US20040196957A1 - Nondestructive analysis method and nondestructive analysis device and specific object by the method/device - Google Patents

Nondestructive analysis method and nondestructive analysis device and specific object by the method/device Download PDF

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US20040196957A1
US20040196957A1 US10/483,399 US48339904A US2004196957A1 US 20040196957 A1 US20040196957 A1 US 20040196957A1 US 48339904 A US48339904 A US 48339904A US 2004196957 A1 US2004196957 A1 US 2004196957A1
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rays
analyzer crystal
transmission
type analyzer
ray
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Masami Ando
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material

Definitions

  • the invention of this application relates to a nondestructive analysis method, a nondestructive analysis device, and a specific object by the method/device.
  • the object is irradiated with monochromatic X-rays, refraction X-rays from the object are introduced to an analyzer crystal (also referred to crystal analysis plate, crystal analysis device, etc.).
  • an analyzer crystal also referred to crystal analysis plate, crystal analysis device, etc.
  • This utilizes the fact that the analyzer crystal has an angular-analysis capability.
  • the image obtained by the angular-analysis is paired with a similar image having different contrast between the transmission beam and diffraction beam (an image of opposite signs: specifically, a white-and-black image if the other image is black-and-white).
  • the nondestructive analysis technique of Japanese Patent No. 2694049 has the problem that when the angular-analysis capability of the transmission-type analyzer crystal is utilized, the effect of the wavelength distribution remains, since no consideration is given to parallelization between the atomic lattice planes of the monochromator for generating the monochromatic X-rays and the atomic lattice planes of the analyzer crystal.
  • any of the foregoing nondestructive analysis techniques can only obtain poor-contrast, hard-to-recognize images due to the configuration that is chiefly intended to obtain an X-ray bright-field image, or an X-ray image or information on an object, superimposed with X-rays affected by the intensity of the X-rays incident directly in the X-ray bright-field image. It has thus been impossible to obtain nothing other than poor-contrast, hard-to-recognize images.
  • an object of the invention is to solve the problems of the conventional art and provide a new nondestructive analysis method and nondestructive analysis device, as well as a specific object by those nondestructive analysis method and device, which can realize a configuration chiefly intended to obtain an X-ray dark-field image in particular, or an X-ray image or object information by X-rays, unaffected by the intensities of the X-rays incident directly with an elimination or a reduction of an unnecessary illuminated background of X-rays, and can obtain a high-contrast image from inside an object at a time with facility.
  • the invention of this application firstly provides a nondestructive analysis method for irradiating an object with monochromatic parallel X-rays, making transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object incident on a transmission-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the transmission-type analyzer crystal, characterized in that: the thickness of the transmission-type analyzer crystal is initially set to such a thickness that when there is no object, either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the transmission-type analyzer crystal have an intensity of nearly zero as compared to the intensity of the others in terms of the intensity of X-rays less affected by X-rays incident directly; and either ones or both of the X-rays along the
  • the present invention in secondly provides a nondestructive analysis method for irradiating an object with monochromatic parallel X-rays, making transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object incident on a transmission-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the transmission-type analyzer crystal, characterized in that: the thickness of the transmission-type analyzer crystal is initially set to such a thickness that when there is no object, either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the transmission-type analyzer crystal have an intensity of nearly zero as compared to the intensity of the others in terms of the intensity of X-rays less affected by X-rays incident directly; and either one or both of an X-ray dark-field image and an X-ray bright-
  • the invention of this application thirdly provides a nondestructive analysis method for irradiating an object with monochromatic parallel X-ray, making transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object incident on a reflection-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the reflection-type analyzer crystal, characterized in that; transmitted transmission X-rays are provided by a dynamical diffraction action of the reflection-type analyzer crystal.
  • the present invention in 4th provides a nondestructive analysis method for irradiating an object with monochromatic parallel X-rays, making transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object incident on a reflection-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the reflection-type analyzer crystal, characterized in that: a transmitted X-ray dark-field image is provided by a dynamical diffraction action of the reflection-type analyzer crystal.
