JP4536873B2 - 三次元形状計測方法及び装置 - Google Patents

三次元形状計測方法及び装置 Download PDF

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Publication number
JP4536873B2
JP4536873B2 JP2000168195A JP2000168195A JP4536873B2 JP 4536873 B2 JP4536873 B2 JP 4536873B2 JP 2000168195 A JP2000168195 A JP 2000168195A JP 2000168195 A JP2000168195 A JP 2000168195A JP 4536873 B2 JP4536873 B2 JP 4536873B2
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measured
sample
dimensional shape
measurement
component
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Expired - Fee Related
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JP2000168195A
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Japanese (ja)
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JP2001343222A5 (fr
JP2001343222A (ja
Inventor
仁 飯島
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Canon Inc
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Canon Inc
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Priority to JP2000168195A priority Critical patent/JP4536873B2/ja
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  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP2000168195A 2000-06-05 2000-06-05 三次元形状計測方法及び装置 Expired - Fee Related JP4536873B2 (ja)

Priority Applications (1)

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JP2000168195A JP4536873B2 (ja) 2000-06-05 2000-06-05 三次元形状計測方法及び装置

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JP2000168195A JP4536873B2 (ja) 2000-06-05 2000-06-05 三次元形状計測方法及び装置

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JP2001343222A JP2001343222A (ja) 2001-12-14
JP2001343222A5 JP2001343222A5 (fr) 2007-07-19
JP4536873B2 true JP4536873B2 (ja) 2010-09-01

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JP2000168195A Expired - Fee Related JP4536873B2 (ja) 2000-06-05 2000-06-05 三次元形状計測方法及び装置

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006516763A (ja) * 2003-01-27 2006-07-06 ゼテテック インスティテュート 干渉計測対象物による反射／散乱および透過ビームの、四半分角視野共時測定のための装置および方法。
JP5231883B2 (ja) * 2008-07-03 2013-07-10 株式会社 光コム 距離計及び距離測定方法並びに光学的三次元形状測定機
JP2013213802A (ja) * 2012-03-09 2013-10-17 Canon Inc 計測装置
JP7107268B2 (ja) * 2019-04-03 2022-07-27 日本製鉄株式会社 速度測定方法及び速度測定装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61202128A (ja) * 1985-03-06 1986-09-06 Hitachi Ltd 半導体レ−ザヘテロダイン干渉計
JPH02122206A (ja) * 1988-11-01 1990-05-09 Nippon Steel Corp 光ファイバー干渉計およびその信号処理方法
JPH0395906U (fr) * 1990-01-23 1991-09-30
JPH0560511A (ja) * 1991-09-02 1993-03-09 Mitsubishi Electric Corp ヘテロダイン干渉計
JPH0650733A (ja) * 1992-07-28 1994-02-25 Citizen Watch Co Ltd 表面形状測定装置
JPH0821704A (ja) * 1994-07-06 1996-01-23 Hamamatsu Photonics Kk 光周波数混合装置
JPH10185529A (ja) * 1996-12-27 1998-07-14 Canon Inc 干渉計及び形状測定装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02173505A (ja) * 1988-12-26 1990-07-05 Brother Ind Ltd 光波干渉型微細表面形状測定装置
JPH0474914A (ja) * 1990-07-16 1992-03-10 Brother Ind Ltd 追従型光波干渉表面形状測定装置
JPH04188003A (ja) * 1990-11-22 1992-07-06 Brother Ind Ltd パターン・マッチング型光ヘテロダイン干渉測定装置
JPH085314A (ja) * 1994-06-20 1996-01-12 Canon Inc 変位測定方法及び変位測定装置
JP2000146516A (ja) * 1998-11-12 2000-05-26 Yokogawa Electric Corp レーザ測長装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61202128A (ja) * 1985-03-06 1986-09-06 Hitachi Ltd 半導体レ−ザヘテロダイン干渉計
JPH02122206A (ja) * 1988-11-01 1990-05-09 Nippon Steel Corp 光ファイバー干渉計およびその信号処理方法
JPH0395906U (fr) * 1990-01-23 1991-09-30
JPH0560511A (ja) * 1991-09-02 1993-03-09 Mitsubishi Electric Corp ヘテロダイン干渉計
JPH0650733A (ja) * 1992-07-28 1994-02-25 Citizen Watch Co Ltd 表面形状測定装置
JPH0821704A (ja) * 1994-07-06 1996-01-23 Hamamatsu Photonics Kk 光周波数混合装置
JPH10185529A (ja) * 1996-12-27 1998-07-14 Canon Inc 干渉計及び形状測定装置

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