JP4460877B2 - レーザ光強度分布変換光学系 - Google Patents
レーザ光強度分布変換光学系 Download PDFInfo
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- JP4460877B2 JP4460877B2 JP2003384698A JP2003384698A JP4460877B2 JP 4460877 B2 JP4460877 B2 JP 4460877B2 JP 2003384698 A JP2003384698 A JP 2003384698A JP 2003384698 A JP2003384698 A JP 2003384698A JP 4460877 B2 JP4460877 B2 JP 4460877B2
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- 238000009826 distribution Methods 0.000 title claims description 105
- 230000003287 optical effect Effects 0.000 title claims description 74
- 238000006243 chemical reaction Methods 0.000 title claims description 34
- 238000009827 uniform distribution Methods 0.000 claims description 11
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims description 6
- 239000010436 fluorite Substances 0.000 claims description 6
- 238000007493 shaping process Methods 0.000 claims description 3
- 230000005499 meniscus Effects 0.000 description 15
- 239000000463 material Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 5
- 230000004907 flux Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
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Description
1.2 < f2 /|f1| < 4 f1 第1群の焦点距離
f2 第2群の焦点距離
2,4,5,6,8,10,12,14 (非球面の)平凸レンズ
3,7,13,15 (球面の)平凹レンズ
11 (球面の)凹レンズ
L1−1〜L5−1 第1群
L1−2〜L5−2 第2群
Claims (5)
- 負の屈折力を有する第1レンズ群と、正の屈折力を有する第2レンズ群とで構成され、入射したほぼガウス分布状の不均一強度分布のレーザ光を光路中で交わらせることなく出射する光強度分布変換光学系であって、前記各レンズ群は、少なくとも1面が凸形状の非球面レンズを含み、且つ凹形状の非球面レンズを含まず、前記レーザ光を前記第1レンズ群中の第1の非球面でほぼ一様分布ビームに整形した後に前記第2レンズ群中の第2の非球面で位相を整合してほぼ平行光束として出射することを特徴とした光強度分布変換光学系。
- 前記第1および第2レンズ群における近軸の屈折力が以下の条件を満足する請求項1に記載した光強度分布変換光学系。
1.2 < f2 /|f1| < 4
f1 第1群の焦点距離、f2 第2群の焦点距離 - 前記各レンズ群には、非球面の変曲点が存在しないか、あっても有効径の外にある請求項1又は2に記載した光強度分布変換光学系。
- 前記第1群レンズ中には少なくとも一面の凹の球面を有し、第1レンズ群全体として負の屈折力を有する請求項1〜3のいずれかに記載した光強度分布変換光学系。
- 前記第1および第2レンズ群は、レンズ材料が合成石英または蛍石よりなる請求項1〜4のいずれかに記載した光強度分布変換光学系。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2003384698A JP4460877B2 (ja) | 2003-11-14 | 2003-11-14 | レーザ光強度分布変換光学系 |
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JP2003384698A JP4460877B2 (ja) | 2003-11-14 | 2003-11-14 | レーザ光強度分布変換光学系 |
Publications (2)
Publication Number | Publication Date |
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JP2005148344A JP2005148344A (ja) | 2005-06-09 |
JP4460877B2 true JP4460877B2 (ja) | 2010-05-12 |
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JP2003384698A Expired - Lifetime JP4460877B2 (ja) | 2003-11-14 | 2003-11-14 | レーザ光強度分布変換光学系 |
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JP (1) | JP4460877B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109557675A (zh) * | 2018-12-20 | 2019-04-02 | 哈尔滨工业大学 | 基于非球面镜像差效应的长焦深激光光束均匀化光学系统 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5343442B2 (ja) * | 2008-08-06 | 2013-11-13 | 横河電機株式会社 | レーザビーム整形装置 |
JP2013055111A (ja) * | 2011-09-01 | 2013-03-21 | Phoeton Corp | レーザ光合成装置、レーザアニール装置およびレーザアニール方法 |
CN106168713B (zh) * | 2016-09-06 | 2021-04-27 | 山东理工大学 | 一种用于高斯光束变换为平顶光束的双非球面透镜整形镜头 |
DE102017113947B4 (de) * | 2017-06-23 | 2020-09-17 | Asphericon Gmbh | Modulares optisches Baukastensystem für kollimierte Top-Hat Verteilung |
CN111323926B (zh) * | 2020-04-07 | 2021-05-11 | 中国科学院半导体研究所 | 高斯光束整形镜、光学系统及其应用 |
-
2003
- 2003-11-14 JP JP2003384698A patent/JP4460877B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109557675A (zh) * | 2018-12-20 | 2019-04-02 | 哈尔滨工业大学 | 基于非球面镜像差效应的长焦深激光光束均匀化光学系统 |
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JP2005148344A (ja) | 2005-06-09 |
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