JP4468752B2 - 荷電粒子線露光方法、荷電粒子線露光装置及びデバイス製造方法 - Google Patents

荷電粒子線露光方法、荷電粒子線露光装置及びデバイス製造方法 Download PDF

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Publication number
JP4468752B2
JP4468752B2 JP2004194769A JP2004194769A JP4468752B2 JP 4468752 B2 JP4468752 B2 JP 4468752B2 JP 2004194769 A JP2004194769 A JP 2004194769A JP 2004194769 A JP2004194769 A JP 2004194769A JP 4468752 B2 JP4468752 B2 JP 4468752B2
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Japan
Prior art keywords
exposure
charged particle
area
pattern
particle beam
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Expired - Fee Related
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JP2004194769A
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Japanese (ja)
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JP2006019434A (ja
JP2006019434A5 (enExample
Inventor
真人 村木
真希 細田
公明 安藤
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Canon Inc
Hitachi High Tech Corp
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Hitachi High Technologies Corp
Canon Inc
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Priority to JP2004194769A priority Critical patent/JP4468752B2/ja
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Publication of JP2006019434A5 publication Critical patent/JP2006019434A5/ja
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JP2004194769A 2004-06-30 2004-06-30 荷電粒子線露光方法、荷電粒子線露光装置及びデバイス製造方法 Expired - Fee Related JP4468752B2 (ja)

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JP2004194769A JP4468752B2 (ja) 2004-06-30 2004-06-30 荷電粒子線露光方法、荷電粒子線露光装置及びデバイス製造方法

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JP2004194769A JP4468752B2 (ja) 2004-06-30 2004-06-30 荷電粒子線露光方法、荷電粒子線露光装置及びデバイス製造方法

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JP2006019434A JP2006019434A (ja) 2006-01-19
JP2006019434A5 JP2006019434A5 (enExample) 2007-08-09
JP4468752B2 true JP4468752B2 (ja) 2010-05-26

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150142606A (ko) 2014-06-12 2015-12-22 캐논 가부시끼가이샤 리소그래피 장치 및 물품의 제조 방법

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5200571B2 (ja) * 2008-02-18 2013-06-05 富士通セミコンダクター株式会社 半導体装置及びフォトマスクの製造方法
JP5586343B2 (ja) * 2010-06-30 2014-09-10 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置及び荷電粒子ビーム描画方法
JP5977941B2 (ja) * 2011-12-19 2016-08-24 株式会社ニューフレアテクノロジー マルチ荷電粒子ビーム描画装置及びマルチ荷電粒子ビーム描画方法
JP6230295B2 (ja) 2013-06-26 2017-11-15 キヤノン株式会社 描画装置及び物品の製造方法
JP2016086102A (ja) 2014-10-27 2016-05-19 キヤノン株式会社 リソグラフィーシステム及び物品の製造方法
JP2016086103A (ja) 2014-10-27 2016-05-19 キヤノン株式会社 描画装置、リソグラフィーシステム、パターンデータの作成方法、描画方法及び物品の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150142606A (ko) 2014-06-12 2015-12-22 캐논 가부시끼가이샤 리소그래피 장치 및 물품의 제조 방법

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