JP4428259B2 - 液体噴射ヘッドおよびその製造方法 - Google Patents
液体噴射ヘッドおよびその製造方法 Download PDFInfo
- Publication number
- JP4428259B2 JP4428259B2 JP2005060044A JP2005060044A JP4428259B2 JP 4428259 B2 JP4428259 B2 JP 4428259B2 JP 2005060044 A JP2005060044 A JP 2005060044A JP 2005060044 A JP2005060044 A JP 2005060044A JP 4428259 B2 JP4428259 B2 JP 4428259B2
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- nozzle plate
- head
- base material
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007788 liquid Substances 0.000 title claims description 74
- 238000004519 manufacturing process Methods 0.000 title claims description 42
- 239000000463 material Substances 0.000 claims description 90
- 238000000576 coating method Methods 0.000 claims description 72
- 239000011248 coating agent Substances 0.000 claims description 71
- 230000015572 biosynthetic process Effects 0.000 claims description 37
- 239000005871 repellent Substances 0.000 claims description 23
- 238000010330 laser marking Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 12
- 238000000465 moulding Methods 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 9
- 238000003825 pressing Methods 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 230000005611 electricity Effects 0.000 description 11
- 230000003068 static effect Effects 0.000 description 11
- 238000011109 contamination Methods 0.000 description 9
- 150000004703 alkoxides Chemical class 0.000 description 7
- 230000002940 repellent Effects 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 230000006378 damage Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 229920001296 polysiloxane Polymers 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 239000002120 nanofilm Substances 0.000 description 3
- 238000004080 punching Methods 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- ZQHKNIGXGUGHOE-UHFFFAOYSA-N 1,1,2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,11,11,12,12,13,13,14,14,15,15,16,16,17,17,20,20,20-heptatriacontafluoroicosyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)CCC(F)(F)F ZQHKNIGXGUGHOE-UHFFFAOYSA-N 0.000 description 1
- 238000000018 DNA microarray Methods 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical group FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Images
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Coating Apparatus (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005060044A JP4428259B2 (ja) | 2005-03-04 | 2005-03-04 | 液体噴射ヘッドおよびその製造方法 |
| US11/312,456 US7490923B2 (en) | 2004-12-21 | 2005-12-21 | Liquid ejecting head |
| US12/117,591 US20080235947A1 (en) | 2004-12-21 | 2008-05-08 | Liquid ejecting head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005060044A JP4428259B2 (ja) | 2005-03-04 | 2005-03-04 | 液体噴射ヘッドおよびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006240109A JP2006240109A (ja) | 2006-09-14 |
| JP2006240109A5 JP2006240109A5 (enExample) | 2007-03-01 |
| JP4428259B2 true JP4428259B2 (ja) | 2010-03-10 |
Family
ID=37046981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005060044A Expired - Fee Related JP4428259B2 (ja) | 2004-12-21 | 2005-03-04 | 液体噴射ヘッドおよびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4428259B2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009160542A (ja) * | 2008-01-09 | 2009-07-23 | Seiko Epson Corp | 液滴吐出装置、及び金属配線の製造装置 |
| JP5444866B2 (ja) * | 2009-06-18 | 2014-03-19 | セイコーエプソン株式会社 | 液体吐出ヘッド、液体吐出装置、及び、液体吐出ヘッドの製造方法 |
| JP5018899B2 (ja) * | 2010-01-13 | 2012-09-05 | セイコーエプソン株式会社 | 液体噴射ヘッド |
| JP6569195B2 (ja) * | 2014-08-22 | 2019-09-04 | ブラザー工業株式会社 | 液体吐出装置、及び、液体吐出装置の製造方法 |
| JP6565146B2 (ja) * | 2014-08-22 | 2019-08-28 | ブラザー工業株式会社 | 液体吐出装置の製造方法 |
| JP6569196B2 (ja) * | 2014-08-22 | 2019-09-04 | ブラザー工業株式会社 | 液体吐出装置の製造方法 |
| JP5943129B2 (ja) * | 2015-08-20 | 2016-06-29 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
| JP2017043023A (ja) * | 2015-08-27 | 2017-03-02 | エスアイアイ・プリンテック株式会社 | インクジェットヘッド、および液体噴射記録装置 |
| JP2019089218A (ja) * | 2017-11-13 | 2019-06-13 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッドおよび液体噴射記録装置 |
-
2005
- 2005-03-04 JP JP2005060044A patent/JP4428259B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006240109A (ja) | 2006-09-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7576859B2 (en) | Alignment apparatus and alignment method | |
| JP4561228B2 (ja) | 液体噴射ヘッドユニット及び液体噴射ヘッドのアライメント方法 | |
| JP4428259B2 (ja) | 液体噴射ヘッドおよびその製造方法 | |
| JP2012000873A (ja) | 液体噴射ヘッドの製造方法 | |
| CN101045386A (zh) | 喷墨记录装置及帽盖 | |
| US8800147B2 (en) | Alignment method of liquid-jet head unit | |
| US20080235947A1 (en) | Liquid ejecting head | |
| JP4715304B2 (ja) | アライメント治具及び液体噴射ヘッドユニットの製造方法 | |
| JPH1016240A (ja) | インクジェットヘッド及びインクジェット記録装置 | |
| JP4196220B2 (ja) | 液体噴射ヘッドのアライメント装置及びそのアラインメント方法 | |
| JP4506528B2 (ja) | 液体噴射ヘッドおよびその製造方法 | |
| US7643144B2 (en) | Alignment apparatus and alignment method | |
| CN107683208A (zh) | 液体喷出头以及记录装置 | |
| US8678545B2 (en) | Inkjet head and inkjet recording apparatus | |
| JP6292396B2 (ja) | 液体噴射ヘッド及び液体噴射装置並びに液体噴射ヘッドの製造方法 | |
| TWI295634B (en) | Nozzle plate producing method, nozzle plate, liquid droplet ejecting head and liquid droplet ejecting apparatus | |
| JP2004284273A (ja) | 液滴吐出ヘッドおよび液滴吐出装置 | |
| JP2015145062A (ja) | 液体噴射ヘッド及び液体噴射装置 | |
| JP4530161B2 (ja) | 液体噴射装置 | |
| US7832086B2 (en) | Alignment jig, manufacturing method thereof, and method of manufacturing liquid-jet head unit | |
| JP4241121B2 (ja) | インクジェット記録装置 | |
| JP6315177B2 (ja) | 液体噴射装置 | |
| JP4461783B2 (ja) | 液体噴射ヘッドの製造方法 | |
| JP4363458B2 (ja) | 液体噴射ヘッドユニット及び液体噴射装置 | |
| JP2013184451A (ja) | インクジェットヘッド及びインクジェット記録装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070116 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070116 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20070404 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20091102 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20091124 |
|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121225 Year of fee payment: 3 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20091207 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121225 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131225 Year of fee payment: 4 |
|
| LAPS | Cancellation because of no payment of annual fees |