JP4486063B2 - 微小可動デバイスの振動抑制機構 - Google Patents
微小可動デバイスの振動抑制機構 Download PDFInfo
- Publication number
- JP4486063B2 JP4486063B2 JP2006174935A JP2006174935A JP4486063B2 JP 4486063 B2 JP4486063 B2 JP 4486063B2 JP 2006174935 A JP2006174935 A JP 2006174935A JP 2006174935 A JP2006174935 A JP 2006174935A JP 4486063 B2 JP4486063 B2 JP 4486063B2
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- Prior art keywords
- housing
- vibration
- movable device
- support member
- micro movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Micromachines (AREA)
Description
Claims (4)
- 微小可動デバイスと、
この微小可動デバイスを内部に収容する筐体と、
振動を吸収する部材から構成され、前記微小可動デバイスを前記筐体と離間させて支持する第1の支持部材と、
振動を吸収する部材から構成され、前記筐体を外部部材と離間させて支持する第2の支持部材と
を備え、
前記第1の支持部材は、前記微小可動デバイスの共振周波数近傍において、前記第2の支持部材よりも低い加速度応答を有する
ことを特徴とする微小可動デバイスの振動抑制機構。 - 前記筐体と前記微小可動デバイスとの間に配設された少なくとも1つのストッパ
をさらに備えることを特徴とする請求項1記載の微小可動デバイスの振動抑制機構。 - 前記第1の支持部材は、弾性高分子からなり、
前記第2の支持部材は、低周波減衰部材からなる
ことを特徴とする請求項1または2記載の微小可動デバイスの振動抑制機構。 - 前記微小可動デバイスは、任意の入力ポートから入力された光ビームを偏向素子により偏向して任意の出力ポートから出力する光スイッチから構成される
ことを特徴とする請求項1乃至3の何れか1項に記載の微小可動デバイスの振動抑制機構。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006174935A JP4486063B2 (ja) | 2006-06-26 | 2006-06-26 | 微小可動デバイスの振動抑制機構 |
Applications Claiming Priority (1)
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JP2006174935A JP4486063B2 (ja) | 2006-06-26 | 2006-06-26 | 微小可動デバイスの振動抑制機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008003453A JP2008003453A (ja) | 2008-01-10 |
JP4486063B2 true JP4486063B2 (ja) | 2010-06-23 |
Family
ID=39007862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006174935A Expired - Fee Related JP4486063B2 (ja) | 2006-06-26 | 2006-06-26 | 微小可動デバイスの振動抑制機構 |
Country Status (1)
Country | Link |
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JP (1) | JP4486063B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5611317B2 (ja) * | 2012-12-26 | 2014-10-22 | スタンレー電気株式会社 | 光偏向器 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02222915A (ja) * | 1989-02-23 | 1990-09-05 | Furukawa Electric Co Ltd:The | 光ファイバスイッチ |
JP2004347713A (ja) * | 2003-05-20 | 2004-12-09 | Fujitsu Ltd | マイクロミラーユニットおよび光レベル制御機能付光スイッチング装置 |
-
2006
- 2006-06-26 JP JP2006174935A patent/JP4486063B2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02222915A (ja) * | 1989-02-23 | 1990-09-05 | Furukawa Electric Co Ltd:The | 光ファイバスイッチ |
JP2004347713A (ja) * | 2003-05-20 | 2004-12-09 | Fujitsu Ltd | マイクロミラーユニットおよび光レベル制御機能付光スイッチング装置 |
Also Published As
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JP2008003453A (ja) | 2008-01-10 |
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