  • the invention of this application in 5th provides a nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object incident on a transmission-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the transmission-type analyzer crystal, characterized in that: the thickness of the transmission-type analyzer crystal is initially set to such a thickness that when there is no object, either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the transmission-type analyzer crystal have an intensity of nearly zero as compared to the intensity of the others in terms of the intensity of X-rays less affected by X-rays incident directly; and either ones or both of the X-rays along the forward dif
  • the present invention in 6th provides a nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object incident on a transmission-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the transmission-type analyzer crystal, characterized in that: the thickness of the transmission-type analyzer crystal is initially set to such a thickness that when there is no object, either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the transmission-type analyzer crystal have an intensity of nearly zero as compared to the intensity of the others in terms of the intensity of X-rays less affected by X-rays incident directly; and either one or both of an X-ray dark-field image and an X-ray bright-
  • the invention of this application in 7th provides a nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object incident on a transmission-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the transmission-type analyzer crystal, characterized in that: the transmission-type analyzer crystal is initially shaped so that it periodically exhibit such thicknesses that when there is no object, either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the transmission-type analyzer crystal have an intensity of nearly zero as compared to the intensity of the others in terms of the intensity of X-rays less affected by X-rays incident directly; a slit plate is arranged on an output side of the transmission
  • the invention of this application in 8th provides a nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object incident on a reflection-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the reflection-type analyzer crystal, characterized in that; transmitted transmission X-rays are obtained by a dynamical diffraction action of the reflection-type analyzer crystal.
  • the present invention in 9th provides a nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object incident on a reflection-type analyzer crystal, and obtaining an image inside the object by X-rays emitted from the reflection-type analyzer crystal, characterized in that: a transmitted X-ray dark-field image is provided by a dynamical diffraction action of the reflection-type analyzer crystal.
  • the invention of this application in 10th provides a nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object incident on an analyzer crystal, and obtaining an image inside the object by X-rays emitted from the analyzer crystal, characterized in that: the analyzer crystal is usable as both transmission-type and reflection-type analyzer crystals, being configured to satisfy both a thickness condition that either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the analyzer crystal have an intensity of nearly zero as compared to the intensity of the others in terms of the intensity of X-rays less affected by X-rays incident directly, and a thickness condition that transmission X-rays, refraction X-rays,
  • the present invention in 11th provides a nondestructive analysis device for irradiating an object with monochromatic parallel X-rays, making transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object incident on an analyzer crystal, and obtaining an image inside the object by X-rays emitted from the analyzer crystal, characterized in that: the analyzer crystal is usable as both transmission-type and reflection-type analyzer crystals, being configured to satisfy both a thickness condition that either ones of X-rays along a forward diffraction direction and X-rays along a diffraction direction obtained by a dynamical diffraction action of the analyzer crystal have an intensity of nearly zero as compared to the intensity of the others in terms of the intensity of X-rays less affected by X-rays incident directly, and a thickness condition that transmission X-rays, refraction X-rays, diffraction X-ray
  • the invention of this application in 12th provides the nondestructive analysis device according to the already described invention, characterized in that the reflection-type analyzer crystal is an asymmetric analyzer crystal.
  • the present invention in 13th provides the nondestructive analysis device according to the already described invention, characterized by comprising: a X-ray detecting device for detecting either one or both of the X-ray dark-field image and the X-ray bright-field image; and image processing equipment for creating an image by using detecting data from the X-ray detecting device.
  • the present invention in 14th provides the nondestructive analysis device according to the already described invention, characterized in that the X-ray detecting device is a two-dimensional detector or a line sensor one-dimensional detector.
  • the present invention in 15th provides the nondestructive analysis device according to the already described invention, characterized in that the image processing equipment is capable of creating either one or both of X-ray dark-field tomography and X-ray bright-field tomography, or either one or both of X-ray dark-field stereography and X-ray bright-field stereography.
  • the present invention in 16th provides the nondestructive analysis device according to the already described invention, characterized by comprising means for monochromating and parallelizing X-rays from an X-ray source
  • the present invention in 17th provides the nondestructive analysis device according to the already described invention, characterized in that the means for monochromating and parallelizing the X-rays is a symmetric or asymmetric monochromator.
  • the present invention in 18th provides the nondestructive analysis device according to the already described invention, characterized in that atomic lattice planes of the symmetric or asymmetric monochromator and atomic lattice planes of the transmission-type analyzer crystal or reflection-type analyzer crystal are parallel with each other.
  • the present invention in 19th provides the nondestructive analysis device according to the already described invention, characterized in that transmission X-rays, refraction X-rays, diffraction X-rays, or small angle scattering X-rays from the object are made incident on the transmission-type analyzer crystal or reflection-type analyzer crystal through one or a plurality of asymmetric monochromators.
  • the present invention in 20th provides the nondestructive analysis device according to the already described invention, characterized in that either one or both of the X-ray dark-field image and the X-ray bright-field image obtained from the transmission-type analyzer crystal are output through one or a plurality of asymmetric monochromators.
  • the invention of this application in 21st provides the nondestructive analysis method according to the already described invention, characterized in that an electromagnetic wave other than the X-rays or a corpuscular beam is used instead of the X-rays.
  • the present invention in 22nd provides the nondestructive analysis device according to the already described invention, characterized in that an electromagnetic wave other than the X-rays or a corpuscular beam is used instead of the X-rays.
  • the present invention in 23rd provides a specific object identified by analyzing an internal structure of an object by using the nondestructive analysis method according to the already described invention, or the nondestructive analysis device according to the already described invention.
  • FIG. 1 is a diagram illustrating an embodiment of the invention of this application for the case of using a transmission-type analyzer crystal
  • FIG. 2 is a diagram illustrating another embodiment of the invention of this application for the case of using a transmission-type analyzer crystal
  • FIG. 3 is a diagram for explaining the dynamical diffraction action of the transmission-type analyzer crystal
  • FIG. 4 is a diagram for explaining an X-ray bright-field image and an X-ray dark-field image of the transmission-type analyzer crystal
  • FIG. 5 is a chart illustrating a theoretical curve of the dynamical diffraction action of the transmission-type analyzer crystal
  • FIG. 6 is a chart illustrating the relationship between the thickness of the transmission-type analyzer crystal and an O-wave and a G-wave;
  • FIG. 7 is a diagram illustrating a further embodiment of the invention of this application for the case of using a transmission-type analyzer crystal
  • FIG. 8( a ) is a diagram illustrating an embodiment of the invention of this application for the case of using a reflection-type analyzer crystal
  • FIG. 8( b ) is a perspective view illustrating the reflection-type analyzer crystal
  • FIG. 9 is a diagram illustrating another embodiment of the invention of this application for the case of using a reflection-type analyzer crystal
  • FIG. 10 is a diagram illustrating an embodiment of the invention of this application for situations where asymmetric monochromators are interposed between an object and a transmission-type analyzer crystal;
  • FIG. 11 is a diagram illustrating an embodiment of the invention of this application for situations where asymmetric monochromators are interposed between a transmission-type analyzer crystal and an X-ray detecting device;
  • FIG. 12 is a diagram showing a practical example of nondestructive analysis by the invention of this application.
  • FIG. 13 is a diagram showing another practical example of nondestructive analysis by the invention of this application.
  • FIG. 14 is a diagram showing another practical example of nondestructive analysis by the invention of this application.
  • FIG. 15 is a diagram showing another practical example of nondestructive analysis by the invention of this application.
  • 8 a , 8 b , 8 c , 8 d asymmetric monochromators
  • An object ( 2 ) to be analyzed is irradiated with monochromatic parallel X-rays I i ( 1 ).
  • Transmission X-rays from the object ( 2 ), and such X-rays as refraction X-rays, diffraction X-rays, and even small angle scattering X-rays (for convenience of explanation, these will be collectively referred to as refraction X-rays, and the like) ( 3 ) are made incident on a transmission-type analyzer crystal ( 4 a ) to utilize the dynamical diffraction action of the transmission-type analyzer crystal ( 4 a ) at this time.
  • the thickness of the transmission-type analyzer crystal ( 4 a ) is initially set to such a thickness that when there is no object, either ones of the X-rays ( 41 a ) along the forward diffraction direction (also referred to, equivalently, as diffraction X-rays along the incident direction or X-rays along the transmission diffraction direction) and the X-rays ( 42 a ) along the diffraction direction obtained by the dynamical diffraction action of the transmission-type analyzer crystal ( 4 a ) show an intensity of approximately zero (including exactly zero; the same holds hereinafter) as compared to the intensity of the others in terms of the intensity of X-rays leas affected by the X-rays incident directly.
  • the dynamical diffraction action means an effect resulting from multiple scattering of X-rays in a nearly perfect crystal.
  • the X-rays are thus output as divided into a wave (called O-wave) along the forward direction (also referred to as incident direction or transmission direction) and a wave (called G-wave) along the diffraction direction, the O-wave and the G-wave being reflected for a plurality of times repeatedly on a number of crystal lattice planes in the crystal.
