JP4544992B2 - 圧力の揺らぎに鈍感な質量流量制御のための装置及び方法 - Google Patents

圧力の揺らぎに鈍感な質量流量制御のための装置及び方法 Download PDF

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Publication number
JP4544992B2
JP4544992B2 JP2004516220A JP2004516220A JP4544992B2 JP 4544992 B2 JP4544992 B2 JP 4544992B2 JP 2004516220 A JP2004516220 A JP 2004516220A JP 2004516220 A JP2004516220 A JP 2004516220A JP 4544992 B2 JP4544992 B2 JP 4544992B2
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Japan
Prior art keywords
mass flow
controller
sensor
pressure
fluid
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Expired - Lifetime
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JP2004516220A
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English (en)
Japanese (ja)
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JP2005531069A (ja
Inventor
シャジ，アリ
コッテンステッティ，ニコラス
アンブロシナ，ジェシー
スミス，ジョン・エイ
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MKS Instruments Inc
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MKS Instruments Inc
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Publication date
Priority claimed from US10/178,119 external-priority patent/US7136767B2/en
Priority claimed from US10/178,568 external-priority patent/US6661693B2/en
Priority claimed from US10/178,752 external-priority patent/US20030234047A1/en
Priority claimed from US10/178,810 external-priority patent/US7004191B2/en
Priority claimed from US10/178,378 external-priority patent/US6948508B2/en
Priority claimed from US10/178,721 external-priority patent/US6712084B2/en
Priority claimed from US10/178,288 external-priority patent/US20030234045A1/en
Priority claimed from US10/178,884 external-priority patent/US6810308B2/en
Priority claimed from US10/178,261 external-priority patent/US6868862B2/en
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of JP2005531069A publication Critical patent/JP2005531069A/ja
Application granted granted Critical
Publication of JP4544992B2 publication Critical patent/JP4544992B2/ja
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
    • G01F15/046—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means involving digital counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
JP2004516220A 2002-06-24 2003-06-24 圧力の揺らぎに鈍感な質量流量制御のための装置及び方法 Expired - Lifetime JP4544992B2 (ja)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US10/178,378 US6948508B2 (en) 2002-06-24 2002-06-24 Apparatus and method for self-calibration of mass flow controller
US10/178,721 US6712084B2 (en) 2002-06-24 2002-06-24 Apparatus and method for pressure fluctuation insensitive mass flow control
US10/178,261 US6868862B2 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with a plurality of closed loop control code sets
US10/178,884 US6810308B2 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with network access to diagnostics
US10/178,568 US6661693B2 (en) 1995-08-31 2002-06-24 Circuit for programming antifuse bits
US10/178,119 US7136767B2 (en) 2002-06-24 2002-06-24 Apparatus and method for calibration of mass flow controller
US10/178,288 US20030234045A1 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with on-line diagnostics
US10/178,810 US7004191B2 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with embedded web server
US10/178,752 US20030234047A1 (en) 2002-06-24 2002-06-24 Apparatus and method for dual processor mass flow controller
PCT/US2003/019969 WO2004001516A1 (fr) 2002-06-24 2003-06-24 Appareil et procede permettant de reguler un debit massique insensible a une fluctuation de pression

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009160666A Division JP5068787B2 (ja) 2002-06-24 2009-07-07 圧力の揺らぎに鈍感な質量流量制御のための装置及び方法

Publications (2)

Publication Number Publication Date
JP2005531069A JP2005531069A (ja) 2005-10-13
JP4544992B2 true JP4544992B2 (ja) 2010-09-15

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JP2004516220A Expired - Lifetime JP4544992B2 (ja) 2002-06-24 2003-06-24 圧力の揺らぎに鈍感な質量流量制御のための装置及び方法

Country Status (3)

Country Link
JP (1) JP4544992B2 (fr)
GB (8) GB2419677A (fr)
WO (1) WO2004001516A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010520459A (ja) * 2007-03-01 2010-06-10 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド 質量流量コントローラにおいてガスの温度を測定するための方法および装置
JP2010531999A (ja) * 2007-06-27 2010-09-30 エム ケー エス インストルメンツ インコーポレーテッド 異なる体積を提供可能な質量流量検証装置及び関連する方法

