GB2419677A - Pressure fluctuation insensitive mass flow controller - Google Patents

Pressure fluctuation insensitive mass flow controller Download PDF

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Publication number
GB2419677A
GB2419677A GB0526337A GB0526337A GB2419677A GB 2419677 A GB2419677 A GB 2419677A GB 0526337 A GB0526337 A GB 0526337A GB 0526337 A GB0526337 A GB 0526337A GB 2419677 A GB2419677 A GB 2419677A
Authority
GB
United Kingdom
Prior art keywords
mass flow
controller
pressure
flow
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0526337A
Other languages
English (en)
Other versions
GB0526337D0 (en
Inventor
Ali Shajii
Nicholas Kottenstette
Jesse Ambrosina
John A Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/178,119 external-priority patent/US7136767B2/en
Priority claimed from US10/178,810 external-priority patent/US7004191B2/en
Priority claimed from US10/178,261 external-priority patent/US6868862B2/en
Priority claimed from US10/178,721 external-priority patent/US6712084B2/en
Priority claimed from US10/178,568 external-priority patent/US6661693B2/en
Priority claimed from US10/178,884 external-priority patent/US6810308B2/en
Priority claimed from US10/178,752 external-priority patent/US20030234047A1/en
Priority claimed from US10/178,378 external-priority patent/US6948508B2/en
Priority claimed from US10/178,288 external-priority patent/US20030234045A1/en
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of GB0526337D0 publication Critical patent/GB0526337D0/en
Publication of GB2419677A publication Critical patent/GB2419677A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/02—Compensating or correcting for variations in pressure, density or temperature
    • G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
    • G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
    • G01F15/046—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means involving digital counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
GB0526337A 2002-06-24 2003-06-24 Pressure fluctuation insensitive mass flow controller Withdrawn GB2419677A (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
US10/178,810 US7004191B2 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with embedded web server
US10/178,261 US6868862B2 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with a plurality of closed loop control code sets
US10/178,721 US6712084B2 (en) 2002-06-24 2002-06-24 Apparatus and method for pressure fluctuation insensitive mass flow control
US10/178,119 US7136767B2 (en) 2002-06-24 2002-06-24 Apparatus and method for calibration of mass flow controller
US10/178,568 US6661693B2 (en) 1995-08-31 2002-06-24 Circuit for programming antifuse bits
US10/178,884 US6810308B2 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with network access to diagnostics
US10/178,752 US20030234047A1 (en) 2002-06-24 2002-06-24 Apparatus and method for dual processor mass flow controller
US10/178,378 US6948508B2 (en) 2002-06-24 2002-06-24 Apparatus and method for self-calibration of mass flow controller
US10/178,288 US20030234045A1 (en) 2002-06-24 2002-06-24 Apparatus and method for mass flow controller with on-line diagnostics
GB0423320A GB2404028B8 (en) 2002-06-24 2003-06-24 Apparatus and method for pressure fluctuation insensitive massflow control

Publications (2)

Publication Number Publication Date
GB0526337D0 GB0526337D0 (en) 2006-02-01
GB2419677A true GB2419677A (en) 2006-05-03

Family

ID=30004142

Family Applications (8)

Application Number Title Priority Date Filing Date
GB0526346A Expired - Lifetime GB2419958B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526348A Expired - Lifetime GB2419421B8 (en) 2002-06-24 2003-06-24 Gas flow standard
GB0526243A Expired - Lifetime GB2419676B8 (en) 2002-06-24 2003-06-24 Mass flow calibrator
GB0526359A Expired - Lifetime GB2419422B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526341A Expired - Lifetime GB2419420B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526343A Expired - Lifetime GB2419957B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0423320A Expired - Lifetime GB2404028B8 (en) 2002-06-24 2003-06-24 Apparatus and method for pressure fluctuation insensitive massflow control
GB0526337A Withdrawn GB2419677A (en) 2002-06-24 2003-06-24 Pressure fluctuation insensitive mass flow controller

