JP4464958B2 - プリフォーム製造のための合成シリカガラス管、鉛直延伸プロセスにおけるその製造方法およびその管の使用 - Google Patents

プリフォーム製造のための合成シリカガラス管、鉛直延伸プロセスにおけるその製造方法およびその管の使用 Download PDF

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Publication number
JP4464958B2
JP4464958B2 JP2006504744A JP2006504744A JP4464958B2 JP 4464958 B2 JP4464958 B2 JP 4464958B2 JP 2006504744 A JP2006504744 A JP 2006504744A JP 2006504744 A JP2006504744 A JP 2006504744A JP 4464958 B2 JP4464958 B2 JP 4464958B2
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JP
Japan
Prior art keywords
tube
silica glass
scavenging gas
glass tube
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2006504744A
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English (en)
Japanese (ja)
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JP2006520738A (ja
Inventor
ガンツ、オリヴァー
ザットマン、ラルフ
フィドラ、ヤン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
Shin Etsu Quartz Products Co Ltd
Original Assignee
Heraeus Tenevo GmbH
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Heraeus Tenevo GmbH, Shin Etsu Quartz Products Co Ltd filed Critical Heraeus Tenevo GmbH
Publication of JP2006520738A publication Critical patent/JP2006520738A/ja
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Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1469—Means for changing or stabilising the shape or form of the shaped article or deposit
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/01205—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments
    • C03B37/01225—Means for changing or stabilising the shape, e.g. diameter, of tubes or rods in general, e.g. collapsing
    • C03B37/0124—Means for reducing the diameter of rods or tubes by drawing, e.g. for preform draw-down
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01884—Means for supporting, rotating and translating tubes or rods being formed, e.g. lathes
    • C03B37/01892—Deposition substrates, e.g. tubes, mandrels
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C03B2201/03—Impurity concentration specified
    • C03B2201/04—Hydroxyl ion (OH)
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/07—Impurity concentration specified
    • C03B2201/075—Hydroxyl ion (OH)
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
JP2006504744A 2003-03-21 2004-03-19 プリフォーム製造のための合成シリカガラス管、鉛直延伸プロセスにおけるその製造方法およびその管の使用 Expired - Lifetime JP4464958B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10312760 2003-03-21
DE10312543 2003-03-22
PCT/EP2004/002882 WO2004083141A1 (de) 2003-03-21 2004-03-19 Rohr aus synthetischem quarzglas für die herstellung einer vorform, verfahren für seine herstellung in einem vertikalziehverfahren und verwendung des rohres

Publications (2)

Publication Number Publication Date
JP2006520738A JP2006520738A (ja) 2006-09-14
JP4464958B2 true JP4464958B2 (ja) 2010-05-19

Family

ID=33030909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006504744A Expired - Lifetime JP4464958B2 (ja) 2003-03-21 2004-03-19 プリフォーム製造のための合成シリカガラス管、鉛直延伸プロセスにおけるその製造方法およびその管の使用

Country Status (5)

Country Link
US (2) US20060191294A1 (de)
JP (1) JP4464958B2 (de)
KR (1) KR101166205B1 (de)
DE (1) DE10393680B4 (de)
WO (1) WO2004083141A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004083141A1 (de) * 2003-03-21 2004-09-30 Heraeus Tenevo Gmbh Rohr aus synthetischem quarzglas für die herstellung einer vorform, verfahren für seine herstellung in einem vertikalziehverfahren und verwendung des rohres
JP4385681B2 (ja) * 2003-08-11 2009-12-16 住友電気工業株式会社 光ファイバ母材の製造方法及び光ファイバの製造方法
JP4929457B2 (ja) * 2006-07-28 2012-05-09 独立行政法人国立高等専門学校機構 シリカガラス材料
EP1942081B1 (de) * 2007-01-02 2011-11-09 Draka Comteq B.V. Verlängertes Backverfahren für Abscheidungsröhrchen aus Quarzglas
JP4995068B2 (ja) * 2007-12-28 2012-08-08 ジャパンスーパークォーツ株式会社 シリコン単結晶引上げ用石英ガラスルツボ
DE102008047736B3 (de) * 2008-07-07 2010-01-21 Heraeus Quarzglas Gmbh & Co. Kg Biegeunempfindliche optische Faser, Quarzglasrohr als Halbzeug für seine Herstellung sowie Verfahren zur Herstellung der Faser
DE102009014418B3 (de) * 2009-03-26 2010-04-15 Heraeus Quarzglas Gmbh & Co. Kg Ziehverfahren zur Herstellung zylinderförmiger Bauteile aus Quarzglas
JP5528488B2 (ja) * 2012-02-09 2014-06-25 信越化学工業株式会社 光ファイバ母材の延伸方法
DE102013107435B4 (de) * 2013-07-12 2015-01-29 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Quarzglas-Großrohres
EP3088370B1 (de) * 2015-04-28 2018-09-26 Heraeus Quarzglas GmbH & Co. KG Verfahren und vorrichtung zur herstellung eines rohres aus glas
EP3112323B1 (de) 2015-07-03 2021-09-01 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung eines substratrohres aus quarzglas
NL2015161B1 (en) * 2015-07-13 2017-02-01 Draka Comteq Bv A method for preparing a primary preform by etching and collapsing a deposited tube.
CN110606652A (zh) * 2018-06-15 2019-12-24 中天科技精密材料有限公司 玻璃基管生产系统及生产方法
CN108545924B (zh) * 2018-06-29 2021-02-02 成都富通光通信技术有限公司 一种制作光纤预制棒的缩棒方法

