JP4498663B2 - 透過型結晶分析体の厚さ設定方法 - Google Patents

透過型結晶分析体の厚さ設定方法 Download PDF

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Publication number
JP4498663B2
JP4498663B2 JP2002186332A JP2002186332A JP4498663B2 JP 4498663 B2 JP4498663 B2 JP 4498663B2 JP 2002186332 A JP2002186332 A JP 2002186332A JP 2002186332 A JP2002186332 A JP 2002186332A JP 4498663 B2 JP4498663 B2 JP 4498663B2
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analyte
crystal
transmission
particle beam
electromagnetic wave
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JP2003329617A (ja
JP2003329617A5 (enExample
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正海 安藤
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Tokyo University of Science
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Tokyo University of Science
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Priority to JP2002186332A priority Critical patent/JP4498663B2/ja
Priority to PCT/JP2002/006595 priority patent/WO2003008952A1/ja
Priority to US10/483,399 priority patent/US20040196957A1/en
Priority to EP02743766A priority patent/EP1429138A1/en
Publication of JP2003329617A publication Critical patent/JP2003329617A/ja
Publication of JP2003329617A5 publication Critical patent/JP2003329617A5/ja
Priority to US12/073,976 priority patent/US7817779B2/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2002186332A 2001-07-11 2002-06-26 透過型結晶分析体の厚さ設定方法 Expired - Fee Related JP4498663B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2002186332A JP4498663B2 (ja) 2001-07-11 2002-06-26 透過型結晶分析体の厚さ設定方法
PCT/JP2002/006595 WO2003008952A1 (fr) 2001-07-11 2002-06-28 Procede et dispositif d'analyse non destructive et objet specifique soumis a ce procede
US10/483,399 US20040196957A1 (en) 2001-07-11 2002-06-28 Nondestructive analysis method and nondestructive analysis device and specific object by the method/device
EP02743766A EP1429138A1 (en) 2001-07-11 2002-06-28 NONDESTRUCTIVE ANALYSIS METHOD AND NONDESTRUCTIVE ANALYSIS DEVICE AND SPECIFIC OBJECT BY THE METHOD/DEVICE
US12/073,976 US7817779B2 (en) 2001-07-11 2008-03-12 Nondestructive analysis method, nondestructive analysis device, and specific object analyzed by the method/device

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2001211221 2001-07-11
JP2001-211221 2001-07-11
JP2002-58053 2002-03-04
JP2002058053 2002-03-04
JP2002186332A JP4498663B2 (ja) 2001-07-11 2002-06-26 透過型結晶分析体の厚さ設定方法

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JP2009215442A Division JP5187694B2 (ja) 2001-07-11 2009-09-17 非破壊分析方法および非破壊分析装置

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JP2003329617A JP2003329617A (ja) 2003-11-19
JP2003329617A5 JP2003329617A5 (enExample) 2005-10-20
JP4498663B2 true JP4498663B2 (ja) 2010-07-07

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US (2) US20040196957A1 (enExample)
EP (1) EP1429138A1 (enExample)
JP (1) JP4498663B2 (enExample)
WO (1) WO2003008952A1 (enExample)

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US7076025B2 (en) 2004-05-19 2006-07-11 Illinois Institute Of Technology Method for detecting a mass density image of an object
US7330530B2 (en) * 2004-10-04 2008-02-12 Illinois Institute Of Technology Diffraction enhanced imaging method using a line x-ray source
FR2883074B1 (fr) 2005-03-10 2007-06-08 Centre Nat Rech Scient Systeme de detection bidimensionnelle pour rayonnement neutrons
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DE102008008829B4 (de) 2007-02-14 2008-11-20 Technische Universität Dresden Verfahren und Vorrichtung zur Registrierung von Realstruktur-Informationen in massiven Kristallkörpern mittels Röntgenstrahlung
JP2008197593A (ja) * 2007-02-16 2008-08-28 Konica Minolta Medical & Graphic Inc X線用透過型回折格子、x線タルボ干渉計およびx線撮像装置
US7469037B2 (en) 2007-04-03 2008-12-23 Illinois Institute Of Technology Method for detecting a mass density image of an object
WO2008156223A1 (ja) * 2007-06-21 2008-12-24 Tokyo University Of Science Educational Foundation Administrative Organization トモシンセシス画像取得方法及びトモシンセシス装置
JP5611223B2 (ja) * 2008-12-01 2014-10-22 ザ ユニバーシティ オブ ノース カロライナ アット チャペル ヒルThe University Of North Carolina At Chapel Hill 多色分布を持つx線ビームからのマルチビームイメージングを用いる対象の画像の検出システム及び方法
US8315358B2 (en) * 2009-06-04 2012-11-20 Nextray, Inc. Strain matching of crystals and horizontally-spaced monochromator and analyzer crystal arrays in diffraction enhanced imaging systems and related methods
US8204174B2 (en) * 2009-06-04 2012-06-19 Nextray, Inc. Systems and methods for detecting an image of an object by use of X-ray beams generated by multiple small area sources and by use of facing sides of adjacent monochromator crystals
WO2011052745A1 (ja) * 2009-10-30 2011-05-05 学校法人東京理科大学 画像合成装置及び画像合成方法
JP6036321B2 (ja) 2012-03-23 2016-11-30 株式会社リガク X線複合装置
US9269468B2 (en) * 2012-04-30 2016-02-23 Jordan Valley Semiconductors Ltd. X-ray beam conditioning
US9068927B2 (en) * 2012-12-21 2015-06-30 General Electric Company Laboratory diffraction-based phase contrast imaging technique
US9008278B2 (en) 2012-12-28 2015-04-14 General Electric Company Multilayer X-ray source target with high thermal conductivity
JP2019191168A (ja) 2018-04-23 2019-10-31 ブルカー ジェイヴィ イスラエル リミテッドBruker Jv Israel Ltd. 小角x線散乱測定用のx線源光学系
JP7308233B2 (ja) 2018-07-05 2023-07-13 ブルカー テクノロジーズ リミテッド 小角x線散乱計測計
CN110793982B (zh) * 2019-11-21 2022-03-04 山东建筑大学 一种纳米晶化动力学过程的高能x射线表征方法
US11781999B2 (en) 2021-09-05 2023-10-10 Bruker Technologies Ltd. Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
US12249059B2 (en) 2022-03-31 2025-03-11 Bruker Technologies Ltd. Navigation accuracy using camera coupled with detector assembly

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US7076025B2 (en) * 2004-05-19 2006-07-11 Illinois Institute Of Technology Method for detecting a mass density image of an object

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Publication number Publication date
US7817779B2 (en) 2010-10-19
WO2003008952A1 (fr) 2003-01-30
JP2003329617A (ja) 2003-11-19
US20040196957A1 (en) 2004-10-07
EP1429138A1 (en) 2004-06-16
US20080298551A1 (en) 2008-12-04

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