JP4474443B2 - 形状測定装置および方法 - Google Patents

形状測定装置および方法 Download PDF

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Publication number
JP4474443B2
JP4474443B2 JP2007185623A JP2007185623A JP4474443B2 JP 4474443 B2 JP4474443 B2 JP 4474443B2 JP 2007185623 A JP2007185623 A JP 2007185623A JP 2007185623 A JP2007185623 A JP 2007185623A JP 4474443 B2 JP4474443 B2 JP 4474443B2
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Japan
Prior art keywords
probe
contact
measured
contact force
measuring
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Expired - Fee Related
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JP2007185623A
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English (en)
Japanese (ja)
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JP2009025024A5 (enExample
JP2009025024A (ja
Inventor
真人 根岸
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Canon Inc
Original Assignee
Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007185623A priority Critical patent/JP4474443B2/ja
Priority to EP08158931A priority patent/EP2017570A1/en
Priority to US12/171,453 priority patent/US7734445B2/en
Publication of JP2009025024A publication Critical patent/JP2009025024A/ja
Publication of JP2009025024A5 publication Critical patent/JP2009025024A5/ja
Application granted granted Critical
Publication of JP4474443B2 publication Critical patent/JP4474443B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/008—Arrangements for controlling the measuring force

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2007185623A 2007-07-17 2007-07-17 形状測定装置および方法 Expired - Fee Related JP4474443B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007185623A JP4474443B2 (ja) 2007-07-17 2007-07-17 形状測定装置および方法
EP08158931A EP2017570A1 (en) 2007-07-17 2008-06-25 Shape measuring device and method with regulated scanning force based on monitoring the position of a resiliently mounted probe with several interferometers.
US12/171,453 US7734445B2 (en) 2007-07-17 2008-07-11 Shape measuring device and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007185623A JP4474443B2 (ja) 2007-07-17 2007-07-17 形状測定装置および方法

Publications (3)

Publication Number Publication Date
JP2009025024A JP2009025024A (ja) 2009-02-05
JP2009025024A5 JP2009025024A5 (enExample) 2009-11-26
JP4474443B2 true JP4474443B2 (ja) 2010-06-02

Family

ID=39730700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007185623A Expired - Fee Related JP4474443B2 (ja) 2007-07-17 2007-07-17 形状測定装置および方法

Country Status (3)

Country Link
US (1) US7734445B2 (enExample)
EP (1) EP2017570A1 (enExample)
JP (1) JP4474443B2 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2037211B1 (en) * 2007-06-29 2017-05-10 Tokyo Seimitsu Co., Ltd. Surface shape measuring device, and surface shape measuring method
JP4611403B2 (ja) * 2008-06-03 2011-01-12 パナソニック株式会社 形状測定装置及び形状測定方法
CN102472662B (zh) 2009-06-30 2014-06-18 六边形度量衡股份公司 使用振动检测的坐标测量机
US8650939B2 (en) * 2009-10-13 2014-02-18 Mitutoyo Corporation Surface texture measuring machine and a surface texture measuring method
JP2011224742A (ja) * 2010-04-21 2011-11-10 Canon Inc ロボットセル
JP5679793B2 (ja) * 2010-12-15 2015-03-04 キヤノン株式会社 形状測定装置及び方法
JP5754971B2 (ja) * 2011-02-14 2015-07-29 キヤノン株式会社 形状測定装置及び形状測定方法
JP2012237686A (ja) * 2011-05-12 2012-12-06 Canon Inc 測定装置
JP5984406B2 (ja) * 2012-02-01 2016-09-06 キヤノン株式会社 測定装置
JP6570393B2 (ja) * 2015-09-25 2019-09-04 株式会社ミツトヨ 形状測定装置の制御方法
JP6611582B2 (ja) * 2015-12-11 2019-11-27 キヤノン株式会社 計測装置、および計測方法
JP6722502B2 (ja) * 2016-04-27 2020-07-15 株式会社キーエンス 三次元座標測定器
DE102017100992A1 (de) 2017-01-19 2018-07-19 Carl Mahr Holding Gmbh Messvorrichtung und Verfahren zum Betreiben einer Messvorrichtung
DE102017100991B3 (de) * 2017-01-19 2017-11-30 Carl Mahr Holding Gmbh Messvorrichtung und Verfahren zur Erfassung wenigstens einer Längenmessgröße
EP3537102B1 (de) * 2018-03-05 2020-05-13 Carl Zeiss Industrielle Messtechnik GmbH Verfahren und anordnung zum erhöhen des durchsatzes bei einer ausreichenden messgenauigkeit bei der werkstückvermessung

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3266113A (en) * 1963-10-07 1966-08-16 Minnesota Mining & Mfg Interreacting articles
DE3279056D1 (en) * 1982-01-15 1988-10-27 Zeiss Carl Fa Threedimensional interferometric length-measuring device
DE3210711C2 (de) * 1982-03-24 1986-11-13 Dr.-Ing. Höfler Meßgerätebau GmbH, 7505 Ettlingen Mehrkoordinatentaster mit einstellbarer Meßkraft zum Abtasten von mehrdimensionalen, stillstehenden Gegenständen
JPS63117612A (ja) 1986-11-04 1988-05-21 東海ゴム工業株式会社 管路止水装置
JP3063290B2 (ja) 1991-09-04 2000-07-12 キヤノン株式会社 触針プローブ
JP3000819B2 (ja) * 1993-03-15 2000-01-17 松下電器産業株式会社 三次元測定用プローブ及び形状測定方法
JP3302139B2 (ja) 1993-10-27 2002-07-15 キヤノン株式会社 移動体の直進精度測定装置
DE19527268B4 (de) * 1994-08-22 2007-05-31 Carl Zeiss Industrielle Messtechnik Gmbh Mehrkoordinatenmeßgerät mit interferometrischer Meßwerterfassung
JP3075981B2 (ja) * 1996-04-05 2000-08-14 松下電器産業株式会社 形状測定装置
JP3272952B2 (ja) 1996-07-02 2002-04-08 キヤノン株式会社 ３次元形状測定装置
DE59711571D1 (de) 1996-12-21 2004-06-03 Zeiss Carl Verfahren zur Steuerung von Koordinatenmessgeräten und Koordinatenmessgerät
CN100487974C (zh) 2002-01-24 2009-05-13 深圳市华为安捷信电气有限公司 相移系统及具有这种相移系统的天线组
JP2005037197A (ja) 2003-07-18 2005-02-10 Ricoh Co Ltd 接触式表面形状測定装置及び測定方法
DE102005021645B4 (de) * 2004-09-09 2016-09-01 Werth Messtechnik Gmbh Verfahren zum opto-taktilen Messen eines Objektes

Also Published As

Publication number Publication date
EP2017570A1 (en) 2009-01-21
US20090024355A1 (en) 2009-01-22
US7734445B2 (en) 2010-06-08
JP2009025024A (ja) 2009-02-05

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