  • I O Intensity of O-wave
  • I G Intensity of G-wave
  • n Refracive index
  • r c Classical electoron radius
  • F G The crystal structure factor in case 0 ⁇ 0
  • the thickness H of the transmission-type analyzer crystal ( 4 a ) should be selected so that either the intensity of I O for O-wave or the intensity of I G for G-wave will be approximately zero, in other words so that either one, compared to the other, that may receive less influence of the X-rays incident directly.
  • the wave that gives approximately the zero intensity forms the dark-field image ( 5 ) and the other wave forms the bright-field image ( 6 ). That is, the following relationship holds: [ Eq .
  • FIG. 5 illustrates the theoretical curves of the dynamical diffraction actions I O (W) and I G (W) in more details.
  • the O-wave constructs an X-ray dark-field image ( 5 ) under the dynamical diffraction action I O (W)
  • the G-wave constructs an X-ray bright-field image ( 6 ) under the dynamical diffraction action I O (W).
  • the G-wave constructs an X-ray dark-field image ( 5 ) under the dynamical diffraction action I G (W)
  • the O-wave constructs an X-ray bright-field image ( 6 ) under the dynamical diffraction action I O (W).
  • the transmission-type analyzer crystal ( 4 a ) is made of a diamond-type silicon analyzer crystal having a size of crystal lattice of 5.4311 angstroms and silicon 4,4,0 reflection is used, the thicknesses H at which I O or I G falls to nearly zero with respect to X-rays of 35 keV in energy appear in periods of 67.5 ⁇ m as illustrated in FIG. 6.
  • the thickness of the transmission-type analyzer crystal ( 4 a ) is adjusted to this period, it is possible to obtain a high-contrast image of the object ( 2 ), either one or both of an X-ray dark-field image ( 5 ) and an X-ray bright-field image ( 6 ), at a time without rotating the transmission-type analyzer crystal ( 4 a ) as in the conventional art.
  • the transmission-type analyzer crystal ( 4 a ) may be formed in a wedge shape or the like that exhibits the foregoing thicknesses periodically, in which case X-ray dark-field images ( 5 ) and X-ray bright-field images ( 6 ) are obtained in a slit fashion successively as shown in FIG. 6. Consequently, as illustrated in FIG.
  • a slit plate ( 11 ) is arranged on the output side of the transmission-type analyzer crystal ( 4 a ) so that this slit plate ( 11 ) and the wedge shape transmission-type analyzer crystal ( 4 a ) can be slid and moved relative to the object ( 2 ), or conversely the object ( 2 ) can be slid and moved relative to the alit plate ( 11 ) and the wedge shape transmission-type analyzer crystal ( 4 a ), to obtain a plurality of slit-like images through the slit plate ( 11 ).
  • Those images can be synthesized into an image or images of any fields of view, or equivalently, either one or both of an X-ray dark-field image and an X-ray bright-field image.
  • the transmission-type analyzer crystal ( 4 a ) capable of such intensity settings may have thicknesses in the range of, e.g., several micrometers to several tens of millimeters while the range varies, as can be seen from the foregoing equations 1, with various factors including the size of the crystal lattice, and the intensities and wavelengths of the X-rays, refraction X-rays, and the like ( 3 ).
  • the transmission-type analyzer crystal ( 4 a ) in this case have a required finishing precision of 1% or less the thickness.
  • the X-rays ( 41 a ) along the forward diffraction direction and the X-rays ( 42 a ) along the diffraction direction from the transmission-type analyzer crystal ( 4 a ) given the foregoing thickness setting are detected by the X-ray detecting devices ( 10 ) (see FIGS. 1 and 2), and images are created by image processing equipment (not shown, but is configured capable of receiving the detecting data of X-rays) by using the detecting data of X-rays from the X-ray detecting devices ( 10 ).
  • the X-ray dark-field image ( 5 ) is created from I O
  • the X-ray bright-field image ( 6 ) from I G .
  • FIGS. 8 ( a ), 8 ( b ), and 9 when a reflection-type analyzer crystal ( 4 b ) is used, an object ( 2 ) to be analyzed is irradiated with monochromatic parallel X-rays I i ( 1 ) via an asymmetric monochromator ( 8 ).
  • Refraction X-rays and the like ( 3 ) from the object ( 2 ) are made incident on the reflection-type analyzer crystal ( 4 b ), at which time the dynamical diffraction action of the reflection-type analyzer crystal ( 4 b ) is utilized so that in the reflection-type analyzer crystal ( 4 b ), the refraction X-rays and the like ( 3 ) from the object ( 2 ) satisfy the diffraction condition and are transmitted by the dynamical diffraction action of the reflection-type analyzer crystal ( 4 b ).
  • the angle between the monochromatic parallel X-rays ( 1 ) and the reflection-type analyzer crystal ( 4 b ) and the thickness of the reflection-type analyzer crystal ( 4 b ) are also given settings at which it possible to obtain the X-ray dark-field image ( 5 ) that is created from the transmission X-rays I T ( 41 b ) from the reflection-type analyzer crystal ( 4 b ).
  • the angle between the monochromatic parallel X-rays ( 1 ) and the reflection-type analyzer crystal ( 4 b ) may also be given another setting to satisfy the diffraction condition by the dynamical diffraction action of the reflection-type analyzer crystal ( 4 b ), so as to obtain an X-ray bright-field image ( 6 ) that is created by reflection X-rays I B ( 42 b ) according to the Bragg reflection condition.
  • the X-rays from the transmission-type analyzer crystal ( 4 a ) or the reflection-type analyzer crystal ( 4 b ) are detected by the X-ray detecting devices ( 10 ).
  • These X-ray detecting devices ( 10 ) may be flat-type panels, columnar panels, or the like based on two-dimensional detectors (such as an X-ray film, a nuclear plate, an X-ray image pick-up tube, an X-ray fluorescence multiplier tube, an X-ray image intensifier, an X-ray imaging plate, an X-ray CCD, and an X-ray imaging detector by amorphous element), or line sensor one-dimensional detectors.
  • Which X-ray detecting devices ( 10 ) to use may be selected arbitrarily depending on the type, condition, and the like of the object ( 2 ) to be analyzed.
  • combination scanning of, for example, object movement, rotation, tilt, etc., with the line sensor one-dimensional detectors or two-dimensional detectors is useful for the creation of tomography and stereography by image processing equipment to be described later.
  • X-ray computed tomography technology can be introduced to obtain new nondestructive analysis images.
  • the image processing equipment (not shown) is capable of creating ordinary X-ray scattering images as either one or both of the X-ray dark-field image ( 5 ) and the X-ray bright-field image ( 6 ), based on the detecting data of X-rays from the X-ray detecting devices ( 10 ) described above.
  • the image processing equipment may have the capability of creating X-ray dark-field and bright-field tomography and stereography through image synthesis processing or the like.
  • the X-rays from the X-ray source described above must reach the object ( 2 ) in the form of a monochromatic beam as well as a parallel beam (also referred to as plane wave).
  • This monochromatization and parallelization can be effected, for example, by using a parabolic mirror made of a multiple layer mirror.
  • a parallel beam may be created through condensation by a parabolic reflection mirror or capillary, followed by monochromatization by monochromators or asymmetric monochromators.
  • the incident X-rays ( 7 ) from the X-ray source (not shown) are monochromated and parallelized by the asymmetric monochromator ( 8 ).
  • the direction of the monochromatic parallel X-rays ( 1 ) from the asymmetric monochromator ( 8 ) (not shown) is changed by the collimator ( 9 ) for irradiation of the object ( 2 ).
  • This collimator ( 9 ) itself may also be used as a monochromator for monochromatization and parallelization.
  • the means for monochromatization and parallelization are not limited thereto.
  • Various means publicly known heretofore may be used as appropriate.
  • the monochromator or the asymmetric monochromator ( 8 ) is used as the monochromatization and parallelization means, it is of extreme importance that the monochromator or the asymmetric monochromator ( 8 ) is arranged with its atomic lattice planes ( 80 ) in parallel with the atomic lattice planes ( 40 a ), ( 40 b ) of the transmission-type analyzer crystal ( 4 a ) or the reflection-type analyzer crystal ( 4 b ) as shown in FIGS. 1, 2, 8 , and 9 (in FIG. 2, the atomic lattice planes ( 90 ) of the collimator ( 9 ) are also arranged in parallel).
  • FIG. 1 shows the asymmetric monochromator ( 8 ) and the transmission-type analyzer ( 4 a ) which are integrated with each other
  • FIG. 2 shows the collimator ( 9 ) and the transmission-type analyzer crystal ( 4 a ) which are unified with each other into a channel-cut shape
  • FIG. 8 shows the asymmetric monochromator ( 8 ) and the reflection-type analyzer crystal ( 4 b ) which are unified with each other into a channel-cut shape. It will be appreciated that the two may be separated or coupled loosely.
  • FIG. 9 shows an example where the asymmetric monochromator ( 8 ) and the reflection-type analyzer crystal ( 4 b ) are arranged separately.
  • the asymmetric monochromator ( 8 ), the collimator ( 9 ), and the transmission-type analyzer crystal ( 4 a ) or the reflection-type analyzer crystal ( 4 b ) must be assembled and adjusted so that their atomic lattice planes ( 80 ), ( 90 ), ( 40 a ), ( 40 b ) are in parallel with each other.
  • the incident X-rays ( 7 ) from the X-ray source (not shown) are monochromated and parallelized by the asymmetric monochromator ( 8 ), the object ( 2 ) is irradiated with the monochromatic parallel X-rays ( 1 ), and the refraction X-rays and the like ( 3 ) from the object ( 2 ) are further passed through one or a plurality of composite asymmetric monochromators ( 8 a ), ( 9 b ) before incidence on the transmission-type analyzer crystal ( 4 a ), as illustrated in FIG.
  • the X-rays ( 41 a ) along the forward diffraction direction and the X-rays ( 42 a ) along the diffraction direction from the transmission-type analyzer crystal ( 4 a ) may be further passed through one or a plurality of composite asymmetric monochromators ( 8 c ), ( 8 d ) before output to the X-ray detecting devices ( 10 ).
  • This also makes it possible to obtain the X-ray dark-field image ( 5 ) and the X-ray bright-field image ( 6 ) as enlarged images.
  • FIGS. 10 and 11 show embodiments for the case of using the transmission-type analyzer crystal ( 4 a ), the reflection-type analyzer crystal ( 4 b ) can also be used to obtain enlarged images and high resolution images, with such a configuration that one or a plurality of composite asymmetric monochromators ( 8 a ), ( 8 b ), ( 8 c ), ( 8 d ) are arranged before and behind the reflection-type analyzer crystal ( 4 b ).
  • the asymmetric monochromators ( 8 ), ( 8 b ) and the transmission-type analyzer crystal ( 4 a ) are also integrated with each other in FIG. 10 (those of FIG. 11 are substantially the same as in FIG. 1).
  • the two parties may be separated or coupled loosely as long as the atomic lattice planes ( 80 ) and the atomic lattice planes ( 40 a ) are in parallel with each other.
  • the analyzer crystals in use have predetermined functions and properties, such as transmission type (the transmission-type analyzer crystal ( 4 a )) and reflection type (the reflection-type analyzer crystal ( 4 b )).
  • an analyzer crystal sharable for both uses may be prepared, and adjusted in thickness in advance of an analysis so as to be usable as transmission type and reflection type, thereby achieving a nondestructive analysis device usable for both types.
  • the analyzer crystal when adjusted in thickness so as to satisfy both the thickness condition described in the first embodiment and the thickness condition described in the second embodiment, the analyzer crystal can be used for both transmission type and reflection type.
  • FIGS. 2 and 8 can be offered as analysis devices usable for both types, not as the dedicated transmission-type analyzer crystal ( 4 a ) or the dedicated reflection-type analyzer crystal ( 4 b ).
  • the analyzer crystals when used as transmission type, the refraction X-rays and the like ( 3 ) from the object ( 2 ) are desirably made incident from obliquely above as in FIG. 2.
  • the analyzer crystals are used as reflection type, the refraction X-rays and the like ( 3 ) from the object ( 2 ) are desirably made incident from directly above as in FIG. 8( a ) (though oblique incidence is also available in reflection type).
  • FIG. 12 shows an image of an object ( 2 ) made of a 1.0-mm thick of aluminum and 140- ⁇ m-diameter boron fibers embedded therein, the image being captured according to the embodiment of FIG. 2.
  • a diamond-type silicon analyzer crystal of 4,4,0 reflection is used as the transmission-type analyzer crystal ( 4 a ).
  • the thickness was adjusted to H that satisfies the relationships of the foregoing equations 1 and 3.
  • an X-ray dark-field image ( 5 ) showing the boron fibers sharply was provided by the G-wave, i.e., the X-rays ( 42 a ) along the diffraction direction.
  • an X-ray bright-field image ( 6 ) was provided at the same time.
