JP4541627B2 - マイクロミラー - Google Patents

マイクロミラー Download PDF

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Publication number
JP4541627B2
JP4541627B2 JP2001549121A JP2001549121A JP4541627B2 JP 4541627 B2 JP4541627 B2 JP 4541627B2 JP 2001549121 A JP2001549121 A JP 2001549121A JP 2001549121 A JP2001549121 A JP 2001549121A JP 4541627 B2 JP4541627 B2 JP 4541627B2
Authority
JP
Japan
Prior art keywords
mirror surface
torsion
micromirror
mirror
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2001549121A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003518650A (ja
JP2003518650A5 (enExample
Inventor
ニーンドルフ アンドレアス
フンク カールステン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of JP2003518650A publication Critical patent/JP2003518650A/ja
Publication of JP2003518650A5 publication Critical patent/JP2003518650A5/ja
Application granted granted Critical
Publication of JP4541627B2 publication Critical patent/JP4541627B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0181—See-saws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2001549121A 1999-12-28 2000-11-22 マイクロミラー Expired - Lifetime JP4541627B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19963382A DE19963382A1 (de) 1999-12-28 1999-12-28 Mikrospiegel
DE19963382.7 1999-12-28
PCT/DE2000/004116 WO2001048527A2 (de) 1999-12-28 2000-11-22 Mikrospiegel

Publications (3)

Publication Number Publication Date
JP2003518650A JP2003518650A (ja) 2003-06-10
JP2003518650A5 JP2003518650A5 (enExample) 2007-09-20
JP4541627B2 true JP4541627B2 (ja) 2010-09-08

Family

ID=7934753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001549121A Expired - Lifetime JP4541627B2 (ja) 1999-12-28 2000-11-22 マイクロミラー

Country Status (6)