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6712084B2 (en) 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US7809473B2 (en) 2002-06-24 2010-10-05 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US7222029B2 (en) * 2004-07-08 2007-05-22 Celerity, Inc. Attitude insensitive flow device system and method
US7467027B2 (en) * 2006-01-26 2008-12-16 Mks Instruments, Inc. Compensation for thermal siphoning in mass flow controllers
US7603186B2 (en) 2006-04-28 2009-10-13 Advanced Energy Industries, Inc. Adaptive response time closed loop control algorithm
US7640078B2 (en) 2006-07-05 2009-12-29 Advanced Energy Industries, Inc. Multi-mode control algorithm
JP4936439B2 (ja) * 2006-10-11 2012-05-23 国立大学法人東京工業大学 圧力レギュレータ及び除振装置
DE102007021099A1 (de) * 2007-05-03 2008-11-13 Endress + Hauser (Deutschland) Ag + Co. Kg Verfahren zum Inbetriebnehmen und/oder Rekonfigurieren eines programmierbaren Feldmeßgeräts
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
US8793082B2 (en) * 2009-07-24 2014-07-29 Mks Instruments, Inc. Upstream volume mass flow verification systems and methods
JP5864849B2 (ja) 2010-10-20 2016-02-17 株式会社堀場エステック 流体計測システム
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
JP5124038B2 (ja) * 2011-09-01 2013-01-23 国立大学法人東京工業大学 圧力レギュレータ及び除振装置
JP6526374B2 (ja) 2013-04-25 2019-06-05 株式会社堀場エステック 流体制御装置
CN104216424B (zh) * 2014-08-29 2019-04-09 湖南三德科技股份有限公司 用于便携设备的精密流量控制器
US9664659B2 (en) * 2014-11-05 2017-05-30 Dresser, Inc. Apparatus and method for testing gas meters
CN104949723A (zh) * 2015-06-30 2015-09-30 开平市中青环保技术服务有限公司 一种液体流量监控器
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
JP7384551B2 (ja) 2017-03-14 2023-11-21 株式会社堀場エステック 診断システム、診断方法、診断プログラム及び流量制御装置。
JP7164938B2 (ja) * 2017-07-31 2022-11-02 株式会社堀場エステック 流量制御装置、流量制御方法、及び、流量制御装置用プログラム
US20200132536A1 (en) * 2018-10-26 2020-04-30 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
JP7251786B2 (ja) * 2019-07-31 2023-04-04 株式会社フジキン 流量測定システムおよび流量測定方法
JP2021152786A (ja) 2020-03-24 2021-09-30 株式会社フジキン 流量制御システム、流量制御システムの制御方法、流量制御システムの制御プログラム
CN111665877B (zh) * 2020-06-18 2023-04-14 北京七星华创流量计有限公司 压力控制方法和装置、光伏设备
WO2022186971A1 (fr) 2021-03-03 2022-09-09 Ichor Systems, Inc. Système de régulation de débit de fluide comprenant un ensemble collecteur
WO2022201963A1 (fr) * 2021-03-24 2022-09-29 日立金属株式会社 Procédé et système de détermination de valeur initiale de paramètre, et procédé et système de réglage de dispositif de commande de débit massique
WO2023012742A1 (fr) * 2021-08-06 2023-02-09 Cavagna Group Spa Procédé d'étalonnage d'un compteur à gaz et compteur à gaz étalonné selon le procédé

