JP4419258B2 - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ Download PDF

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Publication number
JP4419258B2
JP4419258B2 JP2000062456A JP2000062456A JP4419258B2 JP 4419258 B2 JP4419258 B2 JP 4419258B2 JP 2000062456 A JP2000062456 A JP 2000062456A JP 2000062456 A JP2000062456 A JP 2000062456A JP 4419258 B2 JP4419258 B2 JP 4419258B2
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JP
Japan
Prior art keywords
phase
molecular pump
brushless motor
excitation
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000062456A
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English (en)
Japanese (ja)
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JP2001251829A (ja
JP2001251829A5 (enExample
Inventor
知男 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
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Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2000062456A priority Critical patent/JP4419258B2/ja
Publication of JP2001251829A publication Critical patent/JP2001251829A/ja
Publication of JP2001251829A5 publication Critical patent/JP2001251829A5/ja
Application granted granted Critical
Publication of JP4419258B2 publication Critical patent/JP4419258B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Non-Positive Displacement Air Blowers (AREA)
  • Brushless Motors (AREA)
JP2000062456A 2000-03-07 2000-03-07 ターボ分子ポンプ Expired - Lifetime JP4419258B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000062456A JP4419258B2 (ja) 2000-03-07 2000-03-07 ターボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000062456A JP4419258B2 (ja) 2000-03-07 2000-03-07 ターボ分子ポンプ

Publications (3)

Publication Number Publication Date
JP2001251829A JP2001251829A (ja) 2001-09-14
JP2001251829A5 JP2001251829A5 (enExample) 2006-07-20
JP4419258B2 true JP4419258B2 (ja) 2010-02-24

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ID=18582466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000062456A Expired - Lifetime JP4419258B2 (ja) 2000-03-07 2000-03-07 ターボ分子ポンプ

Country Status (1)

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JP (1) JP4419258B2 (enExample)

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Publication number Publication date
JP2001251829A (ja) 2001-09-14

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