JP4545966B2 - 反射測定目盛およびこの測定目盛の製造方法 - Google Patents

反射測定目盛およびこの測定目盛の製造方法 Download PDF

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Publication number
JP4545966B2
JP4545966B2 JP2001046694A JP2001046694A JP4545966B2 JP 4545966 B2 JP4545966 B2 JP 4545966B2 JP 2001046694 A JP2001046694 A JP 2001046694A JP 2001046694 A JP2001046694 A JP 2001046694A JP 4545966 B2 JP4545966 B2 JP 4545966B2
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Japan
Prior art keywords
partial
layer
measurement scale
reflection
partial region
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Expired - Fee Related
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JP2001046694A
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Japanese (ja)
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JP2001296146A (ja
JP2001296146A5 (enExample
Inventor
ゲオルク・フラッシャー
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Publication of JP2001296146A5 publication Critical patent/JP2001296146A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Elements Other Than Lenses (AREA)
JP2001046694A 2000-03-10 2001-02-22 反射測定目盛およびこの測定目盛の製造方法 Expired - Fee Related JP4545966B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10011872A DE10011872A1 (de) 2000-03-10 2000-03-10 Reflexions-Messteilung und Verfahren zur Herstellung derselben
DE10011872:0 2000-03-10

Publications (3)

Publication Number Publication Date
JP2001296146A JP2001296146A (ja) 2001-10-26
JP2001296146A5 JP2001296146A5 (enExample) 2007-11-29
JP4545966B2 true JP4545966B2 (ja) 2010-09-15

Family

ID=7634333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001046694A Expired - Fee Related JP4545966B2 (ja) 2000-03-10 2001-02-22 反射測定目盛およびこの測定目盛の製造方法

Country Status (4)

Country Link
US (1) US6671092B2 (enExample)
EP (1) EP1132719B1 (enExample)
JP (1) JP4545966B2 (enExample)
DE (2) DE10011872A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10150099A1 (de) * 2001-10-11 2003-04-17 Heidenhain Gmbh Dr Johannes Verfahren zur Herstellung eines Maßstabes, sowie derart hergestellter Maßstab und eine Positionsmesseinrichtung
JP2004028862A (ja) * 2002-06-27 2004-01-29 Harmonic Drive Syst Ind Co Ltd 投影型エンコーダ
US20040035012A1 (en) * 2002-08-26 2004-02-26 Moehnke Stephanie J. Measuring device having symbols viewable in multiple orientations
US7256938B2 (en) * 2004-03-17 2007-08-14 General Atomics Method for making large scale multilayer dielectric diffraction gratings on thick substrates using reactive ion etching
US7321467B2 (en) * 2005-05-26 2008-01-22 Macronix International Co., Ltd. Anti-reflection coating layer and design method thereof
US8127993B2 (en) * 2007-06-01 2012-03-06 Mitutoyo Corporation Reflection type encoder, scale thereof and method for producing scale
AT509101B1 (de) * 2009-11-18 2011-10-15 Victor Vasiloiu Induktive messeinrichtung für längen- und winkelerfassung
US20140071532A1 (en) * 2010-12-16 2014-03-13 Suzhou University Color filter
US10317254B2 (en) * 2014-03-27 2019-06-11 Ams Sensors Singapore Pte. Ltd. Optical encoder system
JP7140495B2 (ja) * 2017-12-28 2022-09-21 株式会社ミツトヨ スケールおよびその製造方法
JP2021131312A (ja) * 2020-02-20 2021-09-09 株式会社ミツトヨ スケール
JP7574845B2 (ja) * 2020-03-31 2024-10-29 大日本印刷株式会社 エンコーダ用反射型光学式スケール及び反射型光学式エンコーダ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1279944B (de) * 1965-09-15 1968-10-10 Wenczler & Heidenhain Messteilung
US4374612A (en) 1980-07-25 1983-02-22 Canon Kabushiki Kaisha Mark indicating device for optical apparatus
US4286871A (en) * 1980-08-11 1981-09-01 Keuffel & Esser Company Photogrammetric measuring system
JPS5875004A (ja) * 1981-10-30 1983-05-06 Mitsutoyo Mfg Co Ltd 光電式変位検出装置の反射型スケ−ルの製造方法
JPS60118912U (ja) 1984-01-18 1985-08-12 アルプス電気株式会社 反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル
JPS60161523A (ja) * 1984-02-02 1985-08-23 Mitsutoyo Mfg Co Ltd 三次元測定機
JPS60217361A (ja) * 1984-04-13 1985-10-30 Alps Electric Co Ltd 光反射式コ−ド板
JPS6145923A (ja) * 1984-08-10 1986-03-06 Aronshiya:Kk 反射式ロ−タリ−エンコ−ダ−用回転デイスクの製作方法
IT1245008B (it) * 1991-01-25 1994-09-13 Lamsweerde Edoardo Van Elemento graduato per lettura ottica a riflessione e procedimento per la sua fabbricazione
JPH0933221A (ja) * 1995-07-21 1997-02-07 Mitsutoyo Corp 測長スケール
ATE190408T1 (de) * 1995-11-11 2000-03-15 Heidenhain Gmbh Dr Johannes Auflicht-phasengitter
US6027815A (en) 1996-11-06 2000-02-22 Taiwan Semiconductor Manufacturing Company Non-absorbing anti-reflective coated (ARC) reticle using thin dielectric films and method of forming reticle

Also Published As

Publication number Publication date
EP1132719B1 (de) 2005-06-01
DE50106355D1 (de) 2005-07-07
US6671092B2 (en) 2003-12-30
EP1132719A1 (de) 2001-09-12
JP2001296146A (ja) 2001-10-26
DE10011872A1 (de) 2001-09-27
US20010021485A1 (en) 2001-09-13

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