JP4443541B2 - 乾燥装置 - Google Patents
乾燥装置 Download PDFInfo
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- JP4443541B2 JP4443541B2 JP2006222142A JP2006222142A JP4443541B2 JP 4443541 B2 JP4443541 B2 JP 4443541B2 JP 2006222142 A JP2006222142 A JP 2006222142A JP 2006222142 A JP2006222142 A JP 2006222142A JP 4443541 B2 JP4443541 B2 JP 4443541B2
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- alignment film
- drying
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Description
乾燥時間を最適化するため、図5に示すように、ホットプレート15からの伝熱およびドライヤー19からの温風によって、それぞれ、100mm×100mm×1.1mmのガラス基板1上の配向膜材料膜を乾燥させた。なお、ここでは、ドライヤー19を、ガラス基板1に温風が垂直に吹き付けられるような姿勢で水平に往復移動させた。
本実施の形態に係る乾燥装置により、各温度のガスをガラス基板に吹きつけ、配向膜材料塗膜の外観を観察した。その結果、30℃以下のガスを吹き付けた場合には、配向膜材料塗膜の平坦性が劣化することが判った。また、30℃以上のガスを吹き付けた配向膜材料塗膜の平坦度は、図8に示すように、ガスの温度に応じて変化することが判った。すなわち、ガス温度が高いほど、配向膜材料溶液の流動性がよくなるため、平坦性が向上することが判った。
Claims (2)
- 基板の一方の面に塗布された、配向膜を形成するための溶液を乾燥させる乾燥装置であって、
前記基板の、前記溶液が塗布された面側に、ガスの流れを形成するガス流形成手段を有し、
前記ガス流形成手段が、
前記ガスに熱を与える加熱手段と、
前記基板の溶液が塗布された面に対向する位置において、一方向に特定の間隔で配置され、前記基板の溶液が塗布された面に前記熱を与えられたガスを供給する複数のノズルと、
前記複数のノズルが一の前記基板に前記ガスを供給している時に、前記ノズルに対して前記一方向において前記基板を往復運動させる駆動手段と、
を有することを特徴とする乾燥装置。 - 請求項1記載の乾燥装置であって、
前記基板の、前記溶液が塗布された面と反対側の面側に空間が形成されるように、前記基板を、前記溶液が塗布された面と反対側の面内の複数位置で支持する支持手段と、
前記空間に挿入され、前記基板を前記支持手段からすくい上げるアームと、
を備えることを特徴とする乾燥装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006222142A JP4443541B2 (ja) | 2006-08-17 | 2006-08-17 | 乾燥装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006222142A JP4443541B2 (ja) | 2006-08-17 | 2006-08-17 | 乾燥装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001367097A Division JP3950327B2 (ja) | 2001-11-30 | 2001-11-30 | 液晶表示素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006343772A JP2006343772A (ja) | 2006-12-21 |
JP4443541B2 true JP4443541B2 (ja) | 2010-03-31 |
Family
ID=37640734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2006222142A Expired - Fee Related JP4443541B2 (ja) | 2006-08-17 | 2006-08-17 | 乾燥装置 |
Country Status (1)
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JP (1) | JP4443541B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111718112A (zh) * | 2019-03-18 | 2020-09-29 | 合肥精显电子科技有限公司 | 一种lcd玻璃片烘烤装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6281718A (ja) * | 1985-10-07 | 1987-04-15 | Oki Electric Ind Co Ltd | 基板乾燥装置 |
JPH06186549A (ja) * | 1992-12-16 | 1994-07-08 | Toshiba Corp | 基板の加熱方法および加熱炉 |
JP3028462B2 (ja) * | 1995-05-12 | 2000-04-04 | 東京エレクトロン株式会社 | 熱処理装置 |
JPH10170901A (ja) * | 1996-12-06 | 1998-06-26 | Hitachi Electron Eng Co Ltd | 基板のスピン乾燥装置及びスピン乾燥方法 |
JP3673397B2 (ja) * | 1998-04-30 | 2005-07-20 | 大日本スクリーン製造株式会社 | 基板冷却装置および基板冷却方法 |
JP2002357798A (ja) * | 2001-06-01 | 2002-12-13 | Sony Corp | 液晶表示装置の製造方法及び製造装置 |
JP2003057625A (ja) * | 2001-08-20 | 2003-02-26 | Seiko Epson Corp | 液晶装置用基板の製造方法及び製造装置 |
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2006
- 2006-08-17 JP JP2006222142A patent/JP4443541B2/ja not_active Expired - Fee Related
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JP2006343772A (ja) | 2006-12-21 |
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