JP4473815B2 - 水晶センサ及び感知装置 - Google Patents

水晶センサ及び感知装置 Download PDF

Info

Publication number
JP4473815B2
JP4473815B2 JP2005362357A JP2005362357A JP4473815B2 JP 4473815 B2 JP4473815 B2 JP 4473815B2 JP 2005362357 A JP2005362357 A JP 2005362357A JP 2005362357 A JP2005362357 A JP 2005362357A JP 4473815 B2 JP4473815 B2 JP 4473815B2
Authority
JP
Japan
Prior art keywords
crystal
holding member
wiring board
quartz
surface side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005362357A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006194866A5 (enExample
JP2006194866A (ja
Inventor
俊一 若松
光明 小山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2005362357A priority Critical patent/JP4473815B2/ja
Publication of JP2006194866A publication Critical patent/JP2006194866A/ja
Publication of JP2006194866A5 publication Critical patent/JP2006194866A5/ja
Application granted granted Critical
Publication of JP4473815B2 publication Critical patent/JP4473815B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2005362357A 2004-12-15 2005-12-15 水晶センサ及び感知装置 Expired - Fee Related JP4473815B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005362357A JP4473815B2 (ja) 2004-12-15 2005-12-15 水晶センサ及び感知装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004363512 2004-12-15
JP2005362357A JP4473815B2 (ja) 2004-12-15 2005-12-15 水晶センサ及び感知装置

Publications (3)

Publication Number Publication Date
JP2006194866A JP2006194866A (ja) 2006-07-27
JP2006194866A5 JP2006194866A5 (enExample) 2009-12-17
JP4473815B2 true JP4473815B2 (ja) 2010-06-02

Family

ID=36801044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005362357A Expired - Fee Related JP4473815B2 (ja) 2004-12-15 2005-12-15 水晶センサ及び感知装置

Country Status (1)

Country Link
JP (1) JP4473815B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4299325B2 (ja) * 2006-08-30 2009-07-22 日本電波工業株式会社 水晶センサ及び感知装置
JP5069094B2 (ja) * 2007-12-28 2012-11-07 日本電波工業株式会社 圧電センサ及び感知装置
JP5066442B2 (ja) * 2007-12-28 2012-11-07 日本電波工業株式会社 圧電センサ及び感知装置
DE102010016102B4 (de) 2010-03-23 2016-11-03 Andreas Hettich Gmbh & Co. Kg Messvorrichtung umfassend einen Resonator

Also Published As

Publication number Publication date
JP2006194866A (ja) 2006-07-27

Similar Documents

Publication Publication Date Title
US8176772B2 (en) Piezoelectric sensor and sensing instrument
CN101080624B (zh) 石英传感器和感知装置
CN101084427B (zh) 石英传感器和感知装置
US7148611B1 (en) Multiple function bulk acoustic wave liquid property sensor
JP4256871B2 (ja) 水晶センサ及び感知装置
CN101080625B (zh) 成分测定装置
JP2004264254A (ja) 質量測定チップおよび質量測定装置
JP4473815B2 (ja) 水晶センサ及び感知装置
WO2009142045A1 (ja) 圧電センサ及び感知装置
JP2006029873A (ja) 水晶センサ及び感知装置
JP5240794B2 (ja) 感知装置
JP5066442B2 (ja) 圧電センサ及び感知装置
JP5069094B2 (ja) 圧電センサ及び感知装置
JP5678167B2 (ja) フィルムキャリアを有する共振子を備える測定装置、ハンドピース
JP2006194868A (ja) 成分測定装置
JP2007093239A (ja) Qcm分析装置
JP5589961B2 (ja) 角速度センサ装置
JP2006194866A5 (enExample)
JP6267447B2 (ja) 感知装置及び圧電センサ
JP2008164472A (ja) Qcmセンサー
JP2020091193A (ja) 感知センサー

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080909

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091030

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20091030

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20091118

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20091201

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100201

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100302

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100305

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130312

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130312

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130312

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140312

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees