JP4480029B2 - ライン光照射装置 - Google Patents
ライン光照射装置 Download PDFInfo
- Publication number
- JP4480029B2 JP4480029B2 JP2005512936A JP2005512936A JP4480029B2 JP 4480029 B2 JP4480029 B2 JP 4480029B2 JP 2005512936 A JP2005512936 A JP 2005512936A JP 2005512936 A JP2005512936 A JP 2005512936A JP 4480029 B2 JP4480029 B2 JP 4480029B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light emitting
- line
- irradiation device
- light irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/898—Irregularities in textured or patterned surfaces, e.g. textiles, wood
- G01N21/8983—Irregularities in textured or patterned surfaces, e.g. textiles, wood for testing textile webs, i.e. woven material
Description
2…発光部
21…光射出部
22…柱状レンズ(ロッドレンズ)
21a、21b…狭持板
3…保持体(ケーシング)
3a、3b…観測孔
4…光ファイバ
41…結束部
4a…光導出端部
6…光源
P…列方向
LL…ライン光
W…ワーク
Claims (11)
- 複数の光ファイバの光導出端部を一列又は複数列に密に配列し、それらが所定幅を有した直線状となるように構成した光射出部及びその光射出部の前方であって前記列方向に沿って延伸するように配置した柱状レンズを対で有し、直線状に収斂するライン光を射出する複数の発光部と、
光照射対象であるワークに対向して配置され、そのワークを観測するための観測孔が貫通させてあるものであって、前記各発光部から射出されるライン光の光軸面が所定線上で略交わるようにそれら発光部を保持する保持体とを備え、
前記発光部を保持体に支持させたものであって、前記光ファイバの全て又は一部の長さを異ならせ、前記光射出部の中心線に対し、前記光ファイバを結束して形成された結束部がいずれか片方に偏るように構成しているライン光照射装置。 - 複数の光ファイバの光導出端部を一列又は複数列に密に配列し、それらが所定幅を有した直線状となるように構成した光射出部及びその光射出部の前方であって前記列方向に沿って延伸するように配置した柱状レンズを対で有し、直線状に収斂するライン光を射出する複数の発光部と、
光照射対象であるワークに対向して配置され、そのワークを観測するための観測孔が貫通させてあるものであって、前記各発光部から射出されるライン光の光軸面が所定線上で略交わるようにそれら発光部を保持する保持体とを備え、
前記発光部を列方向に平行な回転軸を中心に回転可能に構成し、その回転角度を設定できるようにしているライン光照射装置。 - 前記各発光部から射出されるライン光の光軸面が前記列方向からみて放射状をなすように、それら各発光部を前記保持体に配設している請求項1又は2記載のライン光照射装置。
- 前記各柱状レンズが、前記列方向から見て略一直線上に配置されている請求項1、2又は3記載のライン光照射装置。
- 前記光射出部が、一対の狭持板をさらに備えたものであり、それら狭持板が前記複数の光導出端部を挟み込んで保持している請求項1、2、3又は4記載のライン光照射装置。
- 前記結束部が前記光ファイバの光導入端部を結束して形成され、その結束部に光源からの光を導入するように構成している請求項1、2、3、4又は5記載のライン光照射装置。
- 前記光ファイバに光を導入する光源が200mA以上の電流を流すことの可能なパワーLEDである請求項1、2、3、4、5又は6記載のライン光照射装置。
- 前記光射出部と柱状レンズとの距離を変え得るように構成している請求項1、2、3、4、5、6又は7記載のライン光照射装置。
- 光射出部を前記列方向に沿って複数直列させている請求項1、2、3、4、5、6、7又は8記載のライン光照射装置。
- 光射出部の長さが全て同一である請求項9記載のライン光照射装置。
- 各光射出部に対し個別に光源を設けている請求項9又は10記載のライン光照射装置。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003288283 | 2003-08-06 | ||
JP2003288283 | 2003-08-06 | ||
JP2004106654 | 2004-03-31 | ||
JP2004106654 | 2004-03-31 | ||
PCT/JP2004/011157 WO2005015186A1 (ja) | 2003-08-06 | 2004-08-04 | ライン光照射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2005015186A1 JPWO2005015186A1 (ja) | 2007-08-30 |
JP4480029B2 true JP4480029B2 (ja) | 2010-06-16 |
Family
ID=34137919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005512936A Expired - Fee Related JP4480029B2 (ja) | 2003-08-06 | 2004-08-04 | ライン光照射装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7631999B2 (ja) |
EP (1) | EP1666872A4 (ja) |
JP (1) | JP4480029B2 (ja) |
KR (1) | KR100779133B1 (ja) |
CN (1) | CN1833163B (ja) |
SG (2) | SG148160A1 (ja) |
TW (1) | TWI239377B (ja) |
WO (1) | WO2005015186A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101316539B1 (ko) * | 2011-11-29 | 2013-10-15 | 주식회사 힘스 | 유기발광다이오드 이물검사기 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5219236B2 (ja) * | 2007-02-26 | 2013-06-26 | 株式会社モリテックス | ラインライトガイド |
JP2010170835A (ja) * | 2009-01-22 | 2010-08-05 | Sanyo Electric Co Ltd | 照明装置および投写型映像表示装置 |
US8134132B2 (en) * | 2010-04-28 | 2012-03-13 | Dymax Corporation | Exposure device having an array of light emitting diodes |
EP2761414A4 (en) * | 2011-09-29 | 2015-06-10 | Intel Corp | FIBER OPTIC PROXIMITY SENSOR |
JP6571317B2 (ja) * | 2014-07-02 | 2019-09-04 | 株式会社アイテックシステム | ライン状照明装置、その製造方法および検査方法 |
JP6775273B2 (ja) * | 2018-08-30 | 2020-10-28 | 株式会社アイテックシステム | ライン状照明装置、その製造方法および検査方法 |
CN115327700B (zh) * | 2022-09-09 | 2023-06-06 | 中国建筑材料科学研究总院有限公司 | 光学纤维丝的排列方法和光学纤维元器件的制备方法 |
Family Cites Families (22)
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US3941485A (en) * | 1973-11-08 | 1976-03-02 | Madden Richard A | Device for continuously measuring a dimension of a workpiece by reflected light |
