JP4479402B2 - ダイシングラインの位置決め方法 - Google Patents
ダイシングラインの位置決め方法 Download PDFInfo
- Publication number
- JP4479402B2 JP4479402B2 JP2004222433A JP2004222433A JP4479402B2 JP 4479402 B2 JP4479402 B2 JP 4479402B2 JP 2004222433 A JP2004222433 A JP 2004222433A JP 2004222433 A JP2004222433 A JP 2004222433A JP 4479402 B2 JP4479402 B2 JP 4479402B2
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- Prior art keywords
- wafer
- dicing
- substrate
- dicing line
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00865—Multistep processes for the separation of wafers into individual elements
- B81C1/00888—Multistep processes involving only mechanical separation, e.g. grooving followed by cleaving
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/1901—Structure
- H01L2924/1904—Component type
- H01L2924/19041—Component type being a capacitor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/30105—Capacitance
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Micromachines (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Description
図1,2,3には、本実施形態における半導体加速度センサを示す。図1は、半導体加速度センサの平面図であり、図2は図1のA−A線での断面図であり、図3は図1のB−B線での断面図である。
図4(a)に示すように、半導体加速度センサを多数作り込んだウエハ状の積層基板1を用意し、支持基板2側に粘着テープ30を貼る。一方、図4(b)に示すように、フレーム35に粘着テープ36を貼り付ける。粘着テープ36はシート基材37の一面に粘着剤38を形成したものである。粘着剤38はUV硬化性接着剤よりなる。さらに、図4(c)に示すように、粘着テープ36のシート基材37にメタルマスク40を配置するとともにUV光を照射して粘着剤38の所定領域(センサチップにおける梁構造体の配置予定領域)38aを選択的に粘着力を低下させる。これを、ダイシング装置におけるXYテーブルにセットする(載置する)。
その後、図8に示すように、ブレード60により、ウエハ状の積層基板1の裏面(ウエハ状の積層基板1における支持基板2側)から、ダイシングラインLd1〜Ld4に沿ってウエハ状の積層基板1をダイシングカットする。このとき、粘着テープ36により切削水や切削くず等から梁構造体8(可動部)を保護しつつダイシングカットすることができる。
また、マークとしてのボンディングパッド(アルミパッド18,19,20)の中心位置Pc1,Pc2,Pc3からダイシングラインLd1〜Ld4の位置を決定するようにしたので、角形をなすボンディングパッドにおいて中心位置は精度よく検出でき、実用上好ましいものとなる。
Claims (4)
- 半導体材料よりなる支持基板(2)の上に埋込絶縁膜(3)を介して半導体層(4)を配した積層基板(1)を用いて構成され、前記半導体層(4)に可動部(13,14,15,16,17)が区画形成された半導体装置におけるダイシングラインの位置決め方法であって、
前記半導体装置を多数作り込んだウエハ状の積層基板(1)における半導体層(4)に粘着テープ(36)を貼り付ける第1工程と、
前記ウエハ状の積層基板(1)の半導体層(4)側に配した光源(42)からの前記支持基板(2)を透過した光を前記ウエハ状の積層基板(1)の支持基板(2)側に配した撮像手段(43)に入力して画像を取得する第2工程と、
前記取得した画像から画像認識にて前記半導体層(4)上に配したマーク(18,19,20)の中心位置(Pc1,Pc2,Pc3)を求めるとともに、これらの中心位置(Pc1,Pc2,Pc3)を結ぶ線と当該線に対し直交する線にて直交2軸座標系を作り、この直交2軸座標において、それら中心位置(Pc1,Pc2,Pc3)からダイシングライン(Ld1〜Ld4)の位置を決定する第3工程と、
を備えたことを特徴とするダイシングラインの位置決め方法。 - 前記マークはボンディングパッド(18,19,20)であることを特徴とする請求項1に記載のダイシングラインの位置決め方法。
- 前記マークは専用のマークであることを特徴とする請求項1に記載のダイシングラインの位置決め方法。
- 前記専用のマークは金属よりなることを特徴とする請求項3に記載のダイシングラインの位置決め方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004222433A JP4479402B2 (ja) | 2004-07-29 | 2004-07-29 | ダイシングラインの位置決め方法 |
US11/169,579 US7763525B2 (en) | 2004-07-29 | 2005-06-30 | Method for positioning dicing line of wafer |
DE102005034881.5A DE102005034881B4 (de) | 2004-07-29 | 2005-07-26 | Verfahren zum Positionieren einer Trennlinie eines Wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004222433A JP4479402B2 (ja) | 2004-07-29 | 2004-07-29 | ダイシングラインの位置決め方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006041394A JP2006041394A (ja) | 2006-02-09 |
JP4479402B2 true JP4479402B2 (ja) | 2010-06-09 |
Family
ID=35668779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004222433A Expired - Fee Related JP4479402B2 (ja) | 2004-07-29 | 2004-07-29 | ダイシングラインの位置決め方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7763525B2 (ja) |
JP (1) | JP4479402B2 (ja) |
