JP2006258631A5 - - Google Patents

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Publication number
JP2006258631A5
JP2006258631A5 JP2005076947A JP2005076947A JP2006258631A5 JP 2006258631 A5 JP2006258631 A5 JP 2006258631A5 JP 2005076947 A JP2005076947 A JP 2005076947A JP 2005076947 A JP2005076947 A JP 2005076947A JP 2006258631 A5 JP2006258631 A5 JP 2006258631A5
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JP
Japan
Prior art keywords
substrate
unit
stage
inspection apparatus
irradiation region
Prior art date
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Application number
JP2005076947A
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English (en)
Japanese (ja)
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JP2006258631A (ja
JP4563847B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2005076947A priority Critical patent/JP4563847B2/ja
Priority claimed from JP2005076947A external-priority patent/JP4563847B2/ja
Publication of JP2006258631A publication Critical patent/JP2006258631A/ja
Publication of JP2006258631A5 publication Critical patent/JP2006258631A5/ja
Application granted granted Critical
Publication of JP4563847B2 publication Critical patent/JP4563847B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005076947A 2005-03-17 2005-03-17 基板検査装置 Expired - Fee Related JP4563847B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005076947A JP4563847B2 (ja) 2005-03-17 2005-03-17 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005076947A JP4563847B2 (ja) 2005-03-17 2005-03-17 基板検査装置

Publications (3)

Publication Number Publication Date
JP2006258631A JP2006258631A (ja) 2006-09-28
JP2006258631A5 true JP2006258631A5 (enExample) 2008-04-24
JP4563847B2 JP4563847B2 (ja) 2010-10-13

Family

ID=37098059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005076947A Expired - Fee Related JP4563847B2 (ja) 2005-03-17 2005-03-17 基板検査装置

Country Status (1)

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JP (1) JP4563847B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100944425B1 (ko) 2008-04-29 2010-02-25 주식회사 포스코 강판 표면의 결함마크 검출 장치
JP5553532B2 (ja) * 2009-06-04 2014-07-16 パナソニック株式会社 光学検査装置
US8502967B2 (en) * 2011-02-01 2013-08-06 Cooper S. K. Kuo Apparatus for optical inspection
US9699447B2 (en) * 2012-11-26 2017-07-04 Frito-Lay North America, Inc. Calibration of a dynamic digital imaging system for detecting defects in production stream
KR102080043B1 (ko) * 2018-07-23 2020-04-07 주식회사 신코 이미지센서를 구비한 광학필름 검사장치
JP7512733B2 (ja) * 2020-07-21 2024-07-09 株式会社サタケ 穀粒検査器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2595927B2 (ja) * 1992-07-07 1997-04-02 東洋紡績株式会社 シート状物色差検査装置
JP4133026B2 (ja) * 2002-06-24 2008-08-13 株式会社堀場製作所 フラットパネルディスプレイの欠陥検査装置を校正するための標準試料および欠陥検査装置の校正方法
JP2004333198A (ja) * 2003-05-01 2004-11-25 Olympus Corp 基板検査装置
JP4342869B2 (ja) * 2003-08-11 2009-10-14 大日本印刷株式会社 検査システム

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