JP4454394B2 - ナノ・インプリント・リソグラフィ用の潤滑性付与レジスト膜 - Google Patents

ナノ・インプリント・リソグラフィ用の潤滑性付与レジスト膜 Download PDF

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Publication number
JP4454394B2
JP4454394B2 JP2004167339A JP2004167339A JP4454394B2 JP 4454394 B2 JP4454394 B2 JP 4454394B2 JP 2004167339 A JP2004167339 A JP 2004167339A JP 2004167339 A JP2004167339 A JP 2004167339A JP 4454394 B2 JP4454394 B2 JP 4454394B2
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JP
Japan
Prior art keywords
release film
layer
film
embossing material
stamper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004167339A
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English (en)
Japanese (ja)
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JP2004358969A5 (https=
JP2004358969A (ja
Inventor
アンドリュー・ホモラ
Original Assignee
コマーグ・インコーポレーテッド
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Application filed by コマーグ・インコーポレーテッド filed Critical コマーグ・インコーポレーテッド
Publication of JP2004358969A publication Critical patent/JP2004358969A/ja
Publication of JP2004358969A5 publication Critical patent/JP2004358969A5/ja
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Publication of JP4454394B2 publication Critical patent/JP4454394B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8408—Processes or apparatus specially adapted for manufacturing record carriers protecting the magnetic layer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
JP2004167339A 2003-06-04 2004-06-04 ナノ・インプリント・リソグラフィ用の潤滑性付与レジスト膜 Expired - Fee Related JP4454394B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US45564503A 2003-06-04 2003-06-04

Publications (3)

Publication Number Publication Date
JP2004358969A JP2004358969A (ja) 2004-12-24
JP2004358969A5 JP2004358969A5 (https=) 2007-07-12
JP4454394B2 true JP4454394B2 (ja) 2010-04-21

Family

ID=33510418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004167339A Expired - Fee Related JP4454394B2 (ja) 2003-06-04 2004-06-04 ナノ・インプリント・リソグラフィ用の潤滑性付与レジスト膜

Country Status (3)

Country Link
JP (1) JP4454394B2 (https=)
DE (1) DE102004027124A1 (https=)
MY (1) MY146088A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008083506A1 (en) * 2007-01-08 2008-07-17 Singulus Technologies Ag Method and apparatus for ensuring quality in storage media production
CN101795838B (zh) 2007-09-06 2014-02-12 3M创新有限公司 形成模具的方法以及使用所述模具形成制品的方法
JP7288247B2 (ja) * 2018-12-07 2023-06-07 日産化学株式会社 インプリント用レプリカモールド及びその作製方法
DE102019106081B4 (de) * 2019-03-11 2024-05-08 Joanneum Research Forschungsgesellschaft Mbh Oligomere Hexafluorpropylenoxidderivate

Also Published As

Publication number Publication date
DE102004027124A1 (de) 2005-01-05
MY146088A (en) 2012-06-29
JP2004358969A (ja) 2004-12-24

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