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218709U (fr) * 1985-07-19 1987-02-04
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
JP2720634B2 (ja) * 1991-05-28 1998-03-04 日本電気株式会社 マスフローコントローラの自己診断装置
JPH05134764A (ja) * 1991-11-12 1993-06-01 Nec Kyushu Ltd マスフローコントローラー
US5263369A (en) * 1992-07-24 1993-11-23 Bear Medical Systems, Inc. Flow sensor system and method
JPH0863235A (ja) * 1994-08-24 1996-03-08 Burutsukusu Instr Kk 差圧式質量流量コントロール装置
US5524084A (en) * 1994-12-30 1996-06-04 Hewlett-Packard Company Method and apparatus for improved flow and pressure measurement and control
US6017143A (en) * 1996-03-28 2000-01-25 Rosemount Inc. Device in a process system for detecting events
US5805442A (en) * 1996-05-30 1998-09-08 Control Technology Corporation Distributed interface architecture for programmable industrial control systems
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
JP3993243B2 (ja) * 1996-10-04 2007-10-17 フィッシャー コントロールズ インターナショナル リミテッド ライアビリティー カンパニー プロセス制御ネットワーク用のネットワークアクセス可能なインタフェース
EP1023650B1 (fr) * 1997-10-13 2003-09-24 Rosemount Inc. Technique de communication pour dispositifs in situ dans des processus industriels
JPH11259140A (ja) * 1998-03-13 1999-09-24 Kokusai Electric Co Ltd 流量制御装置
JP3546153B2 (ja) * 1998-08-24 2004-07-21 忠弘 大見 圧力式流量制御装置におけるオリフィス目詰検出方法およびその検出装置
US6119710A (en) * 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
US6343617B1 (en) * 1999-07-09 2002-02-05 Millipore Corporation System and method of operation of a digital mass flow controller
JP3554509B2 (ja) * 1999-08-10 2004-08-18 忠弘 大見 圧力式流量制御装置における流量異常検知方法
US6539968B1 (en) * 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
US7568000B2 (en) * 2001-08-21 2009-07-28 Rosemount Analytical Shared-use data processing for process control systems
US6619258B2 (en) * 2002-01-15 2003-09-16 Delphi Technologies, Inc. System for controllably disabling cylinders in an internal combustion engine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010520459A (ja) * 2007-03-01 2010-06-10 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド 質量流量コントローラにおいてガスの温度を測定するための方法および装置
JP2010531999A (ja) * 2007-06-27 2010-09-30 エム ケー エス インストルメンツ インコーポレーテッド 異なる体積を提供可能な質量流量検証装置及び関連する方法

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Publication number Publication date
GB2404028A8 (en) 2008-09-03
GB2404028B (en) 2007-01-31
GB2419422B8 (en) 2008-09-03
GB0526337D0 (en) 2006-02-01
GB2419421A (en) 2006-04-26
GB2419422A8 (en) 2008-09-03
GB2419420B8 (en) 2008-09-03
GB2419420B (en) 2006-11-15
GB2419422B (en) 2006-08-16
GB2419676A (en) 2006-05-03
GB2419422A (en) 2006-04-26
GB2419677A (en) 2006-05-03
GB2419958B8 (en) 2008-09-03
GB2419421A8 (en) 2006-04-26
GB2419420A8 (en) 2008-09-03
GB2419957A (en) 2006-05-10
GB0526346D0 (en) 2006-02-01
GB2404028A (en) 2005-01-19
GB2419676A8 (en) 2008-09-03
GB2419958A (en) 2006-05-10
GB2404028B8 (en) 2008-09-03
WO2004001516A1 (fr) 2003-12-31
GB2419958B (en) 2006-11-15
GB0526243D0 (en) 2006-02-01
GB0526359D0 (en) 2006-02-01
GB0526343D0 (en) 2006-02-01
GB2419676B (en) 2006-12-20
GB0526341D0 (en) 2006-02-01
GB2419957A8 (en) 2008-09-03
GB0526348D0 (en) 2006-02-01
GB2419421B8 (en) 2008-09-03
GB2419957B (en) 2006-11-15
JP2005531069A (ja) 2005-10-13
GB0423320D0 (en) 2004-11-24
GB2419957B8 (en) 2008-09-03
GB2419958A8 (en) 2008-09-03
GB2419676B8 (en) 2008-09-03
GB2419421B (en) 2006-11-15
GB2419420A (en) 2006-04-26

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