JP4503799B2 - 光学的位置測定装置 - Google Patents

光学的位置測定装置 Download PDF

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Publication number
JP4503799B2
JP4503799B2 JP2000261121A JP2000261121A JP4503799B2 JP 4503799 B2 JP4503799 B2 JP 4503799B2 JP 2000261121 A JP2000261121 A JP 2000261121A JP 2000261121 A JP2000261121 A JP 2000261121A JP 4503799 B2 JP4503799 B2 JP 4503799B2
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Japan
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scale
detection
projection
graduation
position measuring
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Expired - Fee Related
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JP2000261121A
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English (en)
Japanese (ja)
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JP2001082984A (ja
JP2001082984A5 (enExample
Inventor
ヴオルフガング・ホルツアプフエル
ヴアルター・フーバー
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G01D5/34794—Optical encoders using the Vernier principle, i.e. incorporating two or more tracks having a (n, n+1, ...) relationship

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Body Structure For Vehicles (AREA)
  • Vehicle Body Suspensions (AREA)
  • Eye Examination Apparatus (AREA)
JP2000261121A 1999-08-31 2000-08-30 光学的位置測定装置 Expired - Fee Related JP4503799B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19941318:5 1999-08-31
DE19941318A DE19941318A1 (de) 1999-08-31 1999-08-31 Optische Positionsmeßeinrichtung

Publications (3)

Publication Number Publication Date
JP2001082984A JP2001082984A (ja) 2001-03-30
JP2001082984A5 JP2001082984A5 (enExample) 2007-06-14
JP4503799B2 true JP4503799B2 (ja) 2010-07-14

Family

ID=7920223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000261121A Expired - Fee Related JP4503799B2 (ja) 1999-08-31 2000-08-30 光学的位置測定装置

Country Status (6)

Country Link
US (1) US6541761B1 (enExample)
EP (1) EP1081457B1 (enExample)
JP (1) JP4503799B2 (enExample)
AT (1) ATE398764T1 (enExample)
DE (2) DE19941318A1 (enExample)
ES (1) ES2307478T3 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29916394U1 (de) * 1999-09-17 2001-02-15 Dr. Johannes Heidenhain Gmbh, 83301 Traunreut Optische Positionsmeßeinrichtung
DE19956912A1 (de) 1999-11-26 2001-08-09 Heidenhain Gmbh Dr Johannes Winkelmeßsystem und Winkelmeßverfahren zur berührungslosen Winkelmessung
DE19962278A1 (de) * 1999-12-23 2001-08-02 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
DE10130938A1 (de) * 2001-06-27 2003-01-23 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung und Verfahren zum Betrieb einer Positionsmesseinrichtung
US7002137B2 (en) * 2001-08-30 2006-02-21 Gsi Lumonics Corporation Reference point talbot encoder
GB0200575D0 (en) * 2002-01-11 2002-02-27 Rls Merilna Tehnika D O O Encoder with reference marks
DE10201496A1 (de) * 2002-01-17 2003-07-31 Heidenhain Gmbh Dr Johannes Maßstab und Positionsmesseinrichtung zur absoluten Positionsbestimmung
WO2005001774A2 (en) * 2003-06-18 2005-01-06 Dimensional Photonics Methods and apparatus for reducing error in interferometric imaging measurements
EP1519158B1 (de) * 2003-09-23 2010-08-11 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
DE102004035172A1 (de) 2004-07-16 2006-02-09 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102004053082A1 (de) * 2004-11-03 2006-05-04 Dr. Johannes Heidenhain Gmbh Positionsmesssystem
DE102005006247A1 (de) * 2005-02-11 2006-08-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102005009043A1 (de) * 2005-02-22 2006-08-31 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine Positionsmesseinrichtung
DE102006041357A1 (de) * 2005-11-09 2007-05-10 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Verfahren zum Betrieb einer Positionsmesseinrichtung
ES2311354B1 (es) * 2006-06-08 2009-11-30 Fagor, S. Coop. Dispositivo optoelectronico de medida.
EP2051047B1 (en) 2007-06-01 2019-12-25 Mitutoyo Corporation Reflective encoder, scale thereof, and method for manufacturing scale
KR101025627B1 (ko) * 2007-08-06 2011-03-30 광주과학기술원 리모콘 마우스
DE102008013164A1 (de) 2008-03-07 2009-09-10 Dr. Johannes Heidenhain Gmbh Maßverkörperung für ein optisches Positionsmessgerät und optische Positionsmessgerät
TW201218047A (en) * 2010-10-26 2012-05-01 Xiroku Accupoint Technology Inc Object sensing device
DE102011076055A1 (de) * 2011-05-18 2012-11-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN102508578B (zh) * 2011-10-09 2015-07-22 清华大学深圳研究生院 投影定位装置及方法、交互系统和交互方法
EP2722650A1 (en) * 2012-10-18 2014-04-23 Lambda-X Angular position sensing
WO2015049173A1 (en) * 2013-10-01 2015-04-09 Renishaw Plc Reference mark detector arrangement
DE102014215633A1 (de) * 2013-11-28 2015-05-28 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102014212268A1 (de) 2014-06-26 2016-01-14 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
EP3255384B1 (de) * 2016-06-07 2018-11-28 Dr. Johannes Heidenhain GmbH Massverkörperung sowie positionsmesseinrichtung
JP2020122659A (ja) * 2019-01-29 2020-08-13 日本電産株式会社 位置検出装置、モータシステム及び位置検出方法
DE102020208423A1 (de) 2020-07-06 2022-01-13 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
DE102023207858A1 (de) 2023-08-16 2025-02-20 Dr. Johannes Heidenhain Gmbh Sensoranordnung für eine Oberflächenmessung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3412128C1 (de) 1984-03-31 1985-05-09 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmesseinrichtung
US4618214A (en) 1984-10-26 1986-10-21 Itek Corporation Method of fabricating a controlled harmonic binary grating
DE3616144A1 (de) 1986-05-14 1987-11-19 Heidenhain Gmbh Dr Johannes Fotoelektrische messeinrichtung
US5486923A (en) * 1992-05-05 1996-01-23 Microe Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
JP3390440B2 (ja) * 1992-05-05 2003-03-24 ビーイーアイ・エレクトロニクス・インク 相対的な動きを検出する装置
EP0645607B1 (de) 1993-08-07 1997-06-04 Dr. Johannes Heidenhain GmbH Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
DE19511068A1 (de) * 1995-03-25 1996-09-26 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
GB9522491D0 (en) * 1995-11-02 1996-01-03 Renishaw Plc Opto-electronic rotary encoder
JP3209914B2 (ja) * 1996-03-19 2001-09-17 オークマ株式会社 光学式エンコーダ

Also Published As

Publication number Publication date
ES2307478T3 (es) 2008-12-01
DE19941318A1 (de) 2001-03-15
EP1081457A3 (de) 2001-11-21
ATE398764T1 (de) 2008-07-15
EP1081457B1 (de) 2008-06-18
JP2001082984A (ja) 2001-03-30
EP1081457A2 (de) 2001-03-07
DE50015209D1 (de) 2008-07-31
US6541761B1 (en) 2003-04-01

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