JP4558646B2 - 集積化薄膜光電変換装置 - Google Patents
集積化薄膜光電変換装置 Download PDFInfo
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
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- H—ELECTRICITY
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
- H01L31/076—Multiple junction or tandem solar cells
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
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Description
本発明の薄膜光電変換装置の各構成要素について説明する。
透明基板2としては、例えば、ガラス板や透明樹脂フィルムなどを用いることができる。ガラス板としては、大面積な板が安価に入手可能で透明性、絶縁性が高い、SiO2、Na2O及びCaOを主成分とする両主面が平滑なフロート板ガラスを用いることができる。
一方、結晶質シリコン光電変換ユニット4bの厚さは、0.1μm〜10μmの範囲内にあることが好ましく、0.1μm〜5μmの範囲内にあることがより好ましい。
一方の主面上にSnO2膜3が形成された910mm×910mmの寸法を有するガラス基板2を用意した。図1に示すように、このガラス基板の表面に形成されたSnO2膜3に、レーザースクライブにより、分離溝21及び絶縁分離溝14を形成した。このとき、図3に示すようにプラズマCVD装置の基板ホルダー31への設置時に、基板ホルダー31の内周から約1mm離れるように、幅約100μmの第1の絶縁分離溝14aを形成し、更に第1の絶縁分離溝14aから内側に約0.7mmの距離に、幅約100μmの第2の絶縁分離溝14bを形成した。
表2は、各実施例及び各比較例のハイブリッド型集積化薄膜光電変換装置の800nmにおける分光反射率である。
表3は、各実施例及び各比較例のハイブリッド型集積化薄膜光電変換装置の光電変換特性である。
結晶質シリコン光電変換層を、表1の比較例1に示す流量条件で形成した以外は実施例1と同様にして比較例1のハイブリッド型集積化薄膜光電変換装置1を作成した。比較例1のハイブリッド型集積化薄膜光電変換装置1では、封止前の膜面観察で白濁変色領域51が無い910×455mmサイズのハイブリッド型集積化薄膜光電変換装置1が得られた。実施例1と同様に比較例1のハイブリッド型集積化薄膜光電変換装置1の初期出力と分光反射率を測定すると、それぞれ表3の比較例1と表2の比較例1のようになった。800nmにおける分光反射率の絶対値の差は5%以下であり、初期出力は40.1Wであり、短絡電流、開放端電圧、フィルファクタはそれぞれ、0.455A、129.5V、0.681であった。比較例1では、実施例1に比べ、開放端電圧およびフィルファクタは明らかに低く、初期出力も低い値となった。
結晶質シリコン光電変換層を、表1の比較例2に示す流量条件で形成した以外は実施例1と同様にして比較例2のハイブリッド型集積化薄膜光電変換装置1を作成した。比較例2のハイブリッド型集積化薄膜光電変換装置1では、封止前の膜面観察で図4に示すような、光電変換セル10の両端に白く変色した白濁変色領域51が見られ、この白濁変色領域51は910×455mmサイズのハイブリッド型集積化薄膜光電変換装置1にした際、集積方向50に平行な周辺絶縁分離溝42aの片方から15mm以上30mm以下の幅で存在し、光電変換領域52の総面積に対して白濁変色領域51は約5.5%であった。
一方の主面上にSnO2膜3が形成された365mm×465mmの寸法を有するガラス基板2を用意し、図7に示すように分離溝21を形成した。
結晶質シリコン光電変換層を、表1の比較例3に示す流量条件で形成した以外は実施例2と同様にして比較例3のハイブリッド型集積化薄膜光電変換装置1を作成した。比較例3のハイブリッド型集積化薄膜光電変換装置1では、封止前の膜面観察で白濁変色領域51が無い300×400mmサイズのハイブリッド型集積化薄膜光電変換装置1が得られた。実施例1と同様に比較例3のハイブリッド型集積化薄膜光電変換装置1の初期出力と分光反射率を測定すると、それぞれ表2の比較例3と表3の比較例3のようになった。800nmにおける分光反射率の絶対値の差は5%以下であり、初期出力は11.8Wであり、短絡電流、開放端電圧、フィルファクタはそれぞれ、0.441A、37.0V、0.681であった。比較例3では、実施例2に比べ、開放端電圧およびフィルファクタは明らかに低く、初期出力も低い。
結晶質シリコン光電変換層を、表1の比較例4に示す流量条件で形成した場合、図7に模式的に示すように、光電変換セル10の両端に白く変色した白濁変色領域51が見られた。この白濁変色領域51は300×400mmサイズのハイブリッド型集積化薄膜光電変換装置1にした際、集積方向50に平行な周辺絶縁分離溝42aの片方から5mm以上16mm以下の幅で存在し、光電変換領域52の総面積に対して白濁変色領域51は約5.2%であった。
2 透明基板
3 透明電極膜
4a,4b 半導体薄膜光電変換ユニット
5 裏面電極膜
6 封止樹脂層
7 有機保護層
10 光電変換セル
12 リード線
14a,14b,14c 絶縁分離溝
21,22 分離溝
23 接続溝
31 基板ホルダー
32 バックプレート
41 切断線
42a,42b 周辺絶縁分離溝
50 集積方向
51 白濁変色領域
52 光電変換領域
61 分光反射率測定点1
62 分光反射率測定点2
63 分光反射率測定点3
64 分光反射率測定点4
65 分光反射率測定点5
66 分光反射率測定点6
67 分光反射率測定点7
68 分光反射率測定点8
69 分光反射率測定点9
Claims (4)
- 透明基板の一方の主面上に少なくとも透明電極膜、結晶質シリコン光電変換ユニット及び裏面電極膜が順に形成され、
前記透明電極膜、結晶質シリコン光電変換ユニット、および裏面電極膜が複数の光電変換セルを形成するように複数の分離溝によって分離されてなり、かつ、それらの複数のセルが接続用溝を介して互いに電気的に直列接続された集積化薄膜光電変換装置であって、
前記結晶質シリコン光電変換ユニットの表面の一部に、十分に結晶化されておらず多くの非晶質シリコンを含む白濁変色領域を有し、
前記白濁変色領域の面積は光電変換領域全体の面積の5%以下であり、
前記白濁変色領域が、前記光電変換領域の直列接続した方向に平行な境界から光電変換領域側へ2mm以上10mm以下の幅で存在することを特徴とする集積化薄膜光電変換装置。 - 前記白濁領域は、波長800nmの単色光を前記透明基板の他方の主面から10°入射して測定した拡散成分を含む絶対反射率が、他の領域に対して5%以上大きい領域である請求項1に記載の集積化薄膜光電変換装置。