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3652710A (en) * 1969-07-01 1972-03-28 Gen Electric Curable polyaryleneoxide compositions
FR2220475B1 (de) * 1973-03-08 1977-08-12 Quartz & Silice
US3933454A (en) * 1974-04-22 1976-01-20 Corning Glass Works Method of making optical waveguides
US4165223A (en) * 1978-03-06 1979-08-21 Corning Glass Works Method of making dry optical waveguides
ATE45936T1 (de) * 1982-11-16 1989-09-15 Schott Ruhrglas Verfahren zum herstellen von rohrflaeschchen.
US4685945A (en) * 1984-02-06 1987-08-11 Friedemann Freund Method of processing high purity low-OH vitreous silica fibers
US4632684A (en) * 1984-07-31 1986-12-30 Itt Corporation Method of and apparatus for making optical preforms from tubular bodies
JPS6172644A (ja) * 1984-09-19 1986-04-14 Sumitomo Electric Ind Ltd 低損失光フアイバの製造方法
US4861650A (en) * 1986-12-18 1989-08-29 Monsanto Company Polyimide laminates
GB8819693D0 (en) * 1988-08-18 1988-09-21 Tsl Group Plc Improved vitreous silica articles
DE3913875C1 (de) * 1989-04-27 1990-08-09 Heraeus Quarzschmelze Gmbh, 6450 Hanau, De
CA2024189A1 (en) * 1989-10-23 1991-04-24 Kam W. Ho Bismaleimide resin compositions
US5438105A (en) * 1990-04-27 1995-08-01 Toho Rayon Co., Ltd. Polyamic acid composite, polyimide composite and processes for producing the same
FR2690611B1 (fr) * 1992-04-30 1996-02-02 Moulinex Sa Appareil menager tel qu'un mixeur equipe d'un dispositif de securite.
JP2980501B2 (ja) * 1992-11-19 1999-11-22 信越石英株式会社 大型石英ガラス管、大型石英ガラスプリフォ−ムおよびそれらの製造方法
EP0598349B1 (de) * 1992-11-19 1998-07-29 Shin-Etsu Quartz Products Co., Ltd. Verfahren zur Herstellung eines grossen Quarzglasrohres, sowie einer Vorform und einer optischen Faser
JP2000203860A (ja) * 1992-11-19 2000-07-25 Shinetsu Quartz Prod Co Ltd 大型石英ガラスプリフォ−ム
DE19505929C1 (de) * 1995-02-21 1996-03-28 Heraeus Quarzglas Optisches Bauteil
US5745631A (en) * 1996-01-26 1998-04-28 Irvine Sensors Corporation Self-aligning optical beam system
BR9911392A (pt) * 1998-06-25 2001-09-18 Samsung Electronics Co Ltd Pré-configuração de fibra ótica apresentando barreira de oh e seu método de fabricação
JP2000119034A (ja) * 1998-10-08 2000-04-25 Shinetsu Quartz Prod Co Ltd 光ファイバ用石英ガラス母材の製造方法
DE69929152T2 (de) * 1998-10-08 2006-08-24 Heraeus Tenevo Gmbh Verfahren zum Herstellen einer Vorform aus Quarzglas für optische Fasern und das dafür verwendete Quarzglasrohr
JP4565221B2 (ja) * 1998-10-09 2010-10-20 信越石英株式会社 光ファイバ用母材
DE19852704A1 (de) * 1998-11-16 2000-05-18 Heraeus Quarzglas Verfahren zur Herstellung einer Vorform für eine optische Faser und für die Durchführung des Verfahrens geeignetes Substratrohr
DE19856892C2 (de) * 1998-12-10 2001-03-15 Heraeus Quarzglas Verfahren zur Herstellung eines Rohres aus glasigem Werkstoff, insbesondere aus Quarzglas
KR100306381B1 (ko) 1998-12-10 2001-11-30 윤종용 증착튜브의응축및클로징을위한광섬유모재제조장치및그방법
NL1015405C2 (nl) * 2000-06-09 2001-12-12 Draka Fibre Technology Bv Single mode optische vezel en werkwijze voor het vervaardigen van een single mode optische vezel.
JP3800930B2 (ja) * 2000-06-26 2006-07-26 住友金属工業株式会社 石英ガラスシリンダおよび石英ガラス管とその製造方法
US6820850B2 (en) * 2002-04-24 2004-11-23 Clarence Michael Coleman Support for washer or dryer
DE10332176B4 (de) * 2002-07-24 2007-04-05 Schott Ag Verfahren zur Verminderung der Kontamination mit Alkaliverbindungen der Innenoberfläche von aus Glasrohr hergestellte Hohlkörpern aus Glas und Behälter, sowie dessen Verwendung für medizinische Zwecke
WO2004083141A1 (de) * 2003-03-21 2004-09-30 Heraeus Tenevo Gmbh Rohr aus synthetischem quarzglas für die herstellung einer vorform, verfahren für seine herstellung in einem vertikalziehverfahren und verwendung des rohres

Also Published As

Publication number Publication date
KR20050110689A (ko) 2005-11-23
JP2006520738A (ja) 2006-09-14
DE10393680B4 (de) 2009-03-26
US20100260949A1 (en) 2010-10-14
DE10393680D2 (de) 2005-09-29
KR101166205B1 (ko) 2012-07-18
US20060191294A1 (en) 2006-08-31
WO2004083141A1 (de) 2004-09-30

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