Country Link
US (1) US6749308B1 (enExample)
EP (1) EP1247131B1 (enExample)
JP (1) JP4541627B2 (enExample)
DE (2) DE19963382A1 (enExample)
ES (1) ES2228650T3 (enExample)
WO (1) WO2001048527A2 (enExample)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5910854A (en) 1993-02-26 1999-06-08 Donnelly Corporation Electrochromic polymeric solid films, manufacturing electrochromic devices using such solid films, and processes for making such solid films and devices
US5668663A (en) 1994-05-05 1997-09-16 Donnelly Corporation Electrochromic mirrors and devices
US6891563B2 (en) 1996-05-22 2005-05-10 Donnelly Corporation Vehicular vision system
US6326613B1 (en) 1998-01-07 2001-12-04 Donnelly Corporation Vehicle interior mirror assembly adapted for containing a rain sensor
US6124886A (en) 1997-08-25 2000-09-26 Donnelly Corporation Modular rearview mirror assembly
US8294975B2 (en) 1997-08-25 2012-10-23 Donnelly Corporation Automotive rearview mirror assembly
US6172613B1 (en) 1998-02-18 2001-01-09 Donnelly Corporation Rearview mirror assembly incorporating vehicle information display
US6690268B2 (en) 2000-03-02 2004-02-10 Donnelly Corporation Video mirror systems incorporating an accessory module
US8288711B2 (en) 1998-01-07 2012-10-16 Donnelly Corporation Interior rearview mirror system with forwardly-viewing camera and a control
US6445287B1 (en) 2000-02-28 2002-09-03 Donnelly Corporation Tire inflation assistance monitoring system
US6693517B2 (en) 2000-04-21 2004-02-17 Donnelly Corporation Vehicle mirror assembly communicating wirelessly with vehicle accessories and occupants
US6329925B1 (en) 1999-11-24 2001-12-11 Donnelly Corporation Rearview mirror assembly with added feature modular display
US6477464B2 (en) 2000-03-09 2002-11-05 Donnelly Corporation Complete mirror-based global-positioning system (GPS) navigation solution
US7370983B2 (en) 2000-03-02 2008-05-13 Donnelly Corporation Interior mirror assembly with display
US7855755B2 (en) 2005-11-01 2010-12-21 Donnelly Corporation Interior rearview mirror assembly with display
US7167796B2 (en) 2000-03-09 2007-01-23 Donnelly Corporation Vehicle navigation system for use with a telematics system
US7581859B2 (en) 2005-09-14 2009-09-01 Donnelly Corp. Display device for exterior rearview mirror
US7255451B2 (en) 2002-09-20 2007-08-14 Donnelly Corporation Electro-optic mirror cell
ATE363413T1 (de) 2001-01-23 2007-06-15 Donnelly Corp Verbessertes fahrzeugbeleuchtungssystem
US6918674B2 (en) 2002-05-03 2005-07-19 Donnelly Corporation Vehicle rearview mirror system
AU2003237424A1 (en) 2002-06-06 2003-12-22 Donnelly Corporation Interior rearview mirror system with compass
US7329013B2 (en) 2002-06-06 2008-02-12 Donnelly Corporation Interior rearview mirror system with compass
US7310177B2 (en) 2002-09-20 2007-12-18 Donnelly Corporation Electro-optic reflective element assembly
US7274501B2 (en) 2002-09-20 2007-09-25 Donnelly Corporation Mirror reflective element assembly
AU2002335243A1 (en) * 2002-10-10 2004-05-04 Fujitsu Media Devices Limited Micro moving element comprising torsion bar
US7177068B2 (en) 2002-12-20 2007-02-13 Robert Bosch Gmbh Apparatus, method and system for providing enhanced mechanical protection for thin beams
US7014115B2 (en) 2003-08-25 2006-03-21 Advanced Nano Systems, Inc. MEMS scanning mirror with distributed hinges and multiple support attachments
US7446924B2 (en) 2003-10-02 2008-11-04 Donnelly Corporation Mirror reflective element assembly including electronic component
US7308341B2 (en) 2003-10-14 2007-12-11 Donnelly Corporation Vehicle communication system
US7706046B2 (en) * 2004-06-08 2010-04-27 Gentex Corporation Rearview mirror element having a circuit mounted to the rear surface of the element
US7864398B2 (en) 2004-06-08 2011-01-04 Gentex Corporation Electro-optical element including metallic films and methods for applying the same
ATE517368T1 (de) 2005-05-16 2011-08-15 Donnelly Corp Fahrzeugspiegelanordnung mit zeichen am reflektierenden teil
DE102005033800B4 (de) * 2005-07-13 2016-09-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung
US7643196B2 (en) 2005-12-16 2010-01-05 The Charles Stark Draper Laboratory, Inc. Systems, methods and devices for actuating a moveable miniature platform
