JP4533256B2 - 微細構造体の製造方法および液体吐出ヘッドの製造方法 - Google Patents

微細構造体の製造方法および液体吐出ヘッドの製造方法 Download PDF

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JP4533256B2
JP4533256B2 JP2005188053A JP2005188053A JP4533256B2 JP 4533256 B2 JP4533256 B2 JP 4533256B2 JP 2005188053 A JP2005188053 A JP 2005188053A JP 2005188053 A JP2005188053 A JP 2005188053A JP 4533256 B2 JP4533256 B2 JP 4533256B2
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photosensitive material
positive photosensitive
material layer
layer
pattern
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JP2005188053A
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Japanese (ja)
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JP2006044238A5 (enExample
JP2006044238A (ja
Inventor
雅彦 久保田
環樹 佐藤
工 鈴木
宏恵 石倉
昭二 芝
亮二 柬理
麻紀 服田
和宏 浅井
明彦 岡野
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Canon Inc
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Canon Inc
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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Materials For Photolithography (AREA)
  • Micromachines (AREA)
JP2005188053A 2004-06-28 2005-06-28 微細構造体の製造方法および液体吐出ヘッドの製造方法 Expired - Fee Related JP4533256B2 (ja)

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JP2005188053A JP4533256B2 (ja) 2004-06-28 2005-06-28 微細構造体の製造方法および液体吐出ヘッドの製造方法

Applications Claiming Priority (2)

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JP2004190481 2004-06-28
JP2005188053A JP4533256B2 (ja) 2004-06-28 2005-06-28 微細構造体の製造方法および液体吐出ヘッドの製造方法

Related Child Applications (1)

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JP2010107350A Division JP5159823B2 (ja) 2004-06-28 2010-05-07 構造体の製造方法および液体吐出ヘッドの製造方法

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JP2006044238A JP2006044238A (ja) 2006-02-16
JP2006044238A5 JP2006044238A5 (enExample) 2008-08-14
JP4533256B2 true JP4533256B2 (ja) 2010-09-01

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JP2005188053A Expired - Fee Related JP4533256B2 (ja) 2004-06-28 2005-06-28 微細構造体の製造方法および液体吐出ヘッドの製造方法

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5016870B2 (ja) * 2006-08-11 2012-09-05 キヤノン株式会社 微小流路の製造方法
JP5145668B2 (ja) * 2006-08-11 2013-02-20 大日本印刷株式会社 パターン形成体、およびその製造方法
JP5553538B2 (ja) * 2009-06-19 2014-07-16 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5279686B2 (ja) * 2009-11-11 2013-09-04 キヤノン株式会社 液体吐出ヘッドの製造方法
US11935748B2 (en) 2017-08-31 2024-03-19 Google Llc Fabricating a device using a multilayer stack
CN112551478B (zh) * 2020-12-11 2024-06-07 上海集成电路研发中心有限公司 一种红外探测器及制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4532785B2 (ja) * 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法
JP4298414B2 (ja) * 2002-07-10 2009-07-22 キヤノン株式会社 液体吐出ヘッドの製造方法
JP4280574B2 (ja) * 2002-07-10 2009-06-17 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2004042389A (ja) * 2002-07-10 2004-02-12 Canon Inc 微細構造体の製造方法、液体吐出ヘッドの製造方法および液体吐出ヘッド
JP2004042396A (ja) * 2002-07-10 2004-02-12 Canon Inc 微細構造体の製造方法、液体吐出ヘッドの製造方法および液体吐出ヘッド

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