DE19963382A1 - Mikrospiegel - Google Patents

Mikrospiegel

Info

Publication number
DE19963382A1
DE19963382A1 DE19963382A DE19963382A DE19963382A1 DE 19963382 A1 DE19963382 A1 DE 19963382A1 DE 19963382 A DE19963382 A DE 19963382A DE 19963382 A DE19963382 A DE 19963382A DE 19963382 A1 DE19963382 A1 DE 19963382A1
Authority
DE
Germany
Prior art keywords
mirror surface
conductor tracks
micromirror
torsion
micromirror according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19963382A
Other languages
German (de)
English (en)
Inventor
Andreas Niendorf
Karsten Funk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE19963382A priority Critical patent/DE19963382A1/de
Priority to ES00988634T priority patent/ES2228650T3/es
Priority to PCT/DE2000/004116 priority patent/WO2001048527A2/de
Priority to DE50007817T priority patent/DE50007817D1/de
Priority to US10/169,247 priority patent/US6749308B1/en
Priority to EP00988634A priority patent/EP1247131B1/de
Priority to JP2001549121A priority patent/JP4541627B2/ja
Publication of DE19963382A1 publication Critical patent/DE19963382A1/de
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0181—See-saws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
DE19963382A 1999-12-28 1999-12-28 Mikrospiegel Ceased DE19963382A1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE19963382A DE19963382A1 (de) 1999-12-28 1999-12-28 Mikrospiegel
ES00988634T ES2228650T3 (es) 1999-12-28 2000-11-22 Microespejo.
PCT/DE2000/004116 WO2001048527A2 (de) 1999-12-28 2000-11-22 Mikrospiegel
DE50007817T DE50007817D1 (de) 1999-12-28 2000-11-22 Mikrospiegel
US10/169,247 US6749308B1 (en) 1999-12-28 2000-11-22 Micromirror
EP00988634A EP1247131B1 (de) 1999-12-28 2000-11-22 Mikrospiegel
JP2001549121A JP4541627B2 (ja) 1999-12-28 2000-11-22 マイクロミラー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19963382A DE19963382A1 (de) 1999-12-28 1999-12-28 Mikrospiegel

Publications (1)

Publication Number Publication Date
DE19963382A1 true DE19963382A1 (de) 2001-07-12

Family

ID=7934753

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19963382A Ceased DE19963382A1 (de) 1999-12-28 1999-12-28 Mikrospiegel
DE50007817T Expired - Lifetime DE50007817D1 (de) 1999-12-28 2000-11-22 Mikrospiegel

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE50007817T Expired - Lifetime DE50007817D1 (de) 1999-12-28 2000-11-22 Mikrospiegel

Country Status (6)

Country Link
US (1) US6749308B1 (enExample)
EP (1) EP1247131B1 (enExample)
JP (1) JP4541627B2 (enExample)
DE (2) DE19963382A1 (enExample)
ES (1) ES2228650T3 (enExample)
WO (1) WO2001048527A2 (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7014115B2 (en) 2003-08-25 2006-03-21 Advanced Nano Systems, Inc. MEMS scanning mirror with distributed hinges and multiple support attachments
DE102005033800A1 (de) * 2005-07-13 2007-02-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung
US7177068B2 (en) 2002-12-20 2007-02-13 Robert Bosch Gmbh Apparatus, method and system for providing enhanced mechanical protection for thin beams
DE102008026886A1 (de) 2008-06-05 2009-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Strukturierung einer Nutzschicht eines Substrats
WO2018072973A1 (de) * 2016-10-19 2018-04-26 Robert Bosch Gmbh Mikromechanisches bauteil und herstellungsverfahren für ein mikromechanisches bauteil
DE102016221966A1 (de) 2016-11-09 2018-05-09 Robert Bosch Gmbh Verfahren zum Ansteuern einer Aktoreinrichtung und mikromechanische Vorrichtung
WO2018082750A1 (de) * 2016-11-07 2018-05-11 Blickfeld GmbH Faser-scanner mit mindestens zwei fasern