JPS62251641A (ja) * | 1986-04-25 | 1987-11-02 | Fuji Electric Co Ltd | 光学的検査装置 |
JPS63104872A (ja) * | 1986-10-23 | 1988-05-10 | Kita Denshi:Kk | 印刷エラ−検出方法 |
CA2055142C (en) * | 1990-11-09 | 1995-03-28 | Atsushi Asada | Liquid crystal display apparatus |
US5148303A (en) * | 1991-01-31 | 1992-09-15 | Honeywell Inc. | Delay line fiber optic sensor |
US5185638A (en) * | 1991-04-26 | 1993-02-09 | International Business Machines Corporation | Computer controlled, multiple angle illumination system |
US5222794A (en) * | 1991-12-20 | 1993-06-29 | Ford Motor Company | Fiberoptic line-of-light illuminating device |
US5260766A (en) * | 1992-04-02 | 1993-11-09 | Armitage Mark H | Apparatus for detection of an imperfect seal and method therefore |
US5432600A (en) * | 1992-05-15 | 1995-07-11 | Philip Morris Incorporated | Systems for optically inspecting cylindrical surfaces |
US5268977A (en) * | 1992-07-06 | 1993-12-07 | Miller Jack V | Fiber optic zoom-and-dim pin-spot luminaire |
US5596409A (en) * | 1995-03-22 | 1997-01-21 | Eastman Kodak Company | Associated dual interferometric measurement method for determining a physical property of an object |
JP2975893B2 (ja) | 1996-07-08 | 1999-11-10 | シーシーエス株式会社 | 照明装置の製造方法 |
DE19721915C1 (de) * | 1997-05-26 | 1998-12-10 | Stn Atlas Elektronik Gmbh | Verfahren und Vorrichtung zur Messung von Unebenheiten in einer Objektoberfläche |
US5953113A (en) * | 1997-10-29 | 1999-09-14 | Poffenbarger; Steven Lewis | Device and method for detecting, characterizing and correcting flaws in optic fiber |
US6757058B1 (en) * | 1999-05-05 | 2004-06-29 | Lucidyne Technologies, Inc. | Fiber-optic light line for use in an inspection system |
US6782337B2 (en) * | 2000-09-20 | 2004-08-24 | Kla-Tencor Technologies Corp. | Methods and systems for determining a critical dimension an a presence of defects on a specimen |
JP4262413B2 (ja) * | 2001-01-29 | 2009-05-13 | 新日本製鐵株式会社 | 疵検査用照明装置 |
JP2003097931A (ja) * | 2001-09-21 | 2003-04-03 | Olympus Optical Co Ltd | 光学検査方法及びその装置 |
JP2003202294A (ja) * | 2001-10-29 | 2003-07-18 | Ccs Inc | 検査用照明装置 |
DE10252523A1 (de) * | 2001-11-16 | 2003-07-03 | Ccs Inc | Beleuchtungsvorrichtung zur optischen Prüfung |
US6832849B2 (en) * | 2001-12-04 | 2004-12-21 | Ccs, Inc. | Light radiation device, light source device, light radiation unit, and light connection mechanism |
JP3927878B2 (ja) * | 2002-04-16 | 2007-06-13 | シーシーエス株式会社 | 検査等に用いる照明装置 |
-
2004
- 2004-08-04 EP EP04771195A patent/EP1666872A4/en not_active Withdrawn
- 2004-08-04 JP JP2005512936A patent/JP4480029B2/ja not_active Expired - Fee Related
- 2004-08-04 US US10/567,234 patent/US7631999B2/en not_active Expired - Fee Related
- 2004-08-04 KR KR1020067001326A patent/KR100779133B1/ko not_active IP Right Cessation
- 2004-08-04 SG SG200808228-1A patent/SG148160A1/en unknown
- 2004-08-04 WO PCT/JP2004/011157 patent/WO2005015186A1/ja active Application Filing
- 2004-08-04 SG SG200808227-3A patent/SG148159A1/en unknown
- 2004-08-04 CN CN2004800225334A patent/CN1833163B/zh not_active Expired - Fee Related
- 2004-08-05 TW TW093123425A patent/TWI239377B/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101316539B1 (ko) * | 2011-11-29 | 2013-10-15 | 주식회사 힘스 | 유기발광다이오드 이물검사기 |
Also Published As
Publication number | Publication date |
---|---|
EP1666872A1 (en) | 2006-06-07 |
CN1833163B (zh) | 2010-07-07 |
TW200510672A (en) | 2005-03-16 |
CN1833163A (zh) | 2006-09-13 |
JPWO2005015186A1 (ja) | 2007-08-30 |
KR20060035774A (ko) | 2006-04-26 |
WO2005015186A1 (ja) | 2005-02-17 |
US20060215151A1 (en) | 2006-09-28 |
TWI239377B (en) | 2005-09-11 |
EP1666872A4 (en) | 2011-05-25 |
SG148160A1 (en) | 2008-12-31 |
SG148159A1 (en) | 2008-12-31 |
KR100779133B1 (ko) | 2007-11-23 |
US7631999B2 (en) | 2009-12-15 |
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