Family Applications Before (7)

Application Number Title Priority Date Filing Date
GB0526346A Expired - Lifetime GB2419958B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526348A Expired - Lifetime GB2419421B8 (en) 2002-06-24 2003-06-24 Gas flow standard
GB0526243A Expired - Lifetime GB2419676B8 (en) 2002-06-24 2003-06-24 Mass flow calibrator
GB0526359A Expired - Lifetime GB2419422B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526341A Expired - Lifetime GB2419420B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0526343A Expired - Lifetime GB2419957B8 (en) 2002-06-24 2003-06-24 Mass flow controller
GB0423320A Expired - Lifetime GB2404028B8 (en) 2002-06-24 2003-06-24 Apparatus and method for pressure fluctuation insensitive massflow control

Country Status (3)

Country Link
JP (1) JP4544992B2 (fr)
GB (8) GB2419958B8 (fr)
WO (1) WO2004001516A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7424346B2 (en) 2002-06-24 2008-09-09 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US8738187B2 (en) 2002-06-24 2014-05-27 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control

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US7222029B2 (en) 2004-07-08 2007-05-22 Celerity, Inc. Attitude insensitive flow device system and method
US7461549B1 (en) * 2007-06-27 2008-12-09 Mks Instruments, Inc. Mass flow verifiers capable of providing different volumes, and related methods
US7467027B2 (en) * 2006-01-26 2008-12-16 Mks Instruments, Inc. Compensation for thermal siphoning in mass flow controllers
US7603186B2 (en) 2006-04-28 2009-10-13 Advanced Energy Industries, Inc. Adaptive response time closed loop control algorithm
US7640078B2 (en) 2006-07-05 2009-12-29 Advanced Energy Industries, Inc. Multi-mode control algorithm
JP4936439B2 (ja) * 2006-10-11 2012-05-23 国立大学法人東京工業大学 圧力レギュレータ及び除振装置
US7651263B2 (en) * 2007-03-01 2010-01-26 Advanced Energy Industries, Inc. Method and apparatus for measuring the temperature of a gas in a mass flow controller
DE102007021099A1 (de) 2007-05-03 2008-11-13 Endress + Hauser (Deutschland) Ag + Co. Kg Verfahren zum Inbetriebnehmen und/oder Rekonfigurieren eines programmierbaren Feldmeßgeräts
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
US8793082B2 (en) * 2009-07-24 2014-07-29 Mks Instruments, Inc. Upstream volume mass flow verification systems and methods
JP5864849B2 (ja) 2010-10-20 2016-02-17 株式会社堀場エステック 流体計測システム
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
JP5124038B2 (ja) * 2011-09-01 2013-01-23 国立大学法人東京工業大学 圧力レギュレータ及び除振装置
JP6526374B2 (ja) 2013-04-25 2019-06-05 株式会社堀場エステック 流体制御装置
CN104216424B (zh) * 2014-08-29 2019-04-09 湖南三德科技股份有限公司 用于便携设备的精密流量控制器
US9664659B2 (en) * 2014-11-05 2017-05-30 Dresser, Inc. Apparatus and method for testing gas meters
CN104949723A (zh) * 2015-06-30 2015-09-30 开平市中青环保技术服务有限公司 一种液体流量监控器
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
JP7384551B2 (ja) 2017-03-14 2023-11-21 株式会社堀場エステック 診断システム、診断方法、診断プログラム及び流量制御装置。
JP7164938B2 (ja) * 2017-07-31 2022-11-02 株式会社堀場エステック 流量制御装置、流量制御方法、及び、流量制御装置用プログラム
US20200132536A1 (en) * 2018-10-26 2020-04-30 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics
JP7251786B2 (ja) * 2019-07-31 2023-04-04 株式会社フジキン 流量測定システムおよび流量測定方法
JP7531881B2 (ja) 2020-03-24 2024-08-13 株式会社フジキン 流量制御システム、流量制御システムの制御方法、流量制御システムの制御プログラム
CN111665877B (zh) * 2020-06-18 2023-04-14 北京七星华创流量计有限公司 压力控制方法和装置、光伏设备
US11899477B2 (en) 2021-03-03 2024-02-13 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly
WO2022201963A1 (fr) * 2021-03-24 2022-09-29 日立金属株式会社 Procédé et système de détermination de valeur initiale de paramètre, et procédé et système de réglage de dispositif de commande de débit massique
WO2023012742A1 (fr) * 2021-08-06 2023-02-09 Cavagna Group Spa Procédé d'étalonnage d'un compteur à gaz et compteur à gaz étalonné selon le procédé

