JP4283849B2 - 薄膜光電変換装置およびその製造方法 - Google Patents
薄膜光電変換装置およびその製造方法 Download PDFInfo
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- 238000006243 chemical reaction Methods 0.000 title claims description 287
- 239000010409 thin film Substances 0.000 title claims description 71
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 98
- 239000010408 film Substances 0.000 claims description 66
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 64
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 62
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 51
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 49
- 239000012535 impurity Substances 0.000 claims description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 238000012423 maintenance Methods 0.000 claims description 6
- 230000000593 degrading effect Effects 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 229910021426 porous silicon Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 329
- 239000000758 substrate Substances 0.000 description 30
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 23
- 229910000077 silane Inorganic materials 0.000 description 21
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 20
- 239000007789 gas Substances 0.000 description 19
- 239000001257 hydrogen Substances 0.000 description 19
- 229910052739 hydrogen Inorganic materials 0.000 description 19
- 230000000052 comparative effect Effects 0.000 description 16
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 14
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 10
- 239000011521 glass Substances 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 229910000676 Si alloy Inorganic materials 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 6
- 239000001569 carbon dioxide Substances 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 5
- 150000002431 hydrogen Chemical class 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 4
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000009751 slip forming Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000013081 microcrystal Substances 0.000 description 2
- 229910052990 silicon hydride Inorganic materials 0.000 description 2
- -1 silicon hydride) Chemical compound 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910008310 Si—Ge Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
- H01L31/077—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells the devices comprising monocrystalline or polycrystalline materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Description
前記導電型決定不純物を含まないシリコン酸化物層を、前記結晶質シリコン光電変換ユニットに接して、かつ、その厚さが10nm以下となるように形成することで、高抵抗な薄い層なので、直列抵抗への影響を及ぼさずに界面での漏れ電流を低減し変換効率を改善することができる。
2 透明電極膜
3 結晶質シリコン光電変換ユニット
3a 結晶質シリコン光電変換ユニットのp型層
3b 結晶質シリコンi型層(結晶質シリコン光電変換層)
3c 結晶質シリコン光電変換ユニットのn型層
4 シリコン酸化物層
4a 反射層としても機能するシリコン酸化物層である導電型層
4b シリコン酸化物層である中間反射層
5 裏面電極膜
6 非晶質シリコン光電変換ユニット
6a 非晶質シリコン光電変換ユニットのp型層
6b 非晶質シリコンi型層(非晶質シリコン光電変換層)
6c 非晶質シリコン光電変換ユニットのn型層
本発明の一つの実施形態において、シリコン酸化物からなる層4aは、導電型層、及び反射層の機能を両方果たしており、このシリコン酸化物からなる層4aは前記両方の機能を果たすのであれば、p型の導電型層の一部とすることもできる。
参考例1として、図1に示される結晶質シリコン光電変換ユニット3を有する単接合型結晶質シリコン薄膜光電変換装置を作製した。
(比較例1)
参考例1と全く同条件でp型層3a、結晶質シリコンi型層3b、反射層としても機能するシリコン酸化物層である導電型層4a及びn型層3cの各層を別々のプラズマCVD反応室で形成し、薄膜光電変換装置を形成した。なお、比較例1においても各層のプラズマCVD反応室内には参考例1と同様平行平板型の放電用電極が設置されており、該放電用電極は水平に設置された基体1の上方に位置する。参考例1と同様に出力特性を測定したところ、表1の比較例1に示すように、開放電圧(Voc)が0.500V、短絡電流密度(Jsc)が26.7mA/cm2、曲線因子(FF)が68.5%、そして変換効率が9.14%であった。参考例1と比較例1の変換効率は同程度という事が出来る。
