-09 株式会社サタケ 穀粒検査器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2595927B2 (ja) * 1992-07-07 1997-04-02 東洋紡績株式会社 シート状物色差検査装置
JP4133026B2 (ja) * 2002-06-24 2008-08-13 株式会社堀場製作所 フラットパネルディスプレイの欠陥検査装置を校正するための標準試料および欠陥検査装置の校正方法
JP2004333198A (ja) * 2003-05-01 2004-11-25 Olympus Corp 基板検査装置
JP4342869B2 (ja) * 2003-08-11 2009-10-14 大日本印刷株式会社 検査システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200010762A (ko) * 2018-07-23 2020-01-31 주식회사 신코 이미지센서를 구비한 광학필름 검사장치
KR102080043B1 (ko) 2018-07-23 2020-04-07 주식회사 신코 이미지센서를 구비한 광학필름 검사장치

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Publication number Publication date
JP2006258631A (ja) 2006-09-28

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