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US5910854A (en) 1993-02-26 1999-06-08 Donnelly Corporation Electrochromic polymeric solid films, manufacturing electrochromic devices using such solid films, and processes for making such solid films and devices
US5668663A (en) 1994-05-05 1997-09-16 Donnelly Corporation Electrochromic mirrors and devices
US6891563B2 (en) 1996-05-22 2005-05-10 Donnelly Corporation Vehicular vision system
US6124886A (en) 1997-08-25 2000-09-26 Donnelly Corporation Modular rearview mirror assembly
US6172613B1 (en) 1998-02-18 2001-01-09 Donnelly Corporation Rearview mirror assembly incorporating vehicle information display
US8294975B2 (en) 1997-08-25 2012-10-23 Donnelly Corporation Automotive rearview mirror assembly
US6326613B1 (en) 1998-01-07 2001-12-04 Donnelly Corporation Vehicle interior mirror assembly adapted for containing a rain sensor
US8288711B2 (en) 1998-01-07 2012-10-16 Donnelly Corporation Interior rearview mirror system with forwardly-viewing camera and a control
US6445287B1 (en) 2000-02-28 2002-09-03 Donnelly Corporation Tire inflation assistance monitoring system
US6329925B1 (en) 1999-11-24 2001-12-11 Donnelly Corporation Rearview mirror assembly with added feature modular display
US6693517B2 (en) 2000-04-21 2004-02-17 Donnelly Corporation Vehicle mirror assembly communicating wirelessly with vehicle accessories and occupants
US6477464B2 (en) 2000-03-09 2002-11-05 Donnelly Corporation Complete mirror-based global-positioning system (GPS) navigation solution
US7370983B2 (en) 2000-03-02 2008-05-13 Donnelly Corporation Interior mirror assembly with display
US7167796B2 (en) 2000-03-09 2007-01-23 Donnelly Corporation Vehicle navigation system for use with a telematics system
US7004593B2 (en) 2002-06-06 2006-02-28 Donnelly Corporation Interior rearview mirror system with compass
EP1263626A2 (en) 2000-03-02 2002-12-11 Donnelly Corporation Video mirror systems incorporating an accessory module
WO2007053710A2 (en) 2005-11-01 2007-05-10 Donnelly Corporation Interior rearview mirror with display
US7581859B2 (en) 2005-09-14 2009-09-01 Donnelly Corp. Display device for exterior rearview mirror
ATE363413T1 (de) 2001-01-23 2007-06-15 Donnelly Corp Verbessertes fahrzeugbeleuchtungssystem
WO2006124682A2 (en) 2005-05-16 2006-11-23 Donnelly Corporation Vehicle mirror assembly with indicia at reflective element
US7255451B2 (en) 2002-09-20 2007-08-14 Donnelly Corporation Electro-optic mirror cell
US6918674B2 (en) 2002-05-03 2005-07-19 Donnelly Corporation Vehicle rearview mirror system
US7329013B2 (en) 2002-06-06 2008-02-12 Donnelly Corporation Interior rearview mirror system with compass
AU2003278863A1 (en) 2002-09-20 2004-04-08 Donnelly Corporation Mirror reflective element assembly
US7310177B2 (en) 2002-09-20 2007-12-18 Donnelly Corporation Electro-optic reflective element assembly
WO2004034126A1 (ja) * 2002-10-10 2004-04-22 Fujitsu Limited トーションバーを備えるマイクロ可動素子
US7446924B2 (en) 2003-10-02 2008-11-04 Donnelly Corporation Mirror reflective element assembly including electronic component
US7308341B2 (en) 2003-10-14 2007-12-11 Donnelly Corporation Vehicle communication system
US7864398B2 (en) 2004-06-08 2011-01-04 Gentex Corporation Electro-optical element including metallic films and methods for applying the same
US7706046B2 (en) * 2004-06-08 2010-04-27 Gentex Corporation Rearview mirror element having a circuit mounted to the rear surface of the element
US7643196B2 (en) 2005-12-16 2010-01-05 The Charles Stark Draper Laboratory, Inc. Systems, methods and devices for actuating a moveable miniature platform
US8274729B2 (en) * 2006-03-03 2012-09-25 Gentex Corporation Thin-film coatings, electro-optic elements and assemblies incorporating these elements
US8169681B2 (en) 2006-03-03 2012-05-01 Gentex Corporation Thin-film coatings, electro-optic elements and assemblies incorporating these elements
US7746534B2 (en) * 2006-12-07 2010-06-29 Gentex Corporation Thin-film coatings, electro-optic elements and assemblies incorporating these elements
EP2426552A1 (en) 2006-03-03 2012-03-07 Gentex Corporation Electro-optic elements incorporating improved thin-film coatings
US8368992B2 (en) * 2006-03-03 2013-02-05 Gentex Corporation Electro-optical element including IMI coatings
US7688495B2 (en) * 2006-03-03 2010-03-30 Gentex Corporation Thin-film coatings, electro-optic elements and assemblies incorporating these elements
TWI328139B (en) * 2007-01-22 2010-08-01 Ind Tech Res Inst Projector
US8649083B2 (en) 2007-03-05 2014-02-11 Gentex Corporation Multi-zone mirrors
US10017847B2 (en) * 2007-03-05 2018-07-10 Gentex Corporation Method and apparatus for ion milling
US8035881B2 (en) * 2007-03-05 2011-10-11 Gentex Corporation Multi-zone mirrors
US9274394B2 (en) 2007-03-05 2016-03-01 Gentex Corporation Multi-zone mirrors
US8196874B2 (en) 2007-10-12 2012-06-12 Maxtec, Llc Storable intravenous stands
JP2009229916A (ja) * 2008-03-24 2009-10-08 Nippon Telegr & Teleph Corp <Ntt> マイクロミラー素子およびマイクロミラーアレイ
US8154418B2 (en) 2008-03-31 2012-04-10 Magna Mirrors Of America, Inc. Interior rearview mirror system
DE102013210059B4 (de) * 2013-05-29 2021-07-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung mit einer Feder und einem daran aufgehängten optischen Element
CN105712290B (zh) * 2014-12-04 2017-09-29 无锡华润上华半导体有限公司 Mems静电驱动器的制作方法
DE102015216811B4 (de) 2015-09-02 2023-06-29 Robert Bosch Gmbh Schwenkvorrichtung für einen Mikrospiegel
DE102017206252A1 (de) 2017-04-11 2018-10-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Spiegelvorrichtung
CN116100845A (zh) * 2023-01-06 2023-05-12 四川大学 一种3d打印扭转梁微型集成扫描微镜的方法

