JP4440599B2 - 基板の貼り合わせ装置 - Google Patents

基板の貼り合わせ装置 Download PDF

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Publication number
JP4440599B2
JP4440599B2 JP2003363339A JP2003363339A JP4440599B2 JP 4440599 B2 JP4440599 B2 JP 4440599B2 JP 2003363339 A JP2003363339 A JP 2003363339A JP 2003363339 A JP2003363339 A JP 2003363339A JP 4440599 B2 JP4440599 B2 JP 4440599B2
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JP
Japan
Prior art keywords
substrate
holding
holding table
communication hole
elastic piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2003363339A
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English (en)
Japanese (ja)
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JP2004199036A (ja
JP2004199036A5 (enExample
Inventor
浩一 増田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2003363339A priority Critical patent/JP4440599B2/ja
Priority to US10/726,401 priority patent/US20040109124A1/en
Priority to TW092134051A priority patent/TWI234026B/zh
Priority to KR1020030087461A priority patent/KR100694690B1/ko
Publication of JP2004199036A publication Critical patent/JP2004199036A/ja
Publication of JP2004199036A5 publication Critical patent/JP2004199036A5/ja
Application granted granted Critical
Publication of JP4440599B2 publication Critical patent/JP4440599B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2305/00—Condition, form or state of the layers or laminate
    • B32B2305/55—Liquid crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
    • B32B2309/60—In a particular environment
    • B32B2309/68—Vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Fluid Mechanics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2003363339A 2002-12-04 2003-10-23 基板の貼り合わせ装置 Expired - Lifetime JP4440599B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003363339A JP4440599B2 (ja) 2002-12-04 2003-10-23 基板の貼り合わせ装置
US10/726,401 US20040109124A1 (en) 2002-12-04 2003-12-03 Substrate bonding apparatus and liquid crystal display panel
TW092134051A TWI234026B (en) 2002-12-04 2003-12-03 Substrate bonding apparatus and liquid crystal display panel
KR1020030087461A KR100694690B1 (ko) 2002-12-04 2003-12-04 기판의 접합 장치 및 액정 디스플레이 패널의 제조 방법

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002352709 2002-12-04
JP2003363339A JP4440599B2 (ja) 2002-12-04 2003-10-23 基板の貼り合わせ装置

Publications (3)

Publication Number Publication Date
JP2004199036A JP2004199036A (ja) 2004-07-15
JP2004199036A5 JP2004199036A5 (enExample) 2006-12-07
JP4440599B2 true JP4440599B2 (ja) 2010-03-24

Family

ID=32473690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003363339A Expired - Lifetime JP4440599B2 (ja) 2002-12-04 2003-10-23 基板の貼り合わせ装置

Country Status (4)

Country Link
US (1) US20040109124A1 (enExample)
JP (1) JP4440599B2 (enExample)
KR (1) KR100694690B1 (enExample)
TW (1) TWI234026B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004206076A (ja) * 2002-12-10 2004-07-22 Pioneer Electronic Corp フラットディスプレイ装置
US7866364B2 (en) * 2006-04-28 2011-01-11 Hewlett-Packard Development Company, L.P. Fabrication tool for bonding
KR101031245B1 (ko) * 2010-09-28 2011-04-29 (주) 디오브이 디스플레이장치용 합착장치
US9862634B2 (en) * 2011-08-12 2018-01-09 Corning Incorporated Method and apparatus for removing peripheral portion of a glass sheet
JP6235907B2 (ja) * 2014-01-07 2017-11-22 芝浦メカトロニクス株式会社 基板貼合装置、表示装置用部材の製造装置及び表示装置用部材の製造方法
CN105093575B (zh) * 2015-07-14 2018-07-06 业成光电（深圳）有限公司 贴合治具
KR102330225B1 (ko) * 2016-10-17 2021-11-22 신에츠 엔지니어링 가부시키가이샤 첩합 디바이스의 진공 첩합 장치
JP6255546B1 (ja) * 2016-10-17 2017-12-27 信越エンジニアリング株式会社 貼合デバイスの真空貼り合わせ装置
KR102794913B1 (ko) 2020-05-08 2025-04-11 삼성디스플레이 주식회사 표시 장치의 제조 장치 및 표시 장치의 제조 방법
JP2023173634A (ja) * 2022-05-26 2023-12-07 Tdk株式会社 基板処理装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917533A (ja) 1982-07-21 1984-01-28 Seiko Epson Corp 液晶パネル
US5250146A (en) * 1990-11-05 1993-10-05 Horvath Steven J Apparatus for applying anti-lacerative film to glass
JP3059360B2 (ja) 1995-06-28 2000-07-04 シャープ株式会社 液晶パネルの製造方法および製造用プレス装置
JPH1142708A (ja) 1997-07-25 1999-02-16 Yamauchi Corp 熱圧着用シート及び平板の貼り合わせ方法
JP3828670B2 (ja) * 1998-11-16 2006-10-04 松下電器産業株式会社 液晶表示素子の製造方法
JP2001215459A (ja) 2000-02-02 2001-08-10 Matsushita Electric Ind Co Ltd 液晶表示素子製造装置
JP3742000B2 (ja) * 2000-11-30 2006-02-01 富士通株式会社 プレス装置
KR100720416B1 (ko) * 2002-03-16 2007-05-22 엘지.필립스 엘시디 주식회사 액정표시소자용 합착 장치
US6793756B2 (en) * 2002-03-22 2004-09-21 Lg. Phillips Lcd Co., Ltd. Substrate bonding apparatus for liquid crystal display device and method for driving the same

Also Published As

Publication number Publication date
KR100694690B1 (ko) 2007-03-13
US20040109124A1 (en) 2004-06-10
JP2004199036A (ja) 2004-07-15
TWI234026B (en) 2005-06-11
KR20040048865A (ko) 2004-06-10
TW200420936A (en) 2004-10-16

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