  • FIG. 13 shows an image of an object ( 2 ) made of a 7.0-mm thick of wax and 0.4-mm-diameter nylon fibers embedded therein, the image being captured according to the embodiment of FIG. 2.
  • a crystal made of a diamond-type silicon analyzer crystal is used as the transmission-type analyzer crystal ( 4 a ) .
  • the thickness was adjusted to H that satisfies the relationships of the foregoing equations 1 and 3.
  • an X-ray dark-field image ( 5 ) showing the nylon fibers sharply was provided by the G-wave, i.e., the X-rays ( 42 a ) along the diffraction direction.
  • an X-ray bright-field image ( 6 ) was provided at the same time.
  • FIG. 14 shows an image of an object ( 2 ) made of amber containing an insect, the image being captured according to the embodiment of FIG. 2.
  • a diamond-type silicon analyzer crystal was used as the transmission-type analyzer crystal ( 4 a ).
  • the monochromatic parallel X-rays ( 1 ) displayed energy of 35 keV.
  • a sharp X-ray dark-field image ( 5 ) showing the insect was provided.
  • an X-ray bright-field image ( 6 ) was provided at the same time.
  • FIG. 15 shows an image of a dried fish as an object ( 2 ) to be analyzed, the image being captured according to the embodiment of FIG. 8.
  • a silicon crystal of 4,4,0 reflection was used as the reflection-type analyzer crystal ( 4 b ).
  • the thickness was set at 1 mm.
  • an X-ray dark-field image ( 5 ) showing the dried fish sharply by means of transmission X-rays I T ( 41 b ) was provided.
  • an X-ray bright-field image ( 11 ) was provided separately by reflection X-rays I B ( 42 b ).
  • Image creation can be performed by image processing equipment capable of image processing using the detecting data of corpuscular beams.
  • the electromagnetic waves other than X-rays (10 ⁇ 3 nm to 10 nm) include gamma rays (10 ⁇ 2 nm or shorter), ultraviolet rays (1 nm to 400 nm), visible rays (400 nm to 800 nm), and infrared rays (800 nm to 4000 nm). Any of these can be used to effect the above-described nondestructive analysis according to the invention of this application.
  • the source of the names and wavelength bands of these electromagnetic waves is “electromagnetic waves” in “ Butsurigaku Jiten [Dictionary of Physics ], the 4th Revision” (Baifukan, 1998).
  • the names and wavelength bands of the electromagnetic waves seen in this source are not the only suitable ones, and any electromagnetic wave is applicable as long as it is capable of the above-described nondestructive analysis according to the invention of this application.
  • the invention of this application described above can provide even new comprehensive systems, such as inspection and processing systems, medical diagnostic systems, and status- and form-variation observing systems, which can analyze the structure and function of any kind of objects including foods, drugs, medical diagnostic subjects, semiconductors, and organic and inorganic substances which have been impossible to elucidate or check by the conventional art, in a nondestructive manner with high contrast and high resolution (for example, at least on the order of several tens of micron meters or less). Consequently, in every field of application, it becomes possible to identify objects useful to that field out of various objects, and offer them as new products such as useful foods and useful drugs.
  • high contrast and high resolution for example, at least on the order of several tens of micron meters or less.
  • the invention of this application can be practiced to achieve high synergistic effects. For example, it is possible to identify and offer an object appropriate for a new drug out of any type of objects by elucidating the physiological status of the brain, liver, or the like of an animal, human being, or the like, elucidating the process and status of occurrence and development of cancer, and elucidating the cause-and-effect relationships among the process of occurrence and development of cancer, the status of form variations thereof, and medication.
  • the invention of this application provides a new nondestructive analysis method and nondestructive analysis device by which high-contrast images of the internal structure of any kind of object, regardless of a living body/non-living body, crystal/amorphous, single member/composite member, solid/liquid, etc., can be easily obtained as an X-ray dark-field image and an X-ray bright-field image at a time.
  • the X-ray image in the form of X-ray dark-field image as compared to that of X-ray fluoroscopy not available heretofore, has a significant feature that the structure of the object to be analyzed can be analyzed with extremely high contrast, high precision, extreme visibility, and facility by the simple configuration.
  • the nondestructive analysis method and device of the invention of this application are used for nondestructive analysis, it becomes also possible to identify objects having useful operation, effect, and the like in a variety of fields, and provide them as new products or the like.

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