Citations (2)

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Publication number Priority date Publication date Assignee Title
DE4334267A1 (de) * 1992-10-08 1994-04-14 Fuji Electric Co Ltd Torsionsvibrator und damit ausgestattete Licht-Ablenkvorrichtung
EP0754958A2 (en) * 1995-07-20 1997-01-22 Texas Instruments Incorporated Improvements in or relating to micro-mechanical devices

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GB2275787A (en) 1993-03-05 1994-09-07 British Aerospace Silicon micro-mirror unit
EP0657760A1 (en) * 1993-09-15 1995-06-14 Texas Instruments Incorporated Image simulation and projection system
US5665997A (en) * 1994-03-31 1997-09-09 Texas Instruments Incorporated Grated landing area to eliminate sticking of micro-mechanical devices
JP3425814B2 (ja) * 1994-12-28 2003-07-14 日本信号株式会社 電磁アクチュエータ及びその製造方法
US5670977A (en) * 1995-02-16 1997-09-23 Texas Instruments Incorporated Spatial light modulator having single bit-line dual-latch memory cells
KR100343219B1 (ko) 1995-02-25 2002-11-23 삼성전기주식회사 거울구동장치
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6072617A (en) * 1996-11-26 2000-06-06 Texas Instruments Incorporated Micro mechanical device with memory metal component
DE19728598C2 (de) * 1997-07-04 2000-12-14 Bosch Gmbh Robert Mikromechanische Spiegeleinrichtung
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
DE19857946C1 (de) 1998-12-16 2000-01-20 Bosch Gmbh Robert Mikroschwingspiegel

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4334267A1 (de) * 1992-10-08 1994-04-14 Fuji Electric Co Ltd Torsionsvibrator und damit ausgestattete Licht-Ablenkvorrichtung
EP0754958A2 (en) * 1995-07-20 1997-01-22 Texas Instruments Incorporated Improvements in or relating to micro-mechanical devices

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7177068B2 (en) 2002-12-20 2007-02-13 Robert Bosch Gmbh Apparatus, method and system for providing enhanced mechanical protection for thin beams
US7342703B2 (en) 2002-12-20 2008-03-11 Robert Bosch Gmbh Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action
US7014115B2 (en) 2003-08-25 2006-03-21 Advanced Nano Systems, Inc. MEMS scanning mirror with distributed hinges and multiple support attachments
DE102005033800A1 (de) * 2005-07-13 2007-02-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung
US7369288B2 (en) 2005-07-13 2008-05-06 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Micromechanical optical element having a reflective surface as well as its use
DE102005033800B4 (de) * 2005-07-13 2016-09-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung
DE102008026886A1 (de) 2008-06-05 2009-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Strukturierung einer Nutzschicht eines Substrats
DE102008026886B4 (de) * 2008-06-05 2016-04-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Strukturierung einer Nutzschicht eines Substrats
WO2018072973A1 (de) * 2016-10-19 2018-04-26 Robert Bosch Gmbh Mikromechanisches bauteil und herstellungsverfahren für ein mikromechanisches bauteil
US10989913B2 (en) 2016-10-19 2021-04-27 Robert Bosch Gmbh Micromechanical component and method for producing a micromechanical component
WO2018082750A1 (de) * 2016-11-07 2018-05-11 Blickfeld GmbH Faser-scanner mit mindestens zwei fasern
DE102016221966A1 (de) 2016-11-09 2018-05-09 Robert Bosch Gmbh Verfahren zum Ansteuern einer Aktoreinrichtung und mikromechanische Vorrichtung

Also Published As

Publication number Publication date
JP4541627B2 (ja) 2010-09-08
JP2003518650A (ja) 2003-06-10
WO2001048527A3 (de) 2002-02-14
EP1247131A2 (de) 2002-10-09
WO2001048527A2 (de) 2001-07-05
EP1247131B1 (de) 2004-09-15
US6749308B1 (en) 2004-06-15
DE50007817D1 (de) 2004-10-21
ES2228650T3 (es) 2005-04-16

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Legal Events

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8131 Rejection