US8274729B2 (en) * 2006-03-03 2012-09-25 Gentex Corporation Thin-film coatings, electro-optic elements and assemblies incorporating these elements
US7688495B2 (en) * 2006-03-03 2010-03-30 Gentex Corporation Thin-film coatings, electro-optic elements and assemblies incorporating these elements
EP2426552A1 (en) 2006-03-03 2012-03-07 Gentex Corporation Electro-optic elements incorporating improved thin-film coatings
US8368992B2 (en) * 2006-03-03 2013-02-05 Gentex Corporation Electro-optical element including IMI coatings
US7746534B2 (en) * 2006-12-07 2010-06-29 Gentex Corporation Thin-film coatings, electro-optic elements and assemblies incorporating these elements
US8169681B2 (en) 2006-03-03 2012-05-01 Gentex Corporation Thin-film coatings, electro-optic elements and assemblies incorporating these elements
TWI328139B (en) * 2007-01-22 2010-08-01 Ind Tech Res Inst Projector
US8035881B2 (en) * 2007-03-05 2011-10-11 Gentex Corporation Multi-zone mirrors
US9274394B2 (en) 2007-03-05 2016-03-01 Gentex Corporation Multi-zone mirrors
US10017847B2 (en) 2007-03-05 2018-07-10 Gentex Corporation Method and apparatus for ion milling
US8649083B2 (en) 2007-03-05 2014-02-11 Gentex Corporation Multi-zone mirrors
US8196874B2 (en) * 2007-10-12 2012-06-12 Maxtec, Llc Storable intravenous stands
JP2009229916A (ja) * 2008-03-24 2009-10-08 Nippon Telegr & Teleph Corp <Ntt> マイクロミラー素子およびマイクロミラーアレイ
US8154418B2 (en) 2008-03-31 2012-04-10 Magna Mirrors Of America, Inc. Interior rearview mirror system
DE102008026886B4 (de) * 2008-06-05 2016-04-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Strukturierung einer Nutzschicht eines Substrats
DE102013210059B4 (de) 2013-05-29 2021-07-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung mit einer Feder und einem daran aufgehängten optischen Element
CN105712290B (zh) * 2014-12-04 2017-09-29 无锡华润上华半导体有限公司 Mems静电驱动器的制作方法
DE102015216811B4 (de) 2015-09-02 2023-06-29 Robert Bosch Gmbh Schwenkvorrichtung für einen Mikrospiegel
DE102016220514A1 (de) * 2016-10-19 2018-04-19 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
DE102016013227A1 (de) * 2016-11-07 2018-05-09 Blickfeld GmbH Faser-Scanner mit mindestens zwei Fasern
DE102016221966A1 (de) 2016-11-09 2018-05-09 Robert Bosch Gmbh Verfahren zum Ansteuern einer Aktoreinrichtung und mikromechanische Vorrichtung
DE102017206252A1 (de) 2017-04-11 2018-10-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Spiegelvorrichtung
CN116100845A (zh) * 2023-01-06 2023-05-12 四川大学 一种3d打印扭转梁微型集成扫描微镜的方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3003429B2 (ja) * 1992-10-08 2000-01-31 富士電機株式会社 ねじり振動子および光偏向子
GB2275787A (en) * 1993-03-05 1994-09-07 British Aerospace Silicon micro-mirror unit
EP0657760A1 (en) * 1993-09-15 1995-06-14 Texas Instruments Incorporated Image simulation and projection system
US5665997A (en) * 1994-03-31 1997-09-09 Texas Instruments Incorporated Grated landing area to eliminate sticking of micro-mechanical devices
JP3425814B2 (ja) * 1994-12-28 2003-07-14 日本信号株式会社 電磁アクチュエータ及びその製造方法
US5670977A (en) * 1995-02-16 1997-09-23 Texas Instruments Incorporated Spatial light modulator having single bit-line dual-latch memory cells
KR100343219B1 (ko) * 1995-02-25 2002-11-23 삼성전기주식회사 거울구동장치
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US5739941A (en) * 1995-07-20 1998-04-14 Texas Instruments Incorporated Non-linear hinge for micro-mechanical device
US6072617A (en) * 1996-11-26 2000-06-06 Texas Instruments Incorporated Micro mechanical device with memory metal component
DE19728598C2 (de) 1997-07-04 2000-12-14 Bosch Gmbh Robert Mikromechanische Spiegeleinrichtung
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
DE19857946C1 (de) 1998-12-16 2000-01-20 Bosch Gmbh Robert Mikroschwingspiegel

Also Published As

Publication number Publication date
WO2001048527A3 (de) 2002-02-14
WO2001048527A2 (de) 2001-07-05
US6749308B1 (en) 2004-06-15
ES2228650T3 (es) 2005-04-16
DE19963382A1 (de) 2001-07-12
EP1247131A2 (de) 2002-10-09
JP2003518650A (ja) 2003-06-10
DE50007817D1 (de) 2004-10-21
EP1247131B1 (de) 2004-09-15

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