JP2004358969A5 - - Google Patents

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Publication number
JP2004358969A5
JP2004358969A5 JP2004167339A JP2004167339A JP2004358969A5 JP 2004358969 A5 JP2004358969 A5 JP 2004358969A5 JP 2004167339 A JP2004167339 A JP 2004167339A JP 2004167339 A JP2004167339 A JP 2004167339A JP 2004358969 A5 JP2004358969 A5 JP 2004358969A5
Authority
JP
Japan
Prior art keywords
release film
material layer
embossing material
imprinting
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004167339A
Other languages
English (en)
Japanese (ja)
Other versions
JP4454394B2 (ja
JP2004358969A (ja
Filing date
Publication date
Application filed filed Critical
Publication of JP2004358969A publication Critical patent/JP2004358969A/ja
Publication of JP2004358969A5 publication Critical patent/JP2004358969A5/ja
Application granted granted Critical
Publication of JP4454394B2 publication Critical patent/JP4454394B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004167339A 2003-06-04 2004-06-04 ナノ・インプリント・リソグラフィ用の潤滑性付与レジスト膜 Expired - Fee Related JP4454394B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US45564503A 2003-06-04 2003-06-04

Publications (3)

Publication Number Publication Date
JP2004358969A JP2004358969A (ja) 2004-12-24
JP2004358969A5 true JP2004358969A5 (https=) 2007-07-12
JP4454394B2 JP4454394B2 (ja) 2010-04-21

Family

ID=33510418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004167339A Expired - Fee Related JP4454394B2 (ja) 2003-06-04 2004-06-04 ナノ・インプリント・リソグラフィ用の潤滑性付与レジスト膜

Country Status (3)

Country Link
JP (1) JP4454394B2 (https=)
DE (1) DE102004027124A1 (https=)
MY (1) MY146088A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008083506A1 (en) * 2007-01-08 2008-07-17 Singulus Technologies Ag Method and apparatus for ensuring quality in storage media production
CN101795838B (zh) 2007-09-06 2014-02-12 3M创新有限公司 形成模具的方法以及使用所述模具形成制品的方法
JP7288247B2 (ja) * 2018-12-07 2023-06-07 日産化学株式会社 インプリント用レプリカモールド及びその作製方法
DE102019106081B4 (de) * 2019-03-11 2024-05-08 Joanneum Research Forschungsgesellschaft Mbh Oligomere Hexafluorpropylenoxidderivate

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