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US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
GB2296796A (en) * 1994-12-30 1996-07-10 Hewlett Packard Co Method and apparatus for improved flow and pressure measurement and control
EP0834723A1 (fr) * 1996-10-04 1998-04-08 Emerson Electric Co. Capteur thermique de débit massique et régulateur de débit massique, procédé et dispositif de mesure de débit

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JPH11259140A (ja) * 1998-03-13 1999-09-24 Kokusai Electric Co Ltd 流量制御装置
JP3546153B2 (ja) * 1998-08-24 2004-07-21 忠弘 大見 圧力式流量制御装置におけるオリフィス目詰検出方法およびその検出装置
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US6343617B1 (en) * 1999-07-09 2002-02-05 Millipore Corporation System and method of operation of a digital mass flow controller
JP3554509B2 (ja) * 1999-08-10 2004-08-18 忠弘 大見 圧力式流量制御装置における流量異常検知方法
US6539968B1 (en) * 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
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Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
GB2296796A (en) * 1994-12-30 1996-07-10 Hewlett Packard Co Method and apparatus for improved flow and pressure measurement and control
EP0834723A1 (fr) * 1996-10-04 1998-04-08 Emerson Electric Co. Capteur thermique de débit massique et régulateur de débit massique, procédé et dispositif de mesure de débit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7424346B2 (en) 2002-06-24 2008-09-09 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US8738187B2 (en) 2002-06-24 2014-05-27 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control

Also Published As

Publication number Publication date
GB2419676A8 (en) 2008-09-03
GB2419676B8 (en) 2008-09-03
GB0526341D0 (en) 2006-02-01
GB0526343D0 (en) 2006-02-01
GB2419422B8 (en) 2008-09-03
GB2419422B (en) 2006-08-16
GB2419958B8 (en) 2008-09-03
GB0526337D0 (en) 2006-02-01
GB0526359D0 (en) 2006-02-01
GB2419421A (en) 2006-04-26
GB0526243D0 (en) 2006-02-01
GB2419420B8 (en) 2008-09-03
GB2419422A8 (en) 2008-09-03
GB2419421A8 (en) 2006-04-26
GB2404028B8 (en) 2008-09-03
GB2404028A8 (en) 2008-09-03
GB2419958A8 (en) 2008-09-03
GB2419676B (en) 2006-12-20
GB2419958A (en) 2006-05-10
GB2419420B (en) 2006-11-15
GB0423320D0 (en) 2004-11-24
GB2419420A8 (en) 2008-09-03
GB2419420A (en) 2006-04-26
GB2419421B (en) 2006-11-15
GB2419676A (en) 2006-05-03
GB2404028A (en) 2005-01-19
GB2404028B (en) 2007-01-31
GB2419422A (en) 2006-04-26
GB0526346D0 (en) 2006-02-01
GB2419421B8 (en) 2008-09-03
JP2005531069A (ja) 2005-10-13
WO2004001516A1 (fr) 2003-12-31
GB2419957B8 (en) 2008-09-03
JP4544992B2 (ja) 2010-09-15
GB2419957A8 (en) 2008-09-03
GB2419957A (en) 2006-05-10
GB0526348D0 (en) 2006-02-01
GB2419958B (en) 2006-11-15
GB2419957B (en) 2006-11-15

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