- 前記透明電極膜と前記結晶質シリコン光電変換ユニットとの間に、非晶質シリコン光電変換ユニットをさらに備えてなることを特徴とする請求項1または2に記載の集積化薄膜光電変換装置。
- 半導体薄膜光電変換ユニットが形成されている面積が600cm2以上であることを特徴とする請求項1〜3のいずれか1項に記載の集積化薄膜光電変換装置。
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JP2003174423 | 2003-06-19 | ||
JP2003174423 | 2003-06-19 | ||
PCT/JP2004/007803 WO2004114417A1 (ja) | 2003-06-19 | 2004-05-28 | 薄膜光電変換装置 |
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US (1) | US7678992B2 (ja) |
EP (1) | EP1635402B1 (ja) |
JP (1) | JP4558646B2 (ja) |
KR (1) | KR101067354B1 (ja) |
CN (1) | CN100485973C (ja) |
AT (1) | ATE441213T1 (ja) |
AU (1) | AU2004250460B2 (ja) |
DE (1) | DE602004022807D1 (ja) |
ES (1) | ES2329371T3 (ja) |
WO (1) | WO2004114417A1 (ja) |
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US7492028B2 (en) * | 2005-02-18 | 2009-02-17 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device and manufacturing method of the same, and a semiconductor device |
JP4411337B2 (ja) * | 2007-06-25 | 2010-02-10 | シャープ株式会社 | 積層型光電変換装置 |
WO2009012346A1 (en) * | 2007-07-16 | 2009-01-22 | Ascent Solar Technologies, Inc. | Methods for fabricating p-type cadmium selenide |
EP2187449A1 (en) * | 2007-08-14 | 2010-05-19 | Mitsubishi Heavy Industries, Ltd. | Photoelectric conversion device, and its manufacturing method |
US8129613B2 (en) * | 2008-02-05 | 2012-03-06 | Twin Creeks Technologies, Inc. | Photovoltaic cell comprising a thin lamina having low base resistivity and method of making |
US20110284061A1 (en) * | 2008-03-21 | 2011-11-24 | Fyzikalni Ustav Av Cr, V.V.I. | Photovoltaic cell and methods for producing a photovoltaic cell |
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- 2004-05-28 US US10/543,516 patent/US7678992B2/en not_active Expired - Fee Related
- 2004-05-28 DE DE602004022807T patent/DE602004022807D1/de not_active Expired - Lifetime
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- 2004-05-28 AT AT04735406T patent/ATE441213T1/de not_active IP Right Cessation
- 2004-05-28 ES ES04735406T patent/ES2329371T3/es not_active Expired - Lifetime
- 2004-05-28 KR KR1020057012589A patent/KR101067354B1/ko not_active IP Right Cessation
- 2004-05-28 CN CNB2004800040338A patent/CN100485973C/zh not_active Expired - Fee Related
- 2004-05-28 AU AU2004250460A patent/AU2004250460B2/en not_active Ceased
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Also Published As
Publication number | Publication date |
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ES2329371T3 (es) | 2009-11-25 |
WO2004114417A1 (ja) | 2004-12-29 |
EP1635402B1 (en) | 2009-08-26 |
KR101067354B1 (ko) | 2011-09-23 |
ATE441213T1 (de) | 2009-09-15 |
EP1635402A1 (en) | 2006-03-15 |
AU2004250460A1 (en) | 2004-12-29 |
CN1748322A (zh) | 2006-03-15 |
EP1635402A4 (en) | 2007-02-21 |
US20060097259A1 (en) | 2006-05-11 |
CN100485973C (zh) | 2009-05-06 |
JPWO2004114417A1 (ja) | 2006-08-03 |
AU2004250460B2 (en) | 2009-08-27 |
DE602004022807D1 (de) | 2009-10-08 |
US7678992B2 (en) | 2010-03-16 |
KR20060064703A (ko) | 2006-06-13 |
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