参考例2として、図2に示される非晶質シリコン光電変換ユニット6及び結晶質シリコン光電変換ユニット3を有する多接合型シリコン薄膜光電変換装置を作製した。
参考例2と全く同条件でp型層3a、結晶質シリコンi型層3b、反射層としても機能するシリコン酸化物層である導電型層4a及びn型層3cの各層を別々のプラズマCVD反応室で形成し、薄膜光電変換装置を形成した。なお、比較例2においても各層のプラズマCVD反応室内には参考例2と同様平行平板型の放電用電極が設置されており、該放電用電極は水平に設置された基体1の上方に位置する。参考例2と同様に出力特性を測定したところ、表1の比較例2に示すように、開放電圧(Voc)が1.40V、短絡電流密度(Jsc)が12.4mA/cm2、曲線因子(FF)が71.3%、そして変換効率が12.4%であった。参考例2と比較例2の変換効率は同程度という事が出来る。
参考例3として、図3に示される非晶質シリコン光電変換ユニット6、中間反射層4b及び結晶質シリコン光電変換ユニット3を有する中間反射層を有する多接合型シリコン薄膜光電変換装置を作製した。
参考例3と全く同条件で中間反射層4b、p型層3a、結晶質シリコンi型層3b、反射層としても機能するシリコン酸化物層である導電型層4a及びn型層3cの各層を別々のプラズマCVD反応室で形成し、薄膜光電変換装置を形成した。なお、比較例3においても各層のプラズマCVD反応室内には参考例1と同様平行平板型の放電用電極が設置されており、該放電用電極は水平に設置された基体1の上方に位置する。参考例3と同様に出力特性を測定したところ、表1の比較例3に示すように、開放電圧(Voc)が1.40V、短絡電流密度(Jsc)が13.6mA/cm2、曲線因子(FF)が71.8%、そして変換効率が13.7%であった。参考例3と比較例3の変換効率は同程度という事が出来る。
実施例1として、参考例3における中間反射層を、反応ガスとしてシラン、水素、ホスフィン及び二酸化炭素を導入しn型決定不純物燐を含むシリコン酸化物層を55nm形成後、反応ガスとしてシラン、水素及び二酸化炭素を導入し、導電型決定不純物を含まないシリコン酸化物層を5nm形成し、積層構造とした。その他の層は参考例3と同一条件であり、また同一のプラズマ反応室で形成した。なおプラズマCVD反応室内には平行平板型の放電用電極が設置されており、該放電用電極は水平に設置された基体1の上方に位置する。
実施例1と全く同条件で中間反射層4b、p型層3a、結晶質シリコンi型層3b、反射層としても機能するシリコン酸化物層である導電型層4a及びn型層3cの各層を別々のプラズマCVD反応室で形成し、薄膜光電変換装置を形成した。なお、実施例2においても各層のプラズマCVD反応室内には実施例1と同様平行平板型の放電用電極が設置されており、該放電用電極は水平に設置された基体1の上方に位置する。実施例1と同様に出力特性を測定したところ、表1の実施例2に示すように、開放電圧(Voc)が1.40V、短絡電流密度(Jsc)が13.6mA/cm2、曲線因子(FF)が73.0%、そして変換効率が13.9%であった。実施例1と実施例2の変換効率は同程度という事が出来る。
Claims (5)
- 光入射側から順に、透明電極膜(2)、非晶質シリコン光電変換層(6b)を含む非晶質シリコン光電変換ユニット(6)、中間反射層として作用するシリコン酸化物層(4b)、結晶質シリコン光電変換層(3b)を含む結晶質シリコン光電変換ユニット(3)、裏面電極膜(5)が積層されてなる薄膜光電変換装置であって、
該中間反射層として作用するシリコン酸化物層(4b)は、導電型決定不純物を含むシリコン酸化物層と導電型決定不純物を含まないシリコン酸化物層とが積層されており、
該導電型決定不純物を含まないシリコン酸化物層は、前記結晶質シリコン光電変換ユニット(3)に接し、かつ、その厚さが10nm以下である、薄膜光電変換装置。 - 前記結晶質シリコン光電変換ユニット(3)の結晶質シリコン光電変換層(3b)と裏電極膜(5)との間に、反射層としてのシリコン酸化物導電型層(4a)を有する、請求項1記載の薄膜光電変換装置。
- 前記、反射層としてのシリコン酸化物導電型層(4a)が、導電型決定不純物を含み、かつ、導電型層として前記結晶質シリコン光電変換層(3b)とともに結晶質光電変換ユニット(3)を構成してなる、請求項2記載の薄膜光電変換装置。
- 請求項1から3のいずれか1項記載の薄膜光電変換装置を製造する方法であって、少なくとも前記結晶質光電変換ユニット(3)の各層、および中間反射層として作用するシリコン酸化物層(4b)とを、同一の前記反応室内でプラズマCVD法にて形成する、薄膜光電変換装置の製造方法。
- 請求項1から3のいずれか1項記載の薄膜光電変換装置を製造する方法であって、少なくとも、反射層として作用するシリコン酸化物層(4a)または中間反射層として作用するシリコン酸化物層(4b)と、結晶質シリコン光電変換層(3b)とを、同一の反応室内のプラズマCVD法にて形成することにより、繰り返し製膜により前記反応室内に堆積したシリコン膜の剥離を抑制し、結晶質シリコン光電変換層の膜質低下を招くことなく設備のメンテナンス周期が延長する、薄膜光電変換装置の製造方法。
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EP2251913A3 (en) * | 1997-11-10 | 2012-02-22 | Kaneka Corporation | Method of Manufacturing Silicon-Based Thin Film Photoelectric Converter and Plasma CVD Apparatus Used for Such Method |
JP4105811B2 (ja) * | 1998-09-30 | 2008-06-25 | 京セラ株式会社 | 多結晶シリコン膜の形成方法 |
JP2000183377A (ja) * | 1998-12-17 | 2000-06-30 | Kanegafuchi Chem Ind Co Ltd | シリコン系薄膜光電変換装置の製造方法 |
JP2003124481A (ja) * | 2001-10-11 | 2003-04-25 | Mitsubishi Heavy Ind Ltd | 太陽電池 |
JP2003347572A (ja) * | 2002-01-28 | 2003-12-05 | Kanegafuchi Chem Ind Co Ltd | タンデム型薄膜光電変換装置とその製造方法 |
JP4284582B2 (ja) * | 2002-03-04 | 2009-06-24 | 富士電機システムズ株式会社 | 多接合型薄膜太陽電池とその製造方法 |
JP4222500B2 (ja) * | 2002-04-02 | 2009-02-12 | 株式会社カネカ | シリコン系薄膜光電変換装置 |
JP2003298089A (ja) * | 2002-04-02 | 2003-10-17 | Kanegafuchi Chem Ind Co Ltd | タンデム型薄膜光電変換装置とその製造方法 |
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