DE (1) | DE102005034881B4 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7494900B2 (en) * | 2006-05-25 | 2009-02-24 | Electro Scientific Industries, Inc. | Back side wafer dicing |
JP2008016628A (ja) * | 2006-07-05 | 2008-01-24 | Sharp Corp | 半導体装置及びその製造方法 |
JP2008109015A (ja) * | 2006-10-27 | 2008-05-08 | Disco Abrasive Syst Ltd | ウエーハの分割方法および分割装置 |
JP5906103B2 (ja) * | 2012-03-02 | 2016-04-20 | 株式会社ディスコ | パッケージ基板の加工方法および位置関係検出装置 |
JP6204008B2 (ja) * | 2012-09-14 | 2017-09-27 | 株式会社ディスコ | 加工装置 |
US9646860B2 (en) | 2013-08-09 | 2017-05-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Alignment systems and wafer bonding systems and methods |
CN104445045B (zh) * | 2013-09-24 | 2016-02-17 | 中芯国际集成电路制造(上海)有限公司 | 晶振的形成方法 |
US10153204B2 (en) * | 2014-06-04 | 2018-12-11 | Flir Systems, Inc. | Wafer level packaging of reduced-height infrared detectors |
KR101646691B1 (ko) | 2015-09-18 | 2016-08-08 | 주식회사클로버세븐 | 외상매출채권을 이용한 유류 구매 서비스 시스템 및 그 동작 방법 |
Family Cites Families (18)
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US4213117A (en) * | 1977-11-28 | 1980-07-15 | Hitachi, Ltd. | Method and apparatus for detecting positions of chips on a semiconductor wafer |
JPH06196556A (ja) | 1992-12-22 | 1994-07-15 | Hitachi Ltd | ダイシング装置 |
GB2274333B (en) | 1993-01-07 | 1996-12-11 | Hochiki Co | Smoke detecting apparatus capable of detecting both smoke and fine particles |
JPH06224293A (ja) | 1993-01-27 | 1994-08-12 | Sumitomo Electric Ind Ltd | 半導体ウェーハの切断ライン位置検出方法及び装置 |
JPH06232255A (ja) | 1993-01-29 | 1994-08-19 | Disco Abrasive Syst Ltd | ウェーハのダイシング方法 |
JPH07169720A (ja) | 1993-12-14 | 1995-07-04 | Sony Corp | ダイシング装置 |
JP3170777B2 (ja) | 1994-01-17 | 2001-05-28 | 株式会社東京精密 | ダイシング方法及び装置 |
US6487307B1 (en) * | 1994-11-30 | 2002-11-26 | Isoa, Inc. | System and method of optically inspecting structures on an object |
JP3496347B2 (ja) | 1995-07-13 | 2004-02-09 | 株式会社デンソー | 半導体装置及びその製造方法 |
US5956415A (en) * | 1996-01-26 | 1999-09-21 | Harris Corporation | Enhanced security fingerprint sensor package and related methods |
JPH11192292A (ja) | 1998-01-06 | 1999-07-21 | Nohmi Bosai Ltd | 殺菌機能付き冷却装置 |
US6019663A (en) * | 1998-02-20 | 2000-02-01 | Micron Technology Inc | System for cleaning semiconductor device probe |
JP2000012745A (ja) * | 1998-06-24 | 2000-01-14 | Nec Corp | 半導体パッケージおよびその製造方法 |
JP2000223446A (ja) * | 1998-11-27 | 2000-08-11 | Denso Corp | 半導体装置およびその製造方法 |
JP3631956B2 (ja) * | 2000-05-12 | 2005-03-23 | 富士通株式会社 | 半導体チップの実装方法 |
WO2002001231A1 (en) * | 2000-06-26 | 2002-01-03 | Microsensors, Inc. | Multi-axis gyro structure |
DE60120921T2 (de) * | 2001-04-27 | 2007-02-01 | Stmicroelectronics S.R.L., Agrate Brianza | Aus Halbleitermaterial hergestellter integrierter Kreisel |
JP4256115B2 (ja) * | 2002-05-28 | 2009-04-22 | 富士通マイクロエレクトロニクス株式会社 | マーク認識方法及び半導体装置の製造方法 |
-
2004
- 2004-07-29 JP JP2004222433A patent/JP4479402B2/ja not_active Expired - Fee Related
-
2005
- 2005-06-30 US US11/169,579 patent/US7763525B2/en not_active Expired - Fee Related
- 2005-07-26 DE DE102005034881.5A patent/DE102005034881B4/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7763525B2 (en) | 2010-07-27 |
JP2006041394A (ja) | 2006-02-09 |
DE102005034881A1 (de) | 2006-02-16 |
US20060024920A1 (en) | 2006-02-02 |
DE102005034881B4 (de